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International conference on solid-state sensors, Actuators and Microsystems

作者： B. Han Y.-J. Yoon M. Hamidullah A. T.-H. Lin W.-T. Park Institute of Microelectronics A*STAR Nanyang Technological University Seoul National University of Science and Technology

ISBN: (纸本)9781467359825

This paper presents the development of a ring shaped force sensor for sensorized guidewire applications. The sensor comprises a suspended ring structure located at the center of four suspended beams that can be integrated on the distal tip of a guidewire. SiNWs with a length of 6 μm and a cross section of 90 nm × 90 nm are embedded at the anchor of each silicon bridge as the piezoresistive sensing elements. Taking advantage of the high sensitivity of SiNWs, the fabricated sensor was capable to detect small displacement in nm ranges with a sensitivity of 13.4 × 10~(-3) μm~(-1) in the z-direction. This force sensor showed high linearity (>99.9%) to the applied load and no obvious hysteresis was observed.

关键词： Silicon nanowire tri-axial force sensor minimally invasive surgery guidewire

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An 8×16-pixel 92kSPAD time-resolved sensor with on-pixel 64ps 12b TDC and 100MS/s real-time energy histogramming in 0.13µm CIS technology for PET/MRI applications

An 8×16-pixel 92kSPAD time-resolved sensor with on-pixel 64...

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Leo Huf Campos Braga Leonardo Gasparini Lindsay Grant Robert K. Henderson Nicola Massari Matteo Perenzoni David Stoppa Richard Walker Fondazione Bruno Kessler Trento Italy STMicroelectronics Edinburgh UK University of Edinburgh Edinburgh UK

Positron-Emission Tomography (PET) is a nuclear imaging technique that provides functional 3-dimensional images of the body, finding its key applications in clinical oncology and brain-function analyses. The typical PET scanner is composed of a ring of scintillator crystals that absorb gamma rays and emit photons as a result, coupled to photon-sensing devices. The photons hit the sensors with a certain spread in space and time, depending on the material and geometry of the crystals. The sensors must then estimate the energy, the time of arrival (ToA), and the axial position of incoming gamma rays. Most commercially available scanners use photomultiplier tubes (PMTs), which are sensitive to magnetic fields, as the sensing element, making the integration of these systems with Magnetic-Resonance Imaging (MRI) impossible. A significant amount of research has focused on replacing PMTs with solid-state detectors, such as Silicon photomultipliers (SiPMs) [1], which can be integrated with MRI while maintaining the high-sensitivity of PMTs.

关键词： Photonics Positron emission tomography Magnetic resonance imaging Photomultipliers arrays CMOS integrated circuits Radiation detectors

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Subpixel resolution satellite imaging technique

Subpixel resolution satellite imaging technique

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International conference on Digital Technologies (DT)

作者： Sergey A. Stankevich Sergey V. Shklyar Vladimir M. Tyagur Scientific Centre for Aerospace Research of the Earth National Academy of Sciences of Ukraine Kiev Ukraine State Enterprise for a Special Instrumentation Arsenal State Space Agency of Ukraine Kiev Ukraine

ISBN: (纸本)9781479909230

development of new satellite imagery processing algorithms for resolution enhancement and subpixel analysis allows to increase efficiency of remote sensing applications. Insufficiency of the spatial resolution leads to uncertainty in satellite imagery classification and analysis. In this paper we present the technique for satellite imagery spatial resolution enhancement based on subpixel multiple image registration.

关键词： Satellites Spatial resolution Image restoration Signal resolution Imaging sensor arrays

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Nernst-Planck-Poisson Model for the Description of Behaviour of solid-Contact Ion-Selective Electrodes at Low Analyte Concentration

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ELECTROANALYSIS 2013年第1期25卷 133-140页

作者： Jasielec, Jerzy J. Lisak, Grzegorz Wagner, Michal Sokalski, Tomasz Lewenstam, Andrzej Abo Akad Univ Proc Chem Ctr Ctr Proc Analyt Chem & Sensor Technol ProSens Turku 20500 Finland AGH Univ Sci & Technol Fac Mat Sci & Ceram PL-30059 Krakow Poland

All-solid-state electrodes are increasingly being used in clinical, industrial and environmental analysis. This wide range of applications requires deep theoretical description of such electrodes. This work concentrates on the development of a numerical tool for the qualitative prediction of electrochemical behaviour for solid-contact ion-selective electrodes at low analyte concentrations. For this purpose, a general approach to the description of electro-diffusion processes, namely the Nernst-Planck-Poisson (NPP) model, was applied. The results obtained from this model are verified by experimental data of lead(II)-selective electrodes based on a polymeric PVC membrane with polybenzopyrene doped with Eriochrome Black T used as the solid contact.

