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检索条件"任意字段=8th International Workshop on Control Engineering and Advanced Algorithms, IWCEAA 2024"

共 143 条记录，以下是71-80 订阅

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A Hybrid Proximity Effect Correction Method based on Separation of Forward-/Back-Scattering and Cumulative Distribution Function 8

A Hybrid Proximity Effect Correction Method based on Separat...

引用

8th international workshop on advanced Patterning Solutions, IWAPS 2024

作者： Chen, Jiaxin Zhao, Haojie Zhang, Siyuan Yang, Yujie Yao, Wenze Zhang, Xin Mo, Pinghui Liu, Jie College of Electrical and Information Engineering Hunan University Changsha China College of Integrated Circuits Hunan University Changsha China

ISBN: (数字)9781510686335

ISBN: (纸本)9781510686328

Efficient and accurate proximity effect correction (PEC) is essential for electron beam lithography (EBL) applications. Here we present an efficient PEC method by combining cumulative distribution function (CDF) and separation of forward and back-scattering. Dose and shape hybrid corrections are used together to further enhance PEC accuracy. Compared to the traditional pixelation algorithms, the proposed method can enhance modeling efficiency by three orders of magnitude, while keeping the edge placement error (EPE) below one nanometer, in our testbench calculations. the proposed method might be useful in large-scale mask data preparation (MDP) and direct-write EBL applications. © 2024 SPIE.

关键词： Electron beam lithography Point spread functions Lithography Convolution Interpolation Photoresist materials Attenuation Laser scattering Modeling Statistical analysis

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Large-scale chip layout pattern clustering method based on graph matching 8

Large-scale chip layout pattern clustering method based on g...

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8th international workshop on advanced Patterning Solutions, IWAPS 2024

作者： Wang, Ziwen He, Jialong Zhou, Wenzhan Zhou, Kan Zhao, Xintong Lyu, Shujing Shen, Jiwei Lu, Yue Shanghai Key Laboratory of Multidimensional Information Processing School of Communication and Electronic Engineering East China Normal University Shanghai China Shanghai China

ISBN: (数字)9781510686335

ISBN: (纸本)9781510686328

In the integrated circuits field, the rapid and accurate detection of defects and anomalies is a critical factor in improving lithography process yields. Research on large-scale chip layout pattern feature extraction and clustering algorithms plays a crucial role in enhancing chip manufacturing yield and improving manufacturing processes. this paper proposes a graph matching-based clustering method, leveraging the high redundancy and relatively simple circuit structure of chip layout patterns. Our method innovatively employs a graph-based representation to capture keypoint information in layout patterns, applies dual-similarity constraints to ensure both node and edge similarities, and utilizes agglomerative hierarchical clustering to merge structurally similar patterns, reducing the reliance on typical values. these enhancements allow for better handling of complex geometries, thus improving the efficiency and stability of pattern clustering. Compared to traditional clustering methods based on image statistical characteristics, our approach considers the geometric constraints within the chip layout, achieving effective clustering on large-scale chip layout patterns. © 2024 SPIE.

关键词： Integrated circuit layout

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Secure Vision: Enhancing Data Security in Wireless Sensor Networks through Image Processing 8

Secure Vision: Enhancing Data Security in Wireless Sensor Ne...

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8th international Conference on I-SMAC (IoT in Social, Mobile, Analytics and Cloud), I-SMAC 2024

作者： Swamy, B. Venkata Gopi, S. Sudhakar, Kattupalli Girish, Pechetti Rani, M. Janaki Upadhyay, Shrikant B V Raju Institute of Technology Department of Chemistry Telangana State India Vel Tech Rangarajan Dr.Sagunthala R&d Institute of Science and Technology Department of Cse Chennai Avadi India Lakireddy Bali Reddy College of Engineering Department of Ai & Ds Mylavaram India Bonam Venkata Chalamayya Institute of Technology and Science Batlapalem Amalapuram India Dr. Mgr Educational and Research Institute Department of Ece Chennai India Mlr Institute of Technology Department of Electronics and Communication Engineering Hyderabad India

ISBN: (纸本)9798350376425

the secure Wireless Sensor Network (WSN) architecture was designed in such a way that the tradeoffs among efficiency, scalability and security were balanced. It was consisted of several sensor nodes, cluster heads, base station as well as the control center all of them played a vital role in functioning and managing of data. this network security was provided with a layered security approach like the physical, data link, network, transport, and application layers. Data security and integrity are secured through advanced image processing algorithms, and reliable communication protocol. Regular maintenance, constant monitoring and hardening solutions through resilience and fault tolerance mechanisms added a layer of trust in securing this WSN. A comparative analysis was made using different algorithms, such as Intrusion Detection Systems (IDS) and detection accuracy is 98% and proposed model which has shown a better result in the energy consumption, data transmission latency, encryption time, detection precision as well as efficiency to insure an original data integrity. © 2024 IEEE.

关键词： Data integrity

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Finite-Time Stabilization-Based Neural control for the Synchronous Generator 8th

Finite-Time Stabilization-Based Neural Control for the Syn...

