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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Bhandari, R. Negi, S. Rieth, L. Solzbacher, F. University of Utah Salt Lake City UT United States Blackrock Microsystems Salt Lake City UT United States

ISBN: (纸本)9781424441938

Advances in silicon micromachining have lead to development of sophisticated neural interfaces such as the Utah Slant Electrode Array (USEA). The unique architecture of the USEA comprises of electrodes which increase in length in one direction, while being constant in length in the other. When implanted into a peripheral nerve, the tips of the electrodes penetrate nerve fascicles, and are close to discrete populations of nerve fibers. Although the USEA has been widely used in neural prosthesis the current processes used to fabricate USEA impose limitations in the tolerances of the electrode array geometry. This paper presents a wafer scale fabrication method for USEA which offers high precision and control in electrode geometry and their electrical characteristics. ©2009 IEEE.

关键词： Aspect ratio

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High resolution linear arrays

High resolution linear arrays

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solid-state Imagers and Their applications 1985

作者： Bosiers, Jan Vermeiren, Jan Sevenhans, Jan Interuniversity Microelectronics Center kapeldreef 75 LeuvenB3050 Belgium Sachs-Freeman Associates Inc BowieMD20715 United States

This paper describes the methodology, which is used in IMEC for the realization of very high resolution linear image sensors. The key elements in design and processing are the use of the DEPLI-sensor principle, a quadrilinear read-out approach and the use of p-p+ epimaterial. The feasibility of these principles are demonstrated on devices with a pitch of 8,6,5 and 4 urn and with a number of pixels ranging from BOO to 4096. A standard triple poly, buried channel process is used for the fabrication of the devices. A charge transfer inefficiency of better than 1.E-5 is measured and a data rate of over 5 MHz can be achieved. The dark current is less than 2 nA/cm2, the responsivity equals 0.36 A/W at 700 nm wavelength and the non-uniformity is less than ± 5 % for all sensor types. © 1986 SPIE. All rights reserved.

关键词： Charge transfer

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Realization of in situ doped n-type and p-type Si-microprobe array by selective vapor-liquid-solid (VLS) growth method

Realization of <i>in situ</i> doped n-type and p-type Si-mic...

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International conference on solid state Devices and Materials

作者： Islam, MS Ishino, H Kawano, T Takao, H Sawada, K Ishida, M Toyohashi Univ Technol Dept Elect & Elect Engn Toyohashi Aichi 4418580 Japan

In this paper we report the development of n-type and p-type Si-microprobe arrays fabricated by using in situ doping in vapor-liquid-solid, (VLS) growth employing a gas-source molecular beam epitaxy (GS-MBE) system as the growth environment. VLS growth using Si2H6 only gives intrinsic Si microprobes with the resistivity of similar to 10(4) Omega-cm, which decreases to similar to 10-(2) Omega-cm after phosphorous diffusion at 1100 degrees C. However, by incorporating in situ doping into the VLS growth method, more conductive probes (resistivity similar to 10(-3) Omega-cm) can be realized at a temperature less than 700 degrees C. The site and diameter of the VLS-grown probe can be controlled and the growth rate is higher than that of a poly-Si or epitaxial Si crystal grown by the vapor-solid (VS) method. Due to the low processing temperature, in situ doping is effective for realizing highly conductive probe arrays with smart sensor devices by a standard IC process followed by VLS growth. The wide range of doping leads to the possibility of using these probes for the fabrication of vertical active devices such as diodes and transistors.

