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5th South African conference on sensors, MEMS, and Electro-Optic Systems (SMEOS)

作者： Goss, Tristan M. Fourie, Henning Viljoen, Johan W. HENSOLDT Optron Pty Ltd Nellmapius Dr ZA-0157 Irene South Africa

ISBN: (纸本)9781510627536

With the emergence of Shortwave Infrared (SWIR) InGaAs detector arrays, designers of electro-optical imaging systems can take advantage of the reduced Rayleigh scattering of the SWIR band when compared to visible, resulting in higher contrast images through haze, mist, rain, fog and challenging atmospheric conditions. Furthermore, from a military standpoint, SWIR is invisible to the human eye, thus enabling covert operations and is a good choice for targeting with laser rangefinders and designators that transmits between 1060 nm and 1570 nm. A SWIR sensor can also be used in night vision applications taking advantage of an atmospheric phenomenon called night sky radiance (or night glow) that emits five to seven times more illumination than starlight, nearly all of it in the SWIR wavelengths. In a typical airborne application a sensor's performance is mechanically constrained by the space/volume available and the aperture size limit. This paper describes a model based trade-off methodology to select the optimal Field of View (FOV) for an aperture limited SWIR sensor. This method balances the influences FOV has on sensitivity and resolution. The SWIR sensor's performance is optimized within mechanical constraints and for the intended application scenarios. In the SWIR band the analysis is expanded to include night time scenarios and laser "see-spot" performance. This model is also adapted for input variable compliance with the industry standard NV-IPM range performance model' enabling cross-correlation between the two model's results. An example of a SWIR sensor analysis applying this design model is presented, highlighting the performance advantages that can be gained by maximizing the aperture utilization and choosing the optimal FOV for an imaging sensor when used in airborne targeting applications.

关键词： SWIR imaging sensor airborne targeting field of view resolution sensitivity performance

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Recent advances in biologically sensitive field-effect transistors (BioFETs)

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ANALYST 2002年第9期127卷 1137-1151页

作者： Schöning, MJ Poghossian, A Univ Appl Sci Aachen D-52428 Julich Germany Forschungszentrum Julich Inst Thin Films & Interfaces D-52425 Julich Germany

Thirty years have elapsed since the invention of the ISFET by Bergveld. Since that time, various types of BioFETs have been developed using different biological recognition elements starting with enzymes and immunological species through DNA molecules to living cells and even living organisms. The study of the current state of BioFETs reveals that some BioFETs, like EnFETs are at a well-developed stage, whereas other BioFETs such as GenFETs and beetle/chip FETs are in the initial stages of development. There are still a number of fundamental and technological problems that must be overcome, before the first reliable BioFET-based bioanalytical microsystem will appear on the market. Therefore, intensive interdisciplinary research and cooperation of specialists from different disciplines is still required, not only in the field of biotechnology and bioengineer- ing but also in related disciplines, like informatics, solid-state physics, microtechnology, genetics as well as specific tech- niques such as sensor integration and packaging, interfacing circuits, etc. Hence, future prospects for BioFET developments can be expected in the following directions: (i) BioFETs utilising intact biological receptors (ion channel receptors, binding proteins, etc.) that bind specific drugs and reagents in such a way that they produce a conformational change in the protein structure. This conformational change, in turns, triggers a cellular response, (e.g., the opening of an ion channel of the membrane (so-called ion-channel switch biosensor); (ii) ISFET-based DNA chips can be considered as a new tool for the simultaneous analysis of thousands of nucleic acids with a broad area of potential applications in biomedical research and clinical diagnostics, genomics, drug screening, environmental monitor- ing and food industry. They combine both the possibility of direct DNA hybridisation detection without the use of labelled probes and the large integration ability of these active microelect

关键词： Glucose Oxidase chemical analysis micro total analysis systems Field effect transistors Biosensors signal acquisition biological organs hybrid systems Electronic Nose Oxygen electrodes sensor arrays Si technology

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development of highly roughened porous Au electrode with Pt nano-particle for electrochemical sensor applications

Development of highly roughened porous Au electrode with Pt ...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Kim, J.D. Lee, Y.J. Park, J.Y. Kim, H. Kim, Y. Department of Electronic Engineering Kwangwoon University Seoul Korea Republic of Department of Chemical Engineering Kwangwoon University Seoul Korea Republic of

