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检索条件"任意字段=Conference on Process Control and Diagnostics"

共 1528 条记录，以下是71-80 订阅

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Features of Power Supply Digital control System for Magnetic Pulse processing

Features of Power Supply Digital Control System for Magnetic...

引用

2022 conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2022

作者： Perevalov, Yuri Y. Parmenov, Vyacheslav E. Melnikov, Artem S. Maslennikov, Nazar V. Bondarenko, Dmitriy N. Saint Petersburg Electrotechnical University Faculty of Industrial Automation and Electrical Engineering Leti Saint Petersburg Russia

ISBN: (纸本)9781665409933

This article describes the development of a digital control system and a power source for charging high-voltage capacitors in installations of magnetic pulse processing of various cross-sections pipes and profiles. Comparison of capacitor bank charging process depending on the charge time setpoint was carried out. A digital system for diagnostics and hardware protection of the power supply was also developed and is described. © 2022 IEEE.

关键词： Digital control systems

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AI driven process Diagnostic & control: Device Manufacturing

AI driven Process Diagnostic & Control: Device Manufacturing

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IEEE Electron Devices Technology and Manufacturing conference (EDTM)

作者： Jaeyong Park Samsung Hwasung Republic of Korea

This paper explores the integration of Artificial Intelligence (AI) in process control and diagnostics in semiconductor manufacturing. It highlights current trends, including machine learning (ML) for data alignment and predictive maintenance, and anticipates future advancements in data sharing and standardization. This overview showcases AI’s transformative impact on equipment optimization and industry collaboration, underlining its role in shaping efficient, proactive manufacturing processes.

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In-Line Monitoring of Overlay and process Window using Design-Assisted Voltage Contrast Inspection for 14nm FINFET Technology 36

In-Line Monitoring of Overlay and Process Window using Desig...

引用

conference on Metrology, Inspection, and process control XXXVI Part of SPIE Advanced Lithography and Patterning conference

作者： Li, Runling Hsu, IKai Brozek, Tomasz Yang, Linrong He, Debiao Wu, Fangrui Ren, Jiadong Zhu, Yefang Zhang, Yan Liu, Pei Zhang, Haiqiong Zhang, Guifeng Fu, Yingying Yin, Shan Jia, Yujie Yu, Bo Shanghai Huali Integrated Circuit Corp Shanghai 201314 Peoples R China PDF Solut Santa Clara CA 95050 USA

ISBN: (纸本)9781510649828;9781510649811

A variety of middle-of-line lithography overlay (OVL) and process window (PW) parameters have been monitored using PDF Solutions Design-for-Inspection (TM) (DFI (TM)) in 14nm FinFET technology. The DFI system, which incorporates voltage contrast (VC) electron beam (e-beam) technique on PDF Solutions knowledge based test structure designs, has proven to assist lithography overlay control and process diagnostics, covering process loops of epitaxy, metal gate (MG), contact on active (M0A), contact on metal gate (M0P) as well as segmentation cuts of M0A and MG. In-line eBeam scans are performed after Contact CMP, and OVL and PW parameters are extracted from the curve fitting of VC signals responding to misalignment values. For each process module, dedicated test structures with different layout attributes are designed and placed on the wafer to characterize OVL and PW sensitivity to feature density, geometry and substrate doping. In this work, the concept of DFI system, with specific illustration of DFI M0A to MG OVL measurement to assist inline OVL control and process fix is reported. Although eBeam-based Voltage Contrast techniques traditionally have been used to detect Open and Short failures, and cannot be used to directly measure critical dimensions (CD) of patterned features, the DFI system is designed to monitor integrated process window (PW) variation introduced either by an intentional process split or an unintentional process/tool drift in production line. The results presented below demonstrate DFI capability to assist in-line OVL and PW control for yield enhancement, production monitoring, and excursion prevention.

关键词： Overlay process Window Design for Inspection Voltage Contrast Contact to gate short

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Critical Information Infrastructure Facility Status Monitoring: Risk Potential of the process 15

Critical Information Infrastructure Facility Status Monitori...

引用

15th International conference Management of Large-Scale System Development, MLSD 2022

作者： Abdulova, Ekaterina Laboratory of Complex Networks V.A. Trapeznikov Institute of Control Sciences of Ras Moscow Russia

ISBN: (数字)9781665497015

ISBN: (纸本)9781665497015

The paper is devoted to the issues of data mining and building on their basis predictive models for systems of diagnostics and monitoring of the technological process of facilities of critical information infrastructure. The paper considers a method to information analysis for the construction of instant models of forecasting parameters of technological process with consideration, detailing coefficients of multiple-scale wavelet transformation. An example of the use of the proposed approach for prediction and assessment of the risk potential of the temperature of the feed water behind the high-pressure heater in the power unit of the NPP is presented. © 2022 IEEE.

