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检索条件"任意字段=Conference on Algorithms, Devices, and Systems for Optical Information Processing"

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Control systems for the nanolithography process

Control systems for the nanolithography process

引用

IEEE conference on Decision and Control

作者： C.D. Schaper K. El-Awady A. Tay T. Kailath Department of Electrical Engineering Stanford University Information Systems Laboratory Stanford CA USA

The lithography process is the critical step in the fabrication of nanostructures for integrated circuit manufacturing. In this paper, a summary is presented of several projects applying control and signal processing techniques to lithography. We begin with a discussion of areas in the optical exposure process where systems techniques make a significant difference. These areas include the optical mask preparation step where fast simulation methods and computational algorithms are used for mask design. Critical systems areas for next generation lithography are noted including nanopositioning by precision control of flexure systems and alignment by signal processing of laser interferometry strategies. A case study is then presented of temperature control for the postexposure bake step of sensitive chemically amplified photoresists used in deep-UV lithography.

关键词： Control systems Nanolithography Lithography optical signal processing Signal processing algorithms optical interferometry optical sensors optical device fabrication Nanostructures Integrated circuit manufacture

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A low-power, reconfigurable adaptive equalizer architecture

A low-power, reconfigurable adaptive equalizer architecture

引用

Asilomar conference on Signals, systems & Computers

作者： J. Tschanz N.R. Shanbhag VLSI Information Processing Systems VIPs Group Coordinated Science Laboratory ECE Department University of Illinois Urbana-Champaign Urbana IL USA

This paper presents an architecture for an adaptive equalizer that is dynamically reconfigurable for low-power operation. The equalizer is composed of a signal processing block which accomplishes the filtering operations and a signal monitoring block which controls reconfiguration by monitoring the equalizer performance and dynamically powering up or down filter taps in order to conserve energy. This reconfigurable equalizer is used in the design of a 51.84 Mb/s VDSL receiver core, and simulation results are shown which demonstrate the power savings accomplished through reconfiguration.

关键词： Adaptive equalizers Signal processing algorithms optical fiber cables optical network units Energy consumption Heuristic algorithms Algorithm design and analysis Signal processing Circuits optical fiber networks

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Universal Sensor Interface Module (USIM)

Universal Sensor Interface Module (USIM)

引用

conference on Sensors, C31, information, and Training Technologies for Law Enforcement

作者： King, D Torres, A Wynn, J Raytheon Syst Co Dallas TX 75266 USA

ISBN: (纸本)0819430439

A Universal Sensor Interface Module (USIM) is being developed by the Raytheon-TI systems Company for use with fields of unattended distributed sensors. In its production configuration the USIM will be a multi-chip module consisting of a set of common modules. The common module USIM set consists of (1) a Sensor Adapter Interface (SAI) module, (2) digital signal processor (DSP) and associated memory module, and (3) a RF transceiver module. The Multi-spectral sensor interface is designed around a low power AID converter whose input/output interface consists of: - 8 buffered, sampled inputs from various devices including environmental, acoustic seismic and magnetic sensors. The eight sensor inputs are each high-impedance, low capacitance, differential amplifiers. The inputs are ideally suited for interface with discrete or MEMS sensors, since the differential input will allow direct connection with high-impedance bridge sensors and capacitance voltage sources. Each amplifier is connected to a 22-bit Delta Sigma AID converter to enable simultaneous samples. The low power Delta Sigma A/D converter provides 22 bit resolution at sample frequencies up to 142 hertz (used for magnetic sensors) and 16 bit resolution at frequencies up to 1168 hertz (used for acoustic and seismic sensors). The video interface module is based around the TMS320C5410 DSP. It can provide sensor array addressing, video data input, data calibration and correction. The processor module is based upon a MPC555. It will be used for mode control, synchronization of complex sensors, sensor signal processing, array processing, target classification and tracking. Many functions of the A/D, DSP and transceiver can be powered down by using variable clock speeds under software command or chip power switches. They can be returned to intermediate or full operation by DSP command. Power management may be based on the USIM's internal timer, command from the USIM transceiver, or by sleep mode processing management. Th

关键词： inter-netted sensors distributed processing unattended ground sensors

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Digital spatial domain multiplexing of interferometric optical fibre sensor systems for distributed real time condition monitoring of engineering structures

Digital spatial domain multiplexing of interferometric optic...

引用

AFRICON conference

作者： B. Bridge Y. Hu S. Chen A. Khalid Centre for Automated and Robotic Non-destructive Testing School of Electric Electronic and Information Engineering South Bank University London UK

The potential of large scale fibre optic sensor arrays for distributed and real time monitoring of engineering structures is discussed. It is shown that novel spatial multiplexing techniques augmented by special signal processing algorithms, whilst being more robust than systems based on other multiplexing techniques, can also achieve higher multiplexing capacity, measurement speed and cost effectiveness.