关键词： vapor-liquid-solid (VLS) growth in situ doping molecular beam epitaxy (MBE) Si-microprobe array vertical active devices

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Robot-Assisted Backscatter Localization for IoT applications

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IEEE TRANSACTIONS ON WIRELESS COMMUNICATIONS 2020年第9期19卷 5807-5818页

作者： Zhang, Shengkai Wang, Wei Tang, Sheyang Jin, Shi Jiang, Tao Huazhong Univ Sci & Technol Sch Elect Informat & Commun Wuhan 430074 Peoples R China Southeast Univ Sch Informat Sci & Engn Nanjing 211189 Peoples R China

Recent years have witnessed the rapid proliferation of backscatter technologies that realize the ubiquitous and long-term connectivity to empower smart cities and smart homes. Localizing such backscatter tags is crucial for IoT-based smart applications. However, current backscatter localization systems require prior knowledge of the site, either a map or landmarks with known positions, which is laborious for deployment. To empower universal localization service, this paper presents Rover, an indoor localization system that localizes multiple backscatter tags without any start-up cost using a robot equipped with inertial sensors. Rover runs in a joint optimization framework, fusing measurements from backscattered WiFi signals and inertial sensors to simultaneously estimate the locations of both the robot and the connected tags. Our design addresses practical issues including interference among multiple tags, real-time processing, as well as the data marginalization problem in dealing with degenerated motions. We prototype Rover using off-the-shelf WiFi chips and customized backscatter tags. Our experiments show that Rover achieves localization accuracies of 39.3 cm for the robot and 74.6 cm for the tags.

关键词： Wireless fidelity Backscatter Interference Robot sensing systems Receivers Antenna arrays Backscatter localization inertial sensor channel state information

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Combined Linear-Logarithmic CMOS Image sensor with FPN Calibration 1

Combined Linear-Logarithmic CMOS Image Sensor with FPN Calib...

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IEEE International conference on Integrated Circuits, Technologies and applications (IEEE ICTA)

作者： Cui, Shuang Mu, Yusong Ding, Ning Jiang, Jiaqi Chang, Yuchun Jilin Univ Coll Elect Sci & Engn Changchun 130012 Jilin Peoples R China

ISBN: (纸本)9781538665510

This paper presents a charge compensated phototransistor for a high dynamic range linear-logarithmic CMOS image sensor. The pixel is based on the four-transistor active pixel structure which can automatically switch between the linear mode and logarithmic mode according to the incident light intensity. This paper also proposes a fixed pattern noise (FPN) correction technique for the proposed pixel sensor. The FPN caused by the threshold voltage variation of the transfer gate is corrected by the calibration method of two-step charge transfer. The prototype sensor consisting of a 160 x 200 pixel array with the pixel pitch of 8 x 8 mu m(2) is fabricated with a 0.18 gm 1P6M standard CMOS process. It is found that the dynamic range is achieved 169 dB and the FPN is reduced by 80%.

关键词： CMOS image sensor linear-logarithmic response phototransistor fixed pattern noise

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Highly sensitive temperature sensor with optomechanofluidic resonators 11

Highly sensitive temperature sensor with optomechanofluidic ...

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conference on Advanced sensor Systems and applications XI

作者： Liu, Yize Jiang, Junfeng Liu, Kun Wang, Shuang Niu, Panpan Wang, Tong Liu, Tiegen Tianjin Univ Sch Precis Instrument & Optoelect Engn Tianjin 300072 Peoples R China Tianjin Univ Minist Educ Key Lab Optoelect Informat Technol Tianjin 300072 Peoples R China Tianjin Univ Inst Opt Fiber Sensing Tianjin Opt Fiber Sensing Engn Ctr Tianjin 300072 Peoples R China

ISBN: (数字)9781510646520

ISBN: (纸本)9781510646520;9781510646513

Microfluidic optomechanical device are a unique optofluidics platform that can exhibit optomechanical oscillation in the 10-20 MHz, driven by radiation pressure (RP). The resonant enhancement of both mechanical and optical response in microcavity optomechanical devices allows exquisitely sensitive measurements of environment stimuli (pressure, force, sound speed change) and non-solid states of matter (freely flowing particles, viscous fluids). In this work, we experimentally investigate temperature tuning of these hollow-shell oscillators. We also demonstrate the effect of temperature on the frequency domain of optical machine oscillation resonance shift and applied it to the field of temperature sensing. Our result is a step towards optomechanical sensor in the field of temperature.

