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47th European solid-state Device Research conference (ESSDERC)

作者： Ayele, Getenet Tesega Monfray, Stephane Boeuf, Frederic Cloarec, Jean-Pierre Ecoffey, Serge Drouin, Dominique Puyoo, Etienne Souifi, Abdelkader STMicroelectronics 850 Rue Jean Monnet F-38920 Crolles France INSA Lyon 20 Av Albert Einstein F-69100 Villeurbanne France Univ Sherbrooke 3IT Sherbrooke PQ J1K 2R1 Canada Univ Sherbrooke LN2 CNRS UMI 3463 Sherbrooke PQ J1K 2R1 Canada

ISBN: (纸本)9781509059782

The proof of concept of a new extended-gate pH sensor, developed on an industrial ultrathin body and buried oxide (UTBB) fully-depleted silicon-on-insulator (FDSOI) transistor, is reported. The strong electrostatic coupling between the front gate and back gate of UTBB FDSOI devices provide a signal amplification opportunity for sensing applications. On the other hand, the biasing capability through a capacitive divider circuit of a floating gate ISFET offers an ample advantage for fabrication of stable and CMOS compatible solid state chemical sensors. In addition, the deep downscaling of the state-of-the-art devices enables it to be sensitive at single-charge-resolution. By integrating aluminum oxide (Al2O3) for the pH sensing purpose, we obtained an extended-gate mode ISFET having a sensitivity of 475 mV/pH, which is superior to state-of-the-art low-power ISFETs.

关键词： Aluminum oxide capacitive coupling extended-gate fully-depleted silicon-on-insulator (FDSOI) ion-sensitive-field-effect-transistor(ISFET) pH sensor

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Wind Tunnel Testing of Directionally Sensitive Meander Metasurface and Sub-Resonant sensor arrays 30

Wind Tunnel Testing of Directionally Sensitive Meander Metas...

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30th AIAA/CEAS Aeroacoustics conference

作者： Galluscio, Charles A. Damani, Shishir Alexander, Nathan Devenport, William J. Starkey, Timothy A. Virginia Polytech Inst & State Univ Kevin T Crofton Dept Aerosp & Ocean Engn Blacksburg VA 24060 USA Univ Exeter Dept Phys & Astron Exeter EX4 4QL Devon England

ISBN: (数字)9781624107207

ISBN: (纸本)9781624107207

Locating a sound source through the disruptive turbulent boundary layer's pressure fluctuations is of great difficulty in aero/hydroacoustic applications. Conventional phased microphone arrays have trouble with this task because their diaphragms are exposed to the excess noise presented by these pressure fluctuations. In this paper, a meander-style meta-surface was modified to make it flow-compatible. A sub-resonant sensor array was also designed to filter out convective pressure fluctuations and improve signal to noise ratio. These novel array designs were tested alongside a conventional phased array in Virginia Tech's Stability Wind Tunnel. The metasurface array proved its ability to detect sound sources through a turbulent boundary layer although it was less accurate than the other two arrays. The sub-resonant sensor array displayed similar accuracy to the conventional phased array and provided insight into the design of through-cavities for convective pressure filtering. In combination, these results show promise for the development of novel acoustic array designs which can perform optimally through a turbulent boundary layer.

关键词： Signal to noise ratio

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Moving gas outlets for the evaluation of fast gas sensors

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sensorS AND ACTUATORS B-CHEMICAL 1999年第1-3期58卷 389-393页

作者： Tobias, P Mårtensson, P Göras, A Lundström, I Spetz, AL Linkoping Univ Swedish Sensor Ctr S SENCE S-58183 Linkoping Sweden Linkoping Univ Appl Phys Lab S-58183 Linkoping Sweden MECEL AB S-66200 Amal Sweden

A new method for the evaluation of fast gas sensors is described. By using moving gas outlets, we can quickly change the ambient around a sensor. Different platinum-insulator-silicon carbide (MISiC) structures are investigated. Their sensor response contains fast components, which respond within milliseconds to a change in the ambient from a reducing gas to an oxidising gas and vice versa. Cylinder specific monitoring of car engines with the MISiC structures is discussed. (C) 1999 Elsevier Science S.A. AU rights reserved.

关键词： gas sensors automotive electronics flow silicon carbide high temperature MIS devices

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Where Technology Meets Security: Key Storage and Data Separation for System-on-Chips 44

Where Technology Meets Security: Key Storage and Data Separa...

