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Via-free interconnection in quasi-hermetic wafer-level packaging for RF-MEMS applications and 3D integration

Via-free interconnection in quasi-hermetic wafer-level packa...

14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Phommahaxay, Alain Lissorgues, Gaelle Rousseau, Lionel Perrais, Vincent Marty, Frederic Bourouina, Thrik Nicole, Pierre ESIEE Paris ESYCOM Noisy Le Grand France Thales Airborne Syst Elancourt France

ISBN: (纸本)9781424408412

The development of an interconnection method based on electromagnetic coupling for hermetic or vacuum packaging in RF-MEMS applications is presented in this paper. Combined with wafer-level packaging by anodic bonding, it minimizes the leakage probability of such package by avoiding the use of vertical interconnections or horizontal feedthroughs. Electromagnetic simulations will be discussed and compared to microwave measurements on coupling structures.

关键词： electromagnetic coupling interconnection microwave transition wafer-level packaging

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A microfluidic oxygenator for biological cell culture

A microfluidic oxygenator for biological cell culture

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Lam, Raymond H. W. Kim, Min-Cheol Thorsen, Todd MIT Hatsopoulos Microfluids Lab 77 Massachusetts Ave Cambridge MA 02139 USA

ISBN: (纸本)9781424408412

In this paper, we report on the development of a microfluidic platform in which dissolved oxygen (DO) concentrations can be dynamically adjusted for cell culture applications. The DO concentration in culture media flowing through enclosed microchannels is regulated by the diffusion through an elastromeric interface from an overhead gas channel, using an oxygen-sensitive dye embedded in the fluid channel as a sensor. Using a microchannel network functioning as an oxygen/nitrogen mixer, the growth characteristics of routine fibroblast cells (3T3) were analyzed as a function of eight discrete DO concentrations in culture media within a single device, ranging from anaerobic (0 ppm) to fully saturated (42 ppm).

关键词： microfluid oxygenator sensor cell

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High performance large infrared and visible astronomy arrays for low background applications: Instruments performance data and future developments at Raytheon

High performance large infrared and visible astronomy arrays...

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conference on Infrared Systems and Photoelectronic Technology II

作者： Beuville, Eric Acton, David Corrales, Elizabeth Drab, John Levy, Alan Merrillb, Michael Peralta, Richard Ritchie, William Raytheon Vis Syst Goleta CA 93117 USA Natl Opt Astron Observ Tucson AZ 85719 USA

ISBN: (纸本)9780819468086

Raytheon Vision Systems (RVS) has developed a family of high performance large format infrared detector arrays for astronomy and civil space applications. RVS offers unique off-the-shelf solutions to the astronomy community. This paper describes mega-pixel arrays, based on multiple detector materials, developed for astronomy and low-background applications. New focal plane arrays under development at RVS for the astronomy community will also be presented. Large sensor Chip Assemblies (SCAB) using various detector materials like Si:PINT, HgCdTe, InSb, and Si:As IBC, covering a detection range from visible to large wavelength infrared (LWIR) have been demonstrated with an excellent quantum efficiency and very good uniformity. These focal plane arrays have been assembled using state-of-the-art low noise, low power, readout integrated circuits (ROIC) designed at RVS. Raytheon packaging capabilities address reliability, precision alignment and flatness requirements for both ground-based and space applications. Multiple SCAs can be packaged into even larger focal planes. The VISTA telescope, for example, contains sixteen 2k X 2k infrared focal plane arrays. RVS astronomical arrays are being deployed world-wide in ground-based and space-based applications. A summary of performance data for each of these array types from instruments in operation will be presented (VIRGO Array for large format SWIR, the ORION and VISTA arrays, NEWFIRM and other solutions for MWIR spectral ranges).

关键词： infrared astronomy readouts megapixel focal plane array InSb HgCdTe Si : PIN Raytheon

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Advanced MEMS development for high power sensor application

Advanced MEMS development for high power sensor application

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6th IEEE sensors conference

作者： Kim, Bruce C. Kasim, Rahim Univ Alabama Dept Elect & Comp Engn Tuscaloosa AL 35487 USA Intel Corp Portland OR 95051 USA

ISBN: (纸本)9781424412617

This paper describes the first attempt to utilize the MEMS in high power sensing application. We present a design and fabrication of advanced MEMS sensors in high power distribution systems. The developed MEMS is used as a high current power sensor for on-ship and autonomous moving vehicles. We designed and fabricated arrays of low power MEMS switches to handle high power which are magnetically actuated. MEMS provides the much needed optimization with its high speed switching capability compared to mechanical current sensors and improved power handling efficiency over solid-state switches.

