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IEEE International conference of Electron Devices and solid-state Circuits (EDSSC)

作者： Lee, Jeong-Soo Kim, Sungho Kim, Kihyun Rim, Taiuk Jeong, Yoon-Ha Meyyappan, M.

Increased demand for point-of-care diagnostics has provided a strong motivation for the development of lab-on-a chip systems. The most important part to develop the system is to realize sensing components with high se... 详细信息

ISBN: (纸本)9781457719974

关键词： Ag-AgCl DC characteristics Electrodes Logic gates Noise Optical buffering Semiconductor device measurement Sensitivity Si Si-NW ISFET Si-nanowire ion-sensitive field effect transistor Silicon biosensor application biosensors chemical sensors elemental sem

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Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision

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SCIENCE ADVANCES 2022年第38期8卷 000-000页

作者： Wang, Mengqi Sun, Haoyu Ye, Xiangyu Yu, Pei Liu, Hangyu Zhou, Jingwei Wang, Pengfei Shi, Fazhan Wang, Ya Du, Jiangfeng Univ Sci & Technol China CAS Key Lab Microscale Magnet Resonance Hefei 230026 Peoples R China Univ Sci & Technol China Sch Phys Sci Hefei 230026 Peoples R China Univ Sci & Technol China CAS Ctr Excellence Quantum Informat & Quantum Phy Hefei 230026 Peoples R China Univ Sci & Technol China Hefei Natl Lab Hefei 230088 Peoples R China

Efficient, nanoscale precision alignment of defect center creation in photonics structures in challenges the realization of high-performance photonic devices and quantum technology applications. Here, we propose a facile self-aligned patterning technique based on conventional engineering technology, with doping precision that can reach similar to 15 nm. We demonstrate this technique by fabricating diamond nanopillar sensor arrays with high consistency and near-optimal photon counts. The sensor array achieves high yield approaching the theoretical limit, and high efficiency for filtering sensors with different numbers of nitrogen vacancy centers. Combined with appropriate crystal orientation, the system achieves a saturated fluorescence rate of 4.34 Mcps and effective fluorescencedependent detection sensitivity of 1800 cps(-1/2). These sensors also show enhanced spin properties in the isotopeenriched diamond. Our technique is applicable to all similar solid-state systems and could facilitate the development of parallel quantum sensing and scalable information processing.

关键词： Fluorescence

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Global Shutter solid state Flash LIDAR for Spacecraft Navigation and Docking applications 24

Global Shutter Solid State Flash LIDAR for Spacecraft Naviga...

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conference on Laser Radar Technology and applications XXIV

作者： Sornsin, Beth A. Short, Bradley W. Bourbeau, Tyler N. Dahlin, Michael J. Adv Sci Concepts 135 East Ortega St Santa Barbara CA 93101 USA

ISBN: (纸本)9781510626768

Global shutter flash LIDAR is the sensor of choice for space-based autonomous relative navigation applications. Advanced Scientific Concepts (ASC) has recently delivered LIDAR cameras to the NASA / Lockheed- Martin OSIRS-Rex and the NASA / Boeing CST-100 Starliner programs. These are two of the first operational space programs to use global shutter, flash LIDAR based relative navigation systems. The OSIRIS-REx spacecraft was launched in September 2016 and is the first opportunity to understand how global shutter flash LIDAR performance and reliability is impacted by long term exposure to the deep space environment.

关键词： LIDAR Space operations Camera shutters sensors Staring arrays Laser stabilization Avalanche photodetectors Semiconductor lasers Asteroids solid state physics 3D image capture Navigation systems Satellite laser ranging Space sensors Spaceflight missions

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INDUSTRIAL applications OF solid state IMAGE SCANNERS, 1978.

INDUSTRIAL APPLICATIONS OF SOLID STATE IMAGE SCANNERS, 1978.

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Proc of a Symp on Ind Appl of solid state Image Scanners

This conference proceedings contains 11 papers of which 1 appears in abstract form only. It provides an introduction to the technology of solid state photodiode arrays and charge coupled devices, and to their industrial uses, particularly in instrumentation for the automation of manufacturing processes. The principal aim was to provide a practical guide as to where and how to use these new image sensors in industrial situations. The following topics are covered: A Survey of the Present state of the Art in applications of solid-state Image Scanners;Automated Surface Inspection with solid-state Image sensors;The Use of Self Scanned arrays in the Glass Industry;The Use of solid-state Image Scanners in the British Railways Track Recording Coach;A Photo-Electronic Method for the Monitoring of Deformation in Nuclear Fuel Cladding Tubes;development of the ″Heightscan″ Thickness Gauge;On-Line Volume Measurement of Bulk Materials;Orientation and Inspectioan of Component Parts;An Automatic Tool-Setting Unit;and Moire Detection with solid-state Image Scanners.

