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current developments in optical design and engineering V

作者： Abramov, Alexander P. Petrova, Maria V. Tolstoy, Michael N. Robb, Paul N. Sigler, Robert D. S.I. Vavilov State Optical Inst. St. Petersburg Russia

ISBN: (纸本)0819418994

The incorporation of abnormal dispersion liquids into an optical design can result in significant performance advantages. However, the large thermal coefficient of refractive index which is common to all liquids (dn/dT) can complicate the athermalization of these designs. One method is to use two different liquids to form both positive and negative liquid lens elements which balance each other thermally while maintaining color correction. The success of this approach is dependent on the proper selection of materials, and on a detailed knowledge of the wavelength dependence of the refractive index thermal coefficients. The thermal dependence of refractive index and dispersion in the visible spectral region for a number of liquids was investigated. A correlation between the refractive index thermal coefficient (dn/dT) and abnormal dispersion was found to exist in a majority of liquids. The optical property measurements were made at the Vavilov State optical Institute, St. Petersburg, Russia in collaboration with the Lockheed Palo Alto Research Laboratory, Palo Alto, California.

关键词： optical systems

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Commercial two- and three-element infrared wide-field-of-view 100% coldshielded inverse telephoto lenses

Commercial two- and three-element infrared wide-field-of-vie...

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current developments in optical design and engineering V

作者： Aldrich, Robert E. FLIR Systems Inc. Tualatin OR USA

ISBN: (纸本)0819418994

Infrared 100% coldshielded systems have a fixed and inaccessible aperture stop location, with a long back focal length. Often, the back focal length of a wide field of view infrared lens is longer than its elementary focal length, like a wide angle 35 mm SLR lens. The long back focal length prevents the use of a field flattener lens near the image in order to correct for field curvature and astigmatism. A field lens is usually a key ingredient in wide field of view lenses. Some have designed long and complicated reimagers to create a second image plane for a virtual field flattener lens. An inverse telephoto lens has a long back focal length and allows for an inaccessible aperture stop. The inverse telephoto lens has at least two groups, a negative group and a positive group. The negative group increases the marginal ray height to create a longer back focal length. The positive group brings the marginal ray to focus. Using a single high index and low dispersion aspheric positive element will correct for spherical aberration and reduce axial color and the Petzval sum. A single low index and high dispersion aspheric negative element will correct for coma, axial color and Petzval sum. A low Petzval sum minimizes field curvature and astigmatism. A wide angle 010% coldshielded inverse telephoto lens can be designed with just two elements. Occasionaly in wider field of view systems or larger image plane formats a second negative aspheric is necessary to correct for distortion. Thus creating a third element. Also a diffractive element is sometimes needed to correct lateral color. The diffractive can be added to one of the single point diamond turned aspheres without adding a fourth element. For wider angle applications, a three element inverse telephoto lens will suffice.

关键词： lenses

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EVALUATION OF CRITICAL design PARAMETERS OF AN ION PROJECTOR FOR 1-GBIT DRAM PRODUCTION

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MICROELECTRONIC engineering 1995年第1-4期27卷 323-326页

作者： BRUNGRE, WH LOSCHNER, H STENGL, G FALLMANN, W FINKELSTEIN, W MELNGAILIS, J Fraunhofer-Institut fu¨r Siliziumtechnologie D-14199 Berlin Germany IMS - Ion Microfabrication Systems GmbH Vienna Austria Technical University Vienna A-1040 Vienna Austria Advanced Lithography Group Columbia Maryland 21045USA University of Maryland College Park MD 20742-3511USA

The Advanced Lithography Group (ALG) a consortium of industry and university institutes in the US and Europe has the aim to produce an Ion projection lithography tool ALG-1000 for 0.18 mum geometry and below. The base of the machine is a new ion optical column developed by IMS, Vienna for exposing 20 mm x 20 mm fields at 3x reduction. The errors of the first two lenses (diverging lens and field lens) are fully compensated in 3rd order by an asymmetric Einzellens projecting an ion image of the stencil mask onto the wafer substrate with better than 2 mrad telecentricity. Remaining are errors of 5th order resulting in minimum calculated distortions of less than 30 nm. Space charge effects have been investigated with high transparency masks in two different ion projects. An indication for a space charge effect was observed in the case of the Alpha 5x system with a crossover energy of 7.5 keV if the beam current was raised above 10 nA. The experiments with the IPLM-02 system with a crossover at approximately 50 keV, more representative for the conditions in the ALG-1000 with a crossover energy of 200 keV, allowed the resolution of 0.18 mum lines and spaces even at high currents of up to 2 muA.