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44th IEEE European solid state Circuits conference (ESSCIRC)

作者： Sigl, Georg Gross, Mathieu Pehl, Michael Tech Univ Munich Dept Elect & Comp Engn Munich Germany AISEC Fraunhofer Inst Appl & Integrated Secur Munich Germany

ISBN: (纸本)9781538654040

This article investigates the dependency between advances in chip technology, architectures, and security. Two major properties of secure systems are analyzed in this context: data separation of different applications and secure storage of cryptographic keys. We discuss first examples for compromising data separation, e.g. the Rowhammer attack on modern DRAMs, enabled by the sensitivity of shrinked DRAM cells for crosstalk effects, or Meltdown and Spectre attacks using cache side channels. These attacks show the dependency between data separation and advances in technology and architecture. Even more powerful attacks exploiting bus and network-on-chip traffic are possible. Another area where technology meets security is the storage of cryptographic keys. New technologies offer new ways to realize non-volatile memory (NVM) for secret data storage and to implement physical unclonable functions (PUFs), which generate the key during system start and do not store it permanently in NVM. To enable good PUFs, technology and security people should work together as early as possible in the development phase, since PUFs must be characterized carefully. Ideally a PUF module is provided as a characterized and reliable security primitive in the design library. If we manage to take security already into account in early technology development phases and during architecture definition, we will get more secure systems-on-chip in the future.

关键词： Task analysis Security Nonvolatile memory Secure storage Random access memory arrays

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Chemical Synthesis of Polycarbazole (PCz), Modification and pH sensor Application

Chemical Synthesis of Polycarbazole (PCz), Modification and ...

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6th International conference on Sensing Technology (ICST)

作者： Gupta, Bhavana Prakash, Rajiv Melvin, Ambrose Banaras Hindu Univ Sch Mat Sci & Technol Indian Inst Technol Varanasi 221005 Uttar Pradesh India Tata Inst Fundamental Res Dept Chem Sci Mat Chem Grp Mumbai 400005 Maharashtra India

ISBN: (纸本)9781467322485;9781467327084

Synthesis of Polycarbazole (PCz) is reported using anhydrous ferric chloride as an oxidizing agents. A comparative study of chemically synthesized PCz with electrochemically synthesized is also made. A composite of PCz and polyvinyl chloride (PVC) containing 20% PVC by weight is synthesized and used for the development of solid state pH electrode. The composite was synthesized to improve mechanical strength, stability, and restrict solubility. The pH sensor response is found to be reversible and linear in the pH range 5-10 with sensitivity 35 +/- 2mV/pH. PCz and PVC (20 wt%) based pH sensors show potential applications in development of pH transducers based sensors/biosensors.

关键词： Polycarbazole chemical synthesis pH sensor

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Approach to fast fabrication of micro-sensors with high repetition 4ω-Diode-Pumped solid-state Lasers

Approach to fast fabrication of micro-sensors with high repe...

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PICALO 2004 - 1st Pacific International conference on applications of Laser and Optics

作者： Ostendorf, Andreas Kulik, Christian Meyer, Frank Laser Zentrum Hannover e.V. Hollerithalle 8 D-30419 Hannover Germany

ISBN: (纸本)0912035765

A modification of standard photolithographic processes for thin film technology by Laser Direct Writing (LDW) is introduced. Employing a high frequency UV-Diode-Pumped solid-state Lasers (DPSSL) combined with a scanner beam guiding system, the demonstrated approach optimizes development cycles of new sensor devices. The presented image-mask-free technique allows a structuring of photo-sensitive resist in micrometer range on a base of CAD templates, which insures a high flexibility concerning modifications of the micro-machined geometries. Especially during the development of sensor systems (prototyping) and small batch series, a distinct cost advantage can be obtained, since time- and cost-consuming image mask technology is avoided. The potential of LDW has been proved by machining components of a micro-eddy current sensor with a minimum lateral dimension of some 10 μm in photo resists of 2 μm, 24 μm and 52 μm thickness with excellent geometrical features (smooth edges, flank angle αFi ˜ 90°). Whereas the machining duration in sub-second range (for 2 um thick resists) emphasizes the potential for high flexible prototyping in thin film technology.

关键词： Thin films

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Ultrasonic array sensor using piezoelectric film on silicon diaphragm and its resonant-frequency tuning 12

Ultrasonic array sensor using piezoelectric film on silicon ...

