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14th international conference on image Analysis and processing

作者： Hannuksela, Jari Sangi, Pekka Heikkila, Janne Liu, Xu Doermann, David Univ Oulu Machine Vis Grp Dept Elect & Informat Engn Oulu Finland Univ Maryland Inst Adv Comp Studies Language & Media Proc Lab College Pk MD 20742 USA

ISBN: (纸本)9780769528779

This paper presents a novel user interaction concept for document image scanning with mobile phones. A high resolution mosaic image is constructed in two main stages. Firstly, online camera motion estimation is applied to the phone to assist the user to capture small image patches of the document page. Automatic image stitching process with the help of estimated device motion is carried out to reconstruct the full view of the document. Experiments on document images captured and processed with mosaicing software clearly show the feasibility of the approach.

关键词： Cellular telephones

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Fine pixel SEM image for mask pattern quality assurance based on lithography simulation

Fine pixel SEM image for mask pattern quality assurance base...

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conference on Photomask and Next-Generation Lithography Mask Technology XIII

作者： Yamanaka, Eiji Kariya, Mitsuyo Yamaguchi, Shinji Tanaka, Satoshi Hashimoto, Kohji Itoh, Masamitsu Kobayashi, Hideaki Kawashima, Tsukasa Narukawa, Shogo Toshiba Co Ltd Semicond Co Saiwai Ku 1 Komukai Toshiba Cho Kawasaki Kanagawa 2128583 Japan Toshiba Co Ltd Semicond Co Dai Nippon Printing Corp JapanSaiwai Ku Proc & Mfg Engn CtrElect Device LabElect Devi Kawasaki Kanagawa 2128583 Japan

ISBN: (纸本)0819463582

Optical proximity correction (OPC) is an:essential technology for critical dimension (CD) control in Low-k1 lithography. As technology node becomes tighter, more aggressive OPC is required. However, the number of so-called HOT-SPOTs is increasing dramatically. To apply OPC correctly and efficiently, we should consider the total optimization of the process in close connection with data processing, reticle and wafer fabrication process. Conventional one-dimensional CD measurement is no longer suitable for complicated two-dimensional (2D) patterns generated by OPC (e.g. JOG and SERIF). For quality assurance of mask pattern, a metrology of complicated 2D OPC patterns has been required. In our previous report, we proposed a lithography simulation based on edge extraction from a fine pixel SEM image of an actual photomask. This method is very effective for evaluating quality of 2D OPC mask patterns. Employing the method, we developed a system for guaranteeing 2D OPC patterns before shipping the mask to a wafer factory (Fig. 1). In PMJ2005, we presented some specifications required for an SEM, which was one of the key factors of this method.((1)) We estimated how factors such as field of image, image resolution, positioning error, and image magnification affect lithography simulation based on fine pixel SEM image. For mask pattern quality assurance of hp65, we found that the field of image of larger than 16um square, the pixel size of less than 3nm, the positioning error of within +/-1um and the magnification error of less than 0.3% were acceptable (Table 1). Under these conditions, wafer image can be predicted with sufficient accuracy by the simulation. And then, in BACUS2005, we reported on a new SEM that was able to satisfy these specifications. ((2)) In this paper, we report some evaluation results of distortion caused by not only magnification error but also rotation and position error using actual fine pixel SEM image. We will also present our evaluation results of t

关键词： SEM edge extraction lithography simulation optical proximity correction (OPC) hotspot

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The isophotic metric and its application to feature sensitive morphology on surfaces

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8th European conference on Computer Vision

作者： Pottmann, H Steiner, T Hofer, M Haider, C Hanbury, A Vienna Tech Univ Geometr Modeling & Ind Geometry Grp A-1040 Vienna Austria Tech Gate Vienne Adv Comp Vis A-1220 Vienna Austria Tech Univ Vienna Pattern Recognit & Image Proc Grp A-1040 Vienna Austria

ISBN: (纸本)3540219811

We introduce the isophotic metric, a new metric on surfaces, in which the length of a surface curve is not just dependent on the curve itself, but also on the variation of the surface normals along it. A weak variation of the normals brings the isophotic length of a curve close to its Euclidean length, whereas a strong normal variation increases the isophotic length. We actually have a whole family of metrics, with a parameter that controls the amount by which the normals influence the metric. We are interested here in surfaces with features such as smoothed edges, which are characterized by a significant deviation of the two principal curvatures. The isophotic metric is sensitive to those features: paths along features are close to geodesics in the isophotic metric, paths across features have high isophotic length. This shape effect makes the isophotic metric useful for a number of applications. We address feature sensitive image processing with mathematical morphology on surfaces, feature sensitive geometric design on surfaces, and feature sensitive local neighborhood definition and region growing as an aid in the segmentation process for reverse engineering of geometric objects.

