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International conference on Applied Physics and Material applications (ICAPMA 2013)

作者： Djamal, Mitra Ramli Inst Teknol Bandung Theoret High Energy Phys & Instrumentat Res Grp Fac Math & Nat Sci Jl Ganesa 10 Bandung 40132 Indonesia Univ Negeri Padang Dept Phys Padang 25131 Indonesia

ISBN: (纸本)9783037857786

In recent decades, a new magnetic sensor based on magnetoresistance effect is highly researched and developed intensively. GMR material has great potential as next generation magnetic field sensing devices. It has also good magnetic and electric properties, and high potential to be developed into various applications of electronic devices such as: magnetic field sensor, current measurements, linear and rotational position sensor, data storage, head recording, and nonvolatile magnetic random access memory. GMR material can be developed to be solid state magnetic sensors that are widely used in low field magnetic sensing applications. A solid state magnetic sensor can directly convert magnetic field into resistance, which can be easily detected by applying a sense current or voltage. Generally, there are many sensors for measuring the low magnetic field, such as: fluxgate sensor, Hall sensor, induction coil, GMR sensor, and SQUID sensor. Compared to other low magnetic field sensing techniques, solid state sensors have demonstrated many advantages, such as: small size (<0.1mm(2)), low power, high sensitivity (similar to 0.1Oe) and good compatibility with CMOS technology. The thin film of GMR is usually prepared using: sputtering, electro deposition or molecular beam epitaxy (MBE) techniques. But so far, not many researchers reported the manufacture of thin film of GMR by dc-Opposed Target Magnetron Sputtering (dc-OTMS). In this paper, we inform the development of GMR thin film with sandwich and spin valve structures using dc-OTMS method. We have also developed organic GMR with Alq3 as a spacer layer.

关键词： GMR sensor NiCoFe sandwich spin sputtering thin film

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development of Chemical sensor arrays for Harsh Environments and Aerospace applications

Development of Chemical Sensor Arrays for Harsh Environments...

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First IEEE International conference on sensors - IEEE sensors 2002

作者： Hunter, G.W. Neudeck, P.G. Makel, D. Liu, C.C. Ward, B. Wu, Q.H. Thomas, V. Dutta, P. Frank, M. Trimbol, J. Fulkerson, M. Patton, B. NASA Glenn Research Center Cleveland OH United States Makel Engineering Inc. Chico CA United States Electronics Design Center Case Western Reserve University Cleveland OH United States OAI Cleveland OH United States Ctr. for Indust. Sensors/Msrmt. Ohio State University Columbus OH United States

The aerospace industry requires the development of a range of chemical sensor technologies for such applications as fuel leak detection, fire detection, and emission monitoring. A range of chemical sensors are being developed based on: 1) Micromachining and microfabrication technology, 2) The use of nanocrystalline materials, and 3) The development of high temperature semiconductors, especially silicon carbide. However, due to issues of selectivity and cross-sensitivity, individual sensors are limited in the amount of information that they can provide in environments that contain multiple chemical species. Thus, sensor arrays are being developed to address detection needs in such multi-species environments. This paper discusses the sensor array development for harsh environment and aerospace applications such as leak and fire detection as well as emissions monitoring. Application of these arrays as well as their relative stage of development will be addressed.

关键词： Aerospace engineering

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CMOS Compatible Pyroelectric applications Enabled by Doped HfO₂ Films on Deep-Trench Structures 48

CMOS Compatible Pyroelectric Applications Enabled by Doped H...

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48th European solid-state Device Research conference (ESSDERC)

作者： Mart, C. Weinreich, W. Czernohorsky, M. Riedel, S. Zybell, S. Kuehnel, K. Fraunhofer IPMS Ctr Nanoelect Technol CNT Dresden Germany

ISBN: (纸本)9781538654019

Fully functional pyroelectric films are fabricated on a silicon substrate with deep-trench structures, for the first time. Future integrated pyroelectric applications such as infrared sensors, energy harvesters or temperature manipulation devices require large current responses at low device footprints. In this work, pyroelectric Si-doped HfO2 is deposited in trench structures to considerably increase the pyroelectric response, yielding a coefficient of p= -1560 mu C/m(2)K, which is four times larger than that of PZT projected to the device area. A large harvestable energy density of F-E = 542 J/m(3)K(2) is measured. Simultaneously, CMOS compatible and RoHS compliant manufacturing is demonstrated. Metalorganic atomic layer deposition (ALD) is used to coat the 1:16 aspect ratio structures conformally with uniform silicon dopant levels.