ISBN: (纸本)9781424441938

Highly roughened coral-like porous Au electrode with electroplated Pt nano-particles was newly developed and characterized. The porosity and window-pore size of the fabricated porous Au electrode were approximately 50 % and 100-300nm, respectively. The electroplated Pt nano-particle size was approximately 5-10nm. For miniaturized electrochemical and biochemical sensor applications, the fabricated Au-Pt nano-electrode was characterized in sulfuric acid and H2O2 solutions. It showed extremely large sensitivity of 0.166 mA/mMcm2, excellent linearity of 0.989, and surface roughness factor of 488, which were the highest values in the previously reported ones. ©2009 IEEE.

关键词： Electrochemical sensors

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Detection system of incident slippage and friction coefficient based on a flexible tactile sensor with structural electrodes

Detection system of incident slippage and friction coefficie...

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16th International conference On solid-state sensors, Actuators and Microsystems

作者： Chuang, Cheng-Hsin Liou, Yi-Rong Chen, Chih-Wei So Taiwan Univ Dept Mech Engn Tainan 71005 Taiwan So Taiwan Univ Inst Nanotechnol Tainan 71005 Taiwan

ISBN: (纸本)9781457701573

It is a task to estimate the surface roughness and slippage as a robotic finger slides through an object, but this is an essential perception of a human hand as a finger moves across a wide variety of surfaces or the hand grasps objects. In the present study, a novel flexible tactile sensor was developed for detecting the coefficient of friction and slippage. We introduced an innovative concept of structural electrodes consisting of a microstructure and distributed microelectrodes on a piezoelectric film to detect the lateral force that acts on a tactile sensor. As experimental results show, the output signals of two distributed microelectrodes can reveal the opposite voltage peaks corresponding to the compressive and tensile stress state underneath the microstructure as the held object begins to slip. Clear-cut signals effectively improve the definition of slippage occurrence compared with other slippage sensors. Furthermore, the coefficients of static friction for objects made of different materials were also evaluated based on slippage detection in a drop test. In order to facilitate the applications in a robot, a compact readout module integrated with a tactile sensor was also developed and demonstrated based on a PC-based program. (C) 2012 Elsevier B.V. All rights reserved.

关键词： Tactile sensor Slippage Piezoelectric PVDF (a polymer of vinylidene fluoride)

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2014 IEEE sensors applications Symposium, SAS 2014 - Proceedings

2014 IEEE Sensors Applications Symposium, SAS 2014 - Proceed...

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2014 9th IEEE sensors applications Symposium, SAS 2014

ISBN: (纸本)9781479921805

The proceedings contain 73 papers. The topics discussed include: wide-slot antenna for breast imaging applications;measurement uncertainties in differential radar applied to breast imaging;contactless determination of gas concentration and pressure based on a low jitter mmWave FMC radar;development of a frequency-shifted feedback fiber laser at 777.5 nm for range sensing applications;2-D vector field visualization of corrosion in a small-bore piping system using bobbin-type integrated hall and GMR sensors arrays;non-destructive evaluation of far-side corrosion around the multi-layered rivet by using the solid-state hall sensor array;modeling, quantification, optimization - energy efficiency in distributed, embedded systems;and energy efficient handling of big data in embedded, wireless sensor networks.

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Reservoir computing compensates slow response of chemosensor arrays exposed to fast varying gas concentrations in continuous monitoring

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sensorS AND ACTUATORS B-CHEMICAL 2015年 215卷 618-629页

作者： Fonollosa, Jordi Sheik, Sadique Huerta, Ramon Marco, Santiago Univ Calif San Diego BioCircuits Inst BC La Jolla CA 92093 USA Inst Bioengn Catalonia IBEC Signal & Informat Proc Sensing Syst Barcelona 08028 Spain Univ Barcelona Dept Elect E-08028 Barcelona Spain

