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检索条件"任意字段=Conference on Current Developments in Lens Design and Optical Engineering XXII"

共 444 条记录，以下是421-430 订阅

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Polarization dependent proximity effects

Polarization dependent proximity effects

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conference on optical Microlithography XX

作者： Tyminski, Jacek. K. Matsuyama, Tomoyuki Nakashima, Tashiharu Schmoeller, Thomas Lewellen, John Nikon Precis Inc 1399 Shoreway Rd Belmont CA 94002 USA Synopsys Inc D-81737 Munich Germany Nikon Inc Kumagaya Saitama 3608559 Japan Synopsys Inc Mountain View CA 94043 USA

ISBN: (纸本)9780819466396

To meet the imaging resolution requirements, driven by the evolution of IC design rules, leading-edge scanners incorporate projection lenses with hyper-NAs. Moreover, immersion scanners are being introduced into IC manufacture. Both dry and immersion tools explore the lens design regimes of unprecedented complexity. The need to predict, to analyze and to control the IC pattern CDs is met by various photolithography simulators. The continuing demand for simulation accuracy is reflected by the requirement to quantify the scanner projection lens fingerprints, i.e. projection lens infinitesimal excursions from the ideal performance. The scanner engineering community has been relying on photolithography simulators to analyze the impact of the projection lens fingerprints on the imaging characteristics. However small, these excursions are always present in the projection tools and they control important imaging characteristics such as overlay, CD uniformity, across-field exposure latitude, to name but a few. Customarily, phase front aberrations and lens pupil apodization signatures have been used to predict the scanners imaging responses. Of course, the need to design, to manufacture and to deploy scanners of ever improving quality resulted in dramatic reductions of these non-ideal imaging excursions. The evolution of IC designs and imaging tools complexity escalate the requirements for imaging simulation accuracy. Simultaneously, predicting scanner imaging response has become a key mission in the Deign For Manufacture arena. In view of these developments, it necessary to pose a question if the conventional equipment engineering and imaging simulation methodologies predict scanner imaging responses with the accuracy required by the IC design rules. Differently put, the question is: what is necessary to provide simulation accuracy required by the current IC design rules? This report attempts to address these questions.

关键词： projection lens model vectorization wavefront aberrations optical proximity effects

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design and fabrication of the near-ultraviolet birefringent Solc filter for the NASA IRIS solar physics mission

Design and fabrication of the near-ultraviolet birefringent ...

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conference on current developments in lens design and optical engineering XIII

作者： Berger, Thomas Mudge, Jason Holmes, Buck Searcy, Paul Wuelser, Jean-Pierre Lemen, James Title, Alan Adv Technol Ctr Palo Alto CA 94304 USA

ISBN: (纸本)9780819492036

The NASA Interface Region Imaging Spectrograph (IRIS) mission is a Small Explorer (SMEX) satellite mission designed to study plasma dynamics in the "interface region" between the Sun's chromosphere and corona with high spatial, spectral, and temporal resolution. The primary instrument is a dual Czerny-Turner spectrograph fed by a 20-cm Cassegrain telescope measuring near-and far-ultraviolet (NUV, FUV) spectral lines in the ranges 133-141 nm and 278-283 nm. To determine the position of the slit on the solar disk, a slit-jaw imaging system is used. The NUV slit-jaw imaging system produces high spatial resolution images at two positions in the Mg II 280 nm spectral line complex using a birefringent Solc filter with two wide-band interference pre-filters for spectral order selection. The Solc filter produces a 0.36 nm full-width at half-maximum (FWHM) filter profile with low sidelobes and a peak transmission of 15% at 279.6 nm. The filter consists of two "wire grid'' polarizers surrounding 8 quartz waveplates configured in a modified Solc "fan" rotational pattern. The elements are optically coupled using DC200 silicon-based grease. The NUV Solc filter is sealed in a windowed cell to prevent silicon contamination of the FUV channel. The design of the sealed cell and assembly of the filter into the cell were among the most challenging optomechanical aspects of the IRIS spectrograph system.

关键词： Optics imaging birefringent filter near-ultraviolet far-ultraviolet satellite systems solar spectrum

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Further results in measuring water ice buildup on optical components in cryogenic vacuum chambers

Further results in measuring water ice buildup on optical co...

