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检索条件"任意字段=Conference on Solid State Sensor Arrays - Development and Applications"

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development of 100-nm-thick self-sensing nanocantilevers and characterization of the temperature dependence of the piezoresistivity and conductivity

Development of 100-nm-thick self-sensing nanocantilevers and...

引用

TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Jiang, Yonggang Ono, Takahito Esashi, Masayoshi Graduate School of Engineering Tohoku University Sendai Japan World Premier International Research Center Initiative for Atom Molecule Materials Tohoku University Sendai Japan

ISBN: (纸本)9781424441938

Piezoresistive nanocantilevers are proposed for high-sensitive sensing applications such as thermal detectors, mass sensors, and magnetic resonance force microscopy. This paper describes the development of 100-nm-thick piezoresistive nanocantilevers and characterization of the temperature dependence of the piezoresisitivity and conductivity. The pieozresistive nanocantilevers are fabricated using spin-on diffusion, electron beam lithography, deep reactive ion etching, and XeF2 vapor-phase etching techniques. A maximum longitudinal piezoresistance coefficient is obtained at 80-90 K. The shallo piezoresistor also exhibits a "quantum" metal-insulator transition phenomenon at a temperature as high as 40 K for the first time, which may prohibit its application at lower temperatures. ©2009 IEEE.

关键词： Nanocantilevers

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Wireless integrated microsystems: Wearable and implantable devices for improved health care

Wireless integrated microsystems: Wearable and implantable d...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Wise, Kensall D. Engineering Research Center for Wireless Integrated MicroSystems Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI 48109-2122 United States

ISBN: (纸本)9781424441938

Integrated sensors based on microelectronic technology were first developed in the late 60s for medical applications. Today they have evolved into wireless integrated microsystems (WIMS), combining micropower circuits, wireless interfaces, hermetic packaging, embedded power sources, and MEMS. Such devices are poised to provide important breakthroughs in health care. This paper traces the development of medical microsystems by looking at three of its earliest devices. Catheter-tip pressure sensors have evolved into smart stents and wireless intraocular monitors;wristwatch-size gas chromatography systems are emerging for the rapid identification of biomarkers for in breath;and neural interfaces are permitting revolutionary advances in neuroscience and in prostheses for deafness, blindness, epilepsy, paralysis, Parkinson's disease, and other disorders. The present status and remaining challenges in such devices will be described. ©2009 IEEE.

关键词： Medical applications

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development of SPDT-structured RF MEMS switch

Development of SPDT-structured RF MEMS switch

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Uno, Yutaka Narise, K. Masuda, T. Inoue, K. Adachi, Y. Hosoya, K. Seki, T. Sato, F. OMRON Corporation MEMS Development Sec. 686-1 Ichimiyake Yasu-City Shiga Japan OMRON Corporation Core Technology Center 9-1 Kizugawadai Kizugawa-City Kyoto Japan

ISBN: (纸本)9781424441938

Here, we propose a practical single pole double throw (SPDT)-structured radio frequency microelectromechanical system (RF MEMS) switch for RF applications. This SPDT switch has a very low insertion loss of 1.0dB and a high isolation of 40dB, up to 10GHz. The fabricated switch is compact in size (5.2x3.0x1.8 mm3) with a Land Grid Array Package. The research and development of an RF MEMS switch has been ongoing in our laboratory for years, and we have achieved practical reliability by using a low vibration actuator against a natural frequency. We describe the correlation between contact reliability and the low vibration actuator, as well as the high frequency performance of our new SPDT switch. ©2009 IEEE.

关键词： Natural frequencies

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Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Micro tactile sensors with a suspended and oriented single w...

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： M. Lu D. Lee T. Yeom T. Cui Department of Mechanical Engineering University of Minnesota Minneapolis MN USA

A tactile sensor utilizing a patterned and suspended SWNT film as a sensing element is reported in this paper. Dense and oriented SWNT films were self-assembled using dielectrophoresis through the monitoring of the dc resistance of the film. The SWNT film was patterned by lithography and oxygen plasma etching to form a suspended SWNT beam. PDMS primer was spin-coated on the SWNT structure, and cured to realize a robust tactile sensor. In nanoindentation test, a piezoresistive sensitivity of 5%/mN and a detection limitation of 2 muN were demonstrated. This simple and low temperature fabrication technology is believed to be very promising for flexible tactile sensors and sensor arrays in applications to smart robots, implantable clinic tools, or embedded pressure sensors in microfluidic systems.

关键词： Tactile sensors Carbon nanotubes sensor arrays Temperature sensors Plasma temperature Intelligent sensors sensor systems and applications Chemical elements Self-assembly Dielectrophoresis

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development of a glutamate biosensor based on glutamate oxidase using smart-biochips

Development of a glutamate biosensor based on glutamate oxid...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Rahman, M.M. Yamazaki, T. Ikeda, T. Ishida, M. Sawada, K. Venture Business Laboratory Department of Electrical and Electronic Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tempeku-cho Toyohashi Aichi 441-8580 Japan

ISBN: (纸本)9781424441938

A highly sensitive L-glutamate biosensor based on glutamate oxidase (GLOx) has been fabricated on N-(3-dimethylaminopropyl)-N-ethylcarbodiimide hydrochloride (EDC) activated thioglycolic acid (TGA) self assembled monolayer (SAM) on smart-biochips, where K3Fe(CN)6 and TGA-SAM are used as a mediator and an enzyme immobilization matrix, respectively. The glutamate biosensor displayed a fast response, a low detection limit (DL, 0.072 μM), a wide linear dynamic range (LDR, 0.1 μM to 10.0 mM), good linearity (R=0.9843), and higher sensitivity (17.89 μAmM-1cm-2), small sample volume (70.0 μl), as well as good stability and reproducibility. The Au/TGA system exemplified a simple and efficient approach to the assimilation of GLOx and electrodes, which can provide analytical access to a large group of enzymes for wide range of bio-electrochemical applications in health care fields. ©2009 IEEE.

