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IEEE Proceedings of the National Aerospace and Electronics conference 1975年 576-582页

作者： Meacham, James H.

Remotely piloted vehicle (RPV) imaging devices perform multiple tasks which are vital to a successful RPV mission. The sensor providing general navigation capability also serves as a recovery aid or the means to achieve automatic retrieval. Design approaches are discussed which led to the development of a modular family of day/night imaging systems. Flight test data are used to support the selection of an appropriate system for a particular scenario. Areas covered include special signal processing techniques, sensor trade-offs, and solid state imaging systems.

关键词： TELEVISION applications

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Conducting polymers in chemical sensors and arrays

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ANALYTICA CHIMICA ACTA 2008年第1期614卷 1-26页

作者： Lange, Ulrich Roznyatouskaya, Nataliya V. Mirsky, Vladimir M. Univ Regensburg Inst Analyt Chem Chemo & Biosensors D-93040 Regensburg Germany Moscow MV Lomonosov State Univ Dept Chem Moscow 119992 Russia

The review covers main applications of conducting polymers in chemical sensors and biosensors. The first part is focused on intrinsic and induced receptor properties of conducting polymers, such as pH sensitivity, sensitivity to inorganic ions and organic molecules as well as sensitivity to gases. Induced receptor properties can be also formed by molecularly imprinted polymerization or by immobilization of biological receptors. Immobilization strategies are reviewed in the second part. The third part is focused on applications of conducting polymers as transducers and includes usual optical (fluorescence, SPR, etc.) and electrical (conductometric, amperometric, potentiometric, etc.) transducing techniques as well as organic chemosensitive semiconductor devices. An assembly of stable sensing structures requires strong binding of conducting polymers to solid supports. These aspects are discussed in the next part. Finally, an application of combinatorial synthesis and high-throughput analysis to the development and optimization of sensing materials is described. (C) 2008 Elsevier B.V. All rights reserved.

关键词： conducting polymers chemical sensors electroactive polymers gas sensors combinatorial techniques electropolymerization sensor array

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Advances in the development of solid state photomultipliers for medical imaging - art. no. 69130J

Advances in the development of solid state photomultipliers ...

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Medical Imaging 2008 conference

作者： Levin, E. Shelegeda, E. Shubin, V. E. Shushakov, D. A. Sitarsky, Constantin Vinogradov, S. Amplificat Technol Inc New York NY 11230 USA

ISBN: (纸本)9780819470973

We describe a new type of a sensitive semiconductor photodetector that could be used in medical imaging applications. The photodetector, based on the mechanism of discrete amplification, has performance parameters comparable to, and for some applications exceeding, those of the vacuum photomultiplier tubes. High amplification gain achieved at very low levels of excess noise is accompanied by the fast speed and high dynamic range of the photodetector. Comparison of the technology with classic arrays of Geiger-mode APD arrays is also performed.

关键词： discrete amplification avalanche photodiode photomultiplier tubes photodetector DAPD SiPM solid state photomultiplier APD PMT

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High-average-power diode-pumped solid-state lasers for industrial and military applications

High-average-power diode-pumped solid-state lasers for indus...

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Proceedings of the 1996 9th Annual Meeting of IEEE Lasers and Electro-Optics Society, LEOS'96. Part 2 (of 2)

作者： Burnham, Ralph Fibertek Inc Herndon United States

Two advances in diode-array pump technology have made possible the expansion of the performance of diode-pumped solid-state lasers. These developments include the commercialization of: (1) a reliable high-duty-cycle diode arrays with average power of 10 W/cm from a mounted bar, and 80 W/cm2 from a 2D array and;(2) diode arrays with billion-shot lifetimes operating at ambient temperatures in excess of 70 °C. The frequency-doubled Nd:YAG rod laser developed for a military sensor system and the high-average power, high-brightness diode-pumped industrial laser are also discussed.

关键词： solid state lasers

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Nanocrystalline SiC metal-semiconductor-metal photodetector with ZnO nanorod arrays for high-temperature applications

Nanocrystalline SiC metal-semiconductor-metal photodetector ...