关键词： Mathematical morphology

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Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 147-150页

作者： Jinye, Peng Bianzhang, Yu Dakai, Wang Department of Electronics Northwest University Xi'an 710069 China Department of Electrical Engineering Northwestern Polytechnic University Xi'an 710072 China

In this paper, an images similarity measure based on directional gradient angular histogram (DGAH) is proposed. Analysis and experimental results reveal that the proposed technique not only acquires a superior detection performance, but also the invariance to illumination changes and the robustness to translation, scale and rotation of the image object. In addition, the proposed technique is easily integrated within a wavelet-based image coder since the angular histogram features can be constructed directly on the wavelet coefficients decomposed using anti-symmetrical bi-orthogonal wavelets (ASBIV). © 2002 IEEE.

关键词： image processing

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Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 612-615页

作者： Coquin, Didier Bolon, Philippe Ionescu, Benone LAMII BP 806 74016 Annecy Cedex France CNRS GDR Information Signal ImageS

A problem of both theoretical and practical importance in image processing is to compare two color images, taking into account the eventual diversities due to translation, or color variations. The aim of this paper is to study the behavior of dissimilarity measures in different color spaces. Five color spaces (RGB, HSI. HSV, ClELab, CIE-Luv) are studied. Properties of the dissimilarity measures are compared in terms of sensitivity to radiometric variations, spatial shifts and shape distortions. We compare the results with those obtained by subjective testing. © 2002 IEEE.

关键词： image reconstruction

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Automated segmentation of archaeological profiles for classification

Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 57-60页

作者： Kampel, Martin Sablatnig, Robert Vienna University of Technology Institute of Computer Aided Automation Pattern Recognition and Image Processing Group Favoritenstr.9/183-2 A-1040 Vienna Austria

Classification and reconstruction of archaeological fragments is based on the profile, which is the cross-section of the fragment in the direction of the rotational axis of symmetry. In order to segment the profile into primitives like rim, wall, and base, rules based on expert knowledge are created. The input data for the estimation of the profile is a set of points produced by the acquisition system. A function fitting this set is constructed and later on processed to find the characteristic points necessary to classify the original fragment. The one we propose is based on B-splines or bell-shaped splines. © 2002 IEEE.

关键词： image segmentation

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A trainable hierarchical hiddens Markov tree model for color image annotation

Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 192-195页

作者： Cheng, Li Caelli, Terry Ochoa, Victor University of Alberta Edmonton Alta. T6G 2E9 Canada

In this paper we consider how to annotate or label regions of grey-level or multispectral images based upon known labels and a set of interacting hierarchical doubly stochastic processes. The proposed model extends current work on the use of hierarchical Markavian models for image processing using multiscale representations. In this paper we explore a new bijective up-down algorithm whereby the spatio-spectral context of specific image region signatures are encoded via different types of trainable support kernels for the upward and downward Operations. © 2002 IEEE.

关键词： Hierarchical systems

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Genre-based search through biomedical images

Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 271-273页

作者： Geusebroek, Jan-Mark Hoang, Minh Anh Van Gemert, Jan Worring, Marcel Intelligent Sensory Information Systems Faculty of Science University of Amsterdam Kruislaan 403 1098 SJ Amsterdam Netherlands

We exploit the retrieval of visual information from biomedical scientific publication databases. Therefore, we consider the use of domain specific genres to automatically subdivide large image databases into smaller, consistent parts. Combination with Latent Semantic Indexing on the picture captions allows for efficient retrieval of images in specific categories. We demonstrate our approach on a large collection of images with captions from the Elsevier Brain Research publications. Initial result demonstrate the power of the proposed combination. © 2002 IEEE.

关键词： image processing

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Using constraint inequality on estimated correlation for rapid image search

Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 87-90页

作者： Kaneko, Shun'ichi Mae, Takahiro Miyamoto, Atsushi Hokkaido University Graduate School of Engineering Kita-13 Nishi-8 Kitaku Sapporo Japan Hitachi Co. Ltd. Production Engineering Research Laboratory Yoshida-cho Totsukaku Yokohama Japan

A rapid algorithm of searching for similar images to an object image in a set of registered images is proposed. Provided that correlations of all the pairs of registered images in advance, we can derive a constraint inequality for similarity of the object. By use of the upper bounds defined by the inequality, three conditions of neglect can be derived, which enable to quicken computation of searching. Efficiency rate of eight times in average could be obtained for searching 204 images in the set of 1,200 registered images. © 2002 IEEE.

关键词： image processing

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Registration and fusion of retinal images: A comparative study

Proceedings - International Conference on Pattern Recognitio...

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proceedings - international conference on pattern recognition 2002年第1期16卷 715-718页

作者： Laliberté, France Gagnon, Langis Yunlong, Sheng Département de R-D CRIM Montréal Qué. H3A 1B9 Département de Physique Université Laval Ste-Foy Qué. G1K 7P4

We present a new method to register high and low resolution color images of the retina as well as high resolution angiographies. The registration method is based on global point mapping with blood vessel bifurcations as control points. We also present results of various image fusion algorithms to determine the most appropriate one. Registration and fusion quality assessment is also discussed. © 2002 IEEE.

关键词： Color image processing

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