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conference on current developments in lens design and optical engineering XIV

作者： Moeller, Trevor M. Smith, L. Montgomery Collins, Frank G. Labello, Jesse M. Rogers, James P. Lowry, Heard S. Crider, Dustin H. Univ Tennessee Inst Space 411 BH Goethert Pkwy Tullahoma TN 37388 USA Arnold Engn Dev Complex Arnold AFB TN 37389 USA

ISBN: (纸本)9780819496911

Experiments presented in a previous paper(1) established proof-of-principle that water, the most prevalent contaminant in high-vacuum cryogenic systems, initially collects on the surfaces of optical components as a thin film of ice, and thus can be detected and its thickness measured via multiple-beam thin-film interference phenomena. In those earlier experiments, a molecular sieve zeolite in a canister external to a vacuum chamber served as a water source, while the buildup of ice was measured using a HeNe laser beam reflected off the surface of a mirror with a quartz crystal microbalance (QCM) used for verification of the mass accumulation. Additional experiments have improved upon the techniques used earlier and provided further insight into the ice accumulation process. Use of a shorter wavelength (450 nm) laser in conjunction with a first-surface gold mirror produced greater depth of modulation and thus increased signal-to-noise ratio in the light interference. Data reduction using cross-correlation analysis over single-period interference records provided more accuracy and precision in the ice thickness measurements. Ice buildup under varying pressure and temperature ranges established baseline conditions for transparent thin-film deposition, and the transition to ice fracture and specular reflection. These recent experiments have demonstrated that the optical monitoring of ice accumulation via multiple-beam interference is applicable over a wider range of mass and thicknesses than the conventionally-used QCM method.

关键词： Cryogenic contamination thin film interference

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Exposure of Restore-L Camera optical Elements to a Simulated Orbital Radiation Environment 20

Exposure of Restore-L Camera Optical Elements to a Simulated...

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conference on current developments in lens design and optical engineering XX

作者： Miller, Kevin H. Heaney, James B. Lauenstein, Jean-Marie Brown, Stephen K. O'Connor, Kenneth M. Miller, Sharon K. NASA Goddard Space Flight Ctr 8800 Greenbelt Rd Greenbelt MD 20771 USA SGT KBR 7701 Greenbelt Rd Ste 400 Greenbelt MD 20770 USA NASA Glenn Res Ctr 21000 Brookpark Rd Cleveland OH 44135 USA

ISBN: (数字)9781510629028

ISBN: (纸本)9781510629028

This paper reports on the exposure of visible wavelength camera optical elements to a simulated orbital radiation environment in support of the Restore-L flight project at NASA's Goddard Space Flight Center. Borosilicate glasses with various metal oxide dopants - S-LAL8, S-LAL18, N-SF1, and the polycarbonate material Makrolon GP were exposed to electrons and protons of varying energies. Low energy (E <= 10keV) charged particles were used primarily to assess degradation to the antireflective coatings of the optical elements. High energy (E similar to 1 MeV) charged particles were used to evaluate degradation to the bulk material. Elements of S-LAL18, N-SF1, LaK9G15, and Makrolon GP were exposed to a representative atomic oxygen rich environment. Elements of S-LAL8 and Makrolon GP were exposed to intense ultraviolet radiation. Pre- and post-exposure transmittance measurements were used to quantify the effects on the elements tested in the simulated environment over the 0.3 to 1.2 micron wavelength range. Our measurement results will be discussed in the context of their robustness to the orbital environment and the known chemical constituents of the materials tested.

关键词： Restore-L radiation anti-reflective coating transmittance atomic oxygen ultraviolet

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Field-of-view enhancement for commercially available active imaging camera using time-of-flight technology 19

Field-of-view enhancement for commercially available active ...

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19th conference on current developments in lens design and optical engineering

作者： Poulin-Girard, Anne-Sophie Smith, Michael Gagnon, Mathieu Legault, Marc-Antoine Thibault, Simon Univ Laval Ctr Opt Photon & Lasers 2375 Rue Terrasse Quebec City PQ G1V 0A6 Canada Innovat Vehicle Inst 25 Boul Maisonneuve St Jerome PQ J5L 0A1 Canada

ISBN: (数字)9781510620629

ISBN: (纸本)9781510620629

Active imaging techniques have been, and will remain relevant as an integral part of the sensor network needed in mobile robotics navigation, most commonly with the use of LiDARs. For close range applications, time-of-flight (TOF) cameras are an alternative to more expensive LiDARs. The Kinect v2 (Kinect for XboxOne) has been used frequently as a range imaging camera in machine vision research because of its low cost and good performance. For mobile robotics applications moving at low speed, a larger field of view than the original (70 degrees X 60 degrees) would be desirable to increase awareness of the surroundings, and also detect other moving objects in the trajectory. Our main goal is therefore to increase the Kinect v2 field of view while keeping its main feature of depth measurements. A simple but effective solution consists in using a conversion lens to increase the ray collection angle before the rays enter the IR camera. Depth measurements remain possible from each pixel using TOF with the Kinect v2 modulated signal, provided the field of illumination matches the field of view. A trade-off has to be made between accuracy of depth measurement, optical performance and field of view/illumination enhancement. Therefore, we modified a Kinect v2 to characterize its optical performances and evaluate its relevancy for applications requiring accurate knowledge of the 3D surroundings. A field of view improvement of the Kinect v2 and other similar TOF cameras could offer an alternative at minimal cost for depth measurements in machine vision, specifically in mobile robotics research where object detection and mapping tasks are frequently carried out.