关键词： Potentiometry Ion-selective electrodes solid contact Response Nernst-Planck-Poisson model Electrodiffusion

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SINGLE CHIP PROCESS FOR sensorS IMPLEMENTATION, INTEGRATION, AND CONDITION MONITORING

SINGLE CHIP PROCESS FOR SENSORS IMPLEMENTATION, INTEGRATION,...

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International conference on solid-state sensors, Actuators and Microsystems

作者： C.-W. Cheng K.-C. Liang C.-H. Chu D. A. Horsley W. Fang Taiwan Semiconductor Manufacturing Company (TSMC) Ltd. Hsinchu TAIWAN Berkeley Sensor and Actuator Center University of California Davis CA USA Dept. of Power Mechanical Engineering National Tsing Hua University Hsinchu TAIWAN

ISBN: (纸本)9781467359825

This study presents the development of a foundry available process scheme for MEMS devices. Such MEMS process scheme enables integration of various MEMS sensors with Pirani gauge. In applications, this study has employed such bulk Si with embedded poly plug process scheme to demonstrate various MEMS devices of different vacuum requirement, including resonators, accelerometer, gyroscope, and magnetometers on single Si wafer. Moreover, a monolithically integrated silicon-based Pirani vacuum gauge to provide in situ pressure monitor for each device is also demonstrated.

关键词： Resonators Accelerometer Gyroscope Magnetometers Pirani gauge MEMS device integration

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Comparison of different design methodologies of hardware-based image processing for automation in microrobotics

Comparison of different design methodologies of hardware-bas...

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IEEE/ASME (AIM) International conference on Advanced Intelligent Mechatronics

作者： Tobias Tiemerding Claas Diederichs Christian Stehno Sergej Fatikow Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany CoSynth Embedded Systems GmbH & Company KG Oldenburg Germany

Object-detection and classification is a key task in micro- and nanohandling. The microscopy image is often the only available sensor to detect information about the positions and orientations of objects. FPGA-based image processing is superior to state of the art PC-based image processing in terms of achievable update rate, latency and jitter. development of specialized FPGA solutions for object detection and tracking using a hardware-description language is time consuming and requires deep knowledge of the target system. Using SystemC, a C++ based class library, fast implementation with less knowledge of the system is possible. However, the gain in development speed is accompanied by higher resource usage of the FPGA and lower performance regarding computation speed. In this paper, several image processing algorithms are implemented in both manners and are compared regarding achievable update-rate, resource consumption and development time. The SystemC implementations could be implemented twice as fast and with less knowledge about the system. The increased resource usage of SystemC is negligible for small series and prototyping applications, while the decreased computation speed may be problematic for high-speed applications.

关键词： Field programmable gate arrays Hardware Image edge detection Morphology Libraries Algorithm design and analysis

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Single-photon sampling architecture for solid-state imaging sensors

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PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED stateS OF AMERICA 2013年第30期110卷 E2752-E2761页

作者： van den Berg, Ewout Candes, Emmanuel Chinn, Garry Levin, Craig Olcott, Peter Demetri Sing-Long, Carlos Stanford Univ Dept Math Stanford CA 94305 USA Stanford Univ Dept Stat Stanford CA 94305 USA Stanford Univ Dept Elect Engn Stanford CA 94305 USA Stanford Univ Dept Radiol Stanford CA 94305 USA Stanford Univ Dept Phys Stanford CA 94305 USA Stanford Univ Dept Bioengn Stanford CA 94305 USA Stanford Univ Inst Computat & Math Engn Stanford CA 94305 USA

Advances in solid-state technology have enabled the development of silicon photomultiplier sensor arrays capable of sensing individual photons. Combined with high-frequency time-to-digital converters (TDCs), this technology opens up the prospect of sensors capable of recording with high accuracy both the time and location of each detected photon. Such a capability could lead to significant improvements in imaging accuracy, especially for applications operating with low photon fluxes such as light detection and ranging and positron-emission tomography. The demands placed on on-chip readout circuitry impose stringent trade-offs between fill factor and spatiotemporal resolution, causing many contemporary designs to severely underuse the technology's full potential. Concentrating on the low photon flux setting, this paper leverages results from group testing and proposes an architecture for a highly efficient readout of pixels using only a small number of TDCs. We provide optimized design instances for various sensor parameters and compute explicit upper and lower bounds on the number of TDCs required to uniquely decode a given maximum number of simultaneous photon arrivals. To illustrate the strength of the proposed architecture, we note a typical digitization of a 60 x 60 photodiode sensor using only 142 TDCs. The design guarantees registration and unique recovery of up to four simultaneous photon arrivals using a fast decoding algorithm. By contrast, a cross-strip design requires 120 TDCs and cannot uniquely decode any simultaneous photon arrivals. Among other realistic simulations of scintillation events in clinical positron-emission tomography, the above design is shown to recover the spatiotemporal location of 99.98% of all detected photons.

