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conference on 16 ISCMP

作者： Sarov, Y. Ivanov, Tz Frank, A. Zoellner, J-P Nikolov, N. Rangelow, I. W. Ilmenau Univ Technol FEI IMNE Dept Micro & Nanoelect Syst D-98684 Ilmenau Germany

This paper reports on the fabrication and characterisation of self-actuating, and self-sensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.

关键词： Nanocantilevers

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Hydrogen pump using a high-temperature proton conductor for nuclear fusion engineering applications

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solid state IONICS 2010年第3-4期181卷 215-218页

作者： Tanaka, M. Katahira, K. Asakura, Y. Ohshima, T. Natl Inst Fus Sci Toki Gifu 5095292 Japan TYK Co Ltd Ohbata Tajimi Gifu 5078607 Japan

In a nuclear fusion plant, the development of hydrogen processing technologies is an important issue since hydrogen isotope gas must be utilized as fuel. High-temperature proton conductors are favorable materials for hydrogen processing systems in nuclear fusion engineering. Possible applications of proton conductors include hydrogen pumps and hydrogen sensing. For one of these protonic functions, we have proposed applying a hydrogen pump to hydrogen recovery in the hydrogen processing system. In this paper, as a feasibility study, a one-end closed tube of SrZr0.9Yb0.1O3-alpha proton conductor was evaluated as a hydrogen pump at elevated temperatures. As a result, hydrogen gas could be extracted from a mixture of gases including hydrogen, water vapor and methane, simulating the gases present during hydrogen processing in a fusion device, while methane and water vapor could be decomposed to hydrogen gas on the platinum electrode. This result indicates that a hydrogen pump using a proton conductor is quite useful in the hydrogen recovery system for the exhaust gas of a fusion device. (C) 2009 Elsevier B.V. All rights reserved.

关键词： Proton conductor Nuclear fusion engineering Hydrogen pump Hydrogen sensor Methane decomposition Water vapor electrolysis

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Optical and Noise Performance of CMOS solid-state Photomultipliers

Optical and Noise Performance of CMOS Solid-State Photomulti...

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conference on Photonic Fiber and Crystal Devices - Advances in Materials and Innovations in Device applications IV

作者： Chen, Xiao Jie Johnson, Erik B. Staples, Christopher J. Chapman, Eric Alberghini, Guy Christian, James F. Radiat Monitoring Devices Inc Watertown MA 02472 USA

ISBN: (纸本)9780819482778

solid-state photomultipliers (SSPM) are photodetectors composed of avalanche photodiode pixel arrays operating in Geiger mode (biased above diode breakdown voltage). They are built using CMOS technology and can be used in a variety of applications in high energy and nuclear physics, medical imaging and homeland security related areas. The high gain and low cost associated with the SSPM makes it an attractive alternative to existing photodetectors such as the photomultiplier tube (PMT). The capability of integrating CMOS on-chip readout circuitry on the same substrate as the SSPM also provides a compact and low-power-consumption solution to photodetector applications with stringent area and power requirements. The optical performance of the SSPM, specifically the detection and quantum efficiencies, can depend on the geometry and the doping profile associated with each photodiode pixel. The noise associated with the SSPM not only includes dark noise from each pixel, but also consists of excess noise terms due to after pulsing and inter-pixel cross talk. The magnitude of the excess noise terms can depend on biasing conditions, temperature, as well as pixel and inter-pixel dimensions. We present the optical and noise performance of SSPMs fabricated in a conventional CMOS process, and demonstrate the dependence of the SSPM performance on pixel/inter-pixel geometry, doping profile, temperature, as well as bias conditions. The continuing development of CMOS SSPM technology demonstrated here shows that low cost and high performance solid state photodetectors are viable solutions for many existing and future optical detection applications.

关键词： SSPM CMOS photodector Geiger mode avalanche diode

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development of MEMS power sensor package

Development of MEMS power sensor package

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International conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring conference on Global Business Council, GBC 2010

作者： Kim, Bruce C. Kasim, Rahim University of Alabama Electrical and Computer Engineering Tuscaloosa AL 35487-0286 United States

ISBN: (纸本)9781617386039

This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS device is used as a high power sensor for detecting high current applications. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field. The array of MEMS devices has been packaged in a conventional package and testing was performed to validate its operation. The switching time was very compatible with the existing solid state switches with much higher order of power capability. Copyright© (2010) by IMAPS.

