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检索条件"任意字段=Conference on Current Developments in Lens Design and Optical Engineering XX"

共 445 条记录，以下是241-250 订阅

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Employment of fluorescence for autofocusing in direct laser writing micro-/nano-lithography 15

Employment of fluorescence for autofocusing in direct laser ...

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conference on current developments in lens design and optical engineering XV

作者： Malinauskas, Mangirdas Zukauskas, Albertas Belazaras, Kastytis Vilnius Univ Fac Phys Dept Quantum Elect Laser Res Ctr LT-10223 Vilnius Lithuania

ISBN: (纸本)9781628412192

Herein we present the implementation of autofocusing in multi-photon Direct Laser Writing (DLW) lithography. It is based on fluorescence occurring within the confined volume of a photopolymer/photoresin excitation resulting to a voxel generation. The proposed method is further successfully employed for the nanofabrication of large scale (500 nm in height, up to 25 mm(2) in area) Diffractive optical Elements (DOE). The produced structures are characterized using Scanning Electron Microscope (SEM) and confocal optical profilometry. The introduced technique is potential for a simple, price and effort efficient upgrade of currently existing DLW micro-/nano-lithography setups.

关键词： Direct laser writing femsosecond pulses two-photon polymerization multi-photon excitation nanolitography autofucusing photopolymers diffractive optical elements

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Requirements and limitations for fast numerical calculation of the PSF of imaging systems

Requirements and limitations for fast numerical calculation ...

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conference on current developments in lens design and optical engineering V

作者： Bosch, S Ferré-Borrull, J Gómez-Morales, F Univ Barcelona Dept Fis Aplicada & Opt E-08028 Barcelona Spain

ISBN: (纸本)0819454613

Many practical approaches have been developed for computing the point spread function (PSF) of imaging systems and the subject has been extensively studied for many years, since this has been a classical topic in OptiCs-6. In recent times, the exact numerical calculation of the diffraction integrals and, hence, of the PSF of image forming systems has been successfully addressed(7-10). These methods are based on the determination of the critical points and the semi-periodic zones of the integrand on the plane of the aperture, followed by the summation for each of the zones. In the present work we address a comparison between an approximate calculation method based on the classical approach and the cited exact numerical procedures, mainly regarding the required computational effort involved.

关键词： point-spread function diffraction theory of aberrations optical system evaluation calculation methods

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Diffraction efficiency evaluation of diffractive optical element (DOE) aberration corrector

Diffraction efficiency evaluation of diffractive optical ele...

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conference on current developments in lens design and optical engineering V

作者： Shen, MZ Huang, RH Chinese Acad Sci Inst Opt & Elect Chengdu 610041 Peoples R China

ISBN: (纸本)0819454613

A new way to evaluate the diffraction efficiency of the diffractive optical element (DOE), which serves as an aberration corrector in an infrared hybrid optical system, is proposed. The directly measured ensquared energy of the hybrid optical system is obtained through an experimental test. Then, the actual line spread function (LSF) of the system under test is measured, and the point spread function (PSF) is calculated from LSF based on the symmetric property of the system. The PSF is used to calculate the so-called derived ensquared energy. The ratio of the directly measured and the derived ensquared energy, defined as the diffraction efficiency of the DOE, represents the fraction of the energy focused onto the image point over the total input energy on the image plane, because the energy loss is caused by the scattering from the DOE corrector. The hybrid optical system, experimental setup, evaluation procedure, and the final results will be presented.

关键词： diffraction efficiency diffractive optical elements hybrid optical system radiometric measurement optical test infrared optical system

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design of a discrete scan laser focusing system with a ring grating scan element

Design of a discrete scan laser focusing system with a ring ...

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conference on current developments in lens design and optical engineering IX

作者： Rodgers, J. Michael Opt Res Associates Pasadena CA 91107 USA

ISBN: (纸本)9780819472809

An optical system application required a high speed laser scanning subsystem that produced high quality extended images focused at 32 discrete separated positions along a line, rather than continuously varying positions along the line as in more familiar scanning systems. This paper describes the optical design trades and selection of a grating-based scan element that produces this unusual type of scan, and the optical design methods that corrected aberrations produced by the scan element. A variety of different grating-based scan element designs were explored, in a flat disk geometry, but these produced excessive aberrations, both in the absolute level and in the magnitude of variation with scan. A ring-shaped scan element geometry was identified, which greatly minimized the scan-varying aberrations and brought them to near acceptable levels. Additional cylindrical corrector elements were added near the ring scan element to reduce the astigmatism of the ring substrate, and cylindrical lenslets were placed near the focus to provide further independent correction of astigmatism in each scan position. The resulting design achieved diffraction limited wavefront quality across the scan range.