引用

8th international workshop on advanced Computational Intelligence and Intelligent Informatics, IWACIII 2023

作者： Wang, Honghong Chen, Bing Lin, Chong Xu, Gang College of Electrical Engineering Qingdao University Qingdao266071 China Institute of Complexity Science Qingdao University Qingdao266071 China School of Mechanical and Electrical Engineering Weifang Vocational College Weifang261041 China

ISBN: (纸本)9789819975921

this paper focuses on the problem of finite-time stabilization-based adaptive neural control design for the synchronous generator with unknown nonlinearities. the fast finite-time practical stability criteria is used to address the control design. Neural networks are used to overcome the obstacles appeared in the unknown nonlinear functions. And a systematic finite-time excitation control design is developed by embedding the practical finite-time stability theory and adaptive backstepping technology. through the closed-loop stability analysis, it’s shows that all the signals in the closed-loop systems are bounded. At last, the presented results are tested by the numerical model of the single-machine power system. © 2024, the Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

关键词： Synchronous generators

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Implementation of a Versatile and Efficient Monitoring System in Semiconductor High-Volume Manufacturing 8

Implementation of a Versatile and Efficient Monitoring Syste...

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8th international workshop on advanced Patterning Solutions, IWAPS 2024

作者： Gao, Hongye Ye, Linqiang Kang, Jingfeng Li, Wei Zhu, Aijiao Ta, Xuanyu Pei, Jincheng Huang, Kevin School of Integrated Circuit Peking University Beijing100871 China Semiconductor Manufacturing Beijing Corporation Beijing100000 China KLA Corporation Shanghai201203 China

ISBN: (数字)9781510686335

ISBN: (纸本)9781510686328

Statistical Process control (SPC) plays a critical role in semiconductor manufacturing, ensuring product quality and yield by monitoring key performance indicators (KPIs) of processes and equipment. As semiconductor nodes continue to shrink, the challenges of process control increases, often requiring the combination of traditional KPIs or the creation of new ones to identify root causes effectively. However, existing SPC systems - both commercially available and those developed in-house - may lack the necessary flexibility and functionality to manage complex data volumes. In our study, we propose a flexible and efficient KPI monitoring system based on KLA visual flow editor software applied specifically to photolithography process control and addresses these critical aspects: Scanner Performance Stability: Monitoring the stability of scanners used in photolithography processes is essential for consistent results. Any deviations can impact product quality and yield. Overlay Fingerprint Changes: Overlay refers to the alignment accuracy of multiple layers during semiconductor manufacturing. Detecting changes in overlay fingerprints helps maintain precise alignment, which is crucial for successful chip fabrication. Metrology Health: Metrology tools measure critical dimensions and other parameters during the manufacturing process. Ensuring the health and accuracy of these tools is vital for reliable data. Our proposed monitoring system leverages powerful data processing capabilities, allowing for customized KPI monitoring tailored to specific user needs. By reducing engineering time and costs, it enhances efficiency in high-volume manufacturing environments. © 2024 SPIE.

关键词： Statistical process control

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Querying 3D point clouds exploiting open-vocabulary semantic segmentation of images 8

Querying 3D point clouds exploiting open-vocabulary semantic...

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8th international ISPRS workshop LowCost 3D - Sensors, algorithms, Applications

作者： Alami, Ashkan Remondino, Fabio Trento Italy Department of Information Engineering and Computer Science University of Trento Trento38123 Italy

While deep models have advanced the 3D data analysis and demonstrated impressive results, they often struggle to generalize to new classes that are absent from the training dataset. Recently, open-vocabulary and zero-shot models have addressed this problem. However, these models are still relying on some data for training and fine-tuning for specific tasks. this requirement limits them to real-world applications. In this research, we propose an open-vocabulary method for point cloud segmentation, which does not require additional training data beyond the images and point cloud from the survey scene. By using the capabilities of the power of 2D open-vocabulary models and geometric features from the 3D data, combined with an XGBoost-guided region growing algorithm, our approach segments the queried objects directly in 3D scenes. We evaluate our method on 3D benchmark datasets, such as Replica and ScanNet, showing its practicality and scalability to real-world scenarios with limited data. Copyright: © 2024 Alessio Cardaci et al.

关键词： Semantic Segmentation

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Moving-Target Enclosing control for Multiple Nonholonomic Mobile Agents Under Input Disturbances 8th

Moving-Target Enclosing Control for Multiple Nonholonomic M...