关键词： Time switches

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2010 IEEE Asian solid-state Circuits conference, A-SSCC 2010

2010 IEEE Asian Solid-State Circuits Conference, A-SSCC 2010

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2010 6th IEEE Asian solid-state Circuits conference, A-SSCC 2010

ISBN: (纸本)9781424482979

The proceedings contain 97 papers. The topics discussed include: future television - super hi-vision and beyond;asymmetric cross-coupled sense amplifier for small-sized 0.5-V gigabit-DRAM arrays;a 28 nm dual-port SRAM macro with screening circuitry against write-read disturb failure;a multi-mode digital controller with windowed ADC and self-calibrated DPWM for slew-enhanced switching converter;a 1-V input, 0.2-V to 0.47-V output switched-capacitor DC-DC converter with pulse density and width modulation (PDWM) for 57% ripple reduction;an ultra-low-cost RFID tag with 1.67 Gbps data rate by ink-jet printing on paper substrate;low noise capacitive sensor for multi-touch mobile handset's applications;a 31mA CMOS wideband BD-II B2&B3 mode receiver with 55dB gain dynamic range;a high-speed, on-chip implementation of Teager Kaiser operator for in-band interference rejection;a 40-GHz phase-locked loop for 60-GHz sliding-IF transceivers in 65nm CMOS;and a 0.45V-to-2.7V inductive-coupling level shifter.

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High gain and low excess noise near infrared single photon avalanche detector arrays

High gain and low excess noise near infrared single photon a...

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conference on Advanced Photon Counting Techniques IV

作者： Linga, Krishna Yevtukhov, Yuriy Liang, Bing Amplificat Technol Inc New York NY 11230 USA

ISBN: (纸本)9780819481450

We have designed and developed a new family of photodetectors and arrays with Internal Discrete Amplification (IDA) mechanism for the realization of very high gain and low excess noise factor in the visible and near infrared spectral regions. These devices surpass many limitations of the Single Photon Avalanche Photodetectors such as ultra low excess noise factor, very high gain, lower reset time (< 200 ns). These devices are very simple to operate in the non-gated mode under a constant dc bias voltage. Because of its unique characteristics of self-quenching and self-recovery, no external quenching circuit is needed. This unique feature of self quenching and self-recovery makes it simple to less complex readout integrated circuit to realize large format detector arrays. In this paper, we present the discrete amplification design approach used for the development of self reset, high gain photodetector arrays in the near infrared wavelength region. The demonstrated device performance far exceeds any available solid state Photodetectors in the near infrared wavelength range. These devices are ideal for researchers in the field of spectroscopy, industrial and scientific instrumentation, Ladar, quantum cryptography, night vision and other military, defense and aerospace applications.

关键词： single photon detector photon counting near infrared avalanche photodetector discrete amplification avalanche photodetector arrays

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ESSCIRC 2010 - 36th European solid state Circuits conference

ESSCIRC 2010 - 36th European Solid State Circuits Conference

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36th European solid state Circuits conference, ESSCIRC 2010

ISBN: (纸本)9781424466641

The proceedings contain 123 papers. The topics discussed include: high performance mixed signal: business and technology;3D integration technology: status and application development;engineering hope with biomimetic microelectronic systems;energy harvesting - from devices to systems;technical and economical trends in wireless applications;terahertz imaging with CMOS/BICMOS process technologies;analog mixed-signal circuits in advanced nano-scale CMOS technology for microprocessors and SOCs;trends and perspectives for electrical characterization and reliability assessment in advanced CMOS technologies;a 65-nm CMOS temperature-compensated mobility-based frequency reference for wireless sensor networks;variability analysis of a digitally trimmable ultra-low power voltage reference;and a nano-ampere current reference circuit and its temperature dependence control by using temperature characteristics of carrier mobilities.

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Session 2 overview: mm-wave beamforming & RF building blocks

Session 2 overview: mm-wave beamforming & RF building blocks

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Bud Taddiken Andreas Kaiser Microtune Garland TX USA IEMN-ISEN Lille France

Several thematic areas are covered in this session. Advances in integrated phased arrays for millimeter-waves are described in the first part, followed by circuit techniques for mobile communications, and finally an u... 详细信息

关键词： Array signal processing Radio frequency Phased arrays Circuits Bandwidth Phase noise sensor arrays Mobile communication CMOS technology Voltage-controlled oscillators

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Packaging of High Power Semiconductor Laser arrays Using a Novel Macro-channel Cooler

Packaging of High Power Semiconductor Laser Arrays Using a N...