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12th International conference on solid-state sensors, Actuators and Microsystems (TRANSDUCERS 03)

作者： Yamashita, K Murakami, H Chansomphou, L Okuyama, M Osaka Univ Grad Sch Engn Sci Toyonaka Osaka 5608531 Japan

ISBN: (纸本)0780377311

Ultrasonic micro-array sensors using piezoelectric PZT (Pb(Zr,Ti)O-3) thin films on silicon diaphragms have been fabricated and their resonant frequency could be tuned after the device fabrication. The resonant frequencies of elements of the fabricated sensor array have scattered in 12% due to non-uniformity of material properties, dimensions of diaphragms and film thickness. The resonant frequency of each element has been tuned to an appropriate value by applying adequate electrical poling. Finally, the three-dimensional positions of objects have been successfully determined by using the tuned array sensor.

关键词： Fabrication Piezoelectric films Resonance Resonant frequency Semiconductor thin films sensor arrays Silicon Thin film devices Thin film sensors Tuning

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A microfluidic oxygenator for biological cell culture

A microfluidic oxygenator for biological cell culture

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Lam, Raymond H. W. Kim, Min-Cheol Thorsen, Todd MIT Hatsopoulos Microfluids Lab 77 Massachusetts Ave Cambridge MA 02139 USA

ISBN: (纸本)9781424408412

In this paper, we report on the development of a microfluidic platform in which dissolved oxygen (DO) concentrations can be dynamically adjusted for cell culture applications. The DO concentration in culture media flowing through enclosed microchannels is regulated by the diffusion through an elastromeric interface from an overhead gas channel, using an oxygen-sensitive dye embedded in the fluid channel as a sensor. Using a microchannel network functioning as an oxygen/nitrogen mixer, the growth characteristics of routine fibroblast cells (3T3) were analyzed as a function of eight discrete DO concentrations in culture media within a single device, ranging from anaerobic (0 ppm) to fully saturated (42 ppm).

关键词： microfluid oxygenator sensor cell

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Integrated resonant accelerometer microsystem for automotive applications

Integrated resonant accelerometer microsystem for automotive...

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Proceedings of the 1997 International conference on solid-state sensors and Actuators. Part 2 (of 2)

作者： Ohlckers, Per Holm, Reidar Jakobsen, Henrik Kvisteroy, Terje Kittilsland, Gjermund Nese, Martin Nilsen, Svein M. Ferber, Alain SensoNor Horten Norway

In the project 'IRMA-EU' (IRMA: Integrated Resonant Accelerometer Microsystem for Automotive applications), a project sponsored by the European Commission under ESPRIT, SensoNor and project partners Autoliv and SINTEF are developing a resonant structure two-chip accelerometer silicon microsystem for automotive applications, the SA30: Crash sensor for front impacts, with range ± 50g. The project is focusing on the development of key process technologies, product designs and manufacture of functional prototypes. The IRMA project is coordinated with other activities performed by the partners to cover all aspects of research and technology development as well establishment of high volume production capabilities needed for successful product innovation of this new generation of crash sensors. The sensing principle is an acceleration sensitive resonant structure, with an ASIC for resonance control and signal conditioning. Prototypes in silicon of both the sensor chip and the ASIC chip have confirmed the feasibility of the concept, and ramp up to high volume production has now started.

关键词： Accelerometers

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development of a MOEMS Sun sensor for space applications

Development of a MOEMS Sun sensor for space applications

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13th International conference on solid-state sensors, Actuators and Microsystems

作者： Böhnke, T Stenmark, L Uppsala Univ Dept Engn Sci ASTC S-75105 Uppsala Sweden

ISBN: (纸本)0780389948

This contribution presents the development of a miniaturized sun sensor for sun angle detection in space applications. The sun sensor has a field of view (FoV) of greater than 2 pi sr and a resolution of approximately 1 degree in elevation and azimuth angle;thus, it is a coarse sun sensor with the advantage of having a large field of view. Key elements of this sun sensor are its curved shape, the photosensitive layer consisting of copper indium gallium diselenide (CIGS), the transparent conductive layer consisting of thin molybdenum or aluminum doped zinc oxide, and its integrated design. The sun sensor will be one of the sensors in the attitude determination and control system (ADCS) of a nano-satellite.

关键词： Sun sensor position sensitive detector transparent conductive layer satellite sun angle

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