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59th International solid-state Circuits conference, ISSCC 2012

作者： Watabe, Toshihisa Kitamura, Kazuya Sawamoto, Takehide Kosugi, Tomohiko Akahori, Tomoyuki Iida, Tetsuya Isobe, Keigo Watanabe, Takashi Shimamoto, Hiroshi Ohtake, Hiroshi Aoyama, Satoshi Kawahito, Shoji Egami, Norifumi NHK Science and Technology Research Laboratories Tokyo Japan Shizuoka University Hamamatsu Japan Brookman Technology Hamamatsu Japan

ISBN: (纸本)9781467303736

There has been increasing demand for high-reality video systems. Thus, there has been research and development into ultra-high-definition television (UDTV) schemes for the next-generation television broadcasting system called "Super Hi-Vision" (SHV). This system aims to improve viewing experience using higher-resolution pictures. A pixel count of 7680x4320 and frame rate of 120fps are defined as full-spec parameter values for the SHV video signal. The total pixel data output rate of full-spec SHV image sensors will be 48Gb/s or greater. Several image sensors have been developed for UDTV or digital cinema applications [1-4], but they still do not fulfill SHV specifications. © 2012 IEEE.

关键词： Image sensors

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7.3 A 1000fps vision chip based on a dynamically reconfigurable hybrid architecture comprising a PE array and self-organizing map neural network

7.3 A 1000fps vision chip based on a dynamically reconfigura...

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2014 61st IEEE International solid-state Circuits conference, ISSCC 2014

作者： Shi, Cong Yang, Jie Han, Ye Cao, Zhongxiang Qin, Qi Liu, Liyuan Wu, Nan-Jian Wang, Zhihua Chinese Academy of Sciences Beijing China Tsinghua University Beijing China

A vision chip is a high-speed and compact vision system that integrates an image sensor and parallel image processors on a single silicon die. Nowadays, high-speed vision chips with powerful recognition capabilities are greatly demanded in applications such as: industrial automation, security, entertainment, robotic vision, and human-machine interaction. Some 100-to-1,000fps vision chips have been reported [1-4]. These chips integrate pixel-parallel and row-parallel SIMD array processors to speed up low- and mid-level image processing [1,2]. Recently, microprocessors (MPU) have been embedded to carry out high-level image processing [3,4]. Although excellent in low- and mid-level processing, these systems are poor in high-level feature vector (FV) recognition tasks due to the von Neumann bottleneck of the MPU. As a consequence, these chips can no longer achieve 1,000fps system-level performance, from image acquisition to high-level feature-recognition processing. © 2014 IEEE.

关键词： high-speed techniques image processing image sensors neural nets parallel processing PE array dynamically reconfigurable hybrid architecture high-speed compact vision system image sensor parallel image processors pixel-parallel processors row-parallel SIMD array processors self-organizing map neural network single silicon die vision chip arrays Face recognition Image processing Neural networks Neurons Program processors solid state circuits

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Eddy‐Current Testing with GMR Magnetic sensor arrays

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AIP conference Proceedings 2004年第1期700卷 406-413页

作者： C. H. Smith R. W. Schneider T. Dogaru S. T. Smith 1Advanced Technology Group NVE Corporation Eden Prairie MN 55344 2Albany Instruments Charlotte NC 28209 3C. C. Cameron Applied Research Center UNC Charlotte Charlotte NC 28223

The advent of GMR magnetic sensors and GMR sensor arrays with frequency‐independent sensitivity offers improvements in speed, depth, and resolution in eddy‐current testing. arrays of GMR magnetic sensors allow rapid scanning of an area for defects in a single pass. The small size and low power consumption of these solid‐state magnetic sensors enable the fabrication of compact arrays of sensors on circuit boards and even on‐chip sensor arrays. arrays have been fabricated with sensor spacing as small as 5 micrometers when fine resolution is required. GMR sensor elements can be deposited on active silicon substrates facilitating on‐chip signal processing and multiplexing. This integration simplifies the sensor/signal‐processing interface, minimizes the number of leads, and can reduce the effect of noise. This paper will discuss the technology of fabricating arrays on GMR sensors, especially on‐chip arrays. Integrated sensor arrays with on‐chip signal processing and multiplexing will be described. Finally, some applications of arrays to crack and corrosion detection will be discussed.

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Single chip process for sensors implementation, integration, and condition monitoring

Single chip process for sensors implementation, integration,...