Metal oxide (MOX) gas sensors arrays are a predominant technological choice to perform fundamental tasks of chemical detection. Yet, their use has been mainly limited to relatively controlled instrument configurations where the sensor array is placed within a closed measurement chamber. Usually, the experimental protocol is defined beforehand and it includes three stages: the array is first exposed to a gas reference, then to the gas sample, and finally to the reference again to recover the initial state. Such sampling procedure requires signal acquisition during the complete experimental protocol and usually delays the output prediction until the predefined measurement duration is complete. Due to the slow time response of chemical sensors, the completion of the measurement typically requires minutes. In this paper we propose the use of reservoir computing (RC) algorithms to overcome the slow temporal dynamics of chemical sensor arrays, allowing identification and quantification of chemicals of interest continuously and reducing measurement delays. We generated two datasets to test the ability of RC algorithms to provide accurate and continuous prediction to fast varying gas concentrations in real time. Both datasets - one generated with synthetic data and the other acquired from actual gas sensors provide time series of MOX sensors exposed to binary gas mixtures where concentration levels change randomly over time. Our results show that our approach improves the time response of the sensory system and provides accurate predictions in real time, making the system specifically suitable for online monitoring applications. Finally, the collected dataset and developed code are made publicly available to the research community for further studies. (C) 2015 Elsevier B.V. All rights reserved.

关键词： Electronic nose Chemical sensors Reservoir computing Continuous gas prediction Real time detection

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A universal 3D imaging sensor on a silicon photonics platform

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NATURE 2021年第7845期590卷 256-261页

作者： Rogers, Christopher Piggott, Alexander Y. Thomson, David J. Wiser, Robert F. Opris, Ion E. Fortune, Steven A. Compston, Andrew J. Gondarenko, Alexander Meng, Fanfan Chen, Xia Reed, Graham T. Nicolaescu, Remus Pointcloud Inc San Francisco CA 94107 USA Univ Southampton Optoelect Res Ctr Southampton Hants England Opris Consulting San Jose CA USA

A compact, high-performance silicon photonics-based light detection and ranging system for three-dimensional imaging is developed that should be amenable to low-cost mass manufacturing Accurate three-dimensional (3D) imaging is essential for machines to map and interact with the physical world(1,2). Although numerous 3D imaging technologies exist, each addressing niche applications with varying degrees of success, none has achieved the breadth of applicability and impact that digital image sensors have in the two-dimensional imaging world(3-10). A large-scale two-dimensional array of coherent detector pixels operating as a light detection and ranging system could serve as a universal 3D imaging platform. Such a system would offer high depth accuracy and immunity to interference from sunlight, as well as the ability to measure the velocity of moving objects directly(11). Owing to difficulties in providing electrical and photonic connections to every pixel, previous systems have been restricted to fewer than 20 pixels(12-15). Here we demonstrate the operation of a large-scale coherent detector array, consisting of 512 pixels, in a 3D imaging system. Leveraging recent advances in the monolithic integration of photonic and electronic circuits, a dense array of optical heterodyne detectors is combined with an integrated electronic readout architecture, enabling straightforward scaling to arbitrarily large arrays. Two-axis solid-state beam steering eliminates any trade-off between field of view and range. Operating at the quantum noise limit(16,17), our system achieves an accuracy of 3.1 millimetres at a distance of 75 metres when using only 4 milliwatts of light, an order of magnitude more accurate than existing solid-state systems at such ranges. Future reductions of pixel size using state-of-the-art components could yield resolutions in excess of 20 megapixels for arrays the size of a consumer camera sensor. This result paves the way for the development and proliferati

关键词： Electrical and electronic engineering Imaging and sensing Integrated optics Nanophotonics and plasmonics

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development of an array of polymer/MnO₂/Fe₂O₃ mixtures for use in gas sensing applications

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sensorS AND ACTUATORS B-CHEMICAL 2006年第1-2期118卷 386-392页

作者： Arshak, K. Gaidan, I. Univ Limerick Dept Elect & Comp Engn Limerick Ireland

This paper investigates an array of thick-films gas sensors made from polymer, iron oxide and manganese oxide. The films were printed onto glass substrates with silver electrodes. The effects of different gas vapours on the devices at room temperature were investigated. The response of the sensors was defined as, Delta R = ((R-gas - R-air)/R-air) x 100 and was seen to increase with increasing gas vapour concentration. It was observed that various film compositions showed a higher response to propanol and toluene than that to chloroform, ethanol and hexane. The response of the sensors to the gas vapours was seen to change depending on the composition used to form the sensing layer. For example, sensor S-4 was formed using PVB and 1.5 wt.% carbon black and displayed a higher response to 5000 ppm propanol (43.27) than that to toluene (19.43). While the response of S-3, with a sensing layer composed of 75/25% Fe2O3/MnO2 and 5 wt.% PVB binder and 1.5 wt.% carbon black to the same concentration of propanol and toluene at room temperature was 62.57 and 45.95%, respectively. (c) 2006 Elsevier B.V. All rights reserved.

关键词： oxides polymer gas sensors thick film

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0.5MM x 0.5MM HIGH-TEMPERATURE PRESSURE sensorS FABRICATED WITH IC-FOUNDRY-COMPATIBLE PROCESS IN (100) / (111) HYBRID SOI WAFERS 21

0.5MM x 0.5MM HIGH-TEMPERATURE PRESSURE SENSORS FABRICATED W...

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21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Li, Peng Wang, Jiachou Li, Xinxin Chinese Acad Sci Shanghai Inst Microsyst & Informat Technol State Key Lab Transducer Technol Shanghai 200050 Peoples R China Fudan Univ Sch Microelect State Key Lab ASIC & Syst Shanghai 200433 Peoples R China

ISBN: (纸本)9780738125626

In this paper, a tiny 0.5mm x 0.5mm high-temperature piezoresistive pressure sensor is proposed and fabricated only from the front side of (100) / (111) hybrid SOI silicon wafer (Device layer is (100) silicon and handle layer is (111) silicon) for IC-foundry-compatible, high-yield and low-cost batch production. In our structure design, the device layer of (100) silicon is specifically selected to optimize the piezoresistive performance characteristics of the pressure sensor, while the handle layer of (111) silicon is used to construct sensing diaphragm and pressure-reference cavity. Taking advantages of the benefits of front-sided shallow etching and self-stop wet etching, the realization of the pressure-sensing diaphragm with uniform and controllable thickness is achieved, and the pressure-reference cavity is embedded into the handle layer of (111) silicon. Without complex double-sided micromachining, wafer bonding, and cavity-SOI needed, the fabricated pressure sensor chip-size is as small as 0.5mm x 0.5mm. The testing results show that the 1500-kPa-ranged pressure sensor has a full scale output of 180mV/1500kPa/10VDC, and a high accuracy (combined non-linearity, hysteresis and repeatability) of +/- 0.14%F.S in the range of -55 degrees C to 200 degrees C. In addition, a low thermal hysteresis of 0.082%F S at 200 degrees C is achieved. The small-sized high temperature pressure sensors are promising in wind tunnel applications and volume production.

关键词： Piezoresistive pressure sensor high temperature ultra-small size (100) / (111) hybrid SOI wafer front-sided bulk-micro machining process

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Locally synthesized metal oxide nanowire-devices and their gas sensing applications

Locally synthesized metal oxide nanowire-devices and their g...

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International solid-state sensors, Actuators and Microsystems conference

作者： Kim, D. Lim, M.A. Yang, D. Li, Z. Park, C.O. Park, I. Department of Mechanical Engineering KI for the NanoCentury KAIST Daejon Korea Republic of Intelligent Infrastructure Laboratory Hewlett Packard Laboratory Palo Alto CA United States Department of Materials Science and Engineering KAIST Daejon Korea Republic of

ISBN: (纸本)9781457701573

Highly efficient and simple process to fabricate ZnO nanowire-based gas sensing devices was developed. ZnO nanowires (NWs) were locally synthesized by hydrothermal method using localized thermal energy, which is generated by microheater arrays integrated in the device. To enhance the sensitivity to hydrogen (H2) gas of ZnO NW-based sensor, the surface of ZnO NWs was modified with Platinum (Pt) nanoparticles via local wet chemical reaction. H2 sensing performances of the intrinsic and Pt-coated ZnO NWs were compared at two operating temperatures (250C and 350C). We found that the sensing device based on ZnO NWs decorated with Pt nanoparticles has higher sensitivity compared with intrinsic ZnO NW sensor. © 2011 IEEE.

关键词： Hydrothermal synthesis

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