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2nd International Symposium on advanced optical manufacturing and testing Technologies

作者： Xu, Q Li, W Wang, J Cai, LQ Fine Opt Engn Res Ctr Chengdu Peoples R China

ISBN: (纸本)0819461881

Because of the demand for better performance in optical systems, there's a continuing effort to find more efficient ways of producing large optics. FOERC's involvement in developing new techniques for the fabrication of large optical components has resulted in the AOMTIL (advanced optical manufacturing technology Integrated Line). The purpose of the AOMTIL is to demonstrate the novel manufacturing process and technology for large optics in modem optical system. The progress of AOMTIL is presented in the paper. There are mainly four parts in AOMTIL as follows, the ultra-precision grinding, deterministic figuring or polishing, perfect surface conditioning and precision optical metrology. The preliminary results of the AOMTIL show the possibility to yield more than 20 pieces large optical components per month and the advantages in achieving high accuracy. optical flats larger than 500mm in diameter have been produced with flatness better than V 10 peak to valley.

关键词： large optics ultra-precision grinding deterministic polishing optical metrology

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Research on axisymmetric aspheric surface numerical design and manufacturing technology

Research on axisymmetric aspheric surface numerical design a...

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2nd International Symposium on advanced optical manufacturing and testing Technologies

作者： Wang, ZZ Guo, YB Zheng, L Xiamen Univ Dept Mech & Elect Engn Xiamen 361005 Peoples R China

ISBN: (纸本)0819461881

The key technology for aspheric machining offers exact machining path and machining aspheric lens with high accuracy and efficiency, in spite of the development of traditional manual manufacturing into nowadays numerical control (NC) machining. This paper presents a mathematical model between virtual cone and aspheric surface equations, and discusses the technology of uniform wear of grinding wheel and error compensation in aspheric machining. Finally, a software system for high precision aspheric surface manufacturing is designed and realized, based on the mentioned above. This software system can work out grinding wheel path according to input parameters and generate machining NC programs of aspheric surfaces.

关键词： aspheric surface conic section uniform wear error compensation automatic programming

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A novel manufacturing method of off-axis parabola

A novel manufacturing method of off-axis parabola

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2nd International Symposium on advanced optical manufacturing and testing Technologies

作者： Chen, XH Wang, J Xu, Q Wang, Y Chengdu Fine Opt Engn Res Ctr Keyuan Yi Rd 3New & High Tech Dev Zone Chengdu 610041 Peoples R China

ISBN: (纸本)0819461881

A novel manufacturing method that is different from the traditional method for off-axis parabola is described. Generally, the figure error between the best-fit sphere and the parabola is many microns. It cannot be measured by high-precision interferometer and traditional hand finishing is not efficient. An advanced technology is introduced and the desired off axis parabola is produced directly from the best-fit sphere. In this paper, magnetorheological finishing (MRF) technology is employed. The character of polishing spot, the material removal rate and the major manufacturing parameters are described. Fabrication parameters are optimized and the problems of fabricating off-axis parabola in practice are also discussed. A 150 mm diameter part was produced in a period of time in the experimentation with new deterministic polishing method. The final results show that the manufacturing ratio is more obviously improved than the traditional manufacturing method. It is a valid means to fabricate off-axis parabola with high efficiency and high-accuracy.

关键词： off-axis parabola magnetorheological finishing deterministic polishing

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Study on optics integrated manufacture technology based on windows DNA-OM

Study on optics integrated manufacture technology based on w...

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2nd International Symposium on advanced optical manufacturing and testing Technologies

作者： Yu, M Yang, L Wang, YJ Chinese Acad Sci Inst Opt & Elect Chengdu 610209 Peoples R China Chinese Acad Sci Grad Sch Beijing 100039 Peoples R China

ISBN: (纸本)0819461881

As the shortcoming and insufficiency of CNC systems applied in optics manufacturing, a design and application based on Windows DNA-OM is presented. After introducing the prime principles and logic structures of Windows DNA-OM, a specific solution of optics integrated manufacture based on this framework is discussed in detail. In this solution, the OPC(OLE for Process Control) technology based on COM(Component Object Model) of Microsoft company is used for CNC equipment in the workshop, and this could provide a general interface for communication of hetero-structure CNC equipment of workshop and so all hetero-structure CNC can be accessed in a simple way. The experience and knowledge of optic manufacturing is stored and integrated in Windows DNA-OM Data part, this data part can guide optics manufacture. By completing this data part, an optics manufacture expert system can be realized. Then the prime characteristics of the integrated manufacture system are given. Finally this system is proved to has a good flexibility and opening, ease realizing, low cost and high feasibility.

