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检索条件"任意字段=Conference on Design for Manufacturability through Design-Process Integration IV"

共 310 条记录，以下是21-30 订阅

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Critical Defect Detection, Monitoring and Fix through process integration Engineering by Using D2DB Pattern Monitor Solution 13

Critical Defect Detection, Monitoring and Fix through Proces...

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conference on design-process-Technology Co-Optimization for manufacturability XIII

作者： Tian, Ming Zhang, Yu Guan, Tianpeng Leng, Jianghua Zhao, Baojun Yan, Lei Hu, Wei Vikram, Abhishek Chen, Guojie Wang, Hui Zhang, Gary Liao, Wenkui Shanghai Huali Microelect Corp 568 Gao Si RdZhang Jiang Hitech Pk Shanghai 201203 Peoples R China Anchor Semicond 668 East Beijing RdEast Bldg 19B Shanghai 200001 Peoples R China 3235 Kifer Rd Suite 200 Santa Clara CA 95051 USA

ISBN: (数字)9781510625723

ISBN: (纸本)9781510625716;9781510625723

Rigorous patterning control at critical wafer process steps of semiconductor fabrication is done to ensure integrity of the manufacturing process. At times, still with the entire existing process control infrastructure, we run into defect issues. Here we report an innovative methodology of Pattern Monitor that complements the existing approach and consistently detects critical defects on wafer that are hard to find using conventional wafer inspection tools. The unique integrated pattern centric approach puts this method apart from all the current inline tools. The Die-to-Database Pattern Monitor (D2DB-PM) solution has been applied to understand the evolution of pattern deformation through process integration engineering. A pattern centric engine is the key to this successful solution that is used to process large volumes of already existing Scanning Electron Microscope (SEM) images to perform Die-to-Database shape and critical dimension evaluation to detect deviations in the patterning behavior. This solution helped to resolve the limited Critical dimension (CD) measurement constraint that is otherwise associated with Critical Dimension Scanning Electron Microscope (CDSEM) measurement. In this paper we report the results from this innovative solution to detect process marginality and also verify the improved patterning behavior after the process fix is implemented.

关键词： Die-to-database Pattern Monitor After Develop Inspection (ADI) After Etch Inspection (AEI) SEM Review CDSEM pattern centric pattern monitor

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design of semiconductor laser multi-point beam based on laser welding of galvanized sheet 4

Design of semiconductor laser multi-point beam based on lase...

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conference on Advanced Laser processing and Manufacturing iv

作者： Song, Yuyan Li, Xiang Hu, Cong Xia, Ran Zou, Ao Tang, Xiahui Huazhong Univ Sci & Technol Sch Opt & Elect Informat Wuhan Peoples R China

ISBN: (纸本)9781510639089

The Galvanized steel sheet is used as the automotive body material, and the evaporation of zinc into the weld seam will cause welding defects during the laser welding process. The multi-point laser beam has great development potential in automobile industry, because it can effectively reduce the integration of the galvanized layer into the weld seam during welding. In this paper, a panda-shaped three-point beam (panda beam) is proposed to replace the original single beam used in welding and three methods to realize the panda beam have been discussed. The beam splitting of the diffraction grating is performed, and the three, five and four beam-splitting ratio Daman gratings are obtained but with relatively high energy loss. Additionally, based on the theory of grating diffraction, a panda beam has been obtained by splitting the 4kW incident laser through the Bragg grating. The single front beam radius is 0.6mm with a power of 1.1261kW, and the distance between the two front beams is 3.8mm. The radius of the main beam is 1mm with a power of 1.7168kW, and the distance from the front beam to the main beam is 9.7mm. Lastly, based on the beam splitting theory of geometric optics, the multi-point beam and the panda beam are realized by the ridge reflector with an energy loss of 14.09%, which shows the great advantage of laser beam splitter compared with multi-light source structure in practical application. When welding with the panda beam, two functions of zinc coating and solder melting are carried out respectively, which can avoid zinc vapor entering the molten pool and improve the welding quality.