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2013 17th International conference on solid-state sensors, Actuators and Microsystems, TRANSDUCERS and EUROsensorS 2013

作者： Cheng, C.-W. Liang, K.-C. Chu, C.-H. Horsley, D.A. Fang, W. Ltd. Hsinchu Taiwan Dept. of Power Mechanical Engineering National Tsing Hua University Hsinchu Taiwan Berkeley Sensor and Actuator Center University of California Davis CA United States

ISBN: (纸本)9781467359818

This study presents the development of a foundry available process scheme for MEMS devices. Such MEMS process scheme enables integration of various MEMS sensors with Pirani gauge. In applications, this study has employed such bulk Si with embedded poly plug process scheme to demonstrate various MEMS devices of different vacuum requirement, including resonators, accelerometer, gyroscope, and magnetometers on single Si wafer. Moreover, a monolithically integrated silicon-based Pirani vacuum gauge to provide in situ pressure monitor for each device is also demonstrated. © 2013 IEEE.

关键词： Accelerometers

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Biochemical microsensors on the basis of metabolically sensitive hydrogels

Biochemical microsensors on the basis of metabolically sensi...

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conference on Electroactive Polymer Actuators and Devices (EAPAD) 2011

作者： Guenther, Margarita Gerlach, Gerald Wallmersperger, Thomas Solzbacher, Florian Magda, Jules J. Lin, Genyao Tathireddy, Prashant Orthner, Michael P. Tech Univ Dresden Solid State Elect Lab IFE Helmholtzstr 10 D-01069 Dresden Germany Tech Univ Dresden Inst Solid Mech IFKM D-01062 Dresden Germany Univ Utah Dept Elect & Comp Engn Salt Lake City UT 84112 USA Univ Utah Dept Mat Sci & Engn Salt Lake City UT 84112 USA

ISBN: (纸本)9780894185380

With the rapid development of micro systems technology and microelectronics, smart electronic systems are emerging for the continuous surveillance of relevant parameters in the body and even for closed-loop systems with a sensor feedback to drug release systems. With respect to diabetes management, there is a critical societal need for a sensor that can be used to continuously measure a patient's blood glucose concentration twenty four hours a day on a long-term basis. In this work, thin films of "stimuli-responsive" or "smart" hydrogels were combined with microfabricated piezoresistive pressure transducers to obtain "chemomechanical sensors" that can serve as selective and versatile wireless biomedical sensors. The sensitivity of hydrogels with regard to the concentration of glucose in solutions with physiological pH, ionic strength and temperature was investigated in vitro. The response of the glucose-sensitive hydrogel was studied at different regimes of the glucose concentration change and at different temperatures. sensor response time and accuracy with which a sensor can track gradual changes in glucose was estimated.

关键词： piezoresistive sensor biochemical sensor polyelectrolyte hydrogel glucose-sensitive pH-sensitive swelling behavior biomedical applications

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development of 3D 4-electrode IPMC actuator with accurate omnidirectional control ability for microendoscopic surgical application

Development of 3D 4-electrode IPMC actuator with accurate om...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Feng, Guo-Hua Tsai, Jeng-Wei Department of Mechanical Enginering National Chung Cheng University Chiayi Taiwan

ISBN: (纸本)9781424441938

This paper presents a novel three-dimensional (3D) four-electrode Ion Polymer Metal Composite (IPMC) actuator with accurate omnidirectional control capability. The developed 3D IPMC transducer is used to enclose a section of optical fiber, thereby allowing electronic directional control of conducted laser light. This could be useful in applications such as microendoscopic ocular surgery. The fabricated device with the IPMC actuator dimension of 5mm x 2mm x 1 mm shows that it could reach a displacement of 400 m in the direction perpendicular to the electrode surface when a square wave of 9 volts is applied. A threshold voltage about 4 volts is found during actuation for the fabricated transducer. Besides, the transducer moving along a direction which is not perpendicular to the electrode surface is also demonstrated. The result shows that a displacement of 275 m can be reached when a sinusoid wave of 9 volts is applied, and the angle maintains a near constant value for varied operating frequencies. ©2009 IEEE.

关键词： Electrodes

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Employing a microbolometer as a low pressure sensor

Employing a microbolometer as a low pressure sensor

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3rd South African conference on sensors, MEMS, and Electro-Optical Systems (SMEOS)

作者： Schoeman, J. Univ Pretoria Dept Elect Elect & Comp Engn ZA-0002 Pretoria South Africa

ISBN: (纸本)9781628413243

Uncooled microbolometers have become extremely popular as low cost thermal detectors used in FPAs for thermal imaging cameras. Most of the emphasis of researchers have gone towards the design and optimisation of device structures, materials, processes and readout electronics with this application in mind. However, microbolometers have the potential to be utilised towards the development of alternate applications. It is well known that the thermal conduction of microbolometers depend on the pressure surrounding the device, as this governs the dominating conduction method. This work investigates the possibility of employing a Ti thinfilm microbolometer as a low pressure sensor. A well known multi-physics simulation environment is utilised to simulate the microbolometer thermoelectric response over varied atmospheric pressure conditions. These simulation results are compared with a much simpler air pressure model than previous works using microbolometers, as well as experimental data, where the fabricated prototype showed a measured device TCR of about 0.085% K-1 and a sensitivity of about 0.701 x 10(-9) W K-1 Pa-1.