关键词： Image sensors

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Vapor-Phase Amine Intercalation for the Rational Design of Photonic Nanosheet sensors

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CHEMISTRY OF MATERIALS 2018年第8期30卷 2557-2565页

作者： Ganter, Pirmin Schoop, Leslie M. Daentl, Marie Lotsch, Bettina V. Max Planck Inst Solid State Res Heisenbergstr 1 D-70569 Stuttgart Germany Ludwig Maximilians Univ LMU Munchen Dept Chem Butenandtstr 5-13 D-81377 Munich Germany NIM Schellingstr 4 D-80799 Munich Germany Ctr Nanosci Schellingstr 4 D-80799 Munich Germany Princeton Univ Dept Chem Princeton NJ 08544 USA

The development of vapor sensors with tunable sensitivity and selectivity is highly desirable because of the manifold applications ranging from air quality monitoring to food control. The design of such sensors remains, however, a great challenge. Here, we address this challenge by intercalating primary and tertiary alkylamines with varying alkyl chain lengths into H3Sb3P2O14 nanosheet-based Fabry-Perot interference sensors. As the sensors are photonic in nature, the different amines can be distinguished based on their intercalation time and optical shift. Since the amines are protonated during intercalation and therefore trapped, this allows us to use amine modification as the basis for creating optical sensors. Intercalation of different amines gradually and widely tunes the sensor's sensitivity and selectivity to various analytes. This adjustment of sensing properties allows us to construct a sensor array on a single chip, which can distinguish different volatile organic compounds. The color change of this sensor array upon exposure to solvent vapors can be tracked with the naked eye, making this system a promising platform for the high-fidelity identification of volatile compounds. The sensor design protocol presented herein is straightforward and robust and can be transferred to other nanosheet-based devices for the rational tuning of their vapor-sensing properties and beyond.

关键词： Nanosheets spectral shift air quality monitoring color change sensors rational design Intercalation photonic sensor arrays Amines

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development of high transmittance, back-illuminated, silicon-on-sapphire substrates thinned below 25 micrometers and bonded to fused silica, for high quantum efficiency and high resolution avalanche photodiode imaging arrays

Development of high transmittance, back-illuminated, silicon...

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conference on sensors, Cameras, and Systems for Industrial and Scientific applications XIII

作者： Stern, Alvin G. AG STERN LLC Newton MA 02467 USA

ISBN: (纸本)9780819489456

There is a growing need in scientific and industrial applications for dual-mode, passive and active 2D and 3D LADAR imaging methods. To fill this need, solid-state, single photon sensitive silicon avalanche photodiode (APD) detector arrays offer high sensitivity and the possibility to operate with wide dynamic range in dual linear and Geiger-mode for passive and active imaging. To support the fabrication of large scale, high quantum efficiency and high resolution silicon avalanche photodiode arrays and other advanced solid-state optoelectronics, a novel, high transmittance, back-illuminated silicon-on-sapphire substrate has been developed incorporating a single crystal, epitaxially grown aluminum nitride (AlN) antireflective layer between silicon and R-plane sapphire, that provides refractive index matching to improve the optical transmittance into silicon from sapphire. A one quarter wavelength magnesium fluoride antireflective layer deposited on the back-side of the sapphire improves optical transmittance from the ambient into the sapphire. The magnesium fluoride plane of the Si-(AlN)-sapphire substrate is bonded to a fused silica wafer that provides mechanical support, allowing the sapphire to be thinned below 25 micrometers to improve back-illuminated optical transmittance, while suppressing indirect optical crosstalk from APD emitted light undergoing reflections in the sapphire, to enable high quantum efficiency and high resolution detector arrays.

关键词： high transmittance back-illuminated silicon-on-sapphire thin sapphire substrate bonded fused silica silicon avalanche photodiode high quantum efficiency high resolution

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development of individually addressable micro-mirror-arrays for space applications

Development of individually addressable micro-mirror-arrays ...

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conference on MOEMS and Miniaturized Systems

作者： Dutta, SB Ewin, AJ Jhabvala, M Kotecki, CA Kuhn, JL Mott, DB NASA Goddard Space Flight Ctr Greenbelt MD 20771 USA

ISBN: (纸本)0819438340

A two dimensional array of individually addressable micro-mirrors with 100 mu mx100 mum pixel size, capable of tilting +/- 10 degrees by electrostatic actuation is being developed and fabricated at the Detector development Laboratory of NASA, GSFC. The development requires integration of CMOS and MEMS fabrication processes. We have completed extensive analytical studies and performed laboratory tests to compare model predictions with actual performance of a 3x3 array. We are testing the address and driver circuit for a 32x32 array and also developing the process integration of the CMOS and MEMS fabrication of the larger arrays. The mirrors are capable of operating at cryogenic temperature for astronomical applications. Our goal is to extend the development to a 256x256 array for a wide variety of space applications including the Multi-Object-Spectrometer in the Next Generation Space Telescope (NGST).

