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检索条件"任意字段=Conference on Photon Processing in Microelectronics and Photonics"

共 116 条记录，以下是81-90 订阅

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Optical waveguide fabrication inside transparent materials by use of plasma channeling induced by tailored femtosecond laser

Optical waveguide fabrication inside transparent materials b...

引用

conference on photon processing in microelectronics and photonics II

作者： Kamata, M Ohta, K Obara, M Sekita, H Keio Univ Dept Elect & Elect Engn Fac Sci & Technol Kohoku Ku Yokohama Kanagawa 2238522 Japan

ISBN: (纸本)0819447773

With a loosely focused femtosecond laser, refractive index change is induced in silica glass without any scanning process. By decrease numerical aperture of the incident laser, the induction of irregular structure can be avoided such as clacks and spatial splitting of the induced refractive index change region. We demonstrate controlling of the refractive index change by optimizing the numerical aperture and input energy and input pulsewidth and laser shot number. A new method of fabrication of photonic devices in silica glass is proposed.

关键词： Refractive index Waveguides Femtosecond phenomena Plasma Silica Laser irradiation Pulsed laser operation Glasses photonic devices Laser processing

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Modeling electrical characteristics of laser tuned silicon microdevices

Modeling electrical characteristics of laser tuned silicon m...

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conference on photon processing in microelectronics and photonics II

作者： Meunier, M Ducharme, M Bernier, JS Ecole Polytech Laser Proc Lab Montreal PQ H3C 3A7 Canada

ISBN: (纸本)0819447773

Highly accurate resistances can be made by iteratively laser inducing local diffusion of dopants from the drain and source of a gateless field effect transistor into its channel, thereby forming an electrical link between two adjacent p-n junction diodes. These laser tuned microdevices have been electrically characterized and their current-voltage (I-V) behaviors are linear at low voltages and sublinear at higher voltages where carrier mobility is affected by the,presence of high fields. Considering that the microdevice is a one dimensional trap less n+ nu n+ structure, we have developed a theoretical current-voltage equation that satisfies these experimental results.

关键词： laser trimming laser tuned microdevices laser induced diffusible resistance microelectronics highly accurate resistance

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Porous nanostructured layers on germanium produced by Laser optical breakdown processing

Porous nanostructured layers on germanium produced by Laser ...

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conference on photon processing in microelectronics and photonics II

作者： Kabashin, AV Marien, VGP Yang, DQ Magny, F Meunier, M Ecole Polytech Laser Proc Lab Montreal PQ H3C 3A7 Canada

ISBN: (纸本)0819447773

Germanium wafer surface is modified by a technique of CO2-laser induced air breakdown processing, which was recently introduced and used to produce photoluminescent Si-based nanostructured layers. Structural and optical properties of the Ge-based layers, formed under the irradiation spot as a result of the processing, are characterized by different techniques (SEM, XPS, FTIR, XRD, and PL). It has been found that the layers present a porous structure, containing nanoscale holes, and consist of Ge nanocrystals embedded into GeO2 matrices. They exhibited strong photoluminescence (PL) in the green range (2.2 eV), which was attributed to defects in GeO2 matrix due to the presence of Ge-O modes with some OH vibration in the FTIR spectra. The layers are of importance for local patterning of nanostructures on semiconductors.

关键词： air optical breakdown nanostructured Ge visible photoluminescence laser-assisted patterning

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Femtosecond laser interferometric processing of Nd:GGG planar optical waveguide

Femtosecond laser interferometric processing of Nd:GGG plana...

引用

conference on photon processing in microelectronics and photonics II

作者： Oi, K Obara, M Sumiyoshi, T Keio Univ Fac Sci & Technol Dept Elect & Elect Engn Kohoku Ku Yokohama Kanagawa 2138522 Japan

ISBN: (纸本)0819447773

Surface relief type gratings for input laser coupling were fabricated on the PLD deposited 2 at. % Nd:GGG thin film optical waveguide by femtosecond laser interferometric processing. The. morphology and coupling efficiency were experimentally evaluated. A clear periodic structure with a fringe period of similar to 800 nm and height of similar to 100 nm was obtained for a surface relief type grating induced on the target surface with a fluence of 0.92 Jcm(-2). The coupling efficiency of an 808 nm-centered laser diode pumping light into the 1.35 mum thick film was measured as a function of the incident angle. Three coupling peaks were observed at 57degrees, 65degrees and 77degrees, each being the coupling to the TE0, TE1 and TE2 modes respectively. Each peak had a large FWHM and a maximum coupling efficiency was 3 %.

