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检索条件"任意字段=Conference on Quantum Optics, Optical Data Storage, and Advanced Microlithography"

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Polarization manipulation and multiplexing via optical metasurfaces: from classical to quantum

Polarization manipulation and multiplexing via optical metas...

引用

CLEO: Fundamental Science, CLEO:FS 2024 - Part of conference on Lasers and Electro-optics, CLEO 2024

作者： Peng, Ruwen Liu, Yongmin Wang, Mu National Laboratory of Solid State Microstructures School of Physics Collaborative Innovation Center of Advanced Microstructures Nanjing University Nanjing210093 China Department of Mechanical and Industrial Engineering Northeastern University BostonMA02115 United States American Physical Society HauppaugeNY11788 United States

ISBN: (纸本)9781957171395

Traditional optical elements, such as waveplates and polarization beam splitters, are essential for classical and quantum information techniques. Yet their bulky size and heavy weight are prejudicial for miniaturizing information systems. Here, we present our recent studies on polarization manipulation and multiplexing with optical metasurfaces, which significantly miniaturize optical systems. One is to break the limitation of polarization multiplexing in optical metasurfaces with engineered noise, and the other is to realize multichannel distribution and transformation of entangled photons with dielectric metasurfaces. The approaches achieve potential applications in high-capacity optical displays, data storage, information encryption, and quantum information networks. © 2024 The Author(s) © Optica Publishing Group 2024.

关键词： optical beam splitters

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Faster femtosecond laser processing using a dual-focus SLM emulated lens

Faster femtosecond laser processing using a dual-focus SLM e...

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conference on Lasers and Electro-optics Europe / European quantum Electronics conference (CLEO/Europe-EQEC)

作者： Barber, Liam Low, Jeffery Ashforth, Simon Aguergaray, Claude Simpson, Cather M. Univ Auckland Photon Factory 23 Symonds St Auckland New Zealand

ISBN: (纸本)9781728104690

The generation of multiple beams is an established method to increase the processing speed of advanced laserbased material processing techniques. This multi-foci approach has shown promising results in laser micromachining, scanning microscopy, optical data storage, or optical tweezer arrays. Of particular interest is its application to manufacturing bigger objects where laser treatment is required over surfaces on the centimetre scale or larger. Using a Spatial Light Modulator (SLM), such parallelisation has been studied over the last few years by splitting the input beam into multiple beams (up to 1000 beams [1]) for simultaneous machining on a plane (x-y) perpendicular to the propagation axis (z). This method is primarily based on holographic femtosecond laser processing [2] where computer-generated holograms (CGH) are displayed on an SLM. Further applications include phase distortion and lens aberration correction [3], or for four-dimension light shaping [4]. The SLM provides unique features for dynamic pulse shaping, more efficient use of the laser energy, or the machining of complex shapes.

关键词： Laser beams Machining Ultrafast optics Lenses Laser applications Adaptive optics

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advanced applications of scatterometry based optical metrology 31

Advanced applications of scatterometry based optical metrolo...

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31st conference on Metrology, Inspection, and Process Control for microlithography

作者： Dixit, Dhairya Keller, Nick Kagalwala, Taher Recchia, Fiona Lifshitz, Yevgeny Elia, Alexander Todi, Vinit Fronheiser, Jody Vaid, Alok GLOBALFOUNDRIES Technol Dev 400 Stone Break Extens Malta NY 12020 USA Nanometrics 550 Buckeye Dr Milpitas CA 95035 USA

ISBN: (数字)9781510607422

ISBN: (纸本)9781510607415;9781510607422

The semiconductor industry continues to drive patterning solutions that enable devices with higher memory storage capacity, faster computing performance, and lower cost per transistor. These developments in the field of semiconductor manufacturing along with the overall minimization of the size of transistors require continuous development of metrology tools used for characterization of these complex 3D device architectures. optical scatterometry or optical critical dimension (OCD) is one of the most prevalent inline metrology techniques in semiconductor manufacturing because it is a quick, precise and non-destructive metrology technique. However, at present OCD is predominantly used to measure the feature dimensions such as line-width, height, side-wall angle, etc. of the patterned nano structures. Use of optical scatterometry for characterizing defects such as pitch-walking, overlay, line edge roughness, etc. is fairly limited. Inspection of process induced abnormalities is a fundamental part of process yield improvement. It provides process engineers with important information about process errors, and consequently helps optimize materials and process parameters. Scatterometry is an averaging technique and extending it to measure the position of local process induced defectivity and feature-to-feature variation is extremely challenging. This report is an overview of applications and benefits of using optical scatterometry for characterizing defects such as pitch-walking, overlay and fin bending for advanced technology nodes beyond 7nm. Currently, the optical scatterometry is based on conventional spectroscopic ellipsometry and spectroscopic reflectometry measurements, but generalized ellipsometry or Mueller matrix spectroscopic ellipsometry data provides important, additional information about complex structures that exhibit anisotropy and depolarization effects. In addition the symmetry-antisymmetry properties associated with Mueller matrix (MM) elements provide

关键词： Overlay metrology Scatterometry Metrology Semiconducting wafers Transmission electron microscopy Diffractive optical elements Reactive ion etching 3D modeling Chemical elements optics manufacturing Critical dimension metrology Ellipsometry Mueller matrices optical metrology Process control

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Self-healing of vector Bessel-Gauss beam in high numerical aperture focusing

Self-healing of vector Bessel-Gauss beam in high numerical a...

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conference on Lasers and Electro-optics Europe (CLEO EUROPE)

作者： S. Vyas Y. Kozawa S. Sato Institute of Multidisciplinary Research for Advanced Materials University of Tohoku Sendai Japan

ISBN: (纸本)9781457705328

Vector beams are known to have a unique polarization distribution and corresponding focusing characteristics. Various applications of vector beams are reported. Vector Bessel-Gauss beams are solution of a vector wave equation and belongs to the class of non-diffracting beams. Self-reconstruction of intensity distribution has been the focus of many scientific studies, but there are no reports on polarization reconstruction. The objective of this work is to investigate the self-healing property of intensity and polarization of tightly focused vector Bessel-Gauss beam at the focal plane when a beam is partially obstructed at the pupil plane.

关键词： Diffraction theory Electric fields High numerical aperture optics optical data storage Polarization Vector beams

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Photorefractive Time-Domain Differential Detection Method for High-Precision Distinction of Phase-Modulated Signals in Holographic data storage

Photorefractive Time-Domain Differential Detection Method fo...

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conference on advanced optical Concepts in quantum Computing, Memory, and Communication II

作者： Takabayashi, Masanori Okamoto, Atsushi Hokkaido Univ Grad Sch Informat Sci & Technol Kita Ku Sapporo Hokkaido 0600814 Japan

ISBN: (纸本)9780819474711

We develop a photorefractive time-domain differential detection (PR-TDDD) method in holographic data storage systems with considering the temporal response of photorefractive two-wave mixing (PR-TWM). Optimizing the parameters of PR-TDDD method provides high-precision distinction of phase-modulated signals, i.e. distinction of small phase difference. In PR-TDDD method, the phase information can be sequentially-distinguished by monitoring the output intensity of PR-TWM. This is because the output intensity of PR-TWM is changed when the signal phase is changed. In addition, the changing rate of the output intensity corresponds to that of the signal phase. The advantages of our method are high energy efficiency, alignment-free optics and the distinction of multi-valued phase-modulated signals. Especially, we focus attention on applying to phase-based holographic data storage systems, which can achieve homogeneous intensity distribution on recording plane, i.e. Fourier transform plane, in general, and high energy efficiency because of 100% white rate. More noteworthy is that multi-valued phase-based holographic data storage can be realized by using PR-TDDD method. In this work, we consider the important parameters in PR-TDDD method;signal-to-pump beam intensity ratio, photorefractive coupling strength, and photorefractive time constant. The balance between these parameters is important for realizing the high-precision distinction of phase-modulated signal.

关键词： holographic data storage photorefractive material phase-modulated signal detection

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Proceedings of SPIE - quantum optics, optical data storage, and advanced microlithography

Proceedings of SPIE - Quantum optics, optical data storage, ...

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quantum optics, optical data storage, and advanced microlithography

ISBN: (纸本)9780819470027

The proceedings contain 61 papers. The topics discussed include: the separability of the evolved tripartite Gaussian state;the thermal entanglement in a spin-1 Heisenberg XXZ chain;entanglement generation with coherent light via cross-Kerr-nonlinearity;quantum secure direct communication based on supervised teleportation;a decoherent limit of fault-tolerant quantum computation driven by coherent fields;decoy state quantum key distribution in telecom dark fiber;quantum secret sharing based on Smolin bound entangled states is not unconditionally secure;the study of single photon detector for quantum key distribution;photonic technology in quantum information challenges quantum limitation;polarization coding and decoding by phase modulation in polarizing sagnac interferometers;and a quantum-mathematical model to state single photon (electron) double slit experiment, Fraunhofer and Fresnel diffractions.