关键词： Ion beam lithography

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optical-PERFORMANCE OF AXIAL GRADIENT AND ASPHERIC SURFACE lensES - STUDY AND ANALYSIS 4

OPTICAL-PERFORMANCE OF AXIAL GRADIENT AND ASPHERIC SURFACE L...

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conference on current developments in optical design and optical engineering IV

作者： KASSIM, AM SHEALY, DL AL QUDS UNIV COLL SCI & TECHNOLDEPT PHYSJERUSALEMISRAEL

ISBN: (纸本)0819415871

Using the caustic merit function for plane waves incident upon a singlet lens, a comparison between the optical performance of the lens using an axial gradient index with spherical surfaces or aspheric surfaces with constant index material has been investigated. Results indicate that the use of an inhomogeneous medium for the lens material is more effective in the controlling aberrations than the use of aspheric surfaces for a similar lens.

关键词： GRIN lenses Electronic filtering Aspheric lenses lenses Ray tracing Geometrical optics Refractive index Spherical lenses lens design Gradient-index optics

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USE OF LIQUID-CRYSTAL SWITCH IN SINGLE-lens-REFLEX CAMERA 4

USE OF LIQUID-CRYSTAL SWITCH IN SINGLE-LENS-REFLEX CAMERA

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conference on current developments in optical design and optical engineering IV

作者： JUTAMULIA, S NIWA, H TOYODA, S KOWA CO LTD SAN JOSECA 95112

We propose the use of a liquid-crystal switch consisting of a liquid-crystal cell and a polarizing beam-splitter in a single-lens-reflex camera to replace a mechanical hinged-mirror. Since there is no vibration and no... 详细信息

ISBN: (纸本)0819415871

关键词： Liquid crystals

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lens design USING A MINIMUM NUMBER OF GLASSES 4

LENS DESIGN USING A MINIMUM NUMBER OF GLASSES

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conference on current developments in optical design and optical engineering IV

作者： ZHANG, SY SHANNON, RR UNIV ARIZONA CTR OPT SCITUCSONAZ 85721

ISBN: (纸本)0819415871

Due to increasing environmental limitations on the use of certain raw materials used to make optical glasses, there is now an economic desire to minimize the number of glasses used in lens design. This paper presents the results of a study to create a suggested universal catalogue that contains the minimum number of glasses needed to satisfy most possible lens designs. A nearly symmetric double Gauss lens is used in the glass selection process. As part of this study, the relationship between the error function and the number of glasses chosen is studied, and in addition, a glass range study is also carried out. Three different lens libraries were studied using the global optimization method and the most frequently chosen glasses were then compiled into the suggested universal glass catalogue. A suggested universal glass catalogue constructed from this study is presented.

关键词： optical GLASS lens design

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DERIVATION OF STRUCTURAL INFLUENCE COEFFICIENTS FOR LONG-FOCUS IMAGING optical-systems 4

DERIVATION OF STRUCTURAL INFLUENCE COEFFICIENTS FOR LONG-FOC...

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conference on current developments in optical design and optical engineering IV

作者： DEBRUIN, JC JOHNSON, DB TEXAS INSTRUMENTS INC CTR CONTROL SYST TECHNOLDALLASTX 75266

ISBN: (纸本)0819415871

The structural influence coefficients for an imaging optical system map the decenter and tilt motions of the system elements to changes in the direction and orientation of the line-of-sight and image. A methodology is presented to calculate the structural influence coefficients for the lenses of long-focus (near-infinity) imaging optical systems. Single-lens systems are considered first, with the method then extended to handle multiple elements. Use of an arbitrary structural reference frame is discussed, along with an algorithmic, recursive approach to numerical calculation of the structural influence coefficients. A complete derivation is presented at each step, and an overview of the geometric optical principles involved is provided for reference. The method described allows ready calculation of influence coefficients without tedious ray-trace perturbations or dedicated optical analysis software. This paper is a companion to a previous paper by the authors, in which the structural influence coefficients for plane-mirror systems are derived. The influence coefficient method of both papers is unique in its use of line-of-sight reference frames as an optical kinematic tool to track pointing direction and image orientation.