关键词： Multi-point beam Laser beam splitting Laser welding of galvanized sheet Daman grating Bragg grating Reflective beam splitting

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Concurrent engineering of a next-generation freeform telescope: mechanical design and manufacture 4

Concurrent engineering of a next-generation freeform telesco...

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conference on Advanced Optics for Imaging Applications - UV through LWIR iv

作者： Horvath, Nicholas W. Davies, Matthew A. Univ North Carolina Charlotte Dept Mech Engn 9201 Univ City BlvdDuke Centennial Hall Charlotte NC 28223 USA

ISBN: (纸本)9781510626621

This manuscript is the second of three submissions to describe the concurrent engineering of a 250 mm aperture class three mirror anastigmatic (TMA) visible spectrum imager. The system is an off axis, F/3, 3 degree FOV imager with all freeform mirrors. The major drivers for the mechanical design were low mass, stiffness, robustness, thermal stability, and scalablility. The system is designed using silicon carbide (SiC) for the optics and housing to meet these requirements. The scope of this manuscript is limited to aluminum prototype optics, which are identical to the SiC components. Here, we describe the mechanical design process to light weight the optics while maintaining adequate stiffness. Also described is the pairing of the optic with an optical cell for both the manufacture and system integration using kinematic mounts. The mount design pairs with a matched kinematic mount for off machine figure metrology. This allows for an iterative figure convergence process. A design for manufacture and metrology approach was used to ensure the system elements can be both manufactured and measured by providing feedback to the optical designers.

关键词： Freeform optics Telescope Precision engineering Diamond turning design for manufacture and assembly design for metrology Silicon carbide

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An Exploration of design Options for Integrated Residential PV-ESS 45

An Exploration of Design Options for Integrated Residential ...

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45th Annual conference of the IEEE Industrial Electronics Society (IECON)

作者： Panagiotou, Konstantina Klumpner, Christian Sumner, Mark Georghiou, George E. Univ Cyprus FOSS Res Ctr Sustainable Energy Elect & Comp Engn PV Technol Lab Nicosia Cyprus Univ Nottingham Power Elect Machines & Control Res Grp Elect & Elect Engn Nottingham England

ISBN: (纸本)9781728148786

The behind-the-meter integration of the distributed energy sources and the energy storage systems (ESSs) presents one of the key solutions for the 21st century energy and power challenges. A comprehensive design and development procedure, which integrates the energy management strategy, the power flow control and the sizing techniques, into the system design can provide valuable insights and guidelines for the system operation and implementation. Most of the analyses and tools already presented in the literature do not consider a suitable design and development procedure for ESSs. In this paper, a novel design and development procedure suitable for integrated residential ESSs is presented. The procedure is composed of four stages: (i) Imports Parameters, (ii) Inputs processing, (iii) process Simulation and (iv) design and Sizing Guide. The stages and the capabilities of the proposed design and development procedure are demonstrated through developed design algorithms based on the proposed procedure, looking at a real energy system in the UK.

关键词： integration of ESSs design and development procedure design of integrated residential PV-ESSs

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Integrating biocybernetic adaptation in virtual reality training concentration and calmness in target shooting 1

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3rd International conference on Physiological Computing Systems, PhyCS 2016, 4th International conference on Physiological Computing Systems, PhyCS 2017 and 5th International conference on Physiological Computing Systems, PhyCS 2018

作者： Muñoz, John E. Pope, Alan T. Velez, Luis E. System Design and Engineering Department University of Waterloo Waterloo Canada NASA Langley Research Center Hampton United States Department of Computer and Systems Sciences at Stockholm University Stockholm Sweden