关键词： interferometric ablation femtosecond laser processing grating coupler waveguide laser neodymium doped gallium gadolinium garnet

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Laser metallization for microelectronics and bio-applications

Laser metallization for microelectronics and bio-application...

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conference on photon processing in microelectronics and photonics II

作者： Laude, LD Kolev, K Dicara, C Dupas-Bruzek, C Univ Mons B-7000 Mons Belgium

ISBN: (纸本)0819447773

Excimer lasers were demonstrated to be effective tools in i) engraving ceramics And polymers, ii) changing irreversibly the surface chemistry of the irradiated material, and iii) restricting these effects to specific areas of interest. In so doing, excimer laser irradiation does open new routes to functionnalizing the surface of such diverse and difficult materials, allowing them to be utilized in given applications. In this paper, it is demonstrated how the above three potentialities of excimer laser surface irradiation may be put into practice in producing application-specific metallic tracks onto either sintered ceramics or polymeric materials. To this end, the accent is deliberately put here on the photochemical aspect of this irradiation process. The latter is responsible for modifying the-surface stoichiometry and/or structure of irradiated ceramics and silicone rubbers and also, of some of the solid additives which combine to polymers to form so-called thermoplastics. An important consequence of this changing surface chemistry resides in the possibility for decorating the processed surfaces with metal via an electro less technique, thus establishing the ground for a novel metallization process that is presented and examplified.

关键词： excimer laser sintered ceramics polymeric composites metallization

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Application of melt ejection criterion in simulation of micro-machining with laser

Application of melt ejection criterion in simulation of micr...

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conference on photon processing in microelectronics and photonics II

作者： Semak, VV Schriempf, JT Knorovsky, GA MacCallum, DO Penn State Univ Ctr Electroopt ARL Kittanning PA 16201 USA

ISBN: (纸本)0819447773

A theoretical criterion defining the threshold pulse energy and beam intensity required for melt ejection is proposed. The results of numerical simulation present dependencies of the threshold pulse energy and beam intensity as functions of laser pulse duration and beam radius. The experimental verification of the proposed criterion is described and the comparison of theoretical predictions and measurements is presented. The criterion is applied for simulation of laser drilling metal foil with thickness in the range 25 mum - 125 mum using a laser beam with 12 mum beam radius and pulse durations 10 ns and 100 ns. The computational results are used to interpret the results of an experimental study of laser drilling of 125 mum aluminum foil using a single mode beam of a XeCl laser performed at the Nederlands Centrum voor Laser Research (NCLR) and the University of Twente. Additional results on Nd:YAG spot welds in pure Ni are also presented.

关键词： laser materials processing laser welding laser drilling modeling simulation

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Sub-surface 3d structures by laser-induced modification of the optical properties of transparent materials

Sub-surface 3d structures by laser-induced modification of t...

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conference on photon processing in microelectronics and photonics II

作者： Ashkenasi, D Hoffmann, HJ Krause, D Müller, G Laser & Med Technol GmbH Div Appl Laser Technol Berlin Germany

ISBN: (纸本)0819447773

A new field in laser processing is opened by this method of modifying the optical properties, i.e. the refractive, index, absorption- and scattering-coefficient, inside the material. Focusing ultra. short laser pulses inside the transparent media allows to control and modify their optical properties. This is referred to as nik-engineering(TM), relating the experimental technique to changes of the complex refractive index (n + ik). Three dimensional patterns of the (n + ik) modifications can be achieved in the subsurface region even on a microscopic scale. New results in nik-engineering obtained in our application laboratory are presented using different optical materials. The results in laser nik-engineering. of photo-chromic glass using ultra short laser pulses at a wavelength of 800 nm are presented to the best of our knowledge for the first time. We discuss the results and the possibilities of nik-engineering and consider the technological relevance with respect to decorative work, micro-tagging, and other functional-structures.

关键词： laser processing nik-engineering((TM)) sub-surface modification damage threshold ultra short laser pulses photo-chromic glass

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Femtosecond laser ablation processing of x-cut LiNbO₃ substrates for optical communication devices

Femtosecond laser ablation processing of x-cut LiNbO<sub>3</...

