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Enabling MEMS chemical microsensor arrays for trace analyte detection

Enabling MEMS chemical microsensor arrays for trace analyte ...

14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Meier, Douglas C. Evju, Jon K. Benkstein, Kurt D. Raman, Baranidharan Boger, Zvi Lahr, David L. Semancik, Steve Natl Inst Stand & Technol Chem Sci & Technol Lab Gaithersburg MD 20899 USA

ISBN: (纸本)9781424408412

We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition of low concentration target analytes in background mixtures. This brief report emphasizes: 1) recently developed selection and processing methods for incorporation of high performance sensing materials on the MEMS platforms, 2) special operational modes and data acquisition approaches for ensuring good signal quality while maximizing information content, and 3) signal analysis techniques that include preprocessing routines and advanced recognition algorithms.

关键词： array conductance MEMS metal oxide microhotplate neural networks temperature

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Giant magnetoimpedance effect in soft magnetic wires for sensor applications

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sensorS AND ACTUATORS A-PHYSICAL 1997年第1-3期59卷 20-29页

作者： Vazquez, M Knobel, M Sanchez, ML Valenzuela, R Zhukov, AP CSIC INST CIENCIA MATLAS ROZASMADRIDSPAIN UNICAMP LMBTDFESCMIFGWBR-13083970 CAMPINASSPBRAZIL UNIV OVIEDO DEPT FISE-33007 OVIEDOSPAIN NATL AUTONOMOUS UNIV MEXICO INST MATMEXICO CITY 04510DFMEXICO CHERNOGOLOVKA SOLID STATE PHYS INST CHERNOGOLOVKA 142432MOSCOW DISTRICTRUSSIA

The giant magneto-impedance effect (GMI) consists of the large relative change of the impedance (up to around 300%) observed in magnetically very soft ribbon and wire alloys under the application of de magnetic fields (units of kA m(-1)), The phenomenology of the GMI effect is firstly described including a discussion about its origin which mainly lies in the classical skin-effect. An alternative approach to GMI phenomena considering equivalent circuits is also introduced. The main requirements to detect GMI is to count on a sample with very large circular susceptibility and reduced resistivity provided the frequency of the ac current flowing along the sample (necessary to evaluate the impedance) is high enough (roughly above 0.1 MHz for most samples here considered). The dependence on de magnetic field, mechanical stresses and particularly on thermal treatments resulting in the induced magnetic anisotropies or in the devitrification of amorphous samples into a nanocrystalline structure are reviewed. First results on GMI in glass-coated amorphous microwires are also reported. The use of the GMI as a tool for studying the inner circular magnetization process or for evaluating the magnetostriction is introduced. Finally, a description on various aspects regarding the development of magnetic field, current, proximity and stress sensor applications is presented. (C) 1997 Elsevier Science S.A.

关键词： soft magnetic materials amorphous wires magnetic sensors

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Charge Transfer Speed Analysis in Pinned Photodiode CMOS Image sensors based on a Pulsed Storage-Gate Method 45

Charge Transfer Speed Analysis in Pinned Photodiode CMOS Ima...

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45th European solid-state Device Research conference (ESSDERC)

作者： Pelamatti, Alice Goiffon, Vincent Chabane, Aziouz Magnan, Pierre Virmontois, Cedric Saint-Pe, Olivier de Boisanger, Michel Breart Univ Toulouse Image Sensor Res Team ISAE F-31055 Toulouse France Ctr Natl Etud Spatiales F-31400 Toulouse France Airbus Def & Space F-31030 Toulouse France

