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development of High Sensitivity CMOS-MEMS Inertia sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease 46

Development of High Sensitivity CMOS-MEMS Inertia Sensor and...

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46th European solid-state Device Research conference (ESSDERC) / 42nd European solid-state Circuits conference (ESSCIRC)

作者： Masu, Kazuya Yamane, Daisuke Machida, Katsuyuki Sone, Masato Miyake, Yoshihiro Tokyo Inst Technol Inst Innovat Res FIRST Yokohama Kanagawa 2268503 Japan Tokyo Inst Technol Sch Comp Dept Comp Sci Yokohama Kanagawa 2268503 Japan

ISBN: (纸本)9781509029723

In this paper, we present our recent progress of a high sensitivity complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS) inertia sensor and its application to early-stage diagnosis of Parkinson's disease. The feature of the CMOS-MEMS sensor is the use of gold proof mass. High density of gold enables us to increase sensitivity by reducing thermo-mechanical noise that is inversely proportional to proof mass. We then show the developed CMOS-MEMS multi-physics design environment. An equivalent circuit of a MEMS accelerometer has been designed to simultaneously understand both the mechanical and the electrical behaviors. One of the potential applications of the high sensitivity inertia sensor is also discussed by focusing on early-stage diagnosis of Parkinson's disease.

关键词： CMOS-MEMS gold proof mass inertia sensor multi-physics design environment Parkinson's disease

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Highlights of 2015 international image sensor workshop

Highlights of 2015 international image sensor workshop

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Imaging Systems and applications, IS 2016

作者： Fowler, Boyd Omnivision Technologies United States

This presentation will discuss the latest developments in solid state image sensor technology. Topics include 3D stacked image sensors, photon counting arrays, image sensors with phase detection pixels and time of fli... 详细信息

ISBN: (纸本)9781943580156

关键词： Image sensors

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Pressure sensor based on organic single crystal air-gap transistor

Pressure sensor based on organic single crystal air-gap tran...

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： Marco J. Pereira Cédric Ayela Lionel Hirsch Isabelle Dufour Alejandro Briseno Micaela Matta Yoann Olivier Luca Muccioli Alfred Crosby Guillaume Wantz Univ. Bordeaux IMS UMR 5218 Talence FRANCE Polymer Science & Engineering University of Massachusetts Amherst MA USA Univ. Bordeaux LCPO UMR 5629 Pessac FRANCE Laboratory for Chemistry of Novel Materials University of Mons Mons BELGIUM

ISBN: (纸本)9781538627334

With the development of new technologies, researchers have recently focused their interest on flexible electronics to improve the interaction between users and devices. In this context, integrated ultra-low-pressure sensors remain a technological challenge. Here, we show that organic single crystal-based air-gap transistors fabricated by soft lithography are extremely sensitive to mechanical strain and pressure. When low forces are applied to the suspended semiconducting crystal (rubrene), the gated transistors show that drain currents as output signals are extremely sensitive to the deformations. Incredibly high gauge factors, over 4000, are measured using this technique. Further investigation shows that the contact resistance at the rubrene-gold interface is responsible for the high sensing performances. Such a platform is also able to detect sound waves with high sensitivity, making these simple devices suitable for applications in pressure sensing.

关键词： Crystals Transistors Air gaps Electrodes Pressure sensors Strain

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Experimental validation of a novel bulk acoustic wave sensor read-out circuit 13

Experimental validation of a novel bulk acoustic wave sensor...

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13th IEEE International conference on solid-state and Integrated-Circuit Technology (ICSICT)

作者： Gao Yang Yin Xi-yang Huang Zhen-hua Lv Jun-guang China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China Southwest Univ Sci & Technol Sch Informat Engn Mianyang 621010 Sichuan Peoples R China Chinese Acad Sci Inst High Energy Phys State Key Lab Particle Detect & Elect Beijing 100049 Peoples R China

ISBN: (纸本)9781467397193

The feasibility of the scheme to realize the novel bulk acoustic wave (BAW) sensor readout circuit has been verified by simulation, but further experimental verification is needed. Using the film bulk acoustic resonator (FBAR) with about 1.5 GHz series resonant frequency as the device under test (DUT), we designed and fabricated microstrip six-port network and detector on PCB which meet the requirements of FBAR resonant frequency measurement bandwidth (1.3 - 1.7 GHz). We obtained the measurement result of the reflection coefficient frequency (F-f) curve of the simulated DUT (50 Omega SMA matched load) by using radio frequency signal generator and oscilloscope. Comparing the measurement results from six-port reflectometer and vector network analyzer (VNA), we found they were quite consistent. We verified through experiment that "the six-port reflectometer- based BAW sensor readout circuit" can be used for the measurement of FBAR resonant frequency. Our research is useful for the practical BAW sensor development and the VNA on a chip (VNA-on-chip) design.

