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检索条件"任意字段=3rd Conference on Advances in Laboratory-Based X-Ray Sources and Optics"

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Compact high-repetition rate femtosecond laser-driven hard-x-ray source

Compact high-repetition rate femtosecond laser-driven hard-x...

引用

3rd conference on advances in laboratory-based x-ray sources and optics

作者： Egbert, A Mader, B Chichkov, BN Girardeau-Montaut, JP Laser Zentrum Hannover EV D-30419 Hannover Germany

ISBN: (纸本)0819445487

A compact, high-repetition rate, ultrashort-pulse laser-driven hard-x-ray source based on the combination of a femtosecond laser system with an x-ray diode is demonstrated. A comparison with available laser-plasma hard-x-ray sources is presented. Hard-x-ray fluxes exceeding 10(10) photons/s (emitted in 4pi) are realized at a repetition rate of 250 kHz. Numerical modeling is performed which proves that picosecond and sub-picosecond hard-x-ray pulses can be produced with this source.

关键词： ultrashort hard-x-rays x-ray diode femtosecond laser photocathodes

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Potential for radioscintography with polycapillary optics

Potential for radioscintography with polycapillary optics

引用

3rd conference on advances in laboratory-based x-ray sources and optics

作者： Gibson, WM MacDonald, CA Mail, N SUNY Albany Ctr Xray Opt Albany NY 12222 USA

ISBN: (纸本)0819445487

The potential use of polycapillary optics could provide extraordinarily high spatial resolution imaging of radioactive sources for a new generation of gamma cameras is being investigated. A series of images from I-125 brachytherapy seeds in Lucite phantoms display resolution better than 0.1 mm and signal to noise ratios in excess of a factor of 10. Such "cellular" level resolution might allow early stage location of prostate tumors, and be used to study their size, shape, and rate of growth. Even before being developed into the compact size needed for transrectal investigation of prostate cancer, imaging detectors using such high spatial resolution polycapillary angular filters may be valuable for small animal model studies and other research.

关键词： Photons Radio optics Sensors Spatial resolution Image filtering Prostate Lead Image sensors Tumors x-ray optics

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Polycapillary optics beam divergence

Polycapillary optics beam divergence

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Huang, HP Gibson, W Ponomarev, I Youngman, R Xray Opt Syst Inc Albany NY 12203 USA

ISBN: (纸本)0819445487

This paper is about the beam divergences of polycapillary optics. The definitions and measurement methods of polycapillary optics beam local divergence and global divergence are given. Factors like source spot size, optic input focal distance etc. for determining the beam local divergences are analyzed. Some simulation and experimental results for the polycapillary optics, which are used for x-ray diffraction and x-ray lithography, will also be presented.

关键词： polycapillary optic local divergence global divergence x-ray diffraction x-ray lithography

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Microfocusing source and multilayer based beam generator for MoKα radiation

Microfocusing source and multilayer based beam generator for...

引用

3rd conference on advances in laboratory-based x-ray sources and optics

作者： Jiang, LC Verman, B Seshadri, S Kim, B Osmic Inc Auburn Hills MI 48326 USA

ISBN: (纸本)0819445487

Two-dimensional multilayer optics have been widely used for enhancing and monochromatizing x-ray beams for various diffraction applications. However, when. they are applied to Mo Kalpha radiation, the performance suffers from the fact that multilayer optics can use only a very small portion of the source. This is because the rocking curve of a multilayer becomes narrower at higher energy. Comparing to the optics for the Cu Kalpha radiation, the throughput of the optics for Mo Ka depends heavily on how small the source is. based on the theoretical ray-tracing study, we have designed, fabricated and tested a system combining a microfocusing x-ray source and a side-by-side multilayer optic. Initial test results agree well with the theoretical expectation. The flux gain for a sample smaller than 100 micrometers is about 9 fold compared to a system composing of 2 kW sealed tube and graphite monochromator. The resolution of a diffractometer can also be improved by configuring the optical path. This paper will discuss the system design, detailed comparison between this system and a sealed tube-graphite monochromator based system, and possible applications such as small molecule diffraction system. A theoretical comparison to a rotating anode based system will also be discussed.

关键词： multilayer optics x-ray beam conditioning MoK alpha radiation two-dimensional x-ray optics

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Formation of quasi-monochromatic soft x-ray radiation from laser-produced plasmas

Formation of quasi-monochromatic soft x-ray radiation from l...