关键词： Wavelet transforms

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Semiconductor Manufacturing Case Studies: Wedge Bonder Characterization via Advanced process control (APC) 39

Semiconductor Manufacturing Case Studies: Wedge Bonder Chara...

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IEEE 39th International Electronics Manufacturing Technology conference (IEMT)

作者： Ong, Cheng Guan Seet, Sue Yin Shah, Nazaruddin Md Ezzuddin, Zaril Infineon Technol Malaysia Sdn Bhd Equipment Engn Melaka Malaysia Infineon Technol Malaysia Sdn Bhd Unit Proc Engn Melaka Malaysia Infineon Technol Malaysia Sdn Bhd Factory Intergrat Melaka Malaysia

ISBN: (数字)9781665471701

ISBN: (纸本)9781665471701

Advanced process control (APC) enables solution to finer levels of control and diagnostics with integration between machines to manufacturing system. Defining of each key-numbers thru mathematics derivation can be crunch by APC Trend Suite using calculated and statistical key-numbers. Case studies of application of this feedback information illustrate that benefits can be achieved from straight-forward applications;however, these benefits can be expanded (especially) as more complex scheduling and control solutions are implemented. Realizing this type of yield-enhanced solution in a cost-effective manner requires manufacturing-wide adherence to standards and best practices for component integration, event-based control system operation, and user interface management. In these manufacturing case studies, hick wire wedge bonder platform was selected as primary case studies for abnormal characterization detection with the help of APC Trend Suite Software. Non-stick on lead (NSOL) defect is well known defect in ball bond or wedge bond process, and the post-mortem effect causing high effort of reverse engineering study. With APC connection, several trace data such as current, deformation and impedance able to be captured and correlated back to defect location (row and column). Consequently, the study also looked into Fault Detection, Classification and Prediction (FDC+P) of clamping finger wear and tear rate corresponding to Lot Run Yield and Clamping Touch Down.

关键词： Current Deformation Advanced process control

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Rolling Bearing Fault diagnostics Using SSA-ELM and TVF-EMD Multi-Scale Entropy 7

Rolling Bearing Fault Diagnostics Using SSA-ELM and TVF-EMD ...

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7th International conference on Advanced Algorithms and control Engineering, ICAACE 2024

作者： Song, Shuo Wu, Guangcuan Wang, Wenbo Wuhan University Of Science And Technology Hubei Province Key Laboratory Of System Science In Metallurgical Process Wuhan430081 China Guangdong Hongtu Wuhan Die Casting Co. Wuhan430200 China

ISBN: (纸本)9798350361445

In order to address the issues with the traditional intelligent algorithm for optimizing ELM parameters-such as slow optimization speed, many adjustment parameters, and easy fall into the local optimal value-and its potential use in bearing fault classification using extreme learning machines (ELM), we propose a fault diagnosis method that combines time-varying filtering empirical modal decomposition (TVF-EMD) multiscale entropy with support vector machine (SSA-ELM). This research takes a look at rolling bearing defect feature extraction and ELM parameter optimization, and then introduces a novel swarm intelligence optimization approach. To improve the optimization speed and accuracy of bearing fault classification, the Sparrow Search algorithm (SSA) is used to optimize ELM parameters. A number of intrinsic mode functions (IMF) are derived from the signal after its decomposition using the TVF-EMD method. The next step is to recombine the beneficial IMF components by using the appropriate coefficient approach to identify them. Finally, the reconstructed signal's multi-scale entropy is determined using the feature vector, and the fault classification is carried out with the input of SSA-optimized ELM. The results show that the fault information can be obtained accurately and the identification accuracy is high. The feature vector is used to calculate the multi-scale entropy of the reconstructed signal, this method has better fault diagnosis classification performance. © 2024 IEEE.

关键词： Intrinsic mode functions

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Model-Assisted Reinforcement Learning for Online diagnostics in Stochastic controlled Systems 17

Model-Assisted Reinforcement Learning for Online Diagnostics...