ISBN: (数字)9783030279509

ISBN: (纸本)9783030279493

Training military readiness can significantly reduce potentially avoidable mistakes in real life situations. Virtual Reality (VR) has been widely used to provide a controlled and immersive medium for training both trainees’ physical and cognitive skills. Despite the tremendous advances in VR-based training for military personnel, the attention has been mainly paid on improving simulation’s realism through hardware tools and enhancing graphics and data input paradigms, rather than augmenting the human-computer interaction. Biocybernetic adaptation is a technique from the physiological computing field that allows creating real-time modulations based on detected human states indicated by psychophysiological responses. Although very sophisticated, the creation of biocybernetic loops has been mainly confined to research laboratories and very complex and invasive setups. Moreover, the combination of VR applications and biocybernetic adaptation has rarely been pursued beyond exploratory experiments. The Biocyber Physical System (BioPhyS) for military training in VR constitutes the first fully integrated, distributed and replicable VR simulator that is biocybernetically modulated. BioPhyS uses neurophysiological and cardiovascular measurements recorded from wearable sensors to detect calmness and cognitive readiness states to create dynamic changes in a VR target shooting simulator. The design process, psychophysiological modeling, and biocybernetic loop technology integration are shown, describing a pilot study carried out with a group of non-military participants. We highlight the software elements used for the VR-biocybernetic integration, and the psychophysiological model created for the real-time system as well as the timeline used to develop the functional prototype. We conclude this paper with a set of guidelines for developing meaningful physiological adaptations in VR applications. © Springer Nature Switzerland AG 2019.

关键词： Virtual reality

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An Exploration of design Options for Integrated Residential PV-ESS

An Exploration of Design Options for Integrated Residential ...

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Annual conference of the IEEE Industrial Electronics Society

作者： Konstantina Panagiotou George E. Georghiou Christian Klumpner Mark Sumner PV Technology Laboratory FOSS Research Centre for Sustainable Energy Electrical and Computer Engineering University of Cyprus Nicosia Cyprus Electrical and Electronic Engineering Power Electronics Machines and Control Research Group University of Nottingham Nottingham UK

关键词： Batteries Power grids Pricing Energy management Load flow control System analysis and design process control

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design for qualification: A process for developing additive manufacturing components for critical systems 13

Design for qualification: A process for developing additive ...

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13th Biennial Norddesign conference, Norddesign 2018

作者： Dordlofva, Christo Törlind, Peter Product Innovation Luleå University of Technology Sweden

ISBN: (纸本)9789176851852

Additive Manufacturing (AM), and more specifically Powder Bed Fusion, offers design freedom, functional integration, and cost efficient manufacturing of customised products. These design and manufacturing capabilities are relevant for the space industry with its characteristic low production volumes, high-performance products, pursuit for low weight, and a recent need for cost reduction due to increased market competition. At the same time, the space industry is characterised by products in harsh environments without room for failure, nor the possibility to repair broken parts in service. Product qualification is therefore an important part of the product development process in the space industry, with the purpose of showing that the product design and its manufacturing process fulfils the technical requirements. Qualification is a challenge for AM that currently exhibits a sensitivity in part mechanical properties based on geometry and build orientation, as well as a variability in process outcome. As with other manufacturing processes, design engineers have to take process capabilities into account during product design to render a manufacturable product (design for AM), but also to achieve the right quality and function (design for Excellence). Apart from manufacturability, product qualification has to be considered early in the product development process of AM parts. Given the lack of understanding of AM process characteristics, design engineers are in need of design supports to facilitate the qualification of critical AM parts. This paper presents a design for Qualification process model for development of AM components in critical space systems. The model is proposed based on research performed in the space industry with several case companies. © Proceedings of Norddesign: design in the Era of Digitalization, Norddesign 2018. All rights reserved.

关键词： Space applications

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40nm Ultra-Low Leakage (40ULL) SRAM - Challenges and Solutions 14

40nm Ultra-Low Leakage (40ULL) SRAM - Challenges and Solutio...

