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科仪新知 2008年第167期 30-35页

作者：王祥宇

现代的天文研究与科技的发展有着密不可分的关系，尤其是固态电子侦测器技术的成熟，使得天文研究进入一个准确定量化的时代，大幅加速了天文学的发展。藉着天文对影像品质的要求，更多更先进的大面积侦测器阵列也陆续被开发出来。本文...

现代的天文研究与科技的发展有着密不可分的关系，尤其是固态电子侦测器技术的成熟，使得天文研究进入一个准确定量化的时代，大幅加速了天文学的发展。藉着天文对影像品质的要求，更多更先进的大面积侦测器阵列也陆续被开发出来。本文将介绍台湾参与的先进红外线相机计画，以此为例介绍天文相机的特性与要求，并且说明其与一般数位相机的差异。

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Transparent SU-8 three-axis micro strain gauge force sensing pillar arrays for biological applications

Transparent SU-8 three-axis micro strain gauge force sensing...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Klejwa, N. Harjee, N. Kwon, R. Coulthard, S. M. Pruitt, B. L. Stanford Univ Dept Elect Engn Stanford CA 94305 USA Stanford Univ Dept Engn Mech Stanford CA 94305 USA

ISBN: (纸本)9781424408412

This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies (Drosophila melanogaster), including: 1 mu N force sensitivity, >25 mu N range, and bio-compatibility. By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing.

关键词： SU-8 force sensor strain gauge

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Silicon nanowire arrays for ultrasensitive label-free detection of DNA

Silicon nanowire arrays for ultrasensitive label-free detect...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Gao, Z. Agarwal, A. Trigg, A. D. Singh, N. Fang, C. Tung, C. H. Buddharaju, K. D. Inst Microelect 11 Sci Pk Rd Singapore Singapore

ISBN: (纸本)9781424408412

arrays of highly ordered silicon nanowires (SiNWs) are fabricated using complementary metal-oxide semiconductor (CMOS) compatible technology and their applications in biosensors are investigated. The SiNW arrays show a concentration-dependent resistance change upon hybridization to complementary target DNA. As in the case of other SiNW biosensing devices, the sensing mechanism can be understood in terms of the change in charge density at the SiNW surface after hybridization, the so called "field effect". The SiNW arrays discriminate satisfactorily against mismatched target DNA.

关键词： silicon nanowire nucleic acid peptide nucleic acid field effect biosensor

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One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

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solid-state ELECTRONICS 2007年第11-12期51卷 1596-1608页

作者： Piazza, Gianluca Stephanou, Philip J. Pisano, Albert P. Univ Penn Dept Elect & Syst Engn Philadelphia PA 19104 USA Harmon Devices Inc Berkeley CA 94720 USA Univ Calif Berkeley Berkeley Sensor & Actuator Ctr Berkeley CA 94720 USA

This paper reports on the design, fabrication and testing of novel one and two port piezoelectric higher order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters. The paper offers a comparison of one and two port resonant devices exhibiting frequencies approximately ranging from 200 to 800 MHz, quality factor of few thousands (1000-2500) and motional resistances ranging from 25 to 1000 Omega. Fundamental advantages and limitations of each solution are discussed. The reported experimental results focus on the response of a higher order one port resonator under different environmental conditions and a new class of two port contour resonators for narrow band filtering applications. Furthermore, an overview of novel frequency synthesis schemes that can be enabled by these contour-mode resonators is briefly presented. (c) 2007 Elsevier Ltd. All rights reserved.

关键词： RF MEMS piezoelectric resonator contour-mode resonators aluminum nitride

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Study for the design of eddy current microsensor arrays for non destructive testing applications

Study for the design of eddy current microsensor arrays for ...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Ravat, C. Woytasi, M. Joubert, P. -Y. Le Bihan, Y. Marchand, C. Dufour-Gergam, E. Moulin, J. Martincic, E. Univ Paris 06 LGEP SPEE Labs CNRS UMR 8507 F-91192 Gif Sur Yvette France ENS Cachen CNRS UMR 8029 SATIE SPEE Labs F-94235 Cachan France CNRS IFE UMR 8622 F-91405 Orsay France

ISBN: (纸本)9781424408412

In this paper, an experimental study was carried out for the design of microsensor arrays dedicated to eddy current non destructive applications. A 3-microcoil 1-D array sensor was realized thanks to microtechnology. Since each coil can be used as a transmitter or a receiver, five different transmission-reception strategies were considered for the inspection of a nickel based alloy target, featuring several calibrated surface notches. While the most basic strategy did not detect the smallest notch (0.1x0.1x0.1 mm(3)), the best strategy detected it with a 20 dB signal to noise ratio. The detection performances were then analyzed versus frequency and versus notch size.

关键词： eddy current non destructive testing microsensor array copper microcoils

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A simple optical gas sensor based on micromachined silicon plasma igniters and image processing

A simple optical gas sensor based on micromachined silicon p...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Phommahaxay, Alain Lissorgues, Gaelle Rousseau, Lionel Perrais, Vincent Francais, Olivier Bourouina, Tarik Nicole, Pierre ESIEE Paris ESYCOM Noisy Le Grand France CNAM Paris France Thales Airborne Syst Elancourt France

ISBN: (纸本)9781424408412

The early developments of an optical gas sensor combining plasma ignition by silicon electrode arrays and optical detection coupled with image processing are presented in this paper. The principle of the sensor under development is based on the ionization of chemical species under intense electrical fields and the detection by optical sensors of photons created by glow discharges. Electrodes optimization by electrostatic simulations has led to the design and fabrication of micromachined silicon igniters bonded to a glass substrate. First characterizations of the plasma igniters will be also presented.