关键词： windows DNA-OM OPC optic manufacturing DNC

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The nanotech impact on IC processing: near and long term

The nanotech impact on IC processing: near and long term

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4th conference on Design and Process Integration for Microelectronic manufacturing

作者： Randall, John N. Stallcup, Richard Cavanah, Taylor Zyvex Corp 1321 North Plano Rd Richardson TX 75081 USA

ISBN: (纸本)0819461997

Nanotechnology can be seen to already have an impact on IC processing, no matter how it is defined. Nanomanipulators can be used for a variety of tasks in investigating nanostructures. An emerging application is the probing of individual transistors at the contact level anywhere on a die. As downscaling continues its inexorable march with the increasingly strong optical and other processing proximity effects, the ability to collect IV data from individual transistors anywhere in the circuit is becoming a valuable tool for failure analysis, yield enhancement, reliability, process integration, and time to market. The talk will discuss current capabilities and a roadmap to improve the productivity and capabilities of nanoprobing technology. In the longer term, nanotechnology's impact will not be on characterization and testing, but on processing itself. The real promise of nanotechnology is unprecedented process control of all phases of fabrication. An approach to atomically precise manufacturing will be presented that could enable the fabrication of Si or Si/Ge devices where dopant atoms can be precisely placed and the dimensions and control of those dimensions are limited only by the crystal lattice and its reconstruction due to surface or lattice strain. This fabrication technology could be used to produce ultra-scaled CMOS or advanced device technology.

关键词： nanotechnology transistor testing atomic layer epitaxy Si-Ge atomically precise manufacturing

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A New Category of Particles at 65nm technology and Below

A New Category of Particles at 65nm Technology and Below

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IEEE/SEMI conference and Workshop on advanced Semiconductor manufacturing

作者： D. Rathei A. Neuber D R Yield Software and Solutions Graz Austria MW Zander Stuttgart Germany

We aligned experience from yield analysis with knowledge from aerosol physics and found strong evidence that semiconductor manufacturers have face a new category of particles in the next technology nodes at and below ... 详细信息

关键词： Aerosols optical filters Semiconductor device manufacture Physics Coagulation Inspection Predictive models Virtual manufacturing Chemicals testing

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Solar Thermophotovoltaic Converter with Fresnel Lens and GaSb Cells

Solar Thermophotovoltaic Converter with Fresnel Lens and GaS...

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World conference on Photovoltaic Energy Conversion

作者： V.M. Andreev A.S. Vlasov V.P. Khvostikov O.A. Khvostikova P.Y. Gazaryan N.A. Sadchikov V.D. Rumyantsev A. F. Ioffe Physical-Technical Institute of the Russian Academy of Sciences Saint Petersburg Russia

ISBN: (纸本)1424400163

Developing of a solar thermophotovoltaic system is being reported. Theoretical calculations for system parameters (emitter aperture absorptance, emitter efficiency, PV cell band gap etc.) optimization and overall efficiency estimation are presented. The calculations are mainly oriented to make all the parts of the system matched to each other: the choice of tungsten emitter dimensions, PV cell material etc. 20% STPV module efficiency is reachable for GaSb based receiver with a possible increase to 29% for a tandem PV cell and advanced technology of STPV module. A cost-effective two-stage concentrator module based on a primary Fresnel lens and secondary quartz concave-convex lens have been fabricated. Concentration ratio of ~4000x, necessary for obtaining high efficiency of the concentrator-emitter system, is ensured. Two types of TPV receivers are tested under outdoor conditions (850 W/m 2 average direct sun intensity) and with the solar simulator set up. Emitter temperatures in the range of 1400-2000K are registered and GaSb PV cell short circuit current density up to 5 A/cm 2 is observed. BeO ceramics is used for mounting the PV cells allowing high thermal conductivity and series connection of the cells. High PV efficiency (19% under tungsten emitter irradiation) is obtained in GaSb TPV cells