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development and commercialization of MEMS in Taiwan - A bumpy exciting experience

Development and commercialization of MEMS in Taiwan - A bump...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Huang, Star Rueyshing Asia Pacific Microsyst Inc Hsinchu Taiwan

ISBN: (纸本)9781424408412

Advanced MEMS technologies, devices, applications, and commercialization have been in the focus of many international conferences for nearly two decades. However, successful commercialization of MEMS devices with volumes is only limited to a few products. This paper will discuss from various aspects how to enable this so-called enabling technology starting from development going through commercialization more effectively to shorten product's time-to-market.. The paper is organized in two parts;one is dealing with the infrastructure build-up for MEMS industry, and the other is sharing the personal experience in bringing a MEMS company from ground zero to the number three MEMS wafer foundry provider in the world within five years. It is identified that joint efforts and work together closely from the MEMS interested community right from the beginning is a key successful factor.

关键词： MEMS commercialization foundry Taiwan

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Enabling MEMS chemical microsensor arrays for trace analyte detection

Enabling MEMS chemical microsensor arrays for trace analyte ...

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14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Meier, Douglas C. Evju, Jon K. Benkstein, Kurt D. Raman, Baranidharan Boger, Zvi Lahr, David L. Semancik, Steve Natl Inst Stand & Technol Chem Sci & Technol Lab Gaithersburg MD 20899 USA

ISBN: (纸本)9781424408412

We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition of low concentration target analytes in background mixtures. This brief report emphasizes: 1) recently developed selection and processing methods for incorporation of high performance sensing materials on the MEMS platforms, 2) special operational modes and data acquisition approaches for ensuring good signal quality while maximizing information content, and 3) signal analysis techniques that include preprocessing routines and advanced recognition algorithms.

关键词： array conductance MEMS metal oxide microhotplate neural networks temperature

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development of a wireless bridge monitoring system for condition assessment using hybrid techniques

Development of a wireless bridge monitoring system for condi...

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conference on sensor Systems and Networks - Phenomena, Technology, and applications for NDE and Health Monitoring 2007

作者： Whelan, Matthew J. Fuchs, Michael P. Gangone, Michael V. Janoyan, Kerop D. Clarkson Univ Dept Civil & Environm Engn 8 Clarkson AveBox 5710 Potsdam NY 13699 USA

ISBN: (纸本)9780819466518

The introduction and development of wireless sensor network technology has resulted in rapid growth within the field of structural health monitoring (SHM), as the dramatic cable costs associated with instrumentation of large civil structures is potentially alleviated. Traditionally, condition assessment of bridge structures is accomplished through the use of either vibration measurements or strain sensing. One approach is through quantifying dynamic characteristics and mode shapes developed through the use of relatively dense arrays of accelerometers. Another widely utilized method of condition assessment is bridge load rating, which is enabled through the use of strain sensors. The Wireless sensor Solution (WSS) developed specifically for diagnostic bridge monitoring provides a hybrid system that interfaces with both accelerometers and strain sensors to facilitate vibration-based bridge evaluation as well as load rating and static analysis on a universal platform. This paper presents the development and testing of a wireless bridge monitoring system designed within the Laboratory for Intelligent Infrastructure and Transportation Technologies (LIITT) at Clarkson University. The system interfaces with low-cost MEMS accelerometers using custom signal conditioning for amplification and filtering tailored to the spectrum of typical bridge vibrations, specifically from ambient excitation. Additionally, a signal conditioning and high resolution ADC interface is provided for strain gauge sensors. To permit compensation for the influence of temperature, thermistor-based temperature sensing is also enabled. In addition to the hardware description, this paper presents features of the software applications and host interface developed for flexible, userfriendly in-network control of and acquisition from the sensor nodes. The architecture of the software radio protocol is also discussed along with results of field deployments including relatively large-scale networks and throug

关键词： bridge monitoring wireless sensor network structural health monitoring ambient vibration

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Utilizing a chronopotentiometric sensor technique for metallothionein determination in fish tissues and their host parasites

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sensorS AND ACTUATORS B-CHEMICAL 2007年第1期127卷 112-119页

作者： Petrlova, Jitka Krizkova, Sona Zitka, Ondrej Hubalek, Jaromir Prusa, Richard Adam, Vojtech Wang, Joseph Beklova, Miroslava Sures, Bernd Kizek, Rene Mendel Univ Brno Dept Chem & Biochem CZ-61300 Brno Czech Republic Mendel Univ Brno Dept Anim Nutr & Forage Prod CZ-61300 Brno Czech Republic Brno Univ Technol Dept Microelect CZ-60200 Brno Czech Republic Charles Univ Prague Fac Med 2 Dept Clin Biochem & Pathobiochem CZ-15006 Prague 5 Czech Republic Arizona State Univ Dept Chem & Mat Engn Tempe AZ 85287 USA Arizona State Univ Dept Chem Tempe AZ 85287 USA Univ Vet & Pharmaceut Sci Dept Vet Ecol & Environm Protect CZ-61242 Brno Czech Republic Univ Duisburg Essen D-45117 Essen Germany