ISBN: (纸本)9781467371353

DRIVEN by low noise applications, Pinned Photodiode (PPD) [1]-[3] CMOS Image sensors (CIS) have recently become the main image sensors technology for both commercial and scientific applications. The PPD (schematized in Fig. 1a) consists in a buried photodiode, where the surface p+ implant, also referred to as pinning-implant, pins the surface at the substrate potential. This peculiar structure not only reduces the dark current (by isolating the PPD from the charges generated at the SiO₂-Si interface), but also limits the maximum PPD potential, often referred to as pinning voltage [4], which corresponds to the full depletion condition. The presence of this 'potential floor' enables true charge transfer from the PPD to the collection node (or to another buried channel), whereas in standard photodiodes only charge sharing between two capacitances is possible. The combination of these unique features has led in the last decade to the development of several PPD-based detectors for high speed applications, such as Time of Flight (ToF) applications [5]-[8], which require high speed readout of small packets of photo-charges. One of the main challenges involved in PPD-based high speed detectors is to reach the best temporal resolution by maximizing the charge transfer speed from the photo-generation site to the collection node. The transfer speed becomes even more critical for applications, such as space imaging applications, which require pixel pitches of several tens of μm (for example for optics-related constraints [9]). In the last decade much effort has been put into improving charge transfer speed by introducing a drift field in the PPD by modulating the PPD local potential [5], [7], [10]-[13]. However the existing solutions often involve design and/or geometrical constraints, can require the use of a custom technology, or might not be implementable for large pixel pitches (where only a small drift field can be induced, as the maximum potential variation whi

关键词： Charge transfer CMOS image sensors Electric potential Logic gates Photodiodes

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Process-induced stress and hydrogen effects on monolithic integrated BiCMOS-MEMS resonators

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sensorS AND ACTUATORS A-PHYSICAL 2013年 202卷 75-84页

作者： Zhao, Danqi Zhang, Xia He, Jun Huang, Xian Yang, Fang Liu, Peng Zhang, Dacheng Peking Univ Inst Microelect Key Lab Nano Micro Fabricat Technol Beijing Peoples R China

In this article, the simultaneous fabrication of MEMS and Bi-CMOS components on a monolithic integrated micro-cantilever resonator is investigated. Surface micromachining method for cantilever fabrication has been merged with conventional CMOS process, and release of MEMS structure is conducted after CMOS process. We for the first time propose the additive effects of hydrogen and MEMS steps induced mechanical stress on the IC performance, and at the same time provide a re-adjusting method for integrated process design, in which the NMOS/PMOS threshold voltage is re-adjusted to symmetry by utilizing the MEMS-process-induced IC performance degradation. On-chip digital/analog Bi-CMOS circuits function properly as demonstrated. The proposed re-adjustment process, suitable for fabrications with a variety of design CMOS-MEMS integrated process flexibilities, has the potential to fabricate integrated devices (high quality factor variable capacitors, micromirror arrays and multi-axis gyroscopes etc.). (C) 2013 Elsevier B.V. All rights reserved.

关键词： CMOS-MEMS Monolithic integration Stress Hydrogen Resonator sensor

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development of a CdZnTe-based small field of view gamma camera

Development of a CdZnTe-based small field of view gamma came...

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conference on Penetrating Radiation Systems and applications III

作者： Parnham, K Grosholz, J Davis, RK Vydrin, S Cupec, CA II VI Inc Ev Prod Saxonburg PA 16056 USA

ISBN: (纸本)0819442224

The interest in the use of CdZnTe room-temperature, solid-state detectors for Nuclear Medicine applications continues to grow. Efforts are underway at several companies and institutes to develop CdZnTe detector systems to compete with existing scintillator-based Large Field of View (LFOV) gamma cameras. eV PRODUCTS is focusing on the development of Small Field of View (SFOV) gamma cameras using monolithic CdZnTe detector arrays coupled to custom designed, low noise analog read-out electronics. Electronic noise in the ASIC's has been minimized, and is typically less than 100 e rms (OpF). The detector readout system has the capability to perform automatic energy calibration, gain setting and discrimator level setting, along with a comprehensive self-diagnostic routine. The complete integrated unit includes a bias voltage generator, counters and communication control. A first prototype 256-channel device has been developed and constructed, with pixel dimensions of 1.8 x 1.8 mm(2), on a 34 x 34 x 5mm3 monolithic CdZnTe detector. Results obtained from this system will be presented, showing both the energy resolution and uniformity data for several arrays. The energy resolution has been demonstrated to be 3-5% FWHM @ 140 keV, with photopeak efficiencies of 70-80%.