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8th international workshop on advanced Computational Intelligence and Intelligent Informatics, IWACIII 2023

作者： Jin, Yaning Ju, Shuang Wang, Jing School of Electrical and Control Engineering North China University of Technology Beijing100144 China School of Electrical and Electronic Engineering Shijiazhuang Tiedao University Hebei050043 China

ISBN: (纸本)9789819975921

this paper investigates a moving-target enclosing control problem of multiple nonholonomic mobile agents subject to unknown heterogeneous input disturbances. the agents are required to move around the target and perform an expected spacing between neighboring agents. First, a distribution algorithm is used to generate desired circular trajectories, which can be referenced by the agents. Simultaneously, an adaptive observer of each agent is proposed to estimate the disturbances. then based on the desired circular trajectories and the estimations, a dynamic controller is designed to let the agents globally converge to the desired circular formation. Finally, effectiveness of the method is verified through simulation. © 2024, the Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

关键词： Mobile agents

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Frequency-domain Modeling-free Learning control for Wafer Stages with Transient Improvement by Adaption 8

Frequency-domain Modeling-free Learning Control for Wafer St...

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8th international workshop on advanced Patterning Solutions, IWAPS 2024

作者： Sun, Pengyu Song, Fazhi Liu, Yang Tan, Jiubin Center of Ultra-Precision Optoelectronic Instrument Engineering Harbin Institute of Technology Harbin China Key Lab of Ultra-precision Intelligent Instrumentation Harbin Institute of Technology Ministry of Industry and Information Technology Harbin China

ISBN: (数字)9781510686335

ISBN: (纸本)9781510686328

Precise patterns exposed by the most complicated machine called lithography in high-performance integrated circuits cannot be done without the capability of precise position. Due to the repetitive work demand, a method of FRF(frequency response function)-based modeling-free iterative learning control has been proposed for nanoscaled tracking of wafer stages with high dynamics and external disturbances. the proposed method is aimed at leaving out the modeling process to avoid modeling error and additional expenditure with no need for complex matrix calculation. In an attempt to deal with the adverse effects of iteration transient and random disturbances, an adaptive parameter is designed. © 2024 SPIE.

关键词： Transient analysis

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Research on Production Scheduling and Assembly Integration Optimization in Window and Door Manufacturing Enterprises Based on Improved NSGA-II Algorithm 8th

Research on Production Scheduling and Assembly Integration O...

引用

8th international Conference on Computing, control and Industrial engineering, CCIE 2024

作者： Guo, Shunsheng Liu, Yunsong Guo, Jun School of Mechanical and Electrical Engineering Wuhan University of Technology Hubei Wuhan430000 China

ISBN: (纸本)9789819769339

this study delves into the workshop scheduling problem for window and door manufacturing enterprises, focusing on the two-stage flexible job shop scheduling considering both processing and assembly phases. Initially, the study provides a detailed description of the problem, considering dynamic arrival of jobs, assembly of window and door products from multiple jobs, and the requirement for jobs to reach the assembly station simultaneously. A mathematical model is established with the objectives of minimizing makespan and simultaneousness degree. Subsequently, an improved ENT-NSGA-II algorithm is proposed, employing STPS and RSGS strategies to generate the initial population. the genetic parameters are adaptively adjusted with the iteration count, and three neighborhood search mechanisms are applied to individuals that remain unimproved after crossover and mutation. Testing on 15 instances of varying scales demonstrates that, compared to traditional genetic algorithms and artificial bee colony algorithms, the proposed ENT-NSGA-II algorithm achieves superior solutions in a shorter timeframe, showcasing remarkable performance advantages. © the Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2024.

关键词： Job shop scheduling

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Generative AI Powered Forensic Device 8

Generative AI Powered Forensic Device

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8th IEEE international Conference on Computing, Communication, control and Automation, ICCUBEA 2024

作者： Kshirsagar, Vanita G. Bhosale, Digvijay G. Suryawanshi, Shubhangi Mahajan, Anita Sachin Patil, Pramod Barpute, Jyotsna Vilas Ahire, Prashant G. Patil, Rahul A. Dr. D. Y. Patil Institute of Technology Pune India Dr. D. Y. Patil Institute of Technology Pune India Dr. D. Y. Patil Institute of Technology Pimpri Pune India Ajeenkya D. Y. Patil School of Engineering Pune India Dr. D.Y. Patil Institute of Technology Pune India Symbiosis Institute of Technology Pune India Pimpri Chinchwad college of Engineering Pune India

ISBN: (纸本)9798350391770

Crime is a dominant concern in contemporary society. It is crucial to prevent it and deliver justice promptly. Forensic science is critical for criminal investigations and maintaining law and order. the traditional tactics utilized in this field are frequently based on manual procedures, which are both time-consuming and prone to error, rendering them ineffectual in providing prompt and dependable justice. Utilizing automation and advanced technologies for forensic science and crime scene investigation is now essential. this paper suggests a portable gadget that utilizes Internet of things (IOT), Machine Learning and Deep Learning to predict, gain understanding, and possibly recognize offenders. this gadget is designed to reconstruct fingerprints, detect weapons and recognize suspicious activities. It utilizes algorithms and technologies like autoencoders, GANs, SSD and YOLOv8. We talk about the benefits of merging these technologies into one easy-to-use device, which will offer data integration, instant data processing, and improved forensic analysis. the article offers information about automating important areas to improve investigative processes and enhance the criminal justice system's efficiency and effectiveness in the future. © 2024 IEEE.

关键词： Digital forensics

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