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International solid-state sensors, Actuators and Microsystems conference

作者： Lien, Wei-Cheng Tsai, Dung-Sheng Chiu, Shu- Hsien Senesky, Debbie G. Maboudian, Roya Pisano, Albert P. He, Jr-Hau Applied Science and Technology Program University of California Berkeley CA 94709 United States Berkeley Sensor and Actuator University of California Berkeley CA 94709 United States Department of Mechanical Engineering University of California Berkeley CA 94709 United States Institute of Photonics and Optoelectronics Department of Electrical Engineering National Taiwan University Taipei 10617 Taiwan

ISBN: (纸本)9781457701573

This work demonstrates a method to develop high temperature metal-semiconductor-metal photodetectors using low-temperature, ion beam assisted deposition of nanocrystalline silicon carbide (SiC) and hydrothermal synthesis of zinc oxide (ZnO) nanorod arrays. Due to incorporation of ZnO nanorod arrays, the photo-to-dark current ratio of Au/nanocrystalline SiC is increased from 4.9 to 13.3 at 25°C and from 4.85 to 7.57 at 200°C. The results, suggest that the ZnO nanorod arrays could serve as an antireflection layers to guide more light into the SiC photodetectors. These preliminary results support the integration of nanocrystalline SiC and ZnO nanorod arrays for use in high temperature photo-detection applications. © 2011 IEEE.

关键词： Photodetectors

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A BAND-AID TYPE sensor FOR WEARABLE PHYSIOLOGICAL MONITORING 21

A BAND-AID TYPE SENSOR FOR WEARABLE PHYSIOLOGICAL MONITORING

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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Thanh-Vinh Nguyen Okada, Hironao Takei, Yusuke Takei, Atsushi Ichiki, Masaaki Natl Inst Adv Ind Sci & Technol Ibaraki Japan

ISBN: (纸本)9780738125626

This paper reports on a band-aid type sensor that can simultaneously measure multiple physiological parameters with only one sensing element. The proposed sensor consists of a MEMS-based piezoresistive cantilever, a thin silicone tube whose inner pressure is measured by the cantilever. The whole sensor device is attached to a surgical tape, which allows the band-aid like attachment of the sensor to human skin to measure the vibration caused by the physiological parameters such as pulse wave, heart sound and respiration. Using the fabricated sensor device, we demonstrate two applications: the simultaneous measurements of pulse wave and respiration when attaching the sensor to the user's nose and the simultaneous measurements of heart sound and respiration using when attaching the sensor to the user's chest. We show that these the physiological parameters can be independently extracted from the cantilever output using low pass and high pass filters. The proposed sensor is useful for continuous health monitoring, which has become a great demand in the with/post COVID-19 era.

关键词： Piezoresistive cantilever Wearable Pulse wave Respiration Heart sound

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Copper(II) oxide nanowire array hydrogen sensor via facile large area contact integration

Copper(II) oxide nanowire array hydrogen sensor via facile l...

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2013 17th International conference on solid-state sensors, Actuators and Microsystems, TRANSDUCERS and EUROsensorS 2013

作者： Limkrailassiri, K. Kozinda, A. Lin, L. Berkeley Sensor and Actuator Center University of California Berkeley United States

ISBN: (纸本)9781467359818

This paper presents a novel method to achieve large area contact integration for copper(II) oxide (CuO) nanowire array-based hydrogen gas sensors, which provides a simple solution to the ongoing challenge of harvesting nanostructured materials for gas sensing applications. The method presented herein offers six distinct advantages over previous nanostructured gas sensing technologies: (1) convenient electrical access to as-grown, freestanding nanowire arrays, thereby obviating postgrowth thin-film metallization, (2) lithography-free fabrication, (3) usage of large area nanowire arrays to circumvent low yield of single nanowire sensors, (4) reusability of contacts for batch characterization, (5) compatibility with all free-standing arrays grown on electrically conductive substrates, and (6) rapid response and recovery times. The CuO nanowire array-based gas sensors exhibited 5× to 25× increased resistance during operation, and a 20× improvement in recovery time compared to prior works. © 2013 IEEE.

关键词： Copper oxides

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Personal Inertial Navigation System Employing MEMS Wearable Ground Reaction sensor Array and Interface ASIC Achieving a Position Accuracy of 5.5m Over 3km Walking Distance Without GPS 65

Personal Inertial Navigation System Employing MEMS Wearable ...