关键词： Lenses Tungsten Thermal conductivity Apertures Photonic band gap optical materials Circuit testing Sun Circuit simulation Temperature distribution

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Self inspection of integrated circuits pattern defects using support vector machines

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JOURNAL OF VACUUM SCIENCE & technology B 2005年第6期23卷 3085-3089页

作者： Feng, HY Ye, J Pease, RF Stanford Univ Dept Elect Engn Stanford CA 94305 USA

At various steps of integrated circuit manufacturing, defects need to be inspected to ensure process integrity. It is desirable to detect the defects based on the captured optical image itself without comparing to any reference image. Such a methodology of defect inspection without any reference image is called defect self inspection. In this article, we investigate the defect self inspection using the support vector machines, a pattern classification methodology, and present detection sensitivity of this approach. (c) 2005 American Vacuum Society.

关键词： Integrated circuit testing

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8x10 advanced multipurpose display - Lessons learned from integrating a large area display into a fighter aircraft

8x10 advanced multipurpose display - Lessons learned from in...

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conference on Defense, Security, and Cockpit Displays

作者： Carter, R Warden, R Boeing Tact Aircraft Miss Syst St Louis MO USA

ISBN: (纸本)0819453668

As part of the advanced Mission Computer and Displays program, Boeing was tasked with developing and incorporating an 8x10 Active Matrix Liquid Crystal Display (AMLCD) into the Aft Crew Station of the F/A-18 F Aircraft. In order to meet cost and technical requirements, a commercial AMLCD panel was selected and ruggedized to meet the F/A-18 war fighter environment. The 8x10 AMPD was subjected to Military Standard Environmental testing as well as optical testing to requirements based on lessons learned from previous display activities and has subsequently passed those tests. Developmental Flight testing of the 8x10 AMPD was an unprecedented success and resulted in numerous compliments from F/A-18F Aircrew. The display is currently transitioning from Engineering, manufacturing and Development to Low Rate Initial Production.

关键词： Glasses optical testing LCDs Dielectrophoresis Head Military display technology Accelerated life testing Defense and security Software manufacturing

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The Planck telescope reflectors

The Planck telescope reflectors

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conference on Astronomical Structures and Mechanisms technology

作者： Stute, T EADS Astrium GmbH D-88039 Friedrichshafen Germany

ISBN: (纸本)0819454273

The mechanical division of EADS-Astrium GmbH, Friedrichshafen is currently engaged with the development, manu-PF facturing and testing of the advanced dimensionally stable composite reflectors for the ESA satellite home telescope Planck. The objective of the ESA mission Planck is to analyse the first light that filled the universe, the cosmic microwave background radiation. Under contract of the Danish Space Research Institute and ESA EADS-Astrium GmbH is developing the all CFRP primary and secondary reflectors for the 1.5-metre telescope which is the main instrument of the Planck satellite. The operational frequency ranges from to 25 GHz to 1000 GHz. The demanding high contour accuracy and surface roughness requirements are met. The design provides the extreme dimensional stability required by the cryogenic operational environment at around 40 K. The elliptical off-axis reflectors display a classical lightweight sandwich design with CFRP core and facesheets. Isostatic mounts provide the interfaces to the telescope structure. Protected VDA provides the reflecting surface. The manufacturing is performed at the Friedrichshafen premises of EADS-Space Transportation GmbH, the former Dornier composite workshops. advanced manufacturing technologies like true angle lay-up by CNC fibre placement and filament winding are utilized. The protected coating is applied at the CAHA facilities at the Calar Alto Observatory, Spain. The exhaustive environmental testing is performed at the facilities of IABG, Munich (mechanical testing) and for the the cryo-optical tests at CSL Liege. The project is in advanced state with both Qualification Models being under environmental testing. The flight models will be delivered in 2004. The paper gives an overview over the requirements and the main structural features how these requirements are met. Special production aspects and available test results are reported.

关键词： Reflectors manufacturing Space telescopes Telescopes Reflector telescopes Coating 3D metrology Microwave radiation Interfaces Satellites

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