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11th International conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP)

作者： Wang, Jingwei Yuan, Zhenbang Guo, Lu Xiong, Lingling Zhang, Yanxin Peng, Chenhui Li, Xiaoning Liu, Xingsheng Chinese Acad Sci Xian Inst Opt & Precis Mech State Key Lab Transient Opt & Photon 17 Xinxi RdNew Ind Pk Xian 710119 Shaanxi Peoples R China Xian Focuslight Technol Co LTD Xian 710119 Peoples R China

ISBN: (纸本)9781424481422

High power semiconductor laser arrays have been widely used in many fields, such as pumping solid state laser aerospace, industry, medicine and display. For many applications, high power semiconductor lasers operating quasi-continuous wave (QCW) mode are demanded. For QCW laser, the output peak power is higher and average power is low. Therefore, the transient thermal density is very high. The most common method of removing the large amounts of waste heat in a semiconductor laser package is by using commercially-available copper micro-channel coolers (MCC). However, due to the coefficient of thermal expansion (CTE) mismatching between copper and laser chip, hard-solder cannot be directly used. On the other hand, indium solder has the problem of electro-thermal migration when the temperature grads were high in QCW mode. Furthermore, copper material is susceptible to erosion and corrosion. To overcome these hurdles in many applications, a novel macro channel cooler (MaCC) was presented in this work. The thermal behavior of MaCC-packaged high power semiconductor laser arrays in QCW mode was studied using finite element analysis (FEA). A high power of >250W QCW semiconductor laser array/bar using hard solder was fabricated. The performances of laser arrays, including output power, slope efficiency, threshold, conversion efficiency, spectral width, near field, lifetime etc. were characterized. The measured results indicated that the output power of a MaCC-packaged high power semiconductor laser array was very close to that of copper micro-channel cooler. Based on MaCC-packaged single laser array/bar, multiple-bar stack and two dimension area array lasers with output powers of several kilowatts and several tens of kilowatts were fabricated.

关键词： Efficiency

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Microfluidics and biosensors as tools for NanoBioSystems research with applications in the "Life Science"

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MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL solid-state MATERIALS 2010年第1-3期169卷 174-181页

作者： Schober, Andreas Augspurger, Caroline Fernekorn, Uta Weibezahn, Karl-Friedrich Schlingloff, Gregor Gebinoga, Michael Worgull, Mathias Schneider, Mark Hildmann, Christian Weise, Frank Hampl, Joerg Silveira, Liele Cimalla, Irina Luebbers, Benedikt Tech Univ Ilmenau MacroNano Grp D-98693 Ilmenau Germany Karlsruhe Inst Technol Inst Biol Interfaces D-76344 Eggenstein Leopoldshafen Germany Inst Technol Inst Microtechnol D-76344 Karlsruhe Germany

The fusion of nanotechnology and microtechnology to a field which could be called nanosystemintegration allows for the development of nanobiotechnological systems, which actually image the hierarchical organization of biological systems which utilize scales and laws of nature on all geometric levels. As one example of such systems may serve the design and the construction of a new class of micro-bioreactors. Here we have to construct and arrange fluidic devices and a biochemical environment in such a way, that living cells can survive in a three-dimensional, technical structure. Such organ-like cell structures promise to lead to new ways in medicinal chemistry for the determination of ADME/Tox properties of potential drugs. The integration of sensors, preferable novel AlGaN/GaN nanosensors, is within the construction principle. The latter nanosensors give the possibility to estimate non-destructively and label-free reactions of cells attached to the sensor surface. They are highly sensitive sensors and biocompatible to cells without any cytotoxic effect. In an advanced version the sensor should be implemented to give a better insight into cellular processes of the cells that are cultivated in the micro-bioreactor. (C) 2009 Elsevier B.V. All rights reserved.

关键词： Bio-MEMS Neuromuscular synapse MEA Nanoscale electronics and microsystems three-dimensional cell culture Micropump Microfluidics Bioreactor Multi-well-plate screening Lab-on-a chip Assay technology AlGaN/GaN Nanosensor Non-destructive measurement

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