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65th IEEE International solid-state Circuits conference (ISSCC)

作者： Guo, Qingbo Deng, William Bebek, Ozkan Cavusoglu, Cenk Mastrangelo, Carlos Young, Darrin Univ Utah Salt Lake City UT 84112 USA Univ Calif Berkeley Berkeley CA 94720 USA Ozyegin Univ Istanbul Turkey Case Western Reserve Univ Cleveland OH 44106 USA

ISBN: (纸本)9781509049400

An accurate personal inertial navigation system under GPS-denied environment is highly critical for demanding applications such as firefighting, rescue missions, and military operations. Location-aware computation for large-area mixed reality also calls for accurate personal position tracking. Position calculation can be accomplished by using an inertial measurement unit (IMU) composed of a 3-axis accelerometer, 3-axis gyroscope, and 3-axis magnetometer. A gyroscope and magnetometer together can provide the orientation information, while the displacement can be obtained by integrating the acceleration data over time. A MEMS-based IMU is attractive for its small size, low power and low cost. However, such devices exhibit a limited accuracy, large offset, and time drift, which can result in an excessive position error over time. To achieve high-performance navigation, it is critical to accurately reset the IMU time-integration during each step when the foot contacts the ground. Furthermore, correcting the IMU inherent inaccuracy, bias, and time drift becomes important for improving system performance.

关键词： sensor arrays Inertial navigation Micromechanical devices Electrodes

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Ferroelectric and antiferroelectric films for microelectromechanical systems applications

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THIN solid FILMS 2000年 377卷 712-718页

作者： Xu, BM Cross, LE Bernstein, JJ Penn State Univ Mat Res Lab University Pk PA 16802 USA Charles Stark Draper Lab Inc Cambridge MA 02139 USA

In this paper we have introduced several types of ferroelectric and antiferroelectric thin (thickness m) and thick (thickness >1 mum) films developed in our group for sensor, actuator and transducer applications in... 详细信息

In this paper we have introduced several types of ferroelectric and antiferroelectric thin (thickness <1 m) and thick (thickness >1 mum) films developed in our group for sensor, actuator and transducer applications in microelectromechanical systems (MEMS). Ferroelectric lead zirconate titanate (PZT) films of up to 12 mum in thickness have been prepared on Pt-buffered silicon substrates, which allows for the conventional, through-thickness polarization, and of up to 5 mum in thickness on insulating layer (ZrO2) passivated silicon substrates, which allows for the novel, in-plane polarization. The in-plane poled films make it possible to develop d(33)-mode rather than d(31)-mode bending devices, which immediately leads to two-times improvement in device performance because d(33) approximate to 2 d(31). It also can greatly increase the voltage sensitivity of bending devices because the film thickness and electrode spacing are separated as independent variables, and thus, smaller film capacitance can be obtained by using wider electrode spacing even for fixed film thickness. In addition to PZT ferroelectric films, we have also developed antiferroelectric films as an alternative for high-strain microactuators. The strain level of the antiferroelectric films can reach more than 0.4%, and both digital and analog actuation can be realized by modifying the compositions of the films. As an example for MEMS applications, micromachined, unimorph-type two-dimensional transducer arrays have been fabricated based on both the through-thickness and in-plane polarized PZT films, which can be used for miniaturized, high-resolution acoustic imaging such as hand-held diver's sonar system, medical ultrasound imaging, and non-destructive testing. (C) 2000 Elsevier Science B.V. All rights reserved.

关键词： ferroelectric films antiferroelectric films microelectromechanical systems micromachined transducer arrays

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MONOLITHIC SILICON FABRICATON TECHNOLOGY FOR FLEXIBLE CIRCUIT AND sensor arrays.

MONOLITHIC SILICON FABRICATON TECHNOLOGY FOR FLEXIBLE CIRCUI...

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Technical Digest - IEEE solid-state sensor conference.

作者： Barth, Phillip W. Bernard, Sharon L. Angell, James B. Stanford Univ Stanford CA USA Stanford Univ Stanford CA USA

arrays of circuit elements are fabricated on the surface of a silicon wafer and are interconnected by gold metallization. A layer of polyimide is then formed on the wafer surface by spinning on a layer of polyamic acid and curing it at high temperature. Masking and etching from the backside of the wafer leaves separate silicon islands supported on a flexible polymide substrate, interconnected by the flexible gold metalization. Size is smaller than tape-bonded hybrids. applications include linear thermometer arrays and two-dimensional arrays of sensors for robotic and biomedical uses.

关键词： INTEGRATED CIRCUITS, MONOLITHIC

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