关键词： gas sensor glow discharge silicon electrode image processing

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Pyroelectric linear arrays and their application

Pyroelectric linear arrays and their application

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conference on Infrared Spaceborne Remote Sensing and Instrumentation XV

作者： Norkus, Volkmar Gerlach, Gerald Koehler, Reinhard Hofmann, Guenter Tech Univ Dresden Solid State Elect Lab Mommsenstr 13 D-01062 Dresden Germany DIAS Infrared GmbH D-01217 Dresden Germany

ISBN: (纸本)9780819468260

For about 15 years, the solid-state Electronics Lab at the TU Dresden in co-operation with the DIAS Infrared GmbH has been developing pyroelectric linear arrays on the basis of lithium tantalate. These arrays have up to 256 responsive elements and are responsive in the wavelength range of 0.8 ... 25 mu m. The geometry of the elements can be easily adjusted to the actual application. The available array technology allows the cost-effective production of linear arrays with a high signal-to-noise ratio and an excellent long-term stability. The paper describes the essential properties of the manufactured and newly developed linear arrays and also their applications in contactless temperature measurement, spectrometry and security systems.

关键词： infrared detector pyroelectric linear array array properties spectrometer

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A CMOS array sensor for sub-800-ps time-resolved fluorescence detection 29

A CMOS array sensor for sub-800-ps time-resolved fluorescenc...

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IEEE Custom Integrated Circuits conference

作者： Huang, T. Sorgenfrei, S. Shepard, K. L. Gong, P. Levicky, R. Columbia Univ Dept Elect Engn New York NY 10027 USA Columbia Univ Dept Chem Engn New York NY 10027 USA Polytech Univ Dept Chem & Biol Engn 6 Metrotech Ctr Brooklyn NY 11201 USA

ISBN: (纸本)9781424407866

This paper describes the design of an active CMOS sensor array for fluorescence applications which enables timegated, time-resolved fluorescence spectroscopy. The 64 x 64 array is sensitive to photon densities as low as 8 x 106 photons/cm(2) with 64-point averaging and, through a differential pixel design, has a measured impulse response of better than 800 ps. applications include both active microarrays and high-frame-rate imagers for fluorescence lifetime imaging microscopy.

关键词： sensor arrays Fluorescence IMPULSE RESPONSE Time resolved time-resolved fluorescence spectroscopy photon density imaging instrument

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Recent development of ultra small pixel uncooled focal plane arrays at DRS

Recent development of ultra small pixel uncooled focal plane...

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conference on Infrared Technology and applications XXXIII

作者： Li, Chuan Skidmore, George D. Howard, Christopher Han, C. J. Wood, Lewis Peysha, Doug Williams, Eric Trujillo, Carlos Emmett, Jeff Robas, Gary Jardine, Daniel Wan, C. -F. Clarke, Elwood DRS Sensors & Targeting Syst Dallas TX USA DRS Sensors & Targeting Syst Irvine CA 92606 USA

ISBN: (纸本)9780819466648

DRS is a major supplier of the 25 mu m pixel pitch 640x480 and 320x240 infrared uncooled focal plane arrays (UFPAs) and camera products for commercial and military markets. The state-of-the-art 25 mu m pixel focal plane arrays currently in production provide excellent performance for soldier thermal weapon sights (TWS), vehicle driver vision enhancers (DVE), and aerial surveillance and industrial thermograph applications. To further improve sensor resolution and reduce the sensor system size, weight and cost, it is highly desired to reduce the UFPA pixel size. However, the 17 mu m pixel FPA presents significant design and fabrication challenges as compared with 25 mu m pixel FPAs. The design objectives, engineering trade-offs, and performance goals will be discussed. This paper presents an overview of the 17 mu m microblometer uncooled focal plane arrays and sensor electronics production and development activities at DRS. The 17 mu m pixel performance data from several initial fabrication lots will be summarized. Relevant 25 mu m pixel performance data are provided for comparison. Thermal images and video from the 17 mu m pixel 640x480 UFPA will also be presented.

关键词： uncooled infrared infrared focal plane array

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High-density flexible parylene-based multielectrode arrays for retinal and spinal cord stimulation

High-density flexible parylene-based multielectrode arrays f...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Rodger, D. C. Fong, A. J. Li, W. Ameri, H. Lavrov, I. Zhong, H. Saati, S. Menon, P. Meng, E. Burdick, J. W. Roy, R. R. Edgerton, V. R. Weiland, J. D. Humayun, M. S. Tai, Y. C. CALTECH Pasadena CA 91125 USA Univ Southern Calif Los Angeles CA USA Univ Calif Los Angeles Los Angeles CA USA

ISBN: (纸本)9781424408412

Novel flexible parylene-based high-density electrode arrays have been developed for functional electrical stimulation in retinal and spinal cord applications. These electrode arrays are microfabricated according to single-metal-layer and, most recently, dual-metal-layer processes. A new heat-molding process has been implemented to conform electrode arrays to approximate the curvature of canine retinas, and chronic implantation studies have been undertaken to study the mechanical effects of parylene-based prostheses on the retina, with excellent results to date. Electrode arrays have also been implanted and tested on the spinal cords of routine models, with the ultimate goal of facilitation of locomotion after spinal cord injury;these arrays provide a higher density and better spatial control of stimulation and recording than is typically possible using traditional fine-wire electrodes. Spinal cord stimulation typically elicited three muscle responses, an early (direct), a middle (monosynaptic), and a late (polysynaptic) response, classified based on latency after stimulation. Stimulation at different rostrocaudal levels of the cord yielded markedly different muscle responses, highlighting the need for such high-density arrays.

关键词： BioMEMS neural prosthesis parylene C retinal prosthesis

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