关键词： ferroelectric pyroelectric ALD hafnium oxide sensor

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Vertically Aligned Carbon Nanofibers: Interconnecting solid state Electronics with Biosystems

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JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 2009年第8期9卷 5038-5046页

作者： Cassell, Alan M. Li, Jun Nguyen-Vu, Thuy-Duong Barbara Koehne, Jessica E. Chen, Hua Andrews, Russell Meyyappan, M. Univ Calif Santa Cruz UARC NASA Ames Res Ctr Moffett Field CA 94035 USA Kansas State Univ Dept Chem Manhattan KS 66506 USA

Vertically aligned carbon nanofibers (VACNFs) are grown directly on prefabricated electronic circuits with nanoscale precision. Utilizing the free-standing nanofiber array geometry, we have demonstrated the detection of nucleic acids to construct an ultrasensitive electrochemical sensor. Extending this technology towards in vivo applications, we have modified the free-standing VACNF arrays in order to achieve a multifunctional three dimensional (3-D) matrix that interpenetrates the neuronal network of PC12 cells. We found that PC12 cells cultured on the nanofiber arrays can form an extended neural network upon proper chemical and biochemical modification. The soft 3-D nanofiber array architecture provides a novel platform to fine-tune the topographical, mechanical, chemical, and electrical cues at sub-cellular scales. This biomaterial platform can be used for both fundamental studies of nanomaterial-cell interactions and the development of multifunctional, chronically stable implantable devices. The application of these devices and potential utility as a multifunctional platform for neurophysiology and biochemical studies will be discussed.

关键词： Neural Interface Carbon Nanofiber Vertically Aligned Polypyrrole Nucleic Acid Detection Electrochemical Methods Neurotransmitter Dopamine Implantable Electrode PC12 Cells Biocompatibility

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Picotesla Magnetic sensors for Low-Frequency applications

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IEEE TRANSACTIONS ON MAGNETICS 2011年第10期47卷 3740-3743页

作者： Liou, S. H. Yin, Xiaolu Russek, Stephen E. Heindl, Ranko Da Silva, F. C. S. Moreland, John Pappas, David P. Yuan, L. Shen, J. Univ Nebraska Dept Phys & Astron Lincoln NE 68588 USA Univ Nebraska Ctr Mat & Nanosci Lincoln NE 68588 USA Natl Inst Stand & Technol Boulder CO 80305 USA Western Digital Corp Fremont CA 94539 USA

We demonstrate a simple low-power, magnetic sensor system suitable for high-sensitivity magnetic-field mapping, based on solid-state magnetic tunnel junction devices with minimum detectable fields in a 100 pT range at room temperature. In this paper, we discuss a method that uses multilayer thin films to improve the performance of the soft ferromagnetic layer in magnetoresistive sensor applications, by reducing the coercivity and/or improving the reversibility. We have used it in the design of our new magnetic sensor. This sensor has a sensitivity as high as 750%/mT. The magnetic sensor only dissipates 1 mW of power while operating under an applied voltage of 1 V.

关键词： Magnetic concentrators magnetic noise magnetic sensor magnetic tunnel junction (MTJ)

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TOWARDS A WIRELESS CHIP LESS SMART CURRENT sensor SYSTEM BASED ON GIANT MAGNETORESISTANCE 19

TOWARDS A WIRELESS CHIP LESS SMART CURRENT SENSOR SYSTEM BAS...

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19th International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Kondalkar, Vijay V. Li, Xiang Yang, Sang Sik Lee, Keekeun Ajou Univ Dept Elect & Comp Engn Microsyst Lab Suwon 443749 South Korea

ISBN: (纸本)9781538627327

Passive and remote current sensing technology has many potential applications in monitoring the real-time power usage in electric power distribution infrastructure. We present, the implementation and development of a stable highly sensitive, chip-less, wireless and battery free current sensor. The developed current sensor is consisting of mender structured Giant magnetoresistance (GMR) magnetic sensor for current sensing, one-port surface acoustic wave (SAW) reflective delay line as transponder to replace existing complex wireless transceiver system composed of thosunds of electronic components, two antennas, and a network analyser for measurement unit. Good linearity and sensitivity were observed at the amplitude variations in terms of current and sensor exhibits a sensitivity of 0.57 bB/A with a current sensing range 0 to 15 A. Coupling of Mode (COM) modelling simulations were also performed to predict device performance.

关键词： Giant Magnetoresistance (GMR) Surface acoustic wave (SAW) Current sensor Magnetic sensor

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Light propagation in strip and slot waveguide arrays for sensing 7

Light propagation in strip and slot waveguide arrays for sen...

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conference on Advanced sensor Systems and applications VII

作者： Ma, Qingyan Qi, Fan Wang, Yufei Liu, Zhishuang Zheng, Wanhua Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Lab Beijing Peoples R China Chinese Acad Sci Inst Semicond Lab Solid State Optoelect Informat Technol Beijing Peoples R China Univ Chinese Acad Sci Coll Mat Sci & Optoelect Technol Beijing Peoples R China Univ Chinese Acad Sci Coll Future Technol Beijing Peoples R China

ISBN: (数字)9781510604704

ISBN: (纸本)9781510604698;9781510604704

Light propagation in strip and slot waveguide arrays for sensing are proposed and analyzed with a new theory of quantum walk. The waveguide arrays are designed on silicon-on-insulator and can be fabricated with mature and cost-efficient complementary metal-oxide semiconductor technology. A new slot waveguide array modified by conventional strip waveguide array with electric field mainly confined in the cladding region is investigated. Quantum walks have an exact mapping to classical phenomena as verified by experiments using bright laser light, so that they are introduced in our work as theoretical foundation. We take the width of waveguide of 450 nm and the coupling distance of 200 nm for strip waveguide array, and 420 nm and 180 nm for slot waveguide array, but with a 100nm slot in the center of waveguide. At last the waveguide array covered by a thin layer of graphene is investigated, which brings higher sensing property as well as a much better biocompatibility. With the monochrome light injection the intensity distribution at the end of the arrays changes with the refractive index of the sensing area (cladding region) and it can be explained by quantum walks theory. The designed waveguide arrays can possess compact footprint and high refractive index resolution, reaching 1E-11 RIU theoretically.