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Shevelko, AP Beigman, I Knight, LV Russian Acad Sci PN Lebedev Phys Inst Opt Div Moscow 117924 Russia

ISBN: (纸本)0819445487

This paper describes a simple method for formation of quasi-monochromatic soft x-ray radiation from laser-produced plasmas. The method uses a. special combination of laser target materials and x-ray filters. Targets with middle atomic numbers Z(a)similar to10-25 are chosen, so hydrogen- and helium-like ions ([H]- and [He]-like ions) are excited in the laser-produced plasmas. The x-ray K-absorption filters isolate only a few lines in the spectrum: resonance lines and corresponding satellites of [H]- and [He]-like ions. These lines occupy a narrow spectral band lambda/deltalambda = 10-100. The contribution of continuum radiation out of the separated spectral band is studied theoretically and experimentally. It is shown that the continuum radiation contribution does not exceed 20% of the line radiation intensity. The method of formation of quasi-monochromatic soft x-ray radiation is used for reflectometry (measurements of crystal reflectivity, calibration of crystal spectrometers and x-ray detectors) and for radiometry (absolute radiation yield measurements) of laser-produced plasmas.

关键词： laser plasma x-ray sources linear and continuum x-ray radiation reflectometry radiometry

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Novel x-ray sources and systems using gated electron emitters

Novel X-ray sources and systems using gated electron emitter...

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Whitlock, RR Hsu, DSY Shaw, JL Bell, MI Kerns, S Kerns, DV Kang, WP Davidson, JL USN Res Lab Washington DC 20375 USA

ISBN: (纸本)0819445487

Novel xray sources and applications may be achieved with a combination of gateable electron micro-sources and tailored electron targets. A simple, broad area xray source can be constructed in a biplanar geometry, one side consisting of a low atomic number, x-ray transmissive substrate with an array of emitters, and the other side a simple metallic target. The simple metallic target can be replaced with a composite target in which different areas of the surface are coated with different x-ray emitting metals. The resulting x-ray spectrum will be the composite of spectra of all the irradiated metals. The spectrum is selected with sets of separately gated field emitter arrays, each registered to a respective anode metal. Low voltage electronics control the gate array selections. With the further addition of electron focusing within the tube and an external x-ray detector, the device becomes capable of imaging the composition of the electron target. By augmenting the device with a sample handling capability, whereby the sample is put in the location of. the target, this instrument then becomes capable of x-ray compositional analysis in a manner analogous to an electron microprobe or SEM with EDx attachments. Such instruments can be miniaturized and used for automated analysis systems. The potential for low power, automated analysis by small, unmanned, distributed systems could augment the capabilities already present with high power laboratory instrumentation. An important technical issue on which the practicality of these developments depends, is the robustness of gated field emitter sources. Recent progress in this area is described.

关键词： x-ray tube x-ray spectrum field emitter array nanotube x-ray fluorescence analysis

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x-ray spectral measurements of a dense plasma focus

X-ray spectral measurements of a dense plasma focus

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Whitlock, RR Dozier, CM Newman, DA Petr, R Freshman, J Hoey, DW Heaton, JL USN Res Lab Washington DC 20375 USA

ISBN: (纸本)0819445487

Absolute intensities of spectra in a dense-plasma-focus (DPF) source have been recorded and analyzed. This DPF source has been identified as one of the more promising sources for x-ray lithography. The source, developed by Science Research laboratory, Inc., is currently undergoing testing and further development at BAE Systems, Inc. The DPF operates at 60 Hz and produces an average output pulse of similar to5 J of x rays into 4pi steradians in a continuous operation mode. In all runs, there was an initial number of pulses, typically between 30 to 40, during which the x-ray output increased and the DPF appeared to be undergoing a conditioning process, and after which a "steady-state" mode was achieved where the average x-ray power was relatively constant. Each spectral run was exposed to similar to600 J of output, as measured by the PIN. The x-ray spectral region between 0.8 and 3 keV was recorded on Kodak DEF film in a potassium acid phthalate (KAP) convex curved-crystal spectrograph. The source emits neon line radiation from Ne Ix and Ne x ionization stages in the 900 to 1300 eV region, suitable for lithographic exposures of photoresist. Two helium-like neon lines contribute more than 50% of the total energy. From continuum shape, plasma temperatures were found to be approximately 170-200. eV. The absolute, integrated spectral outputs were verified to within 30% by comparison with measurements by a PIN detector and a radiachromic x-ray dosimeter.

关键词： dense plasma focus x-ray lithography x-ray spectrum

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Plasma characterization in the extreme ultraviolet spectral range

Plasma characterization in the extreme ultraviolet spectral ...