关键词： optical design gratings scanning systems

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New infrared optical systems using diffractive optics

New infrared optical systems using diffractive optics

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conference on current developments in lens design and optical engineering III

作者： Bigwood, C Thales Opt Ltd St Asaph LL17 0LL Denbigh Wales

ISBN: (纸本)0819445347

A method for computing the polychromatic MTF of hybrid refractive - diffractive elements is described taking into consideration the effects of not only the primary diffraction order but also the effects of additional parasitic diffraction orders. The results of this approach are compared with the more conventional single order calculation and with actual measured performance. For certain markets and applications the cost of infrared lenses are critical in order to achieve customer expectations. Two possible methods of realising this requirement are the use of moulded optics or the use of multiple kinoform optics with no refractive power. Examples of such lenses are given along with discussion of the merits and limitations that each approach entails.

关键词： optical design infrared diffractive optics

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Polarization dependent proximity effects

Polarization dependent proximity effects

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conference on optical Microlithography xx

作者： Tyminski, Jacek. K. Matsuyama, Tomoyuki Nakashima, Tashiharu Schmoeller, Thomas Lewellen, John Nikon Precis Inc 1399 Shoreway Rd Belmont CA 94002 USA Synopsys Inc D-81737 Munich Germany Nikon Inc Kumagaya Saitama 3608559 Japan Synopsys Inc Mountain View CA 94043 USA

ISBN: (纸本)9780819466396

To meet the imaging resolution requirements, driven by the evolution of IC design rules, leading-edge scanners incorporate projection lenses with hyper-NAs. Moreover, immersion scanners are being introduced into IC manufacture. Both dry and immersion tools explore the lens design regimes of unprecedented complexity. The need to predict, to analyze and to control the IC pattern CDs is met by various photolithography simulators. The continuing demand for simulation accuracy is reflected by the requirement to quantify the scanner projection lens fingerprints, i.e. projection lens infinitesimal excursions from the ideal performance. The scanner engineering community has been relying on photolithography simulators to analyze the impact of the projection lens fingerprints on the imaging characteristics. However small, these excursions are always present in the projection tools and they control important imaging characteristics such as overlay, CD uniformity, across-field exposure latitude, to name but a few. Customarily, phase front aberrations and lens pupil apodization signatures have been used to predict the scanners imaging responses. Of course, the need to design, to manufacture and to deploy scanners of ever improving quality resulted in dramatic reductions of these non-ideal imaging excursions. The evolution of IC designs and imaging tools complexity escalate the requirements for imaging simulation accuracy. Simultaneously, predicting scanner imaging response has become a key mission in the Deign For Manufacture arena. In view of these developments, it necessary to pose a question if the conventional equipment engineering and imaging simulation methodologies predict scanner imaging responses with the accuracy required by the IC design rules. Differently put, the question is: what is necessary to provide simulation accuracy required by the current IC design rules? This report attempts to address these questions.

关键词： projection lens model vectorization wavefront aberrations optical proximity effects

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The design of Beam Shaping Focused lens Applied in Solar Energy Concentration

The Design of Beam Shaping Focused Lens Applied in Solar Ene...

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conference on current developments in lens design and optical engineering XII/Advances in Thin Film Coatings VII

作者： Ma, Shih-Hsin Lee, Chi-Hung Lee, Yun-Parn Wu, Jih-Huah Tseng, Chun-Ming Feng Chia Univ Dept Photon Taichung 40724 Taiwan Feng Chia Univ Dept Elect Engn Taichung Taiwan Ming Chuan Univ Dept Elect Engn Taoyuan Taiwan Ming Chuan Univ Dept Biomed Engn Taoyuan Taiwan

ISBN: (纸本)9780819487384

In this paper, we proposed a new configuration of concentrator in solar PV system. A special optical system in the concentrator used in focusing sun light to solar cell is proposed, the system compose of an aspherical surface and a specific diffusing surface. The uniform-squared light pattern is obtained on the solar cell, the shape and size of light pattern can be modulated by the parameters of the diffusing surface. In order to decrease the weight of the lens, the concentrator in Fresnel lens type is built at last. Besides, the optical efficiencies formed by the aspherical concentrator and Fresnel concentrator are about 92% and 77%, the concentrations are about 720mW/mm(2) and 640mW/mm(2), and the acceptance angles are about 0.35 degrees and 0.30 degrees, respectively. The tolerances in assembling the component of the concentrator are also discussed in detail.