关键词： Active imaging optical system mobile robotics depth camera range imaging time of flight wide angle machine vision

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Reflectivities of light-absorptive coatings within visible wavelengths range

Reflectivities of light-absorptive coatings within visible w...

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conference on current developments in lens design and optical Systems engineering

作者： Moldosanov, KA Henneck, R Skrynnikov, AM Kashirin, VA Makarov, VP Kobtsov, GA Samsonov, MA Kim, LS Special Design Off OKB Aalam Bishkek 720021 Kyrgyzstan

ISBN: (纸本)0819437387

This paper concerns the light-absorptive coatings intended for reduction of stray sunlight in the satellite-borne optical instrumentation and particle-analyzing apparatus operating in open space under intensive solar illumination. Though the inner surfaces are the passive elements in optical instruments, nontheless the condition and reflectivity of their surfaces can have noticeable effect on the signal-to-noise ratio of their detectors. In order to reduce an influence of the stray light on sensitivity of devices, the reflectivities of inner surfaces are strived to keep minimum in those wavelengths ranges, where the detectors spectral responses are high. We measured reflectivities of several types of traditional Tight-absorptive coatings and also tested our own approach to development of low reflectivity materials. The reflectivities were measured in visible and near-infrared wavelengths ranges (400 to 927 nm), as well as at the hydrogen Lyman-alpha line (121.6 mn), the most intensive line of the solar UV radiation. Also, the values of the solar absorptance alpha (s) and the emissivity epsilon were measured. They made it possible to classify the investigated coatings with their respects to a possible use in converters of solar radiation into the heat. Conclusions are given on application of diverse coatings depending on the instrument's detector type, operational wavelengths range, and operating conditions.

关键词： stray light sunlight light-absorptive coating low reflectivity material optical instrumentation

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Effects of Substrate heating and Vacuum Annealing on optical and Electrical Properties of Alumina-Doped ZnO Films Deposited by DC Magnetron Sputtering

Effects of Substrate heating and Vacuum Annealing on Optical...

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conference on current developments in lens design and optical engineering XII/Advances in Thin Film Coatings VII

作者： Tang, Chien-Jen Wang, Chun-Yuan Jaing, Cheng-Chung Minghsin Univ Sci & Technol Dept Optoelect Syst Engn Hsinchu 304 Taiwan

ISBN: (纸本)9780819487384

Alumina-doped zinc oxide (AZO) films have wide range of applications in optical and optoelectronic devices. AZO films have advantage in high transparency, high stability to hydrogen plasma and low cost to alternative ITO film. AZO film was prepared by direct-current (DC) magnetron sputtering from ceramic ZnO:Al2O3 target. The AZO films were compared in two different conditions. The first is substrate heating process, in which AZO film was deposited by different substrate temperature, room temperature, 150 degrees C and 250 degrees C. The second is vacuum annealing process, in which AZO film with deposited at room temperature have been annealed at 250 degrees C and 450 degrees C in vacuum. The optical properties, electrical properties, grain size and surface structure properties of the films were studied by UV-VIS-NIR spectrophotometer, Hall effect measurement equipment, x-ray diffraction, and scanning electron microscopy. The resistivity, carrier mobility, carrier concentration, and grain size of AZO films were 1.92x10(-3) Omega-cm, 6.38 cm(2)/Vs, 5.08x10(20) #/cm(3), and 31.48 nm respectively, in vacuum annealing of 450 degrees C. The resistivity, carrier mobility, carrier concentration, and grain size of AZO films were 8.72x10(-4) Omega-cm, 6.32 cm(2)/Vs, 1.13x10(21) #/cm(3), and 31.56 nm, respectively, when substrate temperature was at 250 degrees C. Substrate heating process is better than vacuum annealed process for AZO film deposited by DC Magnetron Sputtering.

关键词： Alumina-Doped ZnO films DC magnetron sputtering vacuum annealed substrate heating process optical properties Electrical properties

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Scintillation bit error rate reduction for free space optical communications systems

Scintillation bit error rate reduction for free space optica...