关键词： Microbolometer vacuum gauge vacuum sensor micro-Pirani gauge hermetically sealed packaging FPA

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PRESSURE sensor BASED ON ORGANIC SINGLE CRYSTAL AIR-GAP TRANSISTOR 19

PRESSURE SENSOR BASED ON ORGANIC SINGLE CRYSTAL AIR-GAP TRAN...

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19th International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Pereira, Marco J. Ayela, Cedric Hirsch, Lionel Dufour, Isabelle Briseno, Alejandro Matta, Micaela Olivier, Yoann Muccioli, Luca Crosby, Alfred Wantz, Guillaume Univ Bordeaux Bordeaux INP CNRS IMSUMR 5218 F-33400 Talence France Univ Massachusetts Polymer Sci & Engn Amherst MA 01003 USA Univ Bordeaux Bordeaux INP ENSCBP CNRSLCPOUMR 5629 F-33600 Pessac France Novel Mat Univ Mons Lab Chem B-7000 Mons Belgium

ISBN: (纸本)9781538627327

With the development of new technologies, researchers have recently focused their interest on flexible electronics to improve the interaction between users and devices. In this context, integrated ultra-low-pressure sensors remain a technological challenge. Here, we show that organic single crystal-based air-gap transistors fabricated by soft lithography are extremely sensitive to mechanical strain and pressure. When low forces are applied to the suspended semiconducting crystal (rubrene), the gated transistors show that drain currents as output signals are extremely sensitive to the deformations. Incredibly high gauge factors, over 4000, are measured using this technique. Further investigation shows that the contact resistance at the rubrene-gold interface is responsible for the high sensing performances. Such a platform is also able to detect sound waves with high sensitivity, making these simple devices suitable for applications in pressure sensing.

关键词： Rubrene organic single crystal air-gap transistors MEMS pressure sensor

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Piezoelectric MEMS Oscillators Based on Flexural Mode Membrane Resonator Array for Resonant sensors 22

Piezoelectric MEMS Oscillators Based on Flexural Mode Membra...

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22nd International conference on solid-state sensors, Actuators and Microsystems, Transducers 2023

作者： Luo, Hexu Zhang, Menglun Gong, Yi Ning, Yuan Chen, Xuejiao Li, Quanning Pang, Wei Tianjin University State Key Laboratory Of Precision Measuring Technology And Instruments Tianjin China

ISBN: (纸本)9784886864352

Resonant sensors based on flexural mode MEMS resonators are promising for mass, strain, acceleration and pressure sensing applications. However, low quality factor and high motional resistance of these resonators in air limit oscillator and hence sensor performance. In this work, we report a piezoelectric membrane resonator array with two-port configuration, leveraging its high power handling capability and low motional resistance. An oscillator was designed based on it and achieved a phase noise of -115 dBc/Hz and -145 dBc/Hz at offset frequencies of 1 kHz and 100 kHz, respectively. The lowest Allan deviation of the oscillator was measured to be 0.21 Hz. The phase noise and Allan deviation are the best among low frequency piezoelectric MEMS oscillators for resonant sensors working in air. © 2023 IEEJ.

关键词： Aluminum nitride MEMS Oscillators Piezoelectric Resonator array

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A microfabricated narrow gap biofuel cell with membraneless design flexibility

A microfabricated narrow gap biofuel cell with membraneless ...

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13th International conference on solid-state sensors and Actuators and Microsystems, TRANSDUCERS '05

作者： Korivi, Naga S. Choi, Jin-Woo Department of Electrical and Computer Engineering Louisiana State University Baton Rouge LA 70803 United States

ISBN: (纸本)0780389948

This paper presents the development and characterization of a microfabricated membraneless biofuel cell on a polymer microfluidic chip. The developed microscale biofuel cell utilizes glucose as fuel to generate bioelectric power and produces water as by-product. The developed biofuel cell exhibits a power output (power density up to 4.66 μW/cm2) which can be modulated by the electrode separation. The absence of a proton exchange membrane separating the anode and cathode chambers imparts high design flexibility to the developed biofuel cell. The biofuel cell has been tested for operation in physiological levels of pH and temperature, with both flowing and static fuel conditions. Due to its relatively wide range of operational temperature and stability in flowing fuel conditions, coupled with its harmless by-products and absence of any toxic reagents, renders it highly appropriate for applications in microfluidic, implantable, and portable systems. © 2005 IEEE.

关键词： Fuel cells

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