关键词： Estimation Field programmable gate arrays OFDM Modulation Filtration Clocks Signal processing algorithms

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Light propagation in strip and slot waveguide arrays for sensing 7

Light propagation in strip and slot waveguide arrays for sen...

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conference on Advanced sensor Systems and applications VII

作者： Ma, Qingyan Qi, Fan Wang, Yufei Liu, Zhishuang Zheng, Wanhua Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Lab Beijing Peoples R China Chinese Acad Sci Inst Semicond Lab Solid State Optoelect Informat Technol Beijing Peoples R China Univ Chinese Acad Sci Coll Mat Sci & Optoelect Technol Beijing Peoples R China Univ Chinese Acad Sci Coll Future Technol Beijing Peoples R China

ISBN: (数字)9781510604704

ISBN: (纸本)9781510604698;9781510604704

Light propagation in strip and slot waveguide arrays for sensing are proposed and analyzed with a new theory of quantum walk. The waveguide arrays are designed on silicon-on-insulator and can be fabricated with mature and cost-efficient complementary metal-oxide semiconductor technology. A new slot waveguide array modified by conventional strip waveguide array with electric field mainly confined in the cladding region is investigated. Quantum walks have an exact mapping to classical phenomena as verified by experiments using bright laser light, so that they are introduced in our work as theoretical foundation. We take the width of waveguide of 450 nm and the coupling distance of 200 nm for strip waveguide array, and 420 nm and 180 nm for slot waveguide array, but with a 100nm slot in the center of waveguide. At last the waveguide array covered by a thin layer of graphene is investigated, which brings higher sensing property as well as a much better biocompatibility. With the monochrome light injection the intensity distribution at the end of the arrays changes with the refractive index of the sensing area (cladding region) and it can be explained by quantum walks theory. The designed waveguide arrays can possess compact footprint and high refractive index resolution, reaching 1E-11 RIU theoretically.

关键词： waveguide array sensing quantum walk graphene optical devices

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Beam shaping for kilowatt fiber-coupled diode lasers by using one-step beam cutting-rotating of prisms

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APPLIED OPTICS 2016年第34期55卷 9769-9773页

作者： Wu, Yulong Dong, Zhiyong Chen, Yongqi Qi, Yaoyao Yuan, Xiandan Qi, Yunfei Xu, Li Lin, Xuechun Zou, Yonggang Zhao, Pengfei Changchun Univ Sci & Technol State Key Lab High Power Semicond Lasers Changchun 130022 Jilin Peoples R China Chinese Acad Sci Inst Semicond Lab All Solid State Light Sources Beijing 100083 Peoples R China

The beam quality mismatch of laser diode stacks in both axes limits many direct applications for fiber or solid laser pumping and material processing. In this paper, a one-step cutting-rotating beam shaping system has been designed to homogenize the beam quality of two polarization-multiplexing laser diode stacks. Coupling laser diode stacks consisting of eight bars into a standard fiber with a core diameter of 600 mu m and an NA of 0.22 is achieved. The simulative result shows that the system will have an output power over 1056 W. By using the technique, the production of compact and high brightness fiber-coupling diode lasers can be directly used for laser cladding and laser surface hardening processes. (C) 2016 Optical Society of America

关键词： Diode laser arrays Diode lasers Fiber lasers Laser beam shaping Laser beams Laser materials processing

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A 12-Bit Cyclic ADC for Image sensor 13

A 12-Bit Cyclic ADC for Image Sensor

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2016 13th IEEE International conference on solid-state and Integrated Circuit Technology (ICSICT)

作者： Can Peng Shuang Cui Chao Wang Xiao-Tian Yang Yu-Chun Chang State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin University Jilin Provincial Key Laboratory of Architectural Electricity & Comprehensive Energy Saving Jilin Jianzhu University

ISBN: (纸本)9781467397209

This paper describes a low-power fully differential cyclic analog-to-digital converter（ADC） for CMOS image sensor readout circuits. The Cyclic ADC with redundant signed digital（RSD） algorithm has various obviously advantages, such as simpler circuit configuration and more tolerance to offset error of comparator. An operational amplifier with gain-boosting is used to increase the accuracy of the ADC. A prototype ADC is fabricated in 0.15 um 1P6M CMOS technology. The results indicate that the ADC has a signal-to-noise and distortion ratio（SNDR） of 72.4dB and a spurious free dynamic range（SFDR） of 80.4d B. The power dissipation is 140 uW with a 5V supply, and the chip size is 9um×570um.