关键词： multiplexing single-photon detection superimposed codes

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development of MPPC Array Module

Development of MPPC Array Module

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IEEE Nuclear Science Symposium

作者： S. Adachi S. Nakamura M. Hirayanagi H. Suzuki T. Uchiyama T. Baba M. Watanabe T. Omura Solid State Division Hamamatsu Photonics K.K. Japan Hamamatsu Photonics K.K. Central Research Laboratory Japan

Multi-Pixel Photon Counter (MPPC) is a solid state photon counting device consisting of Geiger-mode APD pixels and self-quenching resistors. The MPPC has attractive features, such as low bias voltage operation, high gain, compact size, robustness and insensitivity to magnetic fields. Therefore, MPPC applications are now being expanded, especially for very low light level measurements. We have developed a new MPPC based PET detector module dedicated to TOF-PET systems. The module consists of a 16 × 16 Lutetium Fine Silicate (LFS) scintillator array with 3.2 mm pitch and a 16 × 16 Through-Silicone-Via (TSV) MPPC array, included analyzing circuits for gamma-ray detection, The performance of the module has been evaluated. The coincidence timing resolution was obtained 440 ps FWHM with a pair of the modules. The energy resolution value was 12.3% at 511 keV. All crystal segments were also clearly separated with uniform irradiation of 511 keV gamma-rays.

关键词： arrays Positron emission tomography Detectors Timing Energy resolution Application specific integrated circuits Photonics

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solid-state Nanopores for Detection of Rod-Like Viruses and Trapping of Single DNA Molecules

Solid-State Nanopores for Detection of Rod-Like Viruses and ...

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IEEE Lester Eastman conference on High Performance Devices (LEC)

作者： McMullen, Angus Liu, Xu Tang, Jay Stein, Derek Brown Univ Dept Phys Providence RI 02912 USA

solid-state nanopores are a promising class of electronic sensor for biosensing applications and single-molecule studies. We report the development of solid-state nanopores for the detection and study of single rod-li... 详细信息

ISBN: (纸本)9781467322980

关键词： solid-state Nanopores Biosensing

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development of high transmittance, back-illuminated, silicon-on-sapphire substrates thinned below 25 micrometers and bonded to fused silica, for high quantum efficiency and high resolution avalanche photodiode imaging arrays

Development of high transmittance, back-illuminated, silicon...

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conference on sensors, Cameras, and Systems for Industrial and Scientific applications XIII

作者： Stern, Alvin G. AG STERN LLC Newton MA 02467 USA

ISBN: (纸本)9780819489456

There is a growing need in scientific and industrial applications for dual-mode, passive and active 2D and 3D LADAR imaging methods. To fill this need, solid-state, single photon sensitive silicon avalanche photodiode (APD) detector arrays offer high sensitivity and the possibility to operate with wide dynamic range in dual linear and Geiger-mode for passive and active imaging. To support the fabrication of large scale, high quantum efficiency and high resolution silicon avalanche photodiode arrays and other advanced solid-state optoelectronics, a novel, high transmittance, back-illuminated silicon-on-sapphire substrate has been developed incorporating a single crystal, epitaxially grown aluminum nitride (AlN) antireflective layer between silicon and R-plane sapphire, that provides refractive index matching to improve the optical transmittance into silicon from sapphire. A one quarter wavelength magnesium fluoride antireflective layer deposited on the back-side of the sapphire improves optical transmittance from the ambient into the sapphire. The magnesium fluoride plane of the Si-(AlN)-sapphire substrate is bonded to a fused silica wafer that provides mechanical support, allowing the sapphire to be thinned below 25 micrometers to improve back-illuminated optical transmittance, while suppressing indirect optical crosstalk from APD emitted light undergoing reflections in the sapphire, to enable high quantum efficiency and high resolution detector arrays.

关键词： high transmittance back-illuminated silicon-on-sapphire thin sapphire substrate bonded fused silica silicon avalanche photodiode high quantum efficiency high resolution

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