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conference on Light-Emitting Diodes - Materials, Devices, and applications for solid state Lighting XX

作者： Lagrange, Alexandre Bono, Hubert Templier, Francois Univ Grenoble Alpes CEA LETI MINATEC Campus F-38054 Grenoble France

ISBN: (纸本)9781510600034

LED have become the main light sources of the future as they open the path for intelligent use of light in time, intensity and color. In many usages, strong energy economy is done by adjusting these properties. The smart lighting has three dimensions, energy efficiency brought by GaN blue emitting LEDs, integration of electronics, sensors, microprocessors in the lighting system and development of new functionalities and services provided by the light. Monolithic LED arrays allow two major innovations, the spatial control of light emission and the adjustment of the electrical properties of the source.

关键词： LED arrays driver integration spatial control

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Realization of cantilever arrays for parallel proximity imaging

Realization of cantilever arrays for parallel proximity imag...

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conference on 16 ISCMP

作者： Sarov, Y. Ivanov, Tz Frank, A. Zoellner, J-P Nikolov, N. Rangelow, I. W. Ilmenau Univ Technol FEI IMNE Dept Micro & Nanoelect Syst D-98684 Ilmenau Germany

This paper reports on the fabrication and characterisation of self-actuating, and self-sensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.

关键词： Nanocantilevers

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Hybrid LAE-CMOS Force-Sensing System Employing TFT-Based Compressed Sensing for Scalability of Tactile Sensing Skins

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IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS 2019年第6期13卷 1264-1276页

作者： Aygun, Levent E. Kumar, Prakhar Zheng, Zhiwu Chen, Ting-Sheng Wagner, Sigurd Sturm, James C. Verma, Naveen Princeton Univ Princeton NJ 08544 USA

Tactile sensing requires form-fitting and dense sensor arrays over large-areas. Hybrid systems, combining Large-Area Electronics (LAE) and silicon-CMOS ICs to respectively provide diverse sensing and high-performance computation/control, enable a platform for such sensing. A key challenge is that hybrid systems require a large number of interfaces between the LAE and CMOS domains, particularly as the number of sensors scales. This paper presents an architecture that exploits the attribute of signal sparsity, commonly exhibited in large-scale tactile-sensing applications, to reduce the interfacing complexity to a level set by the sparsity rather than the number of sensors. This enhances scalability compared to sequential-scanning and active-matrix approaches. The architecture implements compressed sensing via thin-film-transistor (TFT) switches, and is demonstrated in a force-sensing system with 20 force sensors, a TFT die (with 161 ZnO TFTs) per sensor, and a custom CMOS IC for system readout and control. Acquisition error of 0.7 kORMS is achieved over a 100 kO-20 kO sensing range, at energy and rate of 2.46 mu J/frame and 31 fps.

关键词： Thin film transistors Robot sensing systems sensor systems Complexity theory sensor arrays Compressed sensing Compressed sensing Hybrid Systems large-area electronics (LAE) sensing systems thin-film transistor (TFT) ZnO TFTs

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Linear CMOS Image sensor for Bio-Microfluidic Imaging System 13

Linear CMOS Image Sensor for Bio-Microfluidic Imaging System

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2016 13th IEEE International conference on solid-state and Integrated Circuit Technology (ICSICT)

作者： Hejiu Zhang Ningmei Yu Nan Lyu Fengjuan Wang School of Automation and Information Engineering Xi’an University of Technology

ISBN: (纸本)9781467397209

A linear CMOS image sensor（CIS） with 16-stage time-delay integration（TDI） is proposed in this paper for bio-microfluidic imaging system. Compared to the traditional CIS for bio-microfluidic applications, this CIS achieves high speed and high sensitivity in low illumination condition, which is suitable for biomicrofluidic. Moreover, a simple voltage accumulator and 10-bit full-differential single-slope analog-to-digital converter（ADC） are deployed for high-speed and lownoise readout.

关键词： Estimation Field programmable gate arrays OFDM Modulation Filtration Clocks Signal processing algorithms

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Energy selective imaging systems based on monolithic CdZnTe arrays operated in a high speed counting mode

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 1996年第1-2期380卷 323-330页

作者： Polichar, R Schirato, R Shreve, D Reed, J Polichar, A Science Applications International Corporation 4161 Campus Point Court San Diego CA 92121 USA

The excellent inherent energy resolution of CdZnTe and the evolution of techniques to fabricate this material into large, multi-pixel monolithic arrays, have encouraged the development of practical, multi-function, x-ray imaging systems. These systems are capable of simultaneously recording the x-ray image of an object while identifying the average atomic number of each of its internal components. The primary improvement of this new sensor technology is the ability to break down the detected radiation into energy bins after passing through the sample. The reduced fraction of scattered radiation recorded in a collimated, linear scanner image makes it possible to separate differing energy regions of the beam with a single bremsstrahlung source and a single, multiple discriminators. Such imaging systems have immediate applications in security and contraband detection, as well as a number of specialized uses in medical imaging. This review covers recent work carried out at SAIC in the development of these systems including the characterization of the detector devices, the requirements for the electronic readout system and a number of examples of images taken with prototype systems. Studies have been conducted with examples of both linear and area arrays using relatively simple processing electronics. Problems of incomplete charge collection and energy separation are discussed along with potential solutions to these issues. Imaging measurements made with these systems exhibit noise limits set by the available statistics and excellent point spread functions. Practical limitations in the useful pixel resolution approach 0.1 mm with stopping thickness of several millimeters. This suggests that high resolution scanners with x-ray tube potentials of several hundred kilovolts are feasible with this technology.

关键词： x-ray imaging dual energy position sensitive solid state detector array room temperature cadmium zinc telluride

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development of high transmittance, back-illuminated, silicon-on-sapphire substrates for high quantum efficiency and high resolution avalanche photodiode imaging arrays

Development of high transmittance, back-illuminated, silicon...

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IEEE Photonics conference (PHO)

作者： Stern, Alvin G. AG STERN LLC Newton MA 02467 USA

There is a growing need in medical, scientific and industrial applications for dual-mode, passive and active 2D and 3D LADAR imaging methods. To fill this need, solid state, single-photon sensitive silicon avalanche p... 详细信息

ISBN: (纸本)9781424489398

关键词： Avalanche photodiodes Detectors Optical crosstalk Optical device fabrication Silicon Substrates

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A simple optical gas sensor based on micromachined silicon plasma igniters and image processing

A simple optical gas sensor based on micromachined silicon p...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Phommahaxay, Alain Lissorgues, Gaelle Rousseau, Lionel Perrais, Vincent Francais, Olivier Bourouina, Tarik Nicole, Pierre ESIEE Paris ESYCOM Noisy Le Grand France CNAM Paris France Thales Airborne Syst Elancourt France

ISBN: (纸本)9781424408412

The early developments of an optical gas sensor combining plasma ignition by silicon electrode arrays and optical detection coupled with image processing are presented in this paper. The principle of the sensor under development is based on the ionization of chemical species under intense electrical fields and the detection by optical sensors of photons created by glow discharges. Electrodes optimization by electrostatic simulations has led to the design and fabrication of micromachined silicon igniters bonded to a glass substrate. First characterizations of the plasma igniters will be also presented.

关键词： gas sensor glow discharge silicon electrode image processing

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A 4-side tileable back illuminated 3d-integrated Mpixel CMOS image sensor

A 4-side tileable back illuminated 3d-integrated Mpixel CMOS...

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2009 IEEE International solid-state Circuits conference ISSCC 2009

作者： Vyshnavi, Suntharalingam Robert, Berger Stewart, Clark Jeffrey, Knecht Andrew, Messier Kevin, Newcomb Dennis, Rathman Richard, Slattery Antonio, Soares Charles, Stevenson Keith, Warner Douglas, Young Lin, Ping Ang Barmak, Mansoorian David, Shaver MIT Lincoln Laboratory Lexington MA United States Irvine Sensors Costa Mesa CA United States Forza Silicon Pasadena CA United States

ISBN: (纸本)1424434580

The dominant trend with conventional image sensors is toward scaled-down pixel sizes to increase spatial resolution and decrease chip size and cost. While highly capable chips, these monolithic image sensors devote substantial perimeter area to signal acquisition and control circuitry and trade off pixel complexity for fill factor. For applications such as wide-area persistent surveillance, reconnaissance, and astronomical sky surveys it is desirable to have simultaneous near-real-time imagery with fast, wide field-of-view coverage. Since the fabrication of a complex large-format sensor on a single piece of silicon is cost and yield-prohibitive and is limited to the wafer size, for these applications many smaller-sized image sensors are tiled together to realize very large arrays. Ideally the tiled image sensor has no missing pixels and the pixel pitch is continuous across the seam to minimize loss of information content. CCD-based imagers have been favored for these large mosaic arrays because of their low noise and high sensitivity, but CMOS-based image sensors bring architectural benefits, including electronic shutters, enhanced radiation tolerance, and higher data-rate digital outputs that are more easily scalable to larger arrays. In this report the first back-illuminated, 1 Mpixel, 3D-integrated CMOS image sensor with 8 mum-pitch 3D via connections. The chip employs a conventional pixel layout and requires 500 mum of perimeter silicon to house the support circuitry and protect the array from saw damage. In this paper we present a back-illuminated 1 Mpixel CMOS image sensor tile that includes a 64-channel vertically integrated ADC chip stack, and requires only a few pixels of silicon perimeter to the pixel array. The tile and system connector design support 4-side abuttability and fast burst data rates.

关键词： CMOS image sensors sensor arrays Image sensors Pixel Silicon Costs Circuits Tiles Spatial resolution Surveillance

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Diode-pumped, self-Q-switched, independently-addressable laser arrays

Diode-pumped, self-Q-switched, independently-addressable las...

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solid state Lasers V conference

作者： Serreze, HB Linden, KJ Zhou, S Chen, YC SPIRE CORP BEDFORDMA 01730

ISBN: (纸本)0819420727

This paper presents results of a program to develop compact, independently-addressable, pulsed infrared laser arrays useful for applications such as laser topographic mapping. Our approach is based on combining the technology of high-power diode lasers with the recent development of self-Q-switching via saturable absorption in co-doped solid-state laser crystals. Proof-of-concept was demonstrated by the design, construction, and characterization of an independently-addressable, three-element monolithic diode laser array end-pumping a single Cr,Nd:YAG solid-state crystal. Pulse durations of approximately 5 ns at 1.06 micrometer and pulse energies of 8 microjoules at repetition rates up to 400 Hz were obtained with individual pulses exhibiting both excellent repeatability and outstanding spatial mode characteristics.

关键词： solid-state laser diode laser self-Q-switching saturable absorption addressable laser array Cr,Nd:YAG

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development of High Sensitivity CMOS-MEMS Inertia sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease 46

Development of High Sensitivity CMOS-MEMS Inertia Sensor and...

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46th European solid-state Device Research conference (ESSDERC) / 42nd European solid-state Circuits conference (ESSCIRC)

作者： Masu, Kazuya Yamane, Daisuke Machida, Katsuyuki Sone, Masato Miyake, Yoshihiro Tokyo Inst Technol Inst Innovat Res FIRST Yokohama Kanagawa 2268503 Japan Tokyo Inst Technol Sch Comp Dept Comp Sci Yokohama Kanagawa 2268503 Japan

ISBN: (纸本)9781509029723

In this paper, we present our recent progress of a high sensitivity complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS) inertia sensor and its application to early-stage diagnosis of Parkinson's disease. The feature of the CMOS-MEMS sensor is the use of gold proof mass. High density of gold enables us to increase sensitivity by reducing thermo-mechanical noise that is inversely proportional to proof mass. We then show the developed CMOS-MEMS multi-physics design environment. An equivalent circuit of a MEMS accelerometer has been designed to simultaneously understand both the mechanical and the electrical behaviors. One of the potential applications of the high sensitivity inertia sensor is also discussed by focusing on early-stage diagnosis of Parkinson's disease.

关键词： CMOS-MEMS gold proof mass inertia sensor multi-physics design environment Parkinson's disease

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