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conference on photon processing in microelectronics and photonics II

作者： Kitano, R Ozono, K Obara, M Tsuda, H Keio Univ Kohoku Ku Yokohama Kanagawa 2238522 Japan

ISBN: (纸本)0819447773

We have studied femtosecond laser ablation characteristics of LiNbO3 for the first time. LiNbO3 is ferroelectric material with large optical nonlinearity and Pockels effect. The femtosecond laser ablation is very useful to fabricate various optical devices including the optical modulator and the tunable optical filter for optical communication systems because the thermal damage around the irradiated area is small due to the short pulse width, and the sub-wavelength structures may be formed by the multi-photon excitation. In our experiments, the femtosecond Ti:Sapphire laser system (Energy 0.14 mJ/pulse, Wavelength 800 nm, Pulse duration 60 fs, Repetition rate 1 kHz) based on the chirped-pulse amplification (CPA) technique was used. The aperture with a diameter of 5 nun was imaged onto the LiNbO3 surface by the objective lens in the air. We observed ablation holes by the scanning electron microscope and the profilometer. We have found no damage around the holes and the clear boundary between ablated area and non-ablated area was observed. Those features are very useful for precise material processing. The bottom face of the holes was relatively flat. The etching rate was 0.93 micrometer/pulse and proportional to the number of the laser pulse. The results showed that the femtosecond laser ablation is an innovative tool for manufacturing LiNbO3-based optical devices.

关键词： LiNbO3 femtosecond laser ablation processing optical waveguide optical communication

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Laser beam soldering - An attractive alternative to conventional soldering technologies

Laser beam soldering - An attractive alternative to conventi...

引用

conference on photon processing in microelectronics and photonics II

作者： Bosse, L Koglin, A Olowinsky, A Kolauch, V Nover, M Fraunhofer Inst Lasertech ILT D-52074 Aachen Germany

ISBN: (纸本)0819447773

Laser beam soldering (LBS) is a non-standard manufacturing process for electronic packaging and interconnection technology today. Due to the actual trend towards complex and cost intensive products, LBS gains more attention for certain applications in this field. For mass production in automotive applications a fully automated and temperature controlled LBS process was developed. The achieved results are discussed with respect to quality, reliability and process efficiency and compared to established micro flame (hydrogen) soldering technology. The development of the LBS process is presented. The process window is optimized using High Speed Video Imaging. Temperature signals are logged by means of pyrometry. The processed parts are evaluated with metallographical assessment of solder joint quality. Especially cross sections reveal the fine grained structure and the shape of the meniscus of the solder joints. The reliability is proven using shear strength tests and thermally induced strain cycles. Conclusively, LBS is a stable, reproducible process for applications requiring controlled and locally restricted heat input. The thermal and mechanical stress is reduced in comparison to conventional techniques.

关键词： Lead Mirrors Signal detection Sensors Signal processing Aluminum Laser welding Reliability Hybrid circuits Ceramics

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Autonomous production cell for μm- and nm-processing

Autonomous production cell for μm- and nm-processing

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conference on photon processing in microelectronics and photonics II

作者： Kreutz, EW Böske, L Kaierle, S Mann, S Ortmann, J Willach, J Rhein Westfal TH Aachen Klinikum Lehrstuhl Lasertech D-52074 Aachen Germany

ISBN: (纸本)0819447773

Shorter life time cycles of products, increasing workpiece variety and declining lot sizes demand for a closed processing chain which enables the economic production of variable products in the future. A new type of manufacturing concept for the production of the 21(st) century is lined out by the design of an "Autonomous Production Cell". Applied to and designed for manufacturing with laser radiation this concept shows completely new ways in comparison to former manufacturing procedures. The manufacturing processes in the Autonomous Production Cell start with a production oriented design and planning of the manufacturing procedure is including sensor controlled processing of the workpieces with integrated quality management. The quality management detects failures in the manufacturing, procedure and allows back-coupling to any preceding step by means of a multistage cascaded production controller. In comparison to former concepts the user is at all times integrated into the manufacturing procedure. The user can add his own competence and creativity. At the same time he is being relieved by routine work and gets adequate help by the system in corresponding situations. The design of the components of the Autonomous Production Cell (design and planning tools, networking of sensors and actuators, user interface, etc.) has been performed as general as possible. This offers the possibility to transfer this. concept with countable efforts to all the manufacturing with laser radiation such as welding, cutting, surface treatment, freeforming, rapid prototyping, etc.

关键词： laser radiation manufacturing processing control failure analysis quality assurance

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