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Non-silicon MEMS calorimetric gas flow sensor

Non-silicon MEMS calorimetric gas flow sensor

引用

ieee international conference of Nano/Micro Engineered and Molecular systems

作者： Duan, Xuanyi Fu, Xin Xie, Haft Yang, Huayong Zhejiang Univ Dept Mech Engn State Key Lab Fluid Power Transmiss & Control Hangzhou Zhejiang Peoples R China

ISBN: (纸本)9781424401390

A novel non-silicon MEMS calorimetric gas flow sensor is presented. The sensor consists of a metal sensing/heating array placed over a glass substrate and a polyimide layer for passivation. Both the anti-pressure and anti-impact performance is enhanced by using a glass solid substrate instead of a common silicon suspending structure. This merit widens the application range of micro calorimetric sensors from millimeter- or sub-millimeter-tubes to industrial 50 mm-tubes. Both the three-element calorimetric mode and the two-element calorimetric mode were operated and calibrated on an industrial gas calibration system. It is shown that the measuring range of the prototype reaches up to 0-37.5 m3/h. Both Characteristics and optimization methods of the two calorimetric modes are discussed respectively and comparison of the two calorimetric modes is also included.

关键词： flow sensor calorimetric non-silicon glass substrate

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sensor system optimization for Bayesian fusion of distributed stochastic signals under resource constraints

Sensor system optimization for Bayesian fusion of distribute...

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31st ieee international conference on Acoustics, Speech and Signal Processing

作者： Jayaweera, Sudharman K. Wichita State Univ Dept Elect & Comp Engn Wichita KS 67260 USA

ISBN: (纸本)9781424404681

Recently there has been a significant interest in distributed detection and data fusion with analog-relay amplifier local processing under a global power constraint [1-3]. In particular, it was shown in [3] that the optimal fusion performance for a distributed stochastic signal detection is achieved by a finite number of sensors. In this paper, we propose a sensor system optimization method based on the Bhattachrya error exponent. In addition to the global power constraint we also consider the case in which the total available bandwidth may also be limited. Assuming an equi-correlated signalling model we derive the error exponents to the Bayesian fusion performance for asymptotically large systems. Again we optimize the sensor system size based on the Bhattacharya error exponent and provide simple rules that are valid for either the low or high observation SNR regimes.

关键词： Bayesian networks

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Investigation on surface forces measurement using force-balanced MEMS sensor

Investigation on surface forces measurement using force-bala...

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ieee international conference of Nano/Micro Engineered and Molecular systems

作者： Li, Jiang Chen, Haosheng Li, Yongjian Univ Sci & Technol Beijing Sch Mech Engn Beijing 100083 Peoples R China Tsinghua Univ State Key Lab Tribol Beijing 100084 Peoples R China

ISBN: (纸本)9781424401390

In order to avoid the displacement of the AFM cantilever in surface forces measurement, a force-balanced MEMS sensor is developed. The probe of the sensor is a pendulous micromachined sensing element, which can be considered as a pair of differential capacitors. When the sensor is designed as a closed-loop system, the electrostatic force feedback can balance the surface force supplied on the sensing probe, and maintain the pendulum of the probe at the balance position. Consequently, when using the force-balanced MEMS sensor, the surface force between two surfaces can be measured with precisely controlled distance, and the displacement of the conventional cantilever is avoided. Experiment on surface force measurement between the pendulum surface of the probe and a ball's surface is performed, as the distance between the two surfaces is controlled by a nanopositioner.

关键词： adhesion MEMS sensor surface force closed-loop system

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Exploiting multi-channel clustering for power efficiency in sensor networks

Exploiting multi-channel clustering for power efficiency in ...