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IEEE 17th International conference on control and Automation (ICCA)

作者： Noorani, Erfaun Somarakis, Christoforos Goyal, Raman Feldman, Alexander Rane, Shantanu Palo Alto Res Ctr Palo Alto CA 94304 USA Univ Maryland Inst Syst Res ISR Dept Elect & Comp Engn College Pk MD 20742 USA A James Clark Sch Engn College Pk MD 20742 USA

ISBN: (纸本)9781665495721

A mechanism to protect a controlled system in the event of a priori unknown abnormalities (e.g. faults, attacks) is the key to designing resilient and robust control systems. We explore bi-level control design architectures in which a supervisory Reinforcement Learning (RL) agent augments an over-observed controlled system. The RL agent monitors sensor signals, detects and takes action to mitigate unknown sensor faults. We use the system dynamics to extract features and develop a design method for the cost function of the RL module. We theoretically show that the designed cost function has a unique optimal policy that enables the diagnosis of arbitrary constant sensor faults. To conceptualize our architecture, we consider a linear version of an over-observed chemical process, controlled by a Linear Quadratic Gaussian (LQG) Servo-controller with Integral Action. Our experimental results, coupled with our theoretical analysis, show that the RL-agent is successful in identifying and mitigating the faults in one or more sensors in an online fashion.

关键词： Robust control Fault diagnosis System dynamics control design Design methodology Stochastic processes Reinforcement learning

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Multi-Level Voltage control Strategy for Rural Distribution Network based on System Theory 6

Multi-Level Voltage Control Strategy for Rural Distribution ...

引用

6th IEEE International conference on Sensing, diagnostics, Prognostics, and control, SDPC 2022

作者： Wu, Min Wei, Fusheng Cai, Yongzht Guangdong Power Co. Ltd. Guangzhou China Metrology Center of Guangdong Power Grid Co. Ltd. Guangzhou China

ISBN: (数字)9781665469869

ISBN: (纸本)9781665469869

In order to solve the problem that the existing voltage control methods cannot adapt to the demand of voltage control in active rural distribution networks, this paper presents a multi-level voltage control strategy of "station feeder-transformer-consumer"in active rural distribution network based on system theory. Firstly, according to the system theory and general system properties, the principle of regional division of active rural distribution network is put forward, and the regional scope of multi-level voltage regulation is determined;Then, considering the limitation of action times of voltage and reactive power control equipment in each level of "station-feeder-transformer-consumer", a multilevel voltage autonomous linkage control strategy is proposed. Finally, the top-down multi-level voltage control strategy implementation process is formulated with the voltage qualification of each region as the control objective. The simulation analysis on a rural distribution feeder in southern China shows that the proposed voltage control strategy can completely solve the problem of voltage overlimit of multiple nodes, and significantly improve the voltage quality of consumers in active rural distribution network, which verifies the feasibility and effectiveness of this strategy. © 2022 IEEE.

关键词： Voltage control

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Health Indicator Development for Low-Voltage Battery diagnostics and Prognostics in Electric Vehicles 16

Health Indicator Development for Low-Voltage Battery Diagnos...

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16th Annual conference of the Prognostics and Health Management Society, PHM 2024

作者： Du, Xinyu Mu, Huaizheng Corr, Kevin Nowak, Matt Wang, Hong Chang, Tung-Wah Frederick Rahimifard, Sara General Motors Global Technical Center WarrenMI78092 United States General Motors Canadian Technical Center MarkhamONL3R4H8 Canada

ISBN: (纸本)9781936263059

Each electric vehicle (EV) requires a low-voltage (e.g., 12V) auxiliary battery to provide electric power to onboard electronic control units, lighting systems, and various sensors during power off. Therefore, when the low-voltage battery is in low state of health (SOH) or low state of charge (SOC), it may cause no-start events. The existing OnStar Proactive Alert service can effectively predict low SOC or low SOH events for low-voltage batteries in Internal Combustion Engine vehicles using cranking signals. However, it does not work for EVs since there is no cranking event. In this work, a diagnostic and prognostic solution for the low-voltage battery of EVs is proposed. Four novel health indicators (HIs) along with the decision-making system are developed based on equivalent circuit models. Furthermore, the selection process of appropriate HIs tailored to various operational states of the vehicle is described. The validation results based on GM test EV data have demonstrated the effectiveness and robustness of the proposed solution. © 2024 Prognostics and Health Management Society. All rights reserved.

关键词： State of charge

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Application of motion control in rehabilitation devices 23

Application of motion control in rehabilitation devices

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23rd International Carpathian control conference (ICCC)

作者： Cernohorsky, Josef Diblik, Martin Richter, Ales Tech Univ Liberec Fac Mechatron Informat & Interdisciplinary Studie Liberec Czech Republic

ISBN: (纸本)9781665466363

The paper presents an innovative solution of special recondition ergometer. This ergometer is designed as stationary bike with independent pedals. The synchronization of pedals to each other to preserve bipedal motion is based on electronic synchronization via master slave. This arrangement must be changed in each half rotation. The sensorless torque measurement, diagnostics and recondition process visualization is described in the paper too. The short description of mechanical design is a part of the paper.

关键词： motion control human machine interaction recondition device synchronisation

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