关键词： CdZnTe small field of view gamma camera ASIC energy resolution photopeak efficiency

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A 256 pixel pyroelectric linear array with new black coating

A 256 pixel pyroelectric linear array with new black coating

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conference on Infrared Technology and applications XXXVII

作者： Norkus, Volkmar Schossig, Marco Gerlach, Gerald Koehler, Reinhard Tech Univ Dresden Solid State Elect Lab Mommsenstr 13 D-01062 Dresden Germany DIAS Infrared GmbH D-01217 Dresden Germany

ISBN: (纸本)9780819485861

This paper gives a survey of both the design and essential properties of newly developed pyroelectric linear arrays made on the basis of lithium tantalate (LiTaO3). There are up to 256 pixels with a minimum pitch of 50 mu m. The detector is a hybrid arrangement of pyroelectric detector chip and 0.8 mu m CMOS read-out circuit in a hermetic metal housing. Thanks to the development of a new black coating technology the thermal resolution and the homogeneity of the spectral responsivity have been permanently improved. The absorption layer consists of a columnar NiCr thin film. It is deposited using a special GLAD technology in high vacuum. The band absorption coefficient in the wavelength range 1 ... 15 mu m is about 0.9 for a layer with a thickness of about 1 mu m. The NiCr absorption layer has very low thermal mass and high temperature stability. It can be patterned by lift-off technology. The measurement results demonstrate the excellent homogeneity of the spectral responsivity and the improvement of the signal-to-noise ratio of the linear arrays.

关键词： uncooled linear array pyroelectric detector infrared absorber black coating

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Computational survey of representative energetic materials as propellants for microthruster applications

Computational survey of representative energetic materials a...

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conference on Micro (MEMS) and Nanotechnologies for Defense and Security

作者： Fuchs, Brian Stec, Daniel, III US Army ARDEC Picatinny Arsenal NJ 07806 USA SAIC Picatinny Arsenal NJ 07806 USA

ISBN: (纸本)9780819466785

Microthrusters are critical for the development of terrestrial micromissiles and nano air vehicles for reconnaissance, surveillance, and sensor emplacement. With the maturation of MEMS manufacturing technology, the physical components of the thrusters can be readily fabricated. The thruster type that is the most straightforward is chemical combustion of a propellant that is ignited by a heating element giving a single shot thrust. arrays of MEMS manufactured thrusters can be ganged to give multiple firings. The basic model for such a system is a solid rocket motor. The desired elements for the propellant of a chemical thruster are high specific impulse (I-sp), high temperature and pressure, and low molecular weight combustion gases. Since the combustion chamber of a microthruster is extremely small, the propellant material must be able to ignite, sustain and complete its bum inside the chamber. The propellant can be either a solid or a liquid. There are a large number of energetic materials available as candidates for a propellant for microthrusters. There has been no systematic evaluation of the available energetic materials as propellant candidates for microthrusters. This report summarizes computations done on a series of energetic materials to address their suitabilities as microthruster propellants.

关键词： microthrusters MEMS energetic materials propellants

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Tunneling magnetoresistance sensor with pT level 1/f magnetic noise

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AIP ADVANCES 2017年第5期7卷 1-5页

作者： Deak, James G. Zhou, Zhimin Shen, Weifeng MultiDimens Technol Co Ltd R&D Dept Zhangjiagang 215634 Jiangsu Peoples R China MultiDimens Technol Co Ltd Wafer Front End Dept San Jose CA 95138 USA

Magnetoresistive devices are important components in a large number of commercial electronic products in a wide range of applications including industrial position sensors, automotive sensors, hard disk read heads, cell phone compasses, and solid state memories. These devices are commonly based on anisotropic magnetoresistance (AMR) and giant magnetoresistance (GMR), but over the past few years tunneling magnetoresistance (TMR) has been emerging in more applications. Here we focus on recent work that has enabled the development of TMR magnetic field sensors with 1/f noise of less than 100 pT/rtHz at 1 Hz. Of the commercially available sensors, the lowest noise devices have typically been AMR, but they generally have the largest die size. Based on this observation and modeling of experimental data size and geometry dependence, we find that there is an optimal design rule that produces minimum 1/f noise. This design rule requires maximizing the areal coverage of an on-chip flux concentrator, providing it with a minimum possible total gap width, and tightly packing the gaps with MTJ elements, which increases the effective volume and decreases the saturation field of the MTJ freelayers. When properly optimized using this rule, these sensors have noise below 60 pT/rtHz, and could possibly replace fluxgate magnetometers in some applications. (C) 2017 Author(s).