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1st international conference on Communication systems Software and Middleware

作者： Gupta, Ashima Gui, Chao Mohapatra, Prasant Univ Calif Davis Dept Comp Sci Davis CA 95616 USA

ISBN: (纸本)9780780395749

sensor networks typically comprise of a number of inexpensive small devices with processing, communication and sensing abilities that collaborate to perform a common task sensor devices use batteries as their sole power supply. The operational lifetime of a sensor network, therefore, depends entirely on the better utilization of the devices. Typically a sensor network is divided into clusters to optimize power utilization by performing division of labor and data aggregation within a cluster. This paper introduces a novel approach to naturally distributed clustering of sensor nodes in a sensor net using multi channel data planes. Our technique incorporates a virtual sense mechanism that reduces energy spent in sampling and transmissiom It also decreases network traffic, thereby decreasing contention, potential collisions and retransmissions. This approach inherently implements a sleep-awake mechanism based on virtual sensing that contributes towards increasing the network lifetime by efficient utilization. The proposed technique can be used to track spreading phenomenon like forest fires and water flows. A spreading phenomenon can be represented by afield whose value changes dynamically with time over area. We focus on following the movement of such a dynamically changing field rather than obtaining the value of the field at different locations at disjoint random times.

关键词： sensor networks

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In-network outlier detection in wireless sensor networks

In-network outlier detection in wireless sensor networks

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26th ieee Internationa26th ieee international conference on distributed computing systems, ICDCS 2006

作者： Branch, Joel Szymanski, Boleslaw Giannella, Chris Wolff, Ran Kargupta, Hillol Computer Science Rensselaer Polytechnic Institute 110 8th Street Troy NY 12180 Computer Science and Electrical Engineering University of Maryland Baltimore County 1000 Hilltop Circle Baltimore MD 21250

ISBN: (纸本)0769525407

To address the problem of unsupervised outlier detection in wireless sensor networks, we develop an algorithm that (1) is flexible with respect to the outlier definition, (2) works in-network with a communication load proportional to the outcome, and (3) reveals its outcome to all sensors. We examine the algorithm's performance using simulation with real sensor data streams. Our results demonstrate that the algorithm is accurate and imposes a reasonable communication load and level of power consumption. © 2006 ieee.

关键词： Intrusion detection

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When sensor webs start being taken seriously...

When sensor webs start being taken seriously...

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ieee international conference on sensor Networks, Ubiquitous, and Trustworthy computing

作者： Talbert, Michael L. Seetharaman, Guna US Air Force Inst Technol Wright Patterson AFB OH 45433 USA

ISBN: (纸本)0769525539

The art and science of sensing and responding to dynamic data over vast areas through distributed network of assets has long been in existence for centuries. Much of the current and emerging developments in sensor-Networks and Trusted computing have their metaphorical counterparts seen in history. Clear insights into the architecture and effective practices in Command, Control, Communication, Computation, Collaboration and Coordination (C*) have much to offer to the way we design and deploy new and innovative sensors as we continue to exploit latest developments in micro- and nano- scale sensors and systems. This paper presents a brief overview of how a complex web of intelligent autonomous and heterogeneous sensors might be used in a dynamic environment. The key elements of enabling technologies and required capabilities are identified to facilitate a paradigm for (design and deployment of) sensors, driven by system level considerations.

关键词： sensor net sensor web command and control collaboration communications

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Graph spectra of carbon nanotube networks

Graph spectra of carbon nanotube networks

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1st international conference on Nano-Networks and Workshops

作者： Bush, stephen F. Goel, Sanjay SUNY Albany GE Global Res Ctr Albany NY 12222 USA SUNY Albany Albany NY 12222 USA

ISBN: (纸本)9781424403905

sensor coverage will benefit from finding better ways to communicate among smaller sensors. Also, as development in nanotechnology progresses, the need for low-cost, robust, reliable communication among nano-machines will become apparent. Communication and signaling within newly engineered inorganic and biological nano-systems will allow for extremely dense and efficient distributed operation. This paper examines these potential benefits from the perspective of using individual nanotubes within random carbon nanotube networks (CNT) to carry information. One may imagine small CNT networks with functionalized nanotubes sensing multiple elements inserted into a cell in vivo. The information from each nanotube sensor can be fused within the network. This is clearly distinct from traditional, potentially less efficient, approaches of using CNT networks to construct transistors. The CNT network and routing of information is an integral part of the physical layer. Single-walled carbon nanotubes (SWNT) are modeled as linear tubes positioned in two dimensions via central coordinates with a specified angle. A network graph is extracted from the layout of the tubes and the ability to route information at the level of individual nanotubes is considered. The impact of random tube characteristics, such as location and angle, upon the corresponding network graph and its impacts are examined.