Metallothionein (MT) are a class of intracellular proteins possessing cysteme-rich and heavy metal-binding properties. They can be utilized as biomarkers for the detection and assessment of heavy metals in environmental pollution. This paper addresses the development of a sensor technique suitable for the determination of MT in the tissue samples of perches and their parasites. The work suggest a heavy metal biosensor based on interaction of heavy metals (lead(H), cadmium(H), copper(II) and silver(l)) with MT using adsorptive transfer stripping (AdTS) technique in combination with chronopotentiometric stripping analysis. The samples were investigated with various heavy metals (lead(H), cadmium(H), copper(H) and silver(l)), prior to sensor applications to understand the interaction between MT and the metals. The results obtained from this experiment clearly show that cadmium(II) had the highest affinity for MT followed by silver(l), copper(H) and lead(H). Based on these results, we attempted to quantify MT content with respect to content of a heavy metal in the samples of interest. The highest re-evaluated concentration of MT (495 ng/g of fresh weight) was determined in samples of Acanthocephalus anguillae. (c) 2007 Elsevier B.V. All rights reserved.

关键词： metallothionem sensor electrochemical detection peak H perch (Perca fluviatilis) parasites Acanthocephalus lucii and Acanthocephalus anguillae heavy metals

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Computational survey of representative energetic materials as propellants for microthruster applications

Computational survey of representative energetic materials a...

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conference on Micro (MEMS) and Nanotechnologies for Defense and Security

作者： Fuchs, Brian Stec, Daniel, III US Army ARDEC Picatinny Arsenal NJ 07806 USA SAIC Picatinny Arsenal NJ 07806 USA

ISBN: (纸本)9780819466785

Microthrusters are critical for the development of terrestrial micromissiles and nano air vehicles for reconnaissance, surveillance, and sensor emplacement. With the maturation of MEMS manufacturing technology, the physical components of the thrusters can be readily fabricated. The thruster type that is the most straightforward is chemical combustion of a propellant that is ignited by a heating element giving a single shot thrust. arrays of MEMS manufactured thrusters can be ganged to give multiple firings. The basic model for such a system is a solid rocket motor. The desired elements for the propellant of a chemical thruster are high specific impulse (I-sp), high temperature and pressure, and low molecular weight combustion gases. Since the combustion chamber of a microthruster is extremely small, the propellant material must be able to ignite, sustain and complete its bum inside the chamber. The propellant can be either a solid or a liquid. There are a large number of energetic materials available as candidates for a propellant for microthrusters. There has been no systematic evaluation of the available energetic materials as propellant candidates for microthrusters. This report summarizes computations done on a series of energetic materials to address their suitabilities as microthruster propellants.

关键词： microthrusters MEMS energetic materials propellants

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development of novel sphincter sensors for use in Gastroenterology and Urology diagnostic applications

Development of novel sphincter sensors for use in Gastroente...

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29th Annual International conference of the IEEE-Engineering-in-Medicine-and-Biology-Society

作者： Urie, James Mediplus Ltd.

ISBN: (纸本)9781424407873

We are developing a range of sphincter sensors for use in Gastroenterology and Urology diagnostic applications, such as Reflux and Urinary Incontinence. Urinary Incontinence costs the NHS in the UK around £600 million per annum so there is a clear need for improved diagnostic methods such as the sensors being developed. As part of this process a reusable interface unit will be developed which can connect to existing diagnostic equipment thus reducing the impact on the clinicians using the products developed. Initially the interface unit will communicate to the equipment by the use of wires and with future iterations it will enable the clinician to carry out ambulatory studies by storing the data remotely and then wirelessly transmitting the data to the diagnostic equipment. The current methods of measuring sphincter closures are water perfused and solid-state micro-tip catheters. Both have advantages and disadvantages - The water-perfused catheters are slow to respond, single use and also can be tricky to set-up correctly. The solid-state micro-tip catheters are quick to respond, very expensive and are re-usable which has contamination issues. The products developed within Healthy Aims will overcome these shortcomings and will enable clinicians to obtain fast accurate diagnostic results. To date the project has developed a gauge that meets the specifications and has identified a number of different ways in which to manufacture the final device and is confident that by the end of the project a urethral sensor will be going through clinical trials. A number of clinical education seminars have been held to increase the awareness of the project and to ensure that the development is in-line with current clinical thinking. The future of wireless diagnostics for Gastroenterology and Urology will enable more 'natural' diagnosis and possibly treatment of patients suffering with certain conditions. For example, the current method of diagnosing urinary incontinence focuses on

关键词： Biomedical engineering

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