关键词： Photovoltaic solar cell solar energy concentrator

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Cryogenic lens design Case Study: Gemini Planet Imager Spectrograph

Cryogenic Lens Design Case Study: Gemini Planet Imager Spect...

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conference on current developments in lens design and optical engineering XII/Advances in Thin Film Coatings VII

作者： Thibault, S. Univ Laval Dept Phys Quebec City PQ G1V 0A6 Canada

ISBN: (纸本)9780819487384

Making a lens design working at cryogenic temperature is a real challenge. Both optical and mechanical designer must work together to prevent problems during operation. The Gemini Planet Imager (GPI), currently under construction will be a facility instrument for the 8-m Gemini South telescope. The science instrument is a cryogenic integral field spectrograph based on a lenslet array. The integral field nature of the instrument allows for a full mapping of the focal plane at coarse spectral resolution. With such a data cube, artifacts within the PSF such as residual speckles can be suppressed. Additionally, the initial detection of any candidate planet will include spectral information that can be used to distinguish it from a background object: candidates can be followed up with detailed spectroscopic observations. The optics between the lenslet array and the detector are essentially a standard spectrograph with a collimating set of lenses, a dispersive prism and a camera set of lenses in a folded assembly. This paper describes the process from the first preliminary design to the final cryogenic system for both optical and mechanical design to achieve cryogenic working solution. We also discussed the assembly procedure (room temperature vs cryogenic compensation), the test support equipments and finally the laboratory optical performances over the field of view.

关键词： Planet imager cryogenic spectrograph test image quality

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The orbiting carbon observatory (OCO) instrument optical design

The orbiting carbon observatory (OCO) instrument optical des...

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conference on current developments in lens design and optical engineering V

作者： Haring, R Pollock, R Sutin, B Crisp, D Hamilton Sundstrand Pomona CA 91701 USA

ISBN: (纸本)0819454613

The Orbiting Carbon Observatory (OCO) will measure the distribution of total column carbon dioxide in the Earth's atmosphere from an Earth-orbiting satellite. Three high-resolution grating spectrometers measure two CO2 bands centered at 1.61 and 2.06 mum and the oxygen A-band centered at 0.76 mum in the near infrared region of the spectrum. This paper presents the optical design and highlights the critical optical requirements flowed down from the scientific requirements. These requirements necessitate a focal ratio of f/1.9, a spectral resolution of 20,000, and precedence-setting requirements for polarization stability and the instrument line shape function. The solution encompasses three grating spectrometers that are patterned after a simple refractive spectrometer approach consisting of an entrance slit, a two-element collimator, a planar reflection grating, and a two-element camera lens. Each spectrometer shares a common field of view through a single all-reflective telescope. The light is then re-collimated and passed through a relay system, separating the three bands before re-imaging the scene onto each of the spectrometer entrance slits using an all-reflective inverse Newtonian re-imager.

关键词： infrared spectrometer greenhouse gases carbon dioxide oxygen A-band

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Eliminating Dewar Narcissus artifacts induced by moving optics in infrared staring focal plane sensors

Eliminating Dewar Narcissus artifacts induced by moving opti...

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conference on current developments in lens design and optical engineering XIII

作者： McCulloch, Philip M. Olson, Craig Goodman, Timothy D. L3 Commun Sonoma EO Santa Rosa CA 95403 USA

ISBN: (纸本)9780819492036

Staring infrared imagers have multiple surfaces within the integrated Dewar assembly which contribute to non-traditional Narcissus artifacts. Static non-uniformity correction is insufficient to remove dynamic Narcissus artifacts caused by moving focus or zoom groups. Dynamic Narcissus artifacts often manifest as rings apparent to the human eye, although they may lie near the noise floor of the imager. Moreover, strong field curvature of the Narcissus can complicate diagnosis using paraxial methods. We compare a simple pupil ghost metric to traditional Narcissus metrics and present an experimental case study illustrating how the metric can be used during optimization to eliminate the effect.

关键词： optical design Narcissus staring array infrared optics YNI i/ibar

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