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14th IEEE International conference on Solid-State and Integrated Circuit Technology (ICSICT)

作者： Liu, Beiping Balasubramanian, Sriram Balan, Hari Luo, Zhihong Neo, Wah Peng Khua, Kevin Chan, Tze Ho Globalfoundries Singapore Pte Ltd Singapore 738406 Singapore

ISBN: (纸本)9781538644416

We present an overview of the 40nm Ultra-Low Leakage (40ULL) SRAMs, aimed at Internet-of-Things (IoT) applications with stringent leakage requirements. We demonstrate SRAM standby leakage (Isb) reduction to similar to 1.5pA/bit with floating bitlines at 1, iv and a retention leakage 0.4pA/bit achieved through a combination of process technology and design optimizations. The 4OULL technology is qualified with 2000 hours of HTOL stressing with excellent post-stress Vmin characteristics.

关键词： Random access memory Logic gates Optimization Degradation Very large scale integration Transistors Timing

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Iterative Prototyping Methodology for the Development of Innovative and Dependable Complex Embedded Systems through SPC&KPI Techniques 19th

Iterative Prototyping Methodology for the Development of Inn...

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19th International conference on Product-Focused Software process Improvement (PROFES)

作者： Lopez, Patricia Mabe, Jon Etxeberria, Leire Gorritxategi, Eneko IK4 TEKNIKER Eibar 20600 Spain Mondragon Unibertsitatea Arrasate Mondragon 20500 Spain Atten2 Adv Monitoring Technol Eibar 20600 Spain

ISBN: (纸本)9783030036737;9783030036720

In recent years, the use of complex embedded systems in critical domains has become increasingly widespread, driven by the emergence of Industry 4.0, Smart Grid or Smart Health Care paradigms. These latest trends require the development of smart, innovative and dependable complex systems, that combine multiple engineering disciplines, to achieve their challenging goals. In order to assist developers, researchers and designers in this development process, this paper presents a iterative prototyping methodology focused on facing challenges derived from: (i) uncertainties and risks entailed while generating new products based on novel technologies, (ii) unforeseeable interactions intrinsic to system complexity and heterogeneity (e.g.: software, hardware, chemistry, photonics, mechanics, etc.), (iii) operation dependability and regulatory requirements, and (iv) increasing importance of reducing time to market and project cost. The proposed methodology provides a complete solution based on New Product Development processes, dependability and safety standards, and Statistical process Control (SPC) and Key Performance Indicator (KPI) techniques. Special attention is paid to the adaptation and integration of SPC and KPI techniques in the development process, as a mechanism to improve the system's functionality and dependability. Finally, the development of an innovative real-time photonic sensor for analysing lubricant quality in industrial critical applications is presented as a case study.

关键词： Complex systems Embedded software design methodology Product development Research and development Dependability management

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design and pitch scaling for affordable node transition and EUV insertion scenario 11

Design and pitch scaling for affordable node transition and ...

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conference on design-process-Technology Co-Optimization for manufacturability XI

作者： Kim, Ryoung-han Ryckaert, Julien Raghavan, Praveen Sherazi, Yasser Debacker, Peter Trivkovic, Darko Gillijns, Werner Tan, Ling Ee Drissi, Youssef Blanco, Victor Bekaert, Joost Mao, Ming Lariviere, Stephane McIntyre, Greg IMEC VZW Kapeldreef 75 B-3001 Leuven Belgium

ISBN: (纸本)9781510607477;9781510607484

imec's DTCO and EUV achievement toward imec 7nm (iN7) technology node which is industry 5nm node equivalent is reported with a focus on cost and scaling. Patterning-aware design methodology supports both iArF multiple patterning and EUV under one compliant design rule. FinFET device with contacted poly pitch of 42nm and metal pitch of 32nm with 7.5-track, 6.5-track, and 6-track standard cell library are explored. Scaling boosters are used to provide additional scaling and die cost benefit while lessening pitch shrink burden, and it makes EUV insertion more affordable. EUV pattern fidelity is optimized through OPC, SMO, M3D, mask sizing and SRAF. processed wafers were characterized and edge-placement-error (EPE) variability is validated for EUV insertion. Scale-ability and cost of ownership of EUV patterning in aligned with iN7 standard cell design, integration and patterning specification are discussed.

关键词： DTCO Scaling booster EUV SAQP standard cell cost of ownership OPC

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