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Kranzusch, S Mann, KR Peth, C Laser Lab Gottingen EV D-37077 Gottingen Germany

ISBN: (纸本)0819445487

At Laser-Laboratorium Gottingen different laser-plasma sources were tested, which are going to be used for characterization of optical components and sensoric devices in the wavelength region from 11 to 13nm. In all cases EUV radiation is generated by focussing a Q-switched Nd:YAG laser into a gas puff target. By the use of xenon or oxygen as target gas, broadband as well as narrowband EUV radiation is obtained, respectively. Different types of valves and nozzles were tested in order to optimize the emitted radiation with respect to maximum EUV intensities, small source diameters and pointing stability. The investigation of these crucial source parameters was performed with specially designed EUV pinhole cameras, utilizing evaluation algorithms developed for standardized laser beam characterization. In addition, a rotatable pinhole camera was developed which allows spatially and angular resolved monitoring of the soft x-ray emission characteristics. With the help of this camera a strong angular dependence of the EUV intensity was found. The results were compared with fluorescence measurements for visualization of the target gas jet. To explain these results a theoretical model was developed, including the absorptance of the EUV radiation in the surrounding target gas.

关键词： EUV optics 13nm radiation laser-induced plasma pinhole camera absorptance gas puff target

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Fluctuation of femtosecond x-ray pulses generated by a laser-Compton scheme

Fluctuation of femtosecond X-ray pulses generated by a laser...

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Endo, A Yorozu, M Yang, JF Sakai, F Femtosecond Technol Res Assoc Tsukuba Ibaraki 3002635 Japan

ISBN: (纸本)0819445487

A short pulse x-ray generation experiment was performed by laser-Compton scattering through interaction between a 3 ps, 14 MeV electron beam and 100 fs, 85 mJ laser photons in a 90degrees scattering configuration. The observed x-ray intensity was typically 30,000 photons/pulse and roughly matched the theoretically expected intensity. The x-ray energy and pulse duration were estimated theoretically to be 2.3 keV and 280 fs from the observed electron and laser beam parameters. The pulse to pulse fluctuation of the xray output was measured as 25% (rms) during 30-minute operation. The fluctuation was expressed as a function of the fluctuation of the timing between the electron and laser beams. The measured fluctuation of the x-rays was approximately consistent with that caused by the fluctuation of each beam. We are improving the system to achieve the photon energy to 15 keV and the intensity to 10 million photons/pulse by increasing the electron beam energy to 40 MeV and the laser pulse energy to I J/pulse, and to stabilize the x-ray intensity to be better than 3% by improving the timing fluctuation between beams to be less than 300 fs. The amplitude fluctuation of each electron and laser beams are improved to be less than 1% to contribute to the achievement of the targeted 3% x-ray fluctuation.

关键词： laser-Compton scattering timing jitter femtosecond x-ray

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x-ray spectral measurements of the JMAR high power laser-plasma source

X-ray spectral measurements of the JMAR high power laser-pla...

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3rd conference on advances in laboratory-based x-ray sources and optics

作者： Whitlock, RR Dozier, CM Newman, DA Turcu, ICE Gaeta, CJ Cassidy, KL Powers, MF Kleindolph, T Morris, JH Forber, R USN Res Lab Washington DC 20375 USA

ISBN: (纸本)0819445487

x-ray spectra of Cu plasmas at the focus of a four-beam, solid-state diode-pumped laser have been recorded. This laser-plasma x-ray source is being developed for JMAR's lithography systems aimed at high-performance semiconductor integrated circuits. The unique simultaneous overlay of the four sub-nanosecond laser beams at 300 Hertz produces a bright, point-plasma x-ray source. PIN diode measurements of the x-ray output indicate that the conversion efficiency (ratio of x-ray emission energy into 2pi steradians to incident laser energy) was approximately 9 percent with average xray power yields of greater than 10 Watts. Spectra were recorded on calibrated Kodak DEF film in a curved-crystal spectrograph. A KAP crystal (2d = 26.6 Angstroms) was used to disperse the 900 eV to 3000 eV spectral energies onto the film. Preliminary examination of the films indicated the existence of Cu and Cu xx ionization states. Additional spectra as a function of laser input power were also recorded to investigate potential changes in x-ray yields. These films are currently being analyzed. The analysis of the spectra provide absolute line and continuum intensities, and total x-ray output in the measured spectral range.

关键词： laser-plasma x-ray lithography x-ray spectrum

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