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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Thanh-Vinh Nguyen Okada, Hironao Takei, Yusuke Takei, Atsushi Ichiki, Masaaki Natl Inst Adv Ind Sci & Technol Ibaraki Japan

ISBN: (纸本)9780738125626

This paper reports on a band-aid type sensor that can simultaneously measure multiple physiological parameters with only one sensing element. The proposed sensor consists of a MEMS-based piezoresistive cantilever, a thin silicone tube whose inner pressure is measured by the cantilever. The whole sensor device is attached to a surgical tape, which allows the band-aid like attachment of the sensor to human skin to measure the vibration caused by the physiological parameters such as pulse wave, heart sound and respiration. Using the fabricated sensor device, we demonstrate two applications: the simultaneous measurements of pulse wave and respiration when attaching the sensor to the user's nose and the simultaneous measurements of heart sound and respiration using when attaching the sensor to the user's chest. We show that these the physiological parameters can be independently extracted from the cantilever output using low pass and high pass filters. The proposed sensor is useful for continuous health monitoring, which has become a great demand in the with/post COVID-19 era.

关键词： Piezoresistive cantilever Wearable Pulse wave Respiration Heart sound

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FORCE sensor USING IONIC LIQUID CAPILLARY BRIDGE 21

FORCE SENSOR USING IONIC LIQUID CAPILLARY BRIDGE

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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Thanh-Vinh Nguyen Kano, Shinya Takei, Atsushi Ichiki, Masaaki Natl Inst Adv Ind Sci & Technol Ibaraki Japan

ISBN: (纸本)9780738125626

We propose a force/pressure sensing method utilizing a stretched capillary bridge of ionic liquid (IL). In the proposed method, an ionic liquid droplet is stretched by two electrodes, one of which is deformable. The force or pressure applied to this electrode causes the capillary bridge to deform and change its impedance. Thus, the applied force/pressure can be measured by measuring the impedance of the capillary bridge. In comparison with the conventional method based on measurement of interfacial capacitance of the IL droplet, the proposed method offers several advantages such as high sample rate and the capability to miniaturizing the sensor without decreasing the sensitivity. To shed a light on the optimization of the sensor design, we investigated the dependence of the impedance of the capillary bridge on the stretched length and the dependence of the impedance change due to the stretching on the volume of the droplet. Finally, we demonstrated the applications of this method as a force sensing cantilever and a pressure sensor that can measure pulse wave.

关键词： Force sensor tactile sensor ionic liquid capillary bridge droplet impedance

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SC0.096Al0.904N-based Bimorph Piezoelectric Micro Machined Ultrasonic Transducers

SC0.096Al0.904N-based Bimorph Piezoelectric Micro Machined U...

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International conference on solid-state and Integrated Circuit Technology

作者： Ziye Zhai Wenjuan Liu Chengliang Sun The Hongyi honor college of Wuhan University Wuhan China The Institute of Technological Sciences Wuhan University Wuhan China

ISBN: (数字)9798350361834

ISBN: (纸本)9798350361841

The paper presents a $\text{Sc}_{0.096}\mathrm{A}1_{0.904}\mathrm{N}$ -based bimorph piezoelectric micromachined ultrasonic transducers (PMUT) and its liner array with 100 elements for medical imaging applications. The PMUT is fabricated using the Sco $_{0.96}\mathrm{A}1_{0.904}\mathrm{N}$ -based bimorph with thickness of 500nm, respectively. The diameter of PMUT is $120\mu \mathrm{m}$ , of which the center frequency is 1.9MHz. The 3D models are simulated to analysis the resonant frequency, the central displacement, the electrical impedance and the crosstalk response in frequency domain. The active area of the PMUT liner array has a dimension of $150\mu\mathrm{m}$ in both width and length. The phased liner array is simulated using 3D FEM simulation models where the focus depth can be adjusted by the excited signals. Our works validate the bimorph PMUT and its array, thereby accelerating the development of the phased array in medical imaging.

关键词： Phased arrays Ultrasonic transducers solid modeling Analytical models Three-dimensional displays Ultrasonic transducer arrays Resonant frequency Crosstalk Finite element analysis Biomedical imaging

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Enhancement of PDE and Noise Characteristics by Trench Guide with 2×2 Small Lens Array and Backside Pixel Isolation for 7μm SPAD Pixel

Enhancement of PDE and Noise Characteristics by Trench Guide...

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European conference on solid-state Circuits (ESSCIRC)

作者： Hanseung Lee Jongchae Kim Jaehyung Jang Kyungsu Byun Jongmin An Sueon Hwang Jaehyun Park Hoonmoo Choi Sunho Oh Suhyun Yi Yongtae Gim Namil Kim Pyongsu Kwag Minkyu Kim Sangyeong Lee Jihee Han Minsang Yu Taejun Baek Ahyoung Cho Seunghyun Yoon Sooyoung Park Seokhyeon Kim Kwangjun Cho Kyung-Do Kim Wonje Park Juhyun Cho Hoesam Jeong Hoon-Sang Oh Changrock Song SK hynix CIS Development CIS Pixel PI Team Process Development Team Icheon-si Korea

ISBN: (数字)9798350388138

ISBN: (纸本)9798350388145

We present an optimized Light Detection and Ranging (LiDAR) process for $7 \mu \mathrm{~m}$ Single Photon Avalanche Diode (SPAD) pixel. We achieved a Photon Detection Efficiency (PDE) more than two times higher by using a Trench Guide (TG) and a $2 \times 2$ Small Lens Array (SLA) as optical structures. Additionally, we physically divided the pixels using Backside Pixel Isolation (BPI), which reduced both electrical and optical crosstalk, improving the noise characteristics of the SPAD sensor. Finally, we achieved a PDE of 26.4% at $\lambda=940 \mathrm{~nm}, \mathrm{Vex}=2.5 \mathrm{~V}$, and an error rate of less than 0.4% in the average depth accuracy performance of the SPAD sensor.

关键词： Error analysis Noise Optical device fabrication Optical crosstalk Optical imaging Optical sensors Optical noise Single-photon avalanche diodes Optical arrays Lenses

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Tutorial: Fundamentals of Ultra-Low Voltage Embedded Memory Design

Tutorial: Fundamentals of Ultra-Low Voltage Embedded Memory ...

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Eric Karl Intel Portland OR

ISBN: (数字)9781665490160

ISBN: (纸本)9781665490177

To meet the energy efficiency demands of future applications, system-on-chip (SoC) designs continue to march towards ultra-low-voltage operation. This tutorial will address the fundamental challenges for embedded memory operation at low voltages in advanced process technologies, and cover single and multi-port SRAM, logic flip-flop, logic latch arrays, and eFuse technologies, prevalent in embedded design use. Memory assist circuits, repair, error correction, multi-VCC array design, clocking and min-delay design strategies relevant to enabling ultra-low and near-threshold system operation will be explored. System designers will walk away with a stronger understanding of how to better navigate embedded memory usage in ultra-low-voltage designs.

关键词： Tutorials Radio frequency Wireless communication Transceivers solid state circuits Quantum computing Optical transmitters Computer architecture Wireless sensor networks Training

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Lab-on-CMOS Packaging using Wafer-Level Molding and Direct-Write 3D-Printed Interconnects

Lab-on-CMOS Packaging using Wafer-Level Molding and Direct-W...

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2023 IEEE Biomedical Circuits and Systems conference, BioCAS 2023

作者： Dawes, Jacob Chou, Tzu-Hsuan Johnston, Matthew L. Oregon State University School of Electrical Engineering and Computer Science CorvallisOR United States

ISBN: (纸本)9798350300260

Heterogeneous integration of integrated circuits with microfluidic devices and front-end sensors/transducers has demonstrated potential to improve the performance of biological and chemical instrumentation due the close coupling of front-end electronics with the sensor interface. Due to scale mismatch between electrical and microfluidic interconnects/devices, integration of these lab-on-CMOS systems often necessitates large, planar packages. Wafer-level overmolding, a commonly used approach for manufacturing system-in-package components, has been shown as a promising packaging solution for hybrid integration of CMOS and microfluidic systems;integrated circuit dice can be packaged in a common, compression-molded epoxy substrate with planar electrical and microfluidic redistribution layers defined photolithographically. However, fixed-mask approaches limit the ability to rapidly prototype, reconfigure, and re-design, increasing time for development cycles. Recent developments in high resolution direct-write 3D-printing have proven viable in depositing a wide range of materials at the package level. In this work, we demonstrate the use of high-resolution 3D-printing for direct-write fabrication of electrical interconnects in conjunction wafer-level overmolding and planar co-integration of CMOS with microfluidic structures. The fabrication process flow is detailed along with functional demonstrations of on-chip optical transmission measurements and particle counting in a microfluidic channel, demonstrating future utility in cytometry and other emerging lab-on-CMOS applications. © 2023 IEEE.

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Tutorial: Fundamentals of Digital and Digitally Assisted Linear Voltage Regulators

Tutorial: Fundamentals of Digital and Digitally Assisted Lin...

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Arijit Raychowdhury Georgia Institute of Technology Atlanta GA

ISBN: (数字)9798350306200

ISBN: (纸本)9798350306217

Linear voltage regulators, including low-dropout (LDO) regulators, are a popular choice for on-die voltage regulation in SoC processors. Although analog LDOs have been used in supply-sensitive applications over the years, there has been a recent resurgence in research and development of all-digital and digitally assisted LDOs targeted for digital applications. In some of these topologies, traditional design metrics such as power-supply rejection or load regulation are often traded-off for higher energy efficiency and performance during large current and voltage transients, as well as a wide dynamic operating range. This tutorial introduces the fundamentals of all-digital and digitally assisted LDOs and then presents recent advances in circuit topologies. While highlighting the trade- offs between digital and analog LDOs, this presentation covers key metrics such as the transient response, current efficiency, dropout-voltage requirements, and stability via analysis of theoretical control models. Finally, this tutorial explores circuit topologies to unify voltage and clock frequency regulation, to allow designers to reduce voltage guardbands in digital circuits.

关键词： Tutorials Radio frequency Wireless communication Transceivers solid state circuits Quantum computing Optical transmitters Computer architecture Wireless sensor networks Training

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Continuous terahertz omnidirectional beam steering by dual diffraction of metagratings

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Photonics Research 2023年第1期11卷 44-54页

作者： JIE-RONG CHENG YANG YANG SAI CHEN QI-YE WEN YUN-YUN JI FEI FAN SHENG-JIANG CHANG Institute of Modern Optics Nankai UniversityTianjin 300350China Tianjin Key Laboratory of Micro-Scale Optical Information Science and Technology Tianjin 300350China School of Electronic and Information Engineering Beihang UniversityBeijing 100191China State Key Laboratory of Electronic Thin Films and Integrated Devices University of Electronic Science and Technology of ChinaChengdu 610054China Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology Tianjin 300350China

Dynamic beam steering with unlimited angular range and fast speed remains a challenge in the terahertz gap,which is urgently needed for next-generation target tracking,wireless communications,and imaging *** from metasurface phased arrays with element-level phase control,here we steer the beam by globally engineering the diffraction of two cascaded metagratings during in-plane *** from large-angle diffraction and flexible on/off control of the diffraction channels,a pair of metagratings with optimized supercells and proper orientation successfully directs the incoming beam towards any arbitrary direction over the transmission half space,with the steering speed improved more than twice that of the small-angle diffractive ***-beam and dual-beam steering within the solid angle of 1.56πand elevation angle of±77°has been demonstrated with average throughput efficiency of 41.4%at 0.14 THz,which can be generalized to multiple-beam *** dual diffraction engineering scheme offers a clear physical picture for beamforming and greatly simplifies the device structure,with additional merits of large aperture and low power consumption.

关键词： beam directional globally

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A Monolithically Integrated 640 × 512 CMOS-Perovskite Image sensor

A Monolithically Integrated 640 × 512 CMOS-Perovskite Image...

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European conference on solid-state Circuits (ESSCIRC)

作者： Xiaochen Wang Hao Ning Guangcai Hu Yunlong Li Yongliang Xie Jiangming Lin Cheng Zhuo Srikrishna Chanakya Bodepudi Yong Wang Bin Yu Yang Xu College of Integrated Circuits ZJU-HIC State Key Laboratory of Silicon and Advanced Semiconductor Material Zhejiang University Hangzhou China

ISBN: (数字)9798350388138

ISBN: (纸本)9798350388145

The demand for enhanced imager sensing drives innovation in fabrication and device schemes through the integration of new materials. Despite the dominance of CMOS in signal processing, improved image sensing relies on effectively integrating novel photo-absorption materials with CMOS chips. Perovskite films, renowned for their exceptional optoelectronic properties, offer a viable alternative to silicon in photodetectors. So far, the absence of full integration with CMOS IC technology, coupled with the reliance on external readout mechanisms, has not only limited the potential for miniaturization but also impacted cost efficiency. This presents a major bottleneck in the development of photodetector arrays based on perovskite films. Here, we demonstrate a heterogeneous integration architecture that achieves the monolithic integration of perovskite pixels with CMOS IC in an efficient and cost-effective fabrication approach, utilizing a global electrode structure. A $640 \times 512$ CMOS-perovskite image sensor is presented. The architecture and fabrication process are distinguished by their cost-effectiveness, efficiency in terms of time and labor, ease of operation and scalability for mass production. This heterogeneous chip achieves a functional pixel density of $\mathbf{9 8. 7 \%}$ and the max signal-to-noise ratio (SNR) of 48.5 dB. The monolithic integration of perovskite film with CMOS IC demonstrated is unfolding the vision for the next generation of high-performance image sensors.

关键词： Fabrication Image sensors Technological innovation Films Monolithic integrated circuits Perovskites Photodetectors Silicon sensors Signal to noise ratio

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A POLY-DADMAC FUNCTIONALIZED NANOFIBOURS MAT-BASED SELF-POWERED HUMAN MOTION sensor FOR IOT applications 21

A POLY-DADMAC FUNCTIONALIZED NANOFIBOURS MAT-BASED SELF-POWE...

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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Rana, S. M. Sohel Salauddin, M. Rahman, M. Toyabur Yoon, Sanghyuk Cho, Hyunok Park, Jae Y. Kwangwoon Univ Dept Elect Engn Seoul South Korea

ISBN: (纸本)9780738125626

Herein, we present a novel triboelectric nanogenerator based on nylon-11/poly-DADMAC and PVDF-TrFE nanofibers and demonstrate as a self-powered human motion sensor (SPHMS). The incorporation of cation poly-DADMAC into the nylon-11 via the electrospinning method acts as a highly positive triboelectric layer that significantly enhanced dielectric constant by trapping surface charge in the composite materials. The fabricated SPHMS exhibited outstanding performance, including superior electrical performance (power 2.4 mW), excellent mechanical stability (>76k cycles), and sensitivity (1.01 V/KPa). As a proof of concept, the SPHMS was successfully demonstrated for monitoring human motion while walking, jogging, running, and jumping via a smartphone.

关键词： Nylon-11/poly-DADAMAC self-powered motion sensor high stability triboelectric nanogenerator high sensitivity

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