关键词： Self assembled monolayers

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development of 3D 4-electrode IPMC actuator with accurate omnidirectional control ability for microendoscopic surgical application

Development of 3D 4-electrode IPMC actuator with accurate om...

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TRANSDUCERS 2009 - 15th International conference on solid-state sensors, Actuators and Microsystems

作者： Feng, Guo-Hua Tsai, Jeng-Wei Department of Mechanical Enginering National Chung Cheng University Chiayi Taiwan

ISBN: (纸本)9781424441938

This paper presents a novel three-dimensional (3D) four-electrode Ion Polymer Metal Composite (IPMC) actuator with accurate omnidirectional control capability. The developed 3D IPMC transducer is used to enclose a section of optical fiber, thereby allowing electronic directional control of conducted laser light. This could be useful in applications such as microendoscopic ocular surgery. The fabricated device with the IPMC actuator dimension of 5mm x 2mm x 1 mm shows that it could reach a displacement of 400 m in the direction perpendicular to the electrode surface when a square wave of 9 volts is applied. A threshold voltage about 4 volts is found during actuation for the fabricated transducer. Besides, the transducer moving along a direction which is not perpendicular to the electrode surface is also demonstrated. The result shows that a displacement of 275 m can be reached when a sinusoid wave of 9 volts is applied, and the angle maintains a near constant value for varied operating frequencies. ©2009 IEEE.

关键词： Electrodes

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A biomedical multiprocessor SoC for closed-loop neuroprosthetic applications

A biomedical multiprocessor SoC for closed-loop neuroprosthe...

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Tung-Chien Chen Kuanfu Chen Zhi Yang Kimberly Cockerham Wentai Liu National Taiwan University Taipei Taiwan University of California Santa Cruz CA Stanford University Stanford CA

Successful proof-of-concept laboratory experiments on cortically controlled motor prostheses, brain pacemakers and hippocampal prostheses motivate continued development for neural prosthetic systems. Advances in implantable electrode arrays and miniaturized multichannel recording ICs enable long-duration, wireless and closed-loop experiments on freely moving subjects. To further improve clinically viable neural prostheses, the bulk associated with external systems must be eliminated. Thus a miniaturized processing-and-controlling system interfacing recording ICs and actuators in real time is required.

关键词： Neural prosthesis Sorting Principal component analysis Epilepsy Prosthetics sensor arrays Covariance matrix Logic gates Feature extraction Implants

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A 2×32 range-finding sensor array with pixel-inherent suppression of ambient light up to 120klx

A 2×32 range-finding sensor array with pixel-inherent suppr...

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IEEE International conference on solid-state Circuits (ISSCC)

作者： Gerald Zach Horst Zimmermann University of Technology Vienna Vienna Austria

Real-time 3D imaging has reached a state of development where several fields of application are possible, such as factory automation, consumer electronics, security, and robotics. The first commercial products have already been launched, or will be available soon. Accuracies in the centimeter range or even below, low cost, and robustness to disturbances in realistic indoor and outdoor environments are the key performance demands for these sensors, which are mostly based on the time-of-flight (TOF) principle either in pulsed or continuous- wave (CW) mode.

关键词： sensor arrays Optical arrays Capacitors Intelligent sensors Optical filters Optical buffering Strontium Optical modulation Optical sensors Image resolution

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An array of monolithic FBAR-CMOS oscillators for mass-sensing applictions

An array of monolithic FBAR-CMOS oscillators for mass-sensin...

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： M.L. Johnston I. Kymissis K.L. Shepard Department of Electrical Engineering Columbia University New York NY USA

We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an affective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limiations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 times 4 array atop a 0.18mum CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.

关键词： Oscillators sensor arrays Film bulk acoustic resonators Chemical and biological sensors Biosensors Thin film circuits Acoustic signal detection Frequency Monolithic integrated circuits Acoustic sensors

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Advances in radar systems by SELEX Sistemi Integrati: Today and towards the future

Advances in radar systems by SELEX Sistemi Integrati: Today ...

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European Radar conference (EURAD)

作者： Marina Grossi Annamaria Fiorello Stefano Pagliai Microelectron. & Photonic Dept. SELEX-Sist. Integrati Rome Italy Microelectronic and Photonic Department SELEX Sistemi Integrati Rome Italy Military Primary Radar Department SELEX Sistemi Integrati Rome Italy

SELEX Sistemi Integrati is now watching toward the future to reinforce its leadership in the state of the art of radar systems. The strong position in the market has been achieved by delivering top radar performance in many fields of application and it has been based on the capability to manage the proper technology insertion in its radar systems. For each radar product the Company has identified its own key technology components and has planned its development and insertion to take the right advantage from a well established radar knowledge. The same winning approach is now followed for the next generation of SELEX-SI radar systems. In the paper it will be shown how the Company has developed technology and radar systems together in the past, how it is delivering up to date solutions now and how it is preparing the new generation of radar systems by investing again in technology. In this field the focus will be on the new multifunction/multirole radar applications and on the technological capabilities that SELEX-SI is developing by taking advantage of its Research and development facilities.

关键词： Radar applications Radar antennas sensor arrays Paper technology Phased arrays Time to market Transmission line measurements Gallium arsenide solid state circuits Field programmable gate arrays

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