关键词： MEMS micro-mirror-array cryogenic MEMS cryogenic CMOS NGST

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applications of SU-8 in the development of a Single Ion Hit Facility

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 2009年第12-13期267卷 2117-2121页

作者： Arteaga-Marrero, N. Astromskas, G. Olsson, M. G. Elfman, M. Kristiansson, P. Nilsson, E. J. C. Nilsson, C. Pallon, J. Lund Univ Div Nucl Phys Dept Phys SE-22100 Lund Sweden Lund Univ Div Solid State Phys Dept Phys SE-22100 Lund Sweden Lund Univ Dept Infect Med SE-22184 Lund Sweden

The Lund Nuclear Microprobe (LNM) has been adapted to be used as a Single Ion Hit Facility (SIHF) for proton cell irradiation experiments at low dose. In order to test the capabilities of the system, Ni dot arrays and artificial cells have been fabricated with the photopolymer SU-8 and common lithographic techniques. The primary purpose of the Ni dot arrays was to determine the targeting accuracy of the beam in vacuum and in air. Additionally, this sample was employed to evaluate the system performance during cell target irradiation experiments. The Ni dot arrays were also used for beam characterization. The artificial cells were originally fabricated to test the software for cell recognition and localization, developed and implemented at the LNM. However, this sample became very functional to make small adjustments at the irradiation chamber for cell irradiation experiments. A description of the samples, fabrication procedure and applications are presented in this paper. (C) 2009 Elsevier B.V. All rights reserved.

关键词： Single Ion Hit Facility (SIHF) Cell irradiation SU-8 PMMA EBL

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Photovoltaic infrared sensor array in heteroepitaxial narrow gap lead-chalcogenides on silicon 18

Photovoltaic infrared sensor array in heteroepitaxial narrow...

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18th European solid state Device Research conference, ESSDERC 1988

作者： Masek, J. Maissen, C. Zogg, H. Blunier, S. Weibel, H. Lambrecht, A. Spanger, B. Bottner, H. Tacke, M. Swiss Federal Institute of Technology ETH-Hönggerberg ZürichCH-8093 Switzerland Fraunhofer-Institut für Physikalische Messtechnik Heidenhofstr. 8 FreiburgD-7800 Germany

ISBN: (纸本)2868830994

Linear arrays of photovoltaic IR-sensors for thermal imaging applications have been fabricated for the first time in narrow gap semiconductor layers grown heteroepitaxially on Si-substrates. Heteroepitaxy was achieved using intermediate stacked CaF2-BaF2 bilayers to overcome the large lattice- and thermal expansion mismatch between Si and lead-chalcogenides. sensors fabricated in narrow gap PbTe have -5.7 μm cut-off wavelength at 90K and quantum efficiencies around 70%. Resistance-area products are up to 500 -cm2 with mean value of -150 -cm2 for 66 element linear arrays, well above the room temperature photon background noise limit. sensor arrays with shorter cut-off wavelength were fabricated in the same manner in epitaxial Pb1-xEuxSe on fluoride covered Si-substrates. © 1988 Les Editions de Physique.

关键词： Substrates

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Micromachined thermoelectric test device based on Silicon/Germanium superlattices:: Simulation, preparation and characterization of thermoelectric behavior 22

Micromachined thermoelectric test device based on Silicon/Ge...

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22nd International conference on Thermoelectrics (ICT 03)

作者： Schumann, J Kleint, CA Vinzelberg, H Thomas, J Hecker, M Nurnus, J Boettner, H Lambrecht, A Künzel, C Voelklein, F Leibniz Inst Solid State & Mat Res Dresden D-01171 Dresden Germany

ISBN: (纸本)078038301X

Strain-symmetrized superlattice structures based on epitaxially grown Si/Ge multilayers are expected to be promising systems for efficient thermoelectric micro-systems. The paper presents the development of a membrane-type sensor device consisting of Si/Ge superlattice and Si(x)Gel(1-x)-alloy legs allowing the study of the thermoelectric behavior at minimized influence of the supporting substrate components. By means of numerical simulation the optimum layout parameters were determined as well as the temperature distribution within the device including the sensitivity to be expected were estimated. Black body radiation measurements of the functional parameters on nearly freestanding thermopile arrays in the sensor regime are presented.

关键词： Germanium Nonhomogeneous media sensor arrays sensor phenomena and characterization Silicon Superlattices Testing Thermal sensors Thermoelectric devices Thermoelectricity

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