关键词： Optomechanical oscillation Temperature sensor Whispering gallery mode

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Dispensing of cells for highly parallel production of living cell microarrays

Dispensing of cells for highly parallel production of living...

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13th International conference on solid-state sensors and Actuators and Microsystems, TRANSDUCERS '05

作者： Gutmann, Oliver Wintermantel, Markus K. Niekrawietz, Remigius De Heij, Bas Zengerle, Roland Daub, Martina IMTEK University of Freiburg Laboratory for MEMS Applications Germany

ISBN: (纸本)0780389948

The growing new field of cell microarrays enables new biomedical assays. We present a unique parallel cell printing technique, which allows the fast production of living cell microarrays. A 24 nozzle printhead was used to spot vital cells in a non-contact manner. We used a cell suspension with 8×107 cells/ml to generate 100 microarrays containing 24 cell-spots each. Every spot contains between 80 and 100 living cells with extraordinary high survival rates of more than 90 % after printing. Compared to other cell printing techniques [1, 2] we achieved a four times higher cell number per spot and very evenly distributed cells within the spot. © 2005 IEEE.

关键词： arrays

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A tactile stress rate sensor for perception of fine surface features

A tactile stress rate sensor for perception of fine surface ...

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1991 International conference on solid-state sensors and Actuators

作者： Howe, Robert D. Div of Appl Sci Harvard Univ Cambridge MA USA

ISBN: (纸本)0879425857

The author reports the development of a new type of contact sensor for the measurement of fine surface features and textures down to the micron level. The sensor has a complicated rubber covering and is inexpensive and robust. As it is stroked across the surface of interest, piezoelectric transducers embedded in the sensor surface respond to stress induced by surface features. The sensor uses a current amplifier in place of the traditional charge amplifier, which eliminates many of the problems associated with piezoelectric transducers. The resulting signal is proportional to the rate of change of stress, or the stress rate. The signal can be interpreted with the aid of a solid mechanics model of the contact interaction and a linear deconvolution filter. The ability to detect features as small as a few micrometers has been experimentally confirmed. Intended applications include perception of surface properties to improve the robustness of robotic manipulation and rapid evaluation of surface finish in manufacturing.

关键词： Robots

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A flexible tactile sensing array based on novel capacitance mechanism

A flexible tactile sensing array based on novel capacitance ...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Cheng, Ming-Yuan Liao, B.-T. Huang, X.-H. Yang, Y.-J. Department of Mechanical Engineering National Taiwan University Taipei Taiwan

ISBN: (纸本)9781424441938

In this work, we present the development of a reliable capacitive tactile sensing array by using simple fabrication processes. The sensing array, which consists of a micromachined PDMS structure and a flexible printed circuit board with sensing electrodes, will be mainly used as the artificial skin for robot applications. The proposed design can effectively reduce the complexity of the capacitor structure of each sensing element without compromise in sensitivity. The electrical properties of different size of tactile sensing elements are measured. The corresponding scanning circuit is also implemented. The tactile images induced by the PMMA stamps of different shapes have been successfully captured. ©2009 IEEE.

关键词： Robot applications

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Direct field sensor. A mature solid state metering technology

Direct field sensor. A mature solid state metering technolog...

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Sixth International conference on Metering Apparatus and Tariffs for Electricity Supply

作者： Hannah, N.R. Pollock, M.R. Ltd United Kingdom

Ferraris metering elements were widely applicable to the whole range of prevailing market needs, whether for simple single-rate domestic devices or for the most complex polyphase devices with capabilities for reactive energy measurement and impulsing outputs. Until recently, no solid-state technology was able to offer the same universal flexibility, but a breakthrough in the development of a Hall-effect based transducer has changed the picture completely. The new technology is known as Vertical Hall and it overcomes the hitherto practical difficulties, namely temperature, linearity and offset problems, which have excluded it from metering applications in the past. As is described these new Vertical Hall based devices show exceptional performance.

关键词： Hall Effect Transducers

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