关键词： Estimation Field programmable gate arrays OFDM Modulation Filtration Clocks Signal processing algorithms

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ASIC-based Gauss Error Function Module Design for Neural Network Application 13

ASIC-based Gauss Error Function Module Design for Neural Net...

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2016 13th IEEE International conference on solid-state and Integrated Circuit Technology (ICSICT)

作者： Zhi-Tong Qiao Yan Han Jian Lei R.C.C.Cheung Will X.Y.Li Hiao-Xia Han Institute of Microelectronics and Nanoelectronics Zhejiang University Department of Electronic Engineering City University of Hong Kong School of Computer and Engineering Nanjing University of Science and Technology

ISBN: (纸本)9781467397209

The first ASIC-based Gauss error function(GEF module is proposed and fabricated in SMIC 180-nm process in this paper. A novel method is proposed to be used in the design. Experimental results show tha compared with the design based on Taylor expansion method, the proposed design decreases the absolute erro by 99.21%, reduces the area by 77.21% and reduces the delay by 11.96%. It can be used as a Soft Intellectua Property（IP） Core or Digital Signal Processor（DSP） to be easily applied to all kinds of Neural Network applications. The design proposed and the corresponding design and optimization methods can promote the research and development of the implantable neura prosthesis bio-chip and neural network.

关键词： Estimation Field programmable gate arrays OFDM Modulation Filtration Clocks Signal processing algorithms

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High Q Ba(Zn_1/3Ta_2/3)O₃ microwave resonator in a closed cavity for sensor applications

High Q Ba(Zn1/3Ta2/3)O3 mic...

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International conference on Recent Advances in Nano Science and Technology (RAINSAT)

作者： Sindam, Bashaiah Raju, K. C. James Univ Hyderabad Sch Phys Hyderabad 500046 Andhra Pradesh India Univ Hyderabad ACRHEM Hyderabad 500046 Andhra Pradesh India

Microwave dielectric resonator having a high Q-factor results in high sensitivity and it can be used as a sensing element in wireless passive sensor systems. In the present work, we demonstrated high Q resonator enclosed in a metallic cavity which is highly sensitive to resonance frequency and quality factor change arising from small test samples kept on the surface of the resonator. The measurements are made at the resonance frequency of TE10 delta mode. The Ba(Zn1/3Ta2/3)O-3 resonators prepared by solid state reaction method exhibits high Q value of > 12,500. The experimental studies have been conducted on different type of rice grains cut to uniform size and shape to explore the response of resonance frequency and Quality factor. The change in effective dielectric constant and loss tangent of resonator with test samples were measured. Our work should provide a general guidance in development of high Q dielectric resonators for sensor applications. (C) 2015 Elsevier Ltd. All rights reserved.

关键词： Ba(Zn1/3Ta2/3)O-3 Dielectric resonators Resonator based sensors Microwave dielectric properties Quality factor VNA

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Design and Implementation of QCM Virtual Sensing Schemes for Analyses of Volatile Organic Compounds

Design and Implementation of QCM Virtual Sensing Schemes for...

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作者： Nicholas Colby Speller Louisiana State University and Agricultural and Mechanical College

学位级别：博士

sensor arrays have evolved as powerful approaches for providing detection and discrimination of volatile organic compounds (VOCs) as required across numerous analytical applications. Such systems typically comprise a number of cross reactive sensor elements, which generate analyte specific response patterns upon exposure to VOCs, and are known as multisensor arrays. When evaluated using statistical methods, these response patterns facilitate classification of VOCs. As an alternative, a single dynamically operated sensor could also be used to generate analyte specific response patterns. This approach is known as a virtual sensor array (VSA) and can exhibit significant advantages when compared to MSAs. Some advantages include lower power consumption, sensor drift, material cost, and experimental preparatory time. Furthermore, several dynamically operated sensors could be used in tandem (using the MSA and VSA scheme in a complementary fashion) to fabricate virtual multisensor arrays (V-MSAs). Such systems would exhibit greater data density than either the MSA or VSA, and are promising for samples that are particularly challenging to discriminate. Among the various systems utilized for VOC discrimination, sorption based systems hold considerable promise because they are simple and inexpensive yet highly effective. This dissertation is focused on the development of array sensing schemes using ionic liquids (ILs), a group of uniform materials based on organic salts (GUMBOS), and binary blends of either IL or GUMBOS with polymer as recognition elements and the quartz crystal microbalance (QCM) as the transducer. Towards this end, ILs, which are defined as organic salts with melting points below 100 °C, and group of uniform materials based on organic salts (GUMBOS) which extend the melting range of ILs to 250 °C to encompass similar solid phase salts, were used to design the first examples of QCM based VSAs, and V-MSAs, for pure VOC and complex mixture analyses. Furthermore

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