关键词： STRUCTURAL INFLUENCE COEFFICIENTS IMAGING optical systems optical KINEMATICS LINE-OF-SIGHT REFERENCE FRAMES GEOMETRIC OPTICS lens DECENTER STRUCTURAL VIBRATION MECHANICAL TOLERANCE

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ACHROMATIC ABERRATION CORRECTIONS WITH ONLY ONE GLASS 4

ACHROMATIC ABERRATION CORRECTIONS WITH ONLY ONE GLASS

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conference on current developments in optical design and optical engineering IV

作者： MALACARA, D MALACARA, Z CTR INVEST OPT AC 37000 LEONMEXICO

ISBN: (纸本)0819415871

It is well known and described in any geometrical optics textbook that the axial as well as the magnification chromatic aberration may be corrected in a system formed by a pair of thin lenses separated by a certain distance, using only one type of glass. However, it is not so well known that these aberrations may be also corrected in a single thick lens.

关键词： Chromatic aberrations lenses Glasses Geometrical optics Aberration correction optical design Refractive index

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optical-systems design FOR FOCAL-PLANE TESTING USING DIRECT WRITE SCENE GENERATION 4

OPTICAL-SYSTEMS DESIGN FOR FOCAL-PLANE TESTING USING DIRECT ...

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conference on current developments in optical design and optical engineering IV

作者： DOUB, CA CALSPAN CORP AEDC OPERATARNOLD AFBTN 37389

ISBN: (纸本)0819415871

Infrared Focal Plane Array (FPA) sensors are commonly tested using various means of scene generation. At the Arnold engineering Development Center a Direct Write Scene Generator (DWSG) is being developed. The DWSG projects the scene onto the focal plane array by scanning a rake of beams across the sensor. The rake consists of up to 256 synchronous beams generated by passing a single laser beam through an acousto-optic deflector (AOD). A complex radio frequency signal input into the AOD diffracts the laser beam into multiple beams. Each pixel of the focal plane is illuminated by one of the beams in the rake. The Direct Write Scene Generator is being designed to test a focal plane area as large as a 512 X 512 pixel array. Scan optics focus an expanded laser beam to a spot smaller than the focal plane pixel pitch over the entire test area. Several optical configurations and multiple AODs are needed to achieve the test requirements at various wavelengths. Some important considerations in the optical design are spot size, crosstalk, and background radiation.

关键词： Staring arrays lens design Acousto-optics Distortion Scanners Sensors optical design Beam steering Diagnostics Laser sources

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NEW-TYPE PSEUDORANDOM POSITION optical ENCODER WITH SUBMICROMETER RESOLUTION - design AND CHARACTERIZATION 4

NEW-TYPE PSEUDORANDOM POSITION OPTICAL ENCODER WITH SUBMICRO...

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conference on current developments in optical design and optical engineering IV

作者： DURANA, M MILES, R ROBERT, P SWISS FED INST TECHNOL INST METROLDEPT ELECT ENGNCH-1015 LAUSANNESWITZERLAND

ISBN: (纸本)0819415871

The characteristics of a new twin-track absolute position optical encoder are presented. One track containing a pseudorandom code and the second a periodic pattern are synchronously engraved on a glass slab. The optical reading head design composed of a LED, a gradient index lens and a linear CCD array, with simple intensity-based signal processing to read the code pattern is described in detail. This design is combined with a standard Moire method to enhance resolution. Performance enhancement of the optical reading head is studied in terms of track illumination versus code density, detector geometry versus the lens point-spread function (Airy disk);and reduction of extrinsic spatial noise by the application of thick films. Each parameter was considered in terms of the optimal field of view and depth of field of the system. © 1994 SPIE. All rights reserved.

关键词： ABSOLUTE POSITION ENCODERS PSEUDORANDOM CODES optical MEASUREMENTS INSTRUMENTATION

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