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20th International Vacuum Nanoelectronics conference (IVNC 2007)

作者： N. Negishi T. Sato Y. Matsuba R. Tanaka T. Nakada K. Sakemura Y. Okuda A. Watanabe T. Yoshikawa K. Ogasawara M. Nanba S. Okazaki K. Tanioka N. Egami N. Koshida Corporate Research & Development Laboratories Pioneer Corporation Japan NHK Science & Technical Research Labs. Japan Graduate School of Engineering Tokyo University of Agriculture슠and슠Technology Japan

A HARP (high-gain avalanche rushing amorphous photoconductor) [1] imaging tube is well-known as an ultra-high sensitive image sensor and has been applied to high performance low light imaging camera for broadcasting, industry, biology, and so on. Its conventional bulky structure and relatively high power consumption compared with solid-state imaging sensors are, however, still to be improved toward general applications.

关键词： Pixel Active matrix technology Image sensors Silicon Electron guns Electron emission MOSFETs Driver circuits Low voltage Large scale integration

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development of a solid-state multi-sensor array camera for real time imaging of magnetic fields

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Journal of Physics: conference Series 2007年第1期76卷

作者： Benitez, Diego Gaydecki, Patrick Quek, Sung Torres, Vladimir School of Electrical and Electronic Engineering University of Manchester Manchester M60 1QD PO Box 88 United Kingdom

The development of a real-time magnetic field imaging camera based on solid-state sensors is described. The final laboratory comprises a 2D array of 33 x 33 solid state, tri-axial magneto-inductive sensors, and is located within a large current-carrying coil. This may be excited to produce either a steady or time-varying magnetic field. Outputs from several rows of sensors are routed to a sub-master controller and all sub-masters route to a master-controller responsible for data coordination and signal pre-processing. The data are finally streamed to a host computer via a USB interface and the image generated and displayed at a rate of several frames per second. Accurate image generation is predicated on a knowledge of the sensor response, magnetic field perturbations and the nature of the target respecting permeability and conductivity. To this end, the development of the instrumentation has been complemented by extensive numerical modelling of field distribution patterns using boundary element methods. Although it was originally intended for deployment in the nondestructive evaluation (NDE) of reinforced concrete, it was soon realised during the course of the work that the magnetic field imaging system had many potential applications, for example, in medicine, security screening, quality assurance (such as the food industry), other areas of nondestructive evaluation (NDE), designs associated with magnetic fields, teaching and research. © 2007 IOP Publishing Ltd.

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A MICROFLUIDIC OXYGENATOR FOR BIOLOGICAL CELL CULTURE

A MICROFLUIDIC OXYGENATOR FOR BIOLOGICAL CELL CULTURE

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2007 International solid-state sensors, Actuators and Microsystems conference (TRANSDUCERS 2007), vol.5

作者： Raymond H. W. Lam Min-Cheol Kim Todd Thorsen Hatsopoulos Microfluids Laboratory Massachusetts Institute of Technology Cambridge MA USA

In this paper, we report on the development of a microfluidic platform in which dissolved oxygen (DO) concentrations can be dynamically adjusted for cell culture applications. The DO concentration in culture media flowing through enclosed microchannels is regulated by the diffusion through an elastromeric interface from an overhead gas channel, using an oxygen-sensitive dye embedded in the fluid channel as a sensor. Using a microchannel network functioning as an oxygen/nitrogen mixer, the growth characteristics of murine fibroblast cells (3T3) were analyzed as a function of eight discrete DO concentrations in culture media within a single device, ranging from anaerobic (0ppm) to fully saturated (42ppm).

关键词： Microfluid Oxygenator sensor Cell

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development of a MOEMS sun sensor for space applications

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sensorS AND ACTUATORS A-PHYSICAL 2006年第SPEC. ISS.期130卷 28-36页

作者： Bohnke, Tobias Edoff, Marika Stenmark, Lars Uppsala Univ Dept Engn Sci S-75121 Uppsala Sweden

This paper presents the development of a miniaturized, thin film sun sensor for sun angle detection in space applications. The overall design, different thin film layer sequences, processes, materials used and system integration are described. The sun sensor has a field of view (FoV) of greater than 2 pi sr (+/- 90 degrees) and shall have a resolution of approximately 1 degrees in elevation and azimuth angle. This sun sensor is therefore a coarse sun sensor with the advantage of having a large field of view. Key elements are the curved shape, the photosensitive layer consisting of copper indium gallium diselenide (CIGS), the transparent conductive layer consisting of thin molybdenum or aluminum-doped zinc oxide, and its integrated design. Different possible layer sequences are presented and discussed. The sun sensor will be one of the sensors in the attitude determination and control system (ADCS) of a nano-satellite. (c) 2005 Elsevier B.V. All rights reserