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ZnO nanowire arrays - Pattern generation, growth and applications

PHYSICA STATUS solidI B-BASIC solid state PHYSICS 2010年第10期247卷 2305-2314页

作者： Zacharias, Margit Subannajui, Kittitat Menzel, Andreas Yang, Yang Univ Freiburg Inst Microsyst Engn IMTEK Fac Engn D-79110 Freiburg Germany

ZnO nanowires and related materials are in the focus of attention for electronic, optical or sensor applications. However, size, position and arrangement control are essential conditions for the development of future nanowire based devices. Various kinds of template methods including nanosphere lithography and UV laser interference lithography are powerful tools for the preparation of the starting metal catalyst arrays and will be demonstrated and discussed. However, only if the growth mechanism and its guiding parameters are understood in detail, the template will force a pattern arranged growth of nanowires. The paper gives an overview of the various kinds of growth modes for vertical arranged nanowires. Specific experimental conditions establishing the VS or the VLS growth are discussed. In addition, insight is given why the patterning is not all the time conserved and how to overcome these obstacles. In the second part different kinds of applications are summarized. Electronic properties are discussed based on metal semiconductor metal devices. The influence of a core shell nanowire structure on the optical properties is demonstrated. In addition, a simple approach for ZnO nanowire based gas sensors is discussed and shown. As a last example, the transfer of Al2O3 coated nanowires into spinel tubes is reported. [GRAPHICS] .

关键词： growth lithography nanowires photoluminescence templates

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applications of a novel cell micropatterning process for long-term neuron and cell culture

Applications of a novel cell micropatterning process for lon...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Chang, W.C. Sretavan, D.W. Departments of Ophthalmology and Physiology Neuroscience and Bioengineering Programs University of California San Francisco CA United States

ISBN: (纸本)9781424441938

We show several applications for a unique method for creating user-friendly, micropatterned substrates for neuron and cell culture. With neurons, we demonstrated that our micropatterns can separate cell bodies and axons while organizing them in orderly arrays for easy experimentation. These micropatterned neuron cultures also persisted for weeks, enabling maturation and development of presynaptic structures and potentially allowing the explicit design of neuronal circuits. Beyond neurons, we also demonstrated the culture of fibroblasts on the patterned substrates and showed that these cell types likewise remained viable and highly compliant to a variety micropatterns. ©2009 IEEE.

关键词： Cell culture

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Cell-based CMOS sensor and actuator arrays

Cell-based CMOS sensor and actuator arrays

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IEEE International solid-state Circuits conference

作者： Jenkner, M Tartagni, M Hierlemann, A Thewes, R Infineon Technol Agr Corp Res D-81730 Munich Germany Univ Bologna ARCES I-40123 Bologna Italy Swiss Fed Inst Technol Phys Elect Lab CH-8093 Zurich Switzerland

In recent years, increasing knowledge about in vitro cell handling and culturing has encouraged a variety of CMOS-based approaches to stimulate and detect electrical activity of biological cells. This paper outlines in a topical review the scope of cell-based biosensors and actuators for in vitro applications ranging from single-cell detection to multisite probing of complex neural tissue. Recent examples are selected to demonstrate how standard CMOS processes have been used to engineer arrays with different functionality.

关键词： cell-based biosensors cell manipulation dielectrophoresis extracellular recording image sensors in vitro multielectrode array (MEA) multisite recording neurons

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Light emitting diode arrays for consumer and medical applications

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MATERIALS SCIENCE AND ENGINEERING B-solid state MATERIALS FOR ADVANCED TECHNOLOGY 1998年第1-3期51卷 90-93页

作者： Rys, A Piotrowski, T Sobczynski, R Kansas State Univ Dept Elect & Comp Engn Manhattan KS 66506 USA Inst Electron Technol PL-02668 Warsaw Poland Hadaspectrum PL-04831 Warsaw Poland

development of light emitting diodes (LEDs) and arrays of diodes to be utilized in a modern and highly sensitive spectrophotometer is presented. The In1-xGaxAs1-yPy quaternary alloy semiconductor has been utilized in the design and fabrication of surface emitting infrared LEDs in the spectral range from 1100 to 1650 nm. Custom made chips provide the surface-emitting LEDs with high radiance and superior far-field patterns. The hybrid 31-element array of LEDs was fabricated. A temperature sensor and a photodiode was incorporated on the hybrid circuit to control the temperature and light intensity of the diodes. The instrument prototype has been fabricated and preliminary experimental data have been collected. (C) 1998 Elsevier Science S.A. All rights reserved.

关键词： infrared light emitting diodes electrical contacts spectrometer hybrid circuits

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Novel sensor for Color Control in solid state Lighting applications

Novel Sensor for Color Control in Solid State Lighting Appli...

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conference on Light - Emitting Diodes - Materials, Devices, and applications for solid state Lighting XIV

作者： Gourevitch, Alex Thurston, Thomas Singh, Rajiv Banachowicz, Bartosz Korobov, Vladimir Drowley, Cliff Cypress Semicond Inc San Jose CA 95134 USA

ISBN: (纸本)9780819480132

LED wavelength and luminosity shifts due to temperature, dimming, aging, and binning uncertainty can cause large color errors in open-loop light-mixing illuminators. Multispectral color light sensors combined with feedback circuits can compensate for these LED shifts. Typical color light sensor design variables include the choice of light-sensing material, filter configuration, and read-out circuitry. Cypress Semiconductor has designed and prototyped a color sensor chip that consists of photodiode arrays connected to a I/F (Current to Frequency) converter. This architecture has been chosen to achieve high dynamic range (similar to 100dB) and provide flexibility for tailoring sensor response. Several different optical filter configurations were evaluated in this prototype. The color-sensor chip was incorporated into an RGB light color mixing system with closed-loop optical feedback. Color mixing accuracy was determined by calculating the difference between (u',v') set point values and CIE coordinates measured with a reference colorimeter. A typical color precision Delta u'v' less than 0.0055 has been demonstrated over a wide range of colors, a temperature range of 50C, and light dimming up to 80%.

关键词： Metals sensors Optical filters Light emitting diodes Photodiodes Prototyping solid state lighting Temperature metrology Optical sensors RGB color model

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Effect of unmodified and derivatised poly(vinyl chloride) overlayers on the response of an electronic nose based on conducting polymers

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sensorS AND ACTUATORS B-CHEMICAL 1999年第1-3期58卷 536-543页

作者： Reddy, SM Payne, PA Univ Manchester Inst Sci & Technol Dept Instrumentat & Analyt Sci Manchester M60 1QD Lancs England

This paper describes a method of clearly distinguishing the headspace response of water from selected organic compounds. By using hydrophobic unplasticised poly(vinyl chloride) (PVC) as an overlayer, we have been able to minimise water interference at a pre-formed conducting polymer sensor array. As well as attenuating the signal to water, the response of the modified sensor to polar organic compounds has been reduced with the added effect of a switch in sign of the measured parameter. The effect of photo-dehydrochlorination of the PVC overlayer on the sensor array response was also investigated and is reported herein. (C) 1999 Elsevier Science S.A. All rights reserved.

关键词： conducting polymer sensor arrays solvent vapour measurements humidity interference poly(vinyl chloride) overlayers (PVC)

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development of a dissolved carbon dioxide sensor based on a coulometric titration

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sensorS AND ACTUATORS B-CHEMICAL 1999年第1-3期57卷 120-124页

作者： Wiegran, K Trapp, T Cammann, K Inst Chemo & Biosensor eV ICB D-48149 Munster Germany

This paper presents a sensor for the determination of dissolved carbon dioxide in water and seawater, respectively. The gas diffuses through a hydrophobic gas-permeable membrane and reacts with an alkaline electrolyte causing a ptr-value shift which is detected by an iridium oxide pH-electrode. The duration of the pH-shift within a specified pH-interval is measured and this so-called measuring period is correlated with the partial pressure of dissolved carbon dioxide in the sample. To start a new cycle, the initial pH-value is reached again by generating hydroxide ions electrochemically. The sensor allows determination of dissolved carbon dioxide in water in the range from 30 to 180 ppm. (C) 1999 Elsevier Science S.A. All rights reserved.

关键词： dissolved carbon dioxide coulometric titration seawater iridium oxide

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Silicon nanowire arrays for ultrasensitive label-free detection of DNA

Silicon nanowire arrays for ultrasensitive label-free detect...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Gao, Z. Agarwal, A. Trigg, A. D. Singh, N. Fang, C. Tung, C. H. Buddharaju, K. D. Inst Microelect 11 Sci Pk Rd Singapore Singapore

ISBN: (纸本)9781424408412

arrays of highly ordered silicon nanowires (SiNWs) are fabricated using complementary metal-oxide semiconductor (CMOS) compatible technology and their applications in biosensors are investigated. The SiNW arrays show a concentration-dependent resistance change upon hybridization to complementary target DNA. As in the case of other SiNW biosensing devices, the sensing mechanism can be understood in terms of the change in charge density at the SiNW surface after hybridization, the so called "field effect". The SiNW arrays discriminate satisfactorily against mismatched target DNA.

关键词： silicon nanowire nucleic acid peptide nucleic acid field effect biosensor

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development OF CDZNTE ENERGY SELECTIVE arrays FOR INDUSTRIAL AND MEDICAL RADIATION IMAGING

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 1994年第1-3期353卷 349-355页

作者： POLICHAR, R SCHIRATO, R REED, J Science Applications International Corporation 4161 Campus Point Court San Diego CA 92121 USA

Recent advances in the production of CdZnTe using the high pressure Bridgman growth process now make it possible to design and fabricate complex X-ray sensor arrays on large monolithic substrates. These solid state ionization devices have the advantages of improved spatial and energy resolution, and produce significantly higher signals than competitive scintillator-photodiode systems. We have fabricated a number of linear and areal monolithic arrays in our laboratory using vacuum deposited contacts on such material with good success. These arrays operate in a pulse counting mode using hybrid and surface mount circuitry mounted in close proximity to the arrays. Linear devices with pitches of less than 0.8 mm and with 32 elements per substrate have been used for very wide dynamic range radioscopy with excellent results. Images are presented which demonstrate dynamic range in excess of 500:1 and Nyquist limited resolution at diagnostic X-ray energies for a wide variety of samples. Preliminary results demonstrate that the arrays can be used for energy selective radioscopy permitting the identification of differing materials within the image by approximate atomic number. Systems using areal arrays also have been evaluated as radiation cameras and demonstrate good spatial and energy resolution. Examples of data taken with a pin-hole collimator show the ability to distinguish source distributions by energy as well as location and intensity. Ongoing work in the improvement of spatial and energy resolution and the fabrication of larger arrays is discussed.

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Localization of sub-100nm particles on wafers with solid state detector arrays

Localization of sub-100nm particles on wafers with solid sta...

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conference on Advanced Characterization Techniques for Optics Semiconductors and Nanotechnologies

作者： Rinder, T Rothe, H Univ Fed Armed Forces D-22043 Hamburg Germany

ISBN: (纸本)0819450618

Scatterometry is a powerful and fast measurement method to measure surfaces and its properties. The analysis of the backscattered light from a coherently illuminated surface enables the determination of various integral surface topography constants, surface defects and surface material properties. This paper is a continuation a previous paper (Proc. SPIE Vol. 4779, pp. 72-82). In this paper localization of sub- 100nm polystyrene particles on wafers with solid state detector arrays will be considered. In first part of the paper the angle resolved light scatter sensor system LARISSA (Large Dynamic Range Intelligent Scatter sensor Approach) will be reviewed. The system consists of an elliptical mirror optics and a CMOS photodiode detector array. The elliptical mirror optics enables the angle resolved and the integral scatter measurement in a solid angle of pi sr. The CMOS photodiode detector array consists of 32k single detector elements which are aligned in a circular form. Each single detector element is calibrated in a dynamic range of 7 decades of intensity. The ARS system can be used to realize a scatter measurements without moving parts which is a significant advantage in speed over conventional goniometer setups. The integral scatter measurement mode of the ARS sensor LARISSA enables the detection of very small scatter sources. In the second part of the paper localization of sub- 100nm polystyrene particles on wafers will be considered. The integral scatter measurement mode will be described in detail and measurements at a wavelength of 488nm will be presented. The measurement results will be analyzed by using scatter simulations which are based on discrete sources method. The comparison of measurement and simulation enables the determination of the detection limits of the sensor system and the derivation of design hints for particle scanner systems. Finally the results will be summarized and further development will be outlined.

关键词： ARS sensor elliptical mirror system calibrated CMOS photo detector array

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