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检索条件"任意字段=Conference on Photon Processing in Microelectronics and Photonics II"

共 185 条记录，以下是1-10 订阅

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Proceedings of SPIE: photon processing in microelectronics and photonics ii

Proceedings of SPIE: Photon Processing in Microelectronics a...

引用

PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: photon processing in microelectronics and photonics ii

This Volume 4977 of the conference proceedings contains 73 papers. Topics discussed include laser applications in microelectronics and optoelectronic manufacturing, laser microengineering, femtosecond laser processing, laser nanoengineering, pulsed laser deposition, laser engineering photonic structures, laser direct write, microstructuring, laser engineered semiconductor structures, laser joining, welding, drilling and cutting, structuring and synthesis and photonics of nanoscale materials.

关键词： Optoelectronic devices

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Opportunities and challenges for laser technology in microelectronics and photonics

Opportunities and challenges for laser technology in microel...

引用

conference on photon processing in microelectronics and photonics ii

作者： Hoving, W CFT Philips Ctr Ind Technol NL-5600 MD Eindhoven Netherlands

ISBN: (纸本)0819447773

Industrial manufacturing with the aid of laser technology has found many applications in the microelectronics industry during the last three decades. At Philips the main application fields are laser spot welding and marking. Several novel fields are strongly coming up due to the high demands in the microelectronics and (flat) display industry that cannot be met with conventional technologies. In this paper we give an overview of the present status of laser technology in electronics manufacturing and of innovative developments for new applications in microelectronics and photonics.

关键词： laser materials processing micro-spot welding spike-welding adjustment separation cleavage laser mass transfer process control

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Laser processing of photonic & micro-electronic components using multiple visible and UV wavelength source

Laser processing of photonic & micro-electronic components u...

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conference on photon processing in microelectronics and photonics ii

作者： Illy, E Rutterford, G Knowles, MRH Oxford Lasers Ltd Abingdon OX14 3YR Oxon England

Laser processing using a multiple visible and UV wavelength copper laser source is presented with particular emphasis on photonic and microelectronic applications. Visible micromachining of ceramics and diamond are di... 详细信息

ISBN: (纸本)0819447773

关键词： laser micromachining copper vapor laser microelectonics fibre Bragg gratings dicing

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Laser micromachining in the microelectronics industry: Emerging applications

Laser micromachining in the microelectronics industry: Emerg...

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conference on photon processing in microelectronics and photonics ii

作者： Subrahmanyan, PK Electro Sci Ind Inc Portland OR 97007 USA

ISBN: (纸本)0819447773

Emerging applications in the microelectronics industry impose special manufacturing requirements that are not well addressed by conventional manufacturing techniques. On the other hand, advances in laser technology, optics and beam steering combined with a better understanding of laser-material interaction make laser micromachining a viable, attractive, cost-effective and in some cases enabling technology to support these applications. This paper reviews some of the emerging applications in the microelectronics industry that are well served by laser micromachining and discusses the advancements in lasers, optics and beam steering that enable cost effective laser micromachining. It also discusses some open issues that are the subject of current and future research.

关键词： lasers micromachining microelectronics

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Proceedings of photon processing in microelectronics and photonics ii Held in San Jose, California on January 27-30, 2003

Proceedings of Photon Processing in Microelectronics and Pho...

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作者： Fieret, Jim Sugioka, Koji Pique, Alberto Herman, Peter R.

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Modeling electrical characteristics of laser tuned silicon microdevices

Modeling electrical characteristics of laser tuned silicon m...

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conference on photon processing in microelectronics and photonics ii

作者： Meunier, M Ducharme, M Bernier, JS Ecole Polytech Laser Proc Lab Montreal PQ H3C 3A7 Canada

ISBN: (纸本)0819447773

Highly accurate resistances can be made by iteratively laser inducing local diffusion of dopants from the drain and source of a gateless field effect transistor into its channel, thereby forming an electrical link between two adjacent p-n junction diodes. These laser tuned microdevices have been electrically characterized and their current-voltage (I-V) behaviors are linear at low voltages and sublinear at higher voltages where carrier mobility is affected by the,presence of high fields. Considering that the microdevice is a one dimensional trap less n+ nu n+ structure, we have developed a theoretical current-voltage equation that satisfies these experimental results.

关键词： laser trimming laser tuned microdevices laser induced diffusible resistance microelectronics highly accurate resistance

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Optical waveguide fabrication inside transparent materials by use of plasma channeling induced by tailored femtosecond laser

Optical waveguide fabrication inside transparent materials b...

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conference on photon processing in microelectronics and photonics ii

作者： Kamata, M Ohta, K Obara, M Sekita, H Keio Univ Dept Elect & Elect Engn Fac Sci & Technol Kohoku Ku Yokohama Kanagawa 2238522 Japan

ISBN: (纸本)0819447773

With a loosely focused femtosecond laser, refractive index change is induced in silica glass without any scanning process. By decrease numerical aperture of the incident laser, the induction of irregular structure can be avoided such as clacks and spatial splitting of the induced refractive index change region. We demonstrate controlling of the refractive index change by optimizing the numerical aperture and input energy and input pulsewidth and laser shot number. A new method of fabrication of photonic devices in silica glass is proposed.

关键词： Refractive index Waveguides Femtosecond phenomena Plasma Silica Laser irradiation Pulsed laser operation Glasses photonic devices Laser processing

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Laser processing of ceramic and crystalline wafer substrates for microelectronic applications

Laser processing of ceramic and crystalline wafer substrates...

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conference on photon processing in microelectronics and photonics ii

作者： Ashkenasi, D Binder, A Jaber, H Kern, H Müller, N Ziegert, A Laser & Med Technol Berlin GmbH Dept Appl Laser Technol Berlin Germany

ISBN: (纸本)0819447773

Ceramic and crystalline wafer substrates are widely used in microelectronics. The individual choice is based on their thermal, optical and mechanical properties. For a variety of applications high quality laser micro processing of these materials, i.e. the generation of blind and through holes, grooves and even complex three dimensional micro structures, is gaining in importance. The department of applied laser technologies of the LMTB GmbH has conducted extensive studies on the versatility of q-switch Nd:YAG laser systems for the micro structuring of ceramic and crystalline wafer substrates that differ strongly in their optical and mechanical properties, such as Al2O3, AlN, sapphire, Si and SiC. This paper discusses the laser material micro machining results in respect to the laser parameters used to optimize the micro processing quality and speed for the different materials.

关键词： laser material micro machining (LM3) wafer substrates semi-conductors ceramics transparent dielectrics

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Porous nanostructured layers on germanium produced by Laser optical breakdown processing

Porous nanostructured layers on germanium produced by Laser ...

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conference on photon processing in microelectronics and photonics ii

作者： Kabashin, AV Marien, VGP Yang, DQ Magny, F Meunier, M Ecole Polytech Laser Proc Lab Montreal PQ H3C 3A7 Canada

ISBN: (纸本)0819447773

Germanium wafer surface is modified by a technique of CO2-laser induced air breakdown processing, which was recently introduced and used to produce photoluminescent Si-based nanostructured layers. Structural and optical properties of the Ge-based layers, formed under the irradiation spot as a result of the processing, are characterized by different techniques (SEM, XPS, FTIR, XRD, and PL). It has been found that the layers present a porous structure, containing nanoscale holes, and consist of Ge nanocrystals embedded into GeO2 matrices. They exhibited strong photoluminescence (PL) in the green range (2.2 eV), which was attributed to defects in GeO2 matrix due to the presence of Ge-O modes with some OH vibration in the FTIR spectra. The layers are of importance for local patterning of nanostructures on semiconductors.

关键词： air optical breakdown nanostructured Ge visible photoluminescence laser-assisted patterning

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Laser metallization for microelectronics and bio-applications

Laser metallization for microelectronics and bio-application...

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conference on photon processing in microelectronics and photonics ii

作者： Laude, LD Kolev, K Dicara, C Dupas-Bruzek, C Univ Mons B-7000 Mons Belgium

ISBN: (纸本)0819447773

Excimer lasers were demonstrated to be effective tools in i) engraving ceramics And polymers, ii) changing irreversibly the surface chemistry of the irradiated material, and iii) restricting these effects to specific areas of interest. In so doing, excimer laser irradiation does open new routes to functionnalizing the surface of such diverse and difficult materials, allowing them to be utilized in given applications. In this paper, it is demonstrated how the above three potentialities of excimer laser surface irradiation may be put into practice in producing application-specific metallic tracks onto either sintered ceramics or polymeric materials. To this end, the accent is deliberately put here on the photochemical aspect of this irradiation process. The latter is responsible for modifying the-surface stoichiometry and/or structure of irradiated ceramics and silicone rubbers and also, of some of the solid additives which combine to polymers to form so-called thermoplastics. An important consequence of this changing surface chemistry resides in the possibility for decorating the processed surfaces with metal via an electro less technique, thus establishing the ground for a novel metallization process that is presented and examplified.

关键词： excimer laser sintered ceramics polymeric composites metallization

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