关键词： Communication networks Index carbon nanotubes sensor networks

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Design of a hybrid Micro/Nano cantilever-based resonant sensor and its fabrication method

Design of a hybrid Micro/Nano cantilever-based resonant sens...

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ieee international conference of Nano/Micro Engineered and Molecular systems

作者： Zhu, Rong Wang, Dingqu Zhou, Zhaoying Ye, Xiongying Tsinghua Univ Dept Precis Instruments & Mechanol State Key Lab Precis Measurement Technol & Instru Beijing 100084 Peoples R China

ISBN: (纸本)9781424401390

Due to novel mechanical and electrical properties of nanomaterials, such as carbon nanotubes and semiconducting oxide nanobelts, utilizing nanomaterials in micro electromechanical structure to improve performances of sensors has attracted many interests. In this paper, we report a novel micro/nano cantilever structure applying to sense accelerations based on resonant detection. The structure is comprised of a seismic micromachined inertial mass supported by two parallel ZnO nanobelts as doubly-clamped nano-cantilevers suspending between two metal electrodes located over a micromachined trench. Another bottom electrode located underneath the mass is utilized to apply electrostatic force on the mass. The acceleration normal to the mass plane induces electrostatic stiffness change and, in turn, a change in the resonant frequency. We propose design and an effective fabrication for this sensor structure.

关键词： nanoelectromechanical systems(NEMS) resonant sensor acceleration sensor

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Platinum black electroplated impedance particle sensor

Platinum black electroplated impedance particle sensor

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ieee international conference of Nano/Micro Engineered and Molecular systems

作者： Zheng, Siyang Liu, Mike Kasdan, Harvey L. Tai, Yu-Chong CALTECH Caltech Micromachining Lab 1200 E Calif BlvdM-C 136-93 Pasadena CA 91125 USA Internatl Remote Imaging Syst Inc Iris Diagnost Chatsworth CA 91311 USA

ISBN: (纸本)9781424401390

We present a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 pin polystyrene beads passing the sensing electrodes are successfully obtained.

关键词： impedance particle platinum black electroplating paryleen

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LOW ENERGY, distributed, AND QOS-COVERAGE-PRESERVING ARCHITECTURE FOR CLUstER-BASED sensor NETWORKS INVITED PAPER

LOW ENERGY, DISTRIBUTED, AND QOS-COVERAGE-PRESERVING ARCHITE...

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1st international conference on Communications and Networking in China

作者： Alqamzi, Hend Li (Tiffany), Jing Lehigh Univ ECE Dept Bethlehem PA 18015 USA

ISBN: (纸本)1424404630

An important design challenge for node scheduling is to extend the lifespan of sensor networks while preserving sufficient sensing coverage after switching off some sensors. This paper adapts the Energy-balanced COordinated Node Scheduling (ECONS) scheme, a distributed and adaptive protocol previously developed for flat sensor-net architecture, to the clustered architecture. ECONS exploits a geometry-inclusive approach to accurately determine the sensing coverage and the sleeping eligibility, effectively balances the energy consumption among different sensors, and consumes minimal communication overhead. The paper further integrates ECONS with the existing distributed clustering and routing protocols that are specifically designed for cluster-based dense sensor networks, and proposes a new architecture, referred to as the Low-Energy, distributed and QoS-coverage-preserving (LEDS) architecture. The system performance of LEDS is evaluated under two exemplary cases that require high and low QoS on sensing coverage, respectively.

关键词： sensor networks

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