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conference on current developments in lens design and optical engineering II

作者： Mayhew, LM Willebrand, H Kube, E LightPointe Commun Inc Boulder CO 80301 USA

ISBN: (纸本)0819441554

Although relatively unaffected by rain and snow, free space infrared laser optical communication systems are affected by fog and atmospheric turbulence. We have calculated the signal loss from scintillation to predict bit error rates by varying the amount of scintillation, the link distance, and system details. Increasing the number of transmitters and the effective area was predicted to improve scintillation in earlier work in this field.(1) We found that increasing both the number of transmitters and the effective receiver area greatly improved the signal loss caused by scintillation and thus, the bit error rate. For example, under high scintillation (Cn(2) = 10(-13) M,213), the four transmitter/receiver system at a link distance of 1 kin should experience a bit error rate of better than 10(-10) for a 4.0 dB loss. Under the same conditions, an identical system with only one transmitter and receiver should experience a bit error rate of 10(-1.5) (0.032 bits per second) for the same 4.0 dB loss. Increasing just the number of transmitters or the number of receivers improved the signal, but increasing both improved the signal even more than expected. In general, single beam systems should be limited to link distances less than about 600 m.

关键词： scintillation laser communications infrared bit error rate link budget

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Near-infrared imaging system for detecting small organic foreign substances in foods

Near-infrared imaging system for detecting small organic for...

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conference on current developments in lens design and optical engineering XIV

作者： Tashima, Hiroto Genta, Tsuneaki Ishii, Yuya Ishiyama, Takeshi Arai, Shinichi Fukuda, Mitsuo Toyohashi Univ Technol Dept Elect & Elect Engn Toyohashi Aichi 4418580 Japan

ISBN: (纸本)9780819496911

Contamination of foodstuffs with foreign substances is a serious problem because it often has negative effects on consumer health. However, detection of small organic substances in foods can be difficult because they are undetectable with traditional inspection apparatus. In this work, we developed new equipment that can detect small organic contaminant substances in food at high speed using a near-infrared (NIR) imaging technique. The absorption spectra of various foods were measured, and the spectra showed low absorbance at wavelengths from 600 nm to 1150 nm. Based on the observable wavelength range of a CMOS camera, which has a high dynamic range, superluminescent diodes (SLDs) with a wavelength of 830 nm were selected as light sources. We arranged 40 SLDs on a flat panel and placed a diffusion panel over them. As a result, uniformly distributed light with an intensity of 0.26 mW/cm(2) illuminated an area of 6.0 cm x 6.0 cm. Insects (3 mm wide) and hairs (0.1 mm in diameter) were embedded in stacked ham slices and in chocolate, with a total thickness of 5 mm in each case, and the transmission images were observed. Both insects and hairs were clearly observed as dark shadows with high contrast. We also compensated the images by using software developed in this study to eliminate low spatial frequency components in the images and improve the sharpness and contrast. As a result, the foreign substances were more clearly distinguished in the 5-mm-thick ham.

关键词： NIR imaging optical equipment food detection foreign substance safety spatial frequency filter

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Testing and design of a low-cost large scale solar simulator

Testing and design of a low-cost large scale solar simulator

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conference on current developments in lens design and optical engineering XII/Advances in Thin Film Coatings VII

作者： Meng, Qinglong Wang, Yuan Changan Univ Sch Environm Sci & Engn 12 Yanta Rd Xian 710054 Shaanxi Provinc Peoples R China Xi An Jiao Tong Univ Sch Energy & Power Engn Xian 710049 Shaanxi Provinc Peoples R China

ISBN: (纸本)9780819487384

To simulate solar radiation at the earth's surface, a new economical multiple-lamp solar simulator was designed. The solar simulator is comprised of 188 reflector sunlight dysprosium lamps whose light spectrum is very similar to air mass 1.5 (AM1.5) solar spectrum terrestrial standards. Lamps are configured in a hexagonal pattern with 15 columns of 12 or 13 lamps at a lamp-to-lamp spacing and column-to-column spacing of 295mm. Without altering the radiation spectral distribution, the average irradiance on target irradiated area can be adjusted over a wide range between 150 and 1100W/m(2) by means of the variation of lamps number or/and lamp-to-irradiated area distance. At the height of 2.0m the solar simulator provides 2mx1.5m irradiated area with over 1000 W/m(2). Measurement of irradiance indicates that the multiple-lamp simulator conforms to Class B of ASTM (American Society for Testing and Materials) Standard (ASTM E927-2005) in regard to spectrum match, irradiance uniformity and stability. To enlarge the effective irradiated area, two large mirror-like stainless steel plates was mounted on both of the long sides of the solar simulator. The radiation characteristics of simulator are improved and the optimized effectively irradiation surface is expanded up to 81.6%.

关键词： solar simulator irradiance nonuniformity temporal instability

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