关键词： optical interferometry optical arrays Sensor arrays optical sensors optical signal processing Large-scale systems optical fiber sensors Monitoring Signal processing algorithms Robustness

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Surveillance sensor systems using CMOS imagers

Surveillance sensor systems using CMOS imagers

引用

International conference on Image Analysis and processing

作者： A. Teuner M. Hillebrand B.J. Hosticka S.-B. Park J.E. Santos Conde N. Stevanovic Fraunhofer Institute of Microelectronic Circuits and System Duisburg Germany

Surveillance sensors are being applied in factory automation systems, traffic control, entrapment protection, automotive safety systems and in other applications where information about the occupancy of a scene is required. In order to detect object motion several methods exploiting distinct physical phenomena, e.g. passive infrared sensors or active microwave sensors, have been realized. When comparing all of the applicable methods, the electro-optical approach performs very well with respect to the spatial resolution of the monitored area. Therefore, electro-optical sensors are able to provide additional information, e.g. to predict the direction of motion, or to localize and identify objects. However, convenient image processing systems using CCD sensors for image acquisition and DSP or /spl mu/P boards for signal processing and classification are not well suited for dedicated, powerful and cost-effective optical sensor solutions. In contrast to this mainstream approach CMOS based imaging technologies offer novel solutions in both the design and applications of electro-optical surveillance sensors. This contribution discusses CMOS imager operating principles and describes certain architectures and applications for passive and active surveillance sensors. The capabilities for realizing on-chip motion detection and range sensing using fast shutter devices are illustrated. We conclude with a discussion of the status of CMOS surveillance sensors and suggest trends for future applications.

关键词： Surveillance Sensor systems CMOS image sensors Sensor phenomena and characterization Motion detection Electrooptic devices optical sensors CMOS technology Sensor systems and applications Manufacturing automation

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optical integrated wave separator and matrix switch using waveguide-type A-O couplers for WDM systems

Optical integrated wave separator and matrix switch using wa...

引用

Asia-Pacific conference on Communications

作者： Y. Miyazaki N. Goto Department of Information and Computer Sciences Toyohashi University of Technology Toyohashi Japan

Collinear acoustooptic (AO) separators and switches consisting of an optical directional coupler are investigated for use in WDM networks and photonic switching systems. Wavelength-selective switching with AO switches consisting of Nb/sub 2/O/sub 5//Ta/sub 2/O/sub 5//proton-exchanged LiNbO/sub 3/ on LiNbO/sub 3/ substrates are performed. The fundamental switching characteristics and applications to WDM systems are discussed.

关键词： optical waveguides Integrated optics Particle separators Transmission line matrix methods optical switches Couplers Wavelength division multiplexing optical filters optical signal processing optical devices

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Underground imaging based on edge-preserving regularization

Underground imaging based on edge-preserving regularization

引用

International conference on information Intelligence and systems

作者： H. Feng D.A. Castanon W.C. Karl Multi-Dimensional Signal Processing Laboratory Department of Electrical and Computer Engineering Boston University Boston MA USA

Develops approaches for imaging weak-contrast buried objects using data from a ground penetrating radar array. An approximate physical model relating the collected data to the underground objects is developed. This model uses ray optics to represent the air/soil interface, and a Born approximation to model the weak contrast backscattering from buried objects. In order to address both modeling errors and ill-posedness, the proposed image reconstruction algorithms use regularization based on a total variation norm with orientation preference. The algorithms are tested on data generated by nonlinear finite difference time domain electromagnetic simulations.

关键词： Buried object detection optical imaging Ground penetrating radar Nonlinear optics Soil Scattering Approximation methods Backscatter Image reconstruction Testing

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Functional MR image registration using a genetic algorithm

Functional MR image registration using a genetic algorithm

引用

International conference on Neural information processing

作者： J.C. Rajapakse B. Guojun School of Applied Science Nanyang Technological University Singapore

Image registration is formulated as a problem of finding optimal linear intensity and spatial transformations. A genetic algorithm is proposed to find optimal parameters of the transformations. The new approach is use... 详细信息

关键词： Image registration Genetic algorithms optical imaging Head Brain Magnetic resonance imaging Multidimensional systems Humans Stochastic processes Simulated annealing

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ILFE sensor using laser chirp and arc-tangent algorithm

ILFE sensor using laser chirp and arc-tangent algorithm

引用

Pacific Rim conference on Lasers and Electro-Optics (CLEO/Pacific Rim)

作者： Seungho Cho Hojoon Lee Kisoo Kim Department of Information Communication Engineering Hoseo University Asan ChungNam South Korea Institute of Ssang Yong Construction Tech Laboratory Daejeon South Korea

An in-line fibre etalon sensor system using the laser chirp and three wavelength arc-tangent algorithm to measure the absolute phase is studied. We proposed and proved the new algorithm by performing the experiments. ... 详细信息

关键词： Chirp Signal processing algorithms optical fiber sensors Wavelength measurement Strain measurement optical signal processing Magnetic sensors Capacitive sensors optical sensors Sensor systems

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High speed optical scanner for multi-dimensional beam pointing and acquisition

High speed optical scanner for multi-dimensional beam pointi...

引用

IEEE Photonics conference (IPC)

作者： N.A. Riza Yu Huang Photonic Information Processing Systems (PIPS) Laboratory The School of Optics and Center of Research and Education in Optics and Lasers (CREOL) University of Central Florida Orlando FL USA

We report on a novel multi-dimensional optical scanning technique based on fiber-based wavelength division multiplexed (WDM) technology. This scanner can provide a large field of view (e.g., up to 360 degrees), a large scanning volume, a fast scanning speed, and the ability to scan a complicated three-dimensional (3-D) geometry. WDM devices have been recently used in telecommunication optical networks.

关键词： High speed optical techniques optical filters optical crosstalk Laser beams Lenses Laser tuning Tunable circuits and devices Fiber lasers optical fiber devices optical interconnections

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