关键词： quantum optics

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quantum Kirchhoff equation and energy fluctuations of mesoscopic electron resonator with linear dissipation

Quantum Kirchhoff equation and energy fluctuations of mesosc...

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conference on quantum optics, optical data storage, and advanced microlithography

作者： Cui yuan-shun Huaiyin Teachers Coll Dept Phys Jiangsu 223001 Peoples R China

ISBN: (纸本)9780819470027

On the basis of the charge discreteness, the mesoscopic electron resonator with linear dissipation is quantizated. quantum Kirchhoff equation of the system is given by Heisenberg motion equation, quantum fluctuation of energy is calculated under Fock state. The results show that the quantum Kirchhoff equation and the quantum fluctuations of energy are all related with the property of charge quantization.

关键词： mesoscopic electron resonator linear dissipation charge quantization quantum Kirchhoff equation quantum fluctuation

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The progress of ultrahigh density near-field optical storage pre-investigated

The progress of ultrahigh density near-field optical storage...

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conference on quantum optics, optical data storage, and advanced microlithography

作者： Pan, Shi Zhang, Tao Wang, Shuo Wang, Jun Mao, Haifeng Zhao, Bin Hu, Lizhong Zhang, Qingyu Wu, Shifa Dalian Univ Technol Inst Near Field Opt & Nanotechnol Sch Phys & Optoelect Technol Dalian 116024 Peoples R China

ISBN: (纸本)9780819470027

Ultrahigh density near-field optical storage is pre-investigated in this paper. 1. The design of super- lens and simulation is investigated. 2. The GaAs pyramid micro-tips were grown by the method of selecting Liquid Phase Epitaxy. 3. The storage film of Ge2Sb2Te5 is grown by the magnetron sputtering method on the Si (100) substrates. 4. Several characteristics of the storage film have been measured and analysed.

关键词： ultrahigh density optical storage near-field optics SNOM Ge2Sb2Te5 liquid phase epitaxy

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Bare wafer metrology challenges in microlithography at 45 nm node and beyond

Bare wafer metrology challenges in microlithography at 45 nm...

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conference on quantum optics, optical data storage, and advanced microlithography

作者： Huang, Chunsheng KLA Tencor Corp ADE Div Tucson AZ 85706 USA

ISBN: (纸本)9780819470027

The shrinking depth of focus (100-150 nm) of high numerical aperture immersion microlithography optics dictates a tight wafer flatness budget. Wafer flatness nanotopography (NT), and edge roll off (ERO) are critical parts of the equation in immersion microlithographic technology at the 45 nm node and beyond. Wafer features at the nanometer level could result not only in focus variation of the litho process, or thin film thickness variation in CMP process, but also in structural defects of the devices. Therefore;the metrology to measure nanometer level features and to control the quality of wafer geometry is a key to the success of IC production at the 45 run node and beyond.

关键词： bare wafer metrology interferometer wafer nanotopography wafer edge roll off

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quantum secret sharing based on Smolin bound entangled states isnot unconditionally secure

Quantum secret sharing based on Smolin bound entangled state...

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conference on quantum optics, optical data storage, and advanced microlithography

作者： Yu, Ya-fei Zhang, Zhi-ming S China Normal Univ Sch Informat & Photoelect Sci & Engn Lab Photon Informat Technol Guangzhou 510006 Guangdong Peoples R China

ISBN: (纸本)9780819470027

As an important resource of the quantum information engineering, to explore its' possible applications and limits in the field of the secure communication is very necessary. In the paper we analyse the problem of the security of quantum secret sharing with Smolin bound entangled states as the channel quantum state. An intercept-resend strategy of the inner of the legal communicators is proposed to attack the security without be detected by the checking procedure with comparing the results of single-qubit measurement. A conclusion that quantum secret sharing only with Smolin bound entangled states as the channel quantum state isnot unconditionally secure is attained, and a general proof in terms of the quantum correlation is given.

关键词： quantum information bound entangled state quantum secret sharing coherent individual attack

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