关键词： Giant magnetoresistance

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High-resolution 3D imaging laser radar flight test experiments

High-resolution 3D imaging laser radar flight test experimen...

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conference on Laser Radar Technology and applications X

作者： Marino, RM Davis, WR Rich, GC McLaughlin, JL Lee, EI Stanley, BM Burnside, JW Rowe, GS Hatch, RE Square, TE Skelly, LJ O'Brien, M Vasile, A Heinrichs, RM MIT Lincoln Lab Lexington MA 02420 USA

ISBN: (纸本)0819457760

Situation awareness and accurate Target Identification (TID) are critical requirements for successful battle management. Ground vehicles can be detected, tracked, and in some cases imaged using airborne or space-borne microwave radar. Obscurants such as camouflage net and/or tree canopy foliage can degrade the performance of such radars. Foliage can be penetrated with long wavelength microwave radar, but generally at the expense of imaging resolution. The goals of the DARPA Jigsaw program include the development and demonstration of high-resolution 3-D imaging laser radar (ladar) sensor technology and systems that can be used from airborne platforms to image and identify military ground vehicles that may be hiding under camouflage or foliage such as tree canopy. With DARPA support, MIT Lincoln Laboratory has developed a rugged and compact 3-D imaging ladar system that has successfully demonstrated the feasibility and utility of this application. The sensor system has been integrated into a UH-1 helicopter for winter and summer flight campaigns. The sensor operates day or night and produces high-resolution 3-D spatial images using short laser pulses and a focal plane array of Geiger-mode avalanche photo-diode (APD) detectors with independent digital time-of-flight counting circuits at each pixel. The sensor technology includes Lincoln Laboratory developments of the microchip laser and novel focal plane arrays. The microchip laser is a passively Q-switched solid-state frequency-doubled Nd:YAG laser transmitting short laser pulses (300 ps FWHM) at 16 kilohertz pulse rate and at 532 nm wavelength. The single photon detection efficiency has been measured to be > 20% using these 3202 Silicon Geiger-mode APDs at room temperature. The APD saturates while providing a gain of typically > 106. The pulse out of the detector is used to stop a 500 MHz digital clock register integrated within the focal-plane array at each pixel. Using the detector in this binary response mode simp

关键词： sensors LIDAR 3D image processing Camouflage Pulsed laser operation Staring arrays Stereoscopy Imaging systems 3D acquisition Avalanche photodetectors

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Advanced imaging sensors at Rockwell Scientific Company

Advanced imaging sensors at Rockwell Scientific Company

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conference on Infrared Detectors and Focal Plane arrays VII

作者： Montroy, JT Garnett, JD Cabelli, SA Loose, M Joshi, A Hughes, G Kozlowski, L Haas, A Wong, S Zandian, M Chen, A Pasko, JG Farris, M Cabelli, CA Cooper, DE Arias, JM Bajaj, J Vural, K Rockwell Sci Co Camarillo CA 93012 USA

ISBN: (纸本)0819444715

The past 2 to 3 years has been a period of explosive growth in technology development for imaging sensors at Rockwell Scientific Co. (RSC). The state of the art has been advanced significantly, resulting in a number of unique advanced imaging sensor products. A few key examples are: 2048 x 2048 sensor chip assemblies (SCA) for ground and space-based applications, 4096 x 4096 mosaic close-butted mosaic FPA assemblies, a very high performance 10 x 1024 hybridized linear SCA for optical network monitoring and other applications, the revolutionary CMOS ProCam-HD(TM) imaging system-on-a-chip for high definition television (HDTV), and RSC's near-infrared emission microscope camera for VLSI defect detection/analysis. This paper provides selected updates of these products and thereby provides an overview of the ongoing highly fertile period of technology and product development at Rockwell Scientific. A view into future directions for advanced imaging sensors is also provided.

关键词： infrared detectors focal plane array sensor chip assembly astronomy HDTV

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