关键词： waveguide array sensing quantum walk graphene optical devices

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Recent development of ultra small pixel uncooled focal plane arrays at DRS

Recent development of ultra small pixel uncooled focal plane...

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conference on Infrared Technology and applications XXXIII

作者： Li, Chuan Skidmore, George D. Howard, Christopher Han, C. J. Wood, Lewis Peysha, Doug Williams, Eric Trujillo, Carlos Emmett, Jeff Robas, Gary Jardine, Daniel Wan, C. -F. Clarke, Elwood DRS Sensors & Targeting Syst Dallas TX USA DRS Sensors & Targeting Syst Irvine CA 92606 USA

ISBN: (纸本)9780819466648

DRS is a major supplier of the 25 mu m pixel pitch 640x480 and 320x240 infrared uncooled focal plane arrays (UFPAs) and camera products for commercial and military markets. The state-of-the-art 25 mu m pixel focal plane arrays currently in production provide excellent performance for soldier thermal weapon sights (TWS), vehicle driver vision enhancers (DVE), and aerial surveillance and industrial thermograph applications. To further improve sensor resolution and reduce the sensor system size, weight and cost, it is highly desired to reduce the UFPA pixel size. However, the 17 mu m pixel FPA presents significant design and fabrication challenges as compared with 25 mu m pixel FPAs. The design objectives, engineering trade-offs, and performance goals will be discussed. This paper presents an overview of the 17 mu m microblometer uncooled focal plane arrays and sensor electronics production and development activities at DRS. The 17 mu m pixel performance data from several initial fabrication lots will be summarized. Relevant 25 mu m pixel performance data are provided for comparison. Thermal images and video from the 17 mu m pixel 640x480 UFPA will also be presented.

关键词： uncooled infrared infrared focal plane array

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SLIVER-NANOPARTICLE ENHANCED PVA THIN-FILM COLORIMETRIC HUMIDITY sensor 20

SLIVER-NANOPARTICLE ENHANCED PVA THIN-FILM COLORIMETRIC HUMI...

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20th International conference on solid-state sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROsensorS)

作者： Zhang, Yangxi Xia, Ouyang Ho, Kwun Hei Liang, Zengtian Le, Dangyuan Zhang, A. Ping Tam, Hwa-Yaw Hong Kong Polytech Univ Photon Res Ctr Dept Elect Engn Hong Kong Peoples R China Hong Kong Polytech Univ Dept Appl Phys Hong Kong Peoples R China

ISBN: (纸本)9781728120072

In this paper, a fast-response colorimetric humidity sensor based on silver-nanoparticle (AgNP) enhanced polyvinyl alcohol (PVA) thin-film interferometer is reported. The AgNPs are directly printed on a titanium dioxide (TiO2) capped quartz substrate via precision photoreduction technology. Compared with a single layer of PVA film, this PVA-AgNP-TiO2 structure displays more brilliant and abundant colors. The colorimetric sensor can rapidly respond to humidity change in air, and the measured rise time of response is 87 ms. Such fast-response colorimetric sensors have great potential for many applications, such as breath analysis and smartphone camera-based biochips.

关键词： Silver nanoparticles colorimetric sensor humidity sensor thin-film interferometer

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ZEOLITIC IMIDAZOLATE FRAMEWORK MODIFIED FILM BULK ACOUSTIC RESONATOR FOR HIGHLY SENSITIVE AND SELECTIVE ALCOHOL VAPORS DETECTION 20

ZEOLITIC IMIDAZOLATE FRAMEWORK MODIFIED FILM BULK ACOUSTIC R...

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20th International conference on solid-state sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROsensorS)

作者： Hui, Zhipeng Yan, Xu Qu, Hemi Pang, Wei Duan, Xuexin China Marine Dev & Res Ctr Qingdao Peoples R China Tianjin Univ State Key Lab Precis Measuring Technol & Instrume Tianjin Peoples R China

ISBN: (纸本)9781728120072

There is an urgent need for the development of reliable gas sensors in our society due to their widespread applications. This work reports an integration of porous zeolitic imidazolate framework-8 (ZIF-8) with film bulk acoustic resonator (FBAR) to monitor alcohols vapor under ambient condition. The coating of sorptive nano-porous materials on FBAR is effective in improving sensitivity for micro sensor through increasing active surface area in contact with gas analytes. The sensitivity of as-prepared gas sensor was enhanced over 25 times in comparison with the bare one, and the sensor also exhibited selectivity towards different alcohol vapors.

关键词： Gas sensor Alcohols Film bulk acoustic resonator Metal organic frameworks

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