Plasma is playing an increasingly important role in thin film applications. Surprisingly, it is seldom measured and rarely controlled. A heterodyne microwave interferometer capable of measuring and/or controlling plas...
详细信息
Plasma is playing an increasingly important role in thin film applications. Surprisingly, it is seldom measured and rarely controlled. A heterodyne microwave interferometer capable of measuring and/or controlling plasma density over a dynamic range of 2 orders of magnitude is described. A novel Langmuir probe system, called FastProbe, is also described. The FastProbe is rapidly injected in and out of the plasma and can measure plasma uniformity, plasma density and electron energy distributions. The application of these two diagnostics is presented as well as result from ECR, magnetron and RIE plasmas.
A novel distributed multiprocessor system is being developed for a specific government application which requires product development in under 14 months. The system development incorporates a 32-bit advanced modular p...
详细信息
A novel distributed multiprocessor system is being developed for a specific government application which requires product development in under 14 months. The system development incorporates a 32-bit advanced modular processor (AMP) with extended local bus (ELB) capabilities and a dual redundant 21-bit VME backplane interface. The AMP is a 6 × 9 inch double-sided module which integrates the MIPS R3000/R3010 RISC (reduced-instruction-set computer) microprocessor chip set with three 55K gate VHSIC chip designs to achieve a performance capability of over 20 VAX MIPS. Multiple AMPs will be used in the system with additional growth capability of up to 10 AMP modules. An I/O processor and four I/O modules will be developed to provide VME bus extension capabilities and other interface functions. In parallel with the hardware development is an extensive Ada software development which includes a loosely coupled multiprocessor real-time operating system and associated diagnostics and support software. The design methodology for the AMP is presented, including system architecture, software development, and a comprehensive verification process which emphasizes the importance of integrating software and hardware prior to ASIC (application-specific integrated circuit) fabrication.
In this paper, the performance of a state and input observer is evaluated on a DC spindle drive system designed and built for this purpose. The observer estimates the spindle drive load torque (a disturbance input) ba...
详细信息
In this paper, the performance of a state and input observer is evaluated on a DC spindle drive system designed and built for this purpose. The observer estimates the spindle drive load torque (a disturbance input) based on easy-to-access signals: armature voltage, current and speed. The results show that the bandwidth and signal-to-noise ratio of the load torque estimate is as good as that obtained with an in-line torque transducer for the conditions tested. The use of these observers for detecting machine tool malfunctions and abnormal process conditions related to load torque (such as tool breakage, tool wear, slide stick/slip, and bearing preload) is discussed. State and input observers appear to have good potential for machine diagnostics.
An expert system for monitoring VLSI and ULSI integrated circuit process parameters which is based on the concepts of the charge-capacitance method is described. The process parameters determined are oxide leakage cur...
详细信息
An expert system for monitoring VLSI and ULSI integrated circuit process parameters which is based on the concepts of the charge-capacitance method is described. The process parameters determined are oxide leakage current, impedance to establish electric contact quality, oxide layer thickness, semiconductor doping profile, oxide fixed charge density, interface trap density, semiconductor band bending, and threshold voltage of a MOSFET. Instrumentation and measurement are discussed.< >
The current applications of programmable controllers in the discrete manufacturing and process industries are reviewed. Anticipated trends in programmable controller and industrial automation, including factory automa...
详细信息
The current applications of programmable controllers in the discrete manufacturing and process industries are reviewed. Anticipated trends in programmable controller and industrial automation, including factory automation networks, programming software, automation equipment, and artificial intelligence and diagnostics, are discussed. The commercial computer influence on manufacturing is briefly described.< >
State of the art drives have greatly increased features and capabilities due to being software based (microprocessor controlled). Examples of this are capability and interfacing to hierarchy devices such as programmab...
详细信息
State of the art drives have greatly increased features and capabilities due to being software based (microprocessor controlled). Examples of this are capability and interfacing to hierarchy devices such as programmable controllers, instrument distributed systems, and other microprocessor-based equipment capable of performing many functions other than just controlling drive speeds. These functions can be programmable controller-type functions, process maintenance, diagnostics, etc. The need for functional descriptions is discussed, an outline of a typical functional description is given, and suggestions to permit optimization of the drive system are presented.< >
A 10-A high-side driver device that has on-chip intelligence to provide self-protection and diagnostics for an automotive antilock braking system application is described. The device is fabricated by means of a multie...
详细信息
A 10-A high-side driver device that has on-chip intelligence to provide self-protection and diagnostics for an automotive antilock braking system application is described. The device is fabricated by means of a multiepitaxial bipolar process that combines the ruggedness of discrete power transistors with junction-isolated IC circuits. The process combines single or multiple vertical epitaxial-base power transistors with either standard bipolar or CMOS logic, without the compromises typically associated with this type or merged technology. The power components are fabricated by means of an epitaxial process. The process characteristics include wide and uniformly doped base and collector regions affording forward- and reverse-bias safe operating area typical of discrete bipolar power transistors. The power device closely resembles a single diffused bipolar power transistor. A comparison of safe operating area characteristics of several technologies is provided, and the advantage of bulk-epitaxial fabricated devices over power IC surface-control devices is shown.< >
A novel distributed multiprocessor system is being developed for a specific government application which requires product development in under 14 months. The system development incorporates a 32-bit advanced modular p...
详细信息
A novel distributed multiprocessor system is being developed for a specific government application which requires product development in under 14 months. The system development incorporates a 32-bit advanced modular processor (AMP) with extended local bus (ELB) capabilities and a dual redundant 21-bit VME backplane interface. The AMP is a 6*9 inch double-sided module which integrates the MIPS R3000/R3010 RISC (reduced-instruction-set computer) microprocessor chip set with three 55K gate VHSIC chip designs to achieve a performance capability of over 20 VAX MIPS. Multiple AMPs will be used in the system with additional growth capability of up to 10 AMP modules. An I/O processor and four I/O modules will be developed to provide VME bus extension capabilities and other interface functions. In parallel with the hardware development is an extensive Ada software development which includes a loosely coupled multiprocessor real-time operating system and associated diagnostics and support software. The design methodology for the AMP is presented, including system architecture, software development, and a comprehensive verification process which emphasizes the importance of integrating software and hardware prior to ASIC (application-specific integrated circuit) fabrication.< >
The search for uniformity starts with better understanding of newsprint behavior in the printing press and in turn effective specification. Papermaking measurements, high speed scanning, and diagnostics for small scal...
详细信息
The search for uniformity starts with better understanding of newsprint behavior in the printing press and in turn effective specification. Papermaking measurements, high speed scanning, and diagnostics for small scale variation have progressed but improvement in control performance is uncertain - MD and CD basis weight included. diagnostics for medium and large scale variations are needed. Good control performance requires process testing and simulation, improved process interface hardware, multivariable model based design, and renewed emphasis on control basics. Good operation points to cooperative and learning models of organization, authority devolution, shared expertise rather than the individual expert, and improved system support.
暂无评论