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An integrated resonant accelerometer microsystem for automotive applications

sensorS AND ACTUATORS A-PHYSICAL 1998年第1-3期66卷 99-104页

作者： Ohlckers, P Holm, R Jakobsen, H Kvisteroy, T Kittilsland, G Larsen, A Nese, M Nilsen, SM Ferber, A SensoNor N-3191 Horten Norway SINTEF Elect & Cybernet N-0314 Oslo Norway

In the project IRMA-EU (IRMA: integrated resonant accelerometer microsystem for automotive applications). a project sponsored by the European Commision under ESPRIT, SensoNor and project partners Autoliv and SINTEF are developing a resonant-structure two-chip accelerometer silicon microsystem for automotive applications, the SA30 Crash sensor for front impacts, with range +/- 50g. The project is focusing on the development of key process technologies, product designs and manufacture of functional prototypes. The IRMA project is coordinated wi th other activities performed by the partners to cover all aspects of research and technology development as well as establishment of high-volume production capabilities needed for successful product innovation of this new generation of crash sensors. The sensing principle is an acceleration-sensitive resonant structure, with an ASIC for resonance control and signal conditioning. Prototypes in silicon of both the sensor chip and the ASIC chip have confirmed the feasibility of the concept. Ramp up to high-volume production will be started as soon as fully functional microsystems are demonstrated. (C) 1998 Elsevier Science S.A. All rights reserved.

关键词： crash sensors resonant structures silicon microsystems

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IN-SITU DEPOSTION OF PRESSURE AND TEMPERATURE SENSITIVE E-SKIN FOR ROBOTIC applications 21

IN-SITU DEPOSTION OF PRESSURE AND TEMPERATURE SENSITIVE E-SK...

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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Fastier-Wooller, Jarred W. Vu, Trung Hieu Tran, Canh-Dung Dinh, Toan Dau, Van Thanh Dao, Dzung Viet Griffith Univ Sch Engn & Built Environm Southport Qld 4222 Australia Univ Southern Queensland Sch Mech & Elect Engn Toowoomba Qld 4350 Australia Griffith Univ Ctr Catalysis & Clean Energy Nathan Qld Australia Griffith Univ QLD Micro & Nanotechnol Ctr Brisbane Qld 4111 Australia

ISBN: (纸本)9780738125626

The development of a multimodal sensing platform with multiple layers for electronic skin (e-skin) sensing of temperature and pressure has attracted considerable interest to practical applications in soft robotics, human-machine interfaces, and wearable health monitoring. In this work, we demonstrated a new platform technology with multiple sandwiched layers of highly oriented carbon nanotube membrane and polyacrylonitrile for the integration of pressure and temperature sensory functionalities into a single platform that is thin, ultra-lightweight, flexible, and wearable. The key technology of in situ deposition of sensor platform on objects or in robot interface makes this a unique method for the development of e-skins for robotic applications, offering a new approach to wearable electronics and portable health care.

关键词： Electrospinning e-skin carbon nanotube polyacrylonitrile pressure/temperature sensor

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Impedance extraction microsystem for nanostructured electrochemical sensor arrays

Impedance extraction microsystem for nanostructured electroc...

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作者： Yang, Chao Michigan State University

学位级别：Ph.D.

Electrochemical biosensors transform biochemical reactions into electrical information through various electrode transducers. With their high sensitivity and specificity, electrochemical biosensors are ideal agents to detect many inorganic and organic substances. Recently, the microfabrication of biosensors has matured to the point where high density arrays can be generated. A microsystem comprised of such arrays and an integrated circuit (IC) suitable for sensor interrogation and information extraction enables the capabilities of electrochemical sensors to be employed in applications that require miniaturization, including point of care medical diagnostics and distributed safety and security monitoring. In such a microsystem, the interrogation IC must provide extremely high sensitivity, to read the weak response from the miniaturized sensors, and be capable of multi-channel simultaneous readout, to support high density (∼100 elements) arrays. This dissertation focuses on overcoming the challenges and limitations in electronics that impede the development of electrochemical microsystems. Specifically, this research targets electrochemical impedance spectroscopy, an essential assay technique for many sensor interfaces. Several possible architectures for multichannel impedance spectroscopy were explored in this dissertation. The key functional blocks, identified as an impedance extractor and digitizer and a wide frequency range quadrature signal generator, were designed, tested, and implemented within a prototype biosensor array system to validate the design. The results of this research pave the way for further development of ICs for electrochemical sensors and lay a solid foundation for future implementations of fully integrated electrochemical impedance microsystems.

关键词： Electrochemical sensorsImpedance Bioelectric

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Long-range all-solid-state flash LiDAR sensor for autonomous driving 19

Long-range all-solid-state flash LiDAR sensor for autonomous...

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conference on High-Power Diode Laser Technology XIX

作者： Lemmetti, Juha Sorri, Niklas Kallioniemi, Ilkka Melanen, Petri Uusimaa, Petteri Modulight Hermiankatu 22 Tampere 33720 Finland

ISBN: (数字)9781510641723

ISBN: (纸本)9781510641723

LiDAR sensors have gathered lot of interest in the field of autonomous driving. Still, the offering of mass-produced, small form-factor all-solid-state LiDAR sensors remain scarce. Furthermore, most of the sensor applications are currently designed for short-range (<50 feet) and medium-range (50-300 feet) applications. There's a requirement for an efficient solution for long range LiDAR sensor that can be used to monitor the road in front of the vehicle. It must be powerful enough to cover long ranges (300 -800 feet) with high enough refresh rate and minimize detection noise while maintaining eye-safety. For these requirements a flash type LiDAR illuminator would be ideal for fast data collection and minimizing the power density. We propose a novel solution for long-range all-solid-state LiDAR application by using a segmented flash illumination and readout concept utilizing state-of-the-art laser diode technology and CMOS imaging at <1 mu m wavelength. Employing a stack of individually addressable high-power nanostack arrays as the illumination source allows to produce series of 3D flashes, which significantly improves the transverse resolution of the LiDAR, while at the same time mitigating the requirements for the smallest detector pixel size. The design makes it possible to achieve eye-safety even when targeting long ranges with silicon-based detectors. With this approach, the high illumination intensity requirements for the long range can be fulfilled while at the same time maintaining eye-safe operation. Additionally, the design allows for higher refresh rates while the heat management and the power consumption of the system can be minimized.

关键词： LiDAR flash LiDAR individually addressable nano stack arrays

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solid-state aspect sensor

Solid-state aspect sensor

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Shuttle Pointing of Electro-Optical Experiments 1980

作者： Cassidy, L. Kaplan, L. Perkin-Elmer Corporation Optical Technology Division DanburyCT06810 United States

Programs in development for the near future will require pointing sensors with accuracies in the region of 1 arc-sec and sub-arc-sec stability. The Advanced X-Ray Astronomical Facility, Annular Suspension Pointing System, Shuttle Infra-Red Telescope Facility and Stereosat are representatives of these programs. This paper describes a solid state Aspect sensor which could support this pointing capability and the testing technology necessary to verify its performance. The sensor uses a Charge Coupled Device (CCD) array integrated with a high-performance optical assembly. Perkin-Elmer has developed in-house a solid state sensor which could be used for precision pointing and attitude estimation applications. A test facility has been established which can be used to evaluate CCD arrays and optical assemblies for their suitability and use in a star sensor. The detail design of a stellar sensor to meet 1 arc-sec pointing requirements is presented. Optical performance characteristics are discussed, as is the verification testing of a prototype optical assembly. Test data are provided. The optical assembly is a 253-mm focal length, F/l.5 catadioptric lens system. Discussion of the solid state focal plane includes focal plane requirements and centroiding algorithms, focal plane and CCD test facilities, representative test data from linear CCD arrays, and a candidate CCD array for this application. An integrated sensor test station is described. Important considerations in the development of this precision pointing sensor are also presented, along with the predicted sensor performance based upon computer simulations. © 1981 SPIE. All rights reserved.

关键词： Focusing

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Uniform III-V semiconductor quantum wire and quantum dot arrays by natural self-faceting on patterned substrates

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THIN solid FILMS 2000年第1-2期367卷 32-39页

作者： Ploog, KH Nötzel, R Paul Drude Inst Solid State Elect Berlin Germany

We review the unique self-organizing growth mechanisms on planar and patterned high-index semiconductor substrates in atomic hydrogen assisted molecular beam epitaxy (MBE) allowing the reproducible fabrication of dense arrays of quantum wires and quantum dots with large confinement energy and uniform size distribution needed for realistic device applications. On not intentionally patterned substrates, hydrogen induced nanometer-scale self-faceting is directly applied for the formation of conductive quantum wires on GaAs(331)A exhibiting pronounced anisotrapy of the electron conductivity. In conventional MBE on intentionally patterned GaAs(311)A substrates the self-limiting formation of a fast growing mesa sidewall is highlighted. The systematic engineering of growth selectivity by appropriate pattern design reveals high flexibility for the fabrication of dense arrays of quantum wires, dot-like nanostructures, and coupled wire-dot arrays with superior control of nanostructure size and position. A new dimension in nanostructure formation is introduced by combining the natural self-faceting on GaAs(311)A substrates with patterned growth in atomic hydrogen assisted MBE producing linear arrays of quantum dots with minimized size fluctuations. (C) 2000 Elsevier Science S.A. All rights reserved.

关键词： III-V semiconductors molecular beam epitaxy patterned growth quantum wires quantum dots

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solid state IMAGE SENSING: A NEW AND VERSATILE TOOL FOR SCIENCE AND INDUSTRY.

SOLID STATE IMAGE SENSING: A NEW AND VERSATILE TOOL FOR SCIE...

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Asilomar Conf on Circuits, Syst, and Comput, 7th, Annu, Conf Rec, Pap

作者： Weckler, Gene P.

Recent developments pertaining to solid state image sensors are reviewed. Advances in signal processing are discussed and characteristics and performance of typical sensor arrays are presented. New and novel applications ranging from scientific instruments to non-contact measurements for industrial process control. The basic device consists of a silicon chip containing a row of photodiodes and a parallel shift register. Connected to each stage of the shift register is the gate of an MOS switch which couples the adjacent photodiode to a common video line. Both linear and area arrays have emerged from the development stage. New and novel applications ranging from scientific instruments to non-contact measurements for industrial process control are described and illustrated.

关键词： Semiconductor diodes, Photodiode

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A 64x64 High-Density Redox Amplified Coulostatic Discharge-Based Biosensor Array in 180nm CMOS 43

A 64x64 High-Density Redox Amplified Coulostatic Discharge-B...

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2017 43rd IEEE European solid state Circuits conference (ESSCIRC)

作者： Sun, Alexander Alvarez-Fontecilla, Enrique Venkatesh, A. G. Aronoff-Spencer, Eliah Hall, Drew A. Univ Calif San Diego Dept Elect & Comp Engn La Jolla CA 92093 USA Univ Calif San Diego Sch Med La Jolla CA 92093 USA

ISBN: (纸本)9781509050253

This paper describes the design of a high-density 4,096-pixel electrochemical biosensor array in 180nm CMOS for biomedical applications that require multiple analyte detection from small (5 mu 1) samples. Each pixel of the array contains an exposed 45x45 mu m(2) interdigitated micro-electrode surrounded by a similar to 9pL nanowell fabricated using only a standard CMOS process along with a simple electroless gold plating procedure without the need for further post processing. Directly underneath each transducer is a complete ultra-low-leakage (sub-fA) readout circuitry, which leverages the Coulostatic Discharge sensing technique and interdigitated electrode (IDE) geometry to minimize both the complexity and overall size of the array. By evaluating IDE designs with different feature sizes (2-5)mu m), an average maximum amplification factor of 10.5x was achieved using redox cycling coupled with the higher collection efficiency of trenches formed from opening the passivation. The array's sensor density is comparable to or better than state-of-the-art sensor arrays, all without augmenting the sensors with additional materials or structures. Using the array, detection of anti Rubella is demonstrated

关键词： Electrodes Discharges (electric) sensor arrays Biosensors Current measurement Voltage measurement Area measurement

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A Monolithically Integrated 640 x 512 CMOS-Perovskite Image sensor 50

A Monolithically Integrated 640 x 512 CMOS-Perovskite Image ...

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50th IEEE European solid-state Electronics Research conference (ESSERC)

作者： Wang, Xiaochen Ning, Hao Hui, Guangcai Li, Yunlong Xie, Yongliang Lin, Jiangming Zhuo, Cheng Bodepudi, Srikrishna Chanakya Wang, Yong Yu, Bin Xu, Yang Zhejiang Univ Coll Integrated Circuits State Key Lab Silicon & Adv Semicond Mat ZJU HEC Hangzhou 310027 Peoples R China

ISBN: (纸本)9798350388138;9798350388145

The demand for enhanced imager sensing drives innovation in fabrication and device schemes through the integration of new materials. Despite the dominance of CMOS in signal processing, improved image sensing relies on effectively integrating novel photo-absorption materials with CMOS chips. Perovskite films, renowned for their exceptional optoelectronic properties, offer a viable alternative to silicon in photodetectors. So far, the absence of full integration with CMOS IC technology, coupled with the reliance on external readout mechanisms, has not only limited the potential for miniaturization but also impacted cost efficiency. This presents a major bottleneck in the development of photodetector arrays based on perovskite films. Here, we demonstrate a heterogeneous integration architecture that achieves the monolithic integration of perovskite pixels with CMOS IC in an efficient and cost-effective fabrication approach, utilizing a global electrode structure. A 640 x 512 CMOS-perovskite image sensor is presented. The architecture and fabrication process are distinguished by their cost-effectiveness, efficiency in terms of time and labor, ease of operation and scalability for mass production. This heterogeneous chip achieves a functional pixel density of 98.7% and the max signal-to-noise ratio (SNR) of 48.5 dB. The monolithic integration of perovskite film with CMOS IC demonstrated is unfolding the vision for the next generation of high-performance image sensors.

关键词： Perovskite Monolithic Integration Image sensor CMOS

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A humidity-independent ammonia sensor based on a quartz microbalance: a test under agricultural conditions

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sensorS AND ACTUATORS B-CHEMICAL 1999年第1-3期57卷 255-260页

作者： Rechenbach, T Schramm, U Boeker, P Horner, G Roesky, CEO Trepte, J Winter, S Pollex, R Bargon, J Weber, E Lammers, PS Univ Bonn Inst Agr Engn D-53115 Bonn Germany Univ Bonn Inst Phys & Theoret Chem D-53115 Bonn Germany HKR Sensor Syst D-81371 Munich Germany Feinchem Sebnitz GMBH D-01855 Sebnitz Germany Univ Mining Technol Inst Organ Chem D-09599 Freiberg Germany

sensor-arrays consisting of multiple quartz microbalances (QMB) each coated with different cryptophanes (CPH), macrocycles (MC) (U. Schramm, T. Rechenbach, P. Boeker, S. Winter, C. Roesky, R. Pollex, E. Weber, P. Schulze Lammers, J. Bargon, Ammonia sensor based on carboxylic-acid functionalized cryptophanes and macrocycles, Proceedings of the EUROsensorS XII conference, 1998, pp. 533-536), or heterocalixarenes (E. Weber, J. Trepte, K. Gloe, M. Piel, M. Czugler, ***. Krartsov, Yu.A. Simonov, J. Aiptrowsky, E.V. Ganin, Heterocalixarenes featuring the benzimidazol-2-one subunit synthesis and X-ray structural studies of solvent inclusion, J. Chem. Sec., Perkin Trans. 2 (1996) 2359-2364) have been used to detect ammonia under agricultural conditions. As with almost all other QMB-based ammonia sensors, when using only one ammonia-sensitive sensor element on the array, the response of this initial device to ammonia fluctuated significantly due to a pronounced sensitivity to humidity. This cross sensitivity to humidity has been compensated using a heterocalixarene as a coating on one additional element of the array which thus functions as a humidity sensor. Combined with a partial least-square (PLS) analysis, this combination yields a robust humidity-independent ammonia sensor for agricultural applications. (C) 1999 Elsevier Science S.A. All rights reserved.

关键词： sensor ammonia humidity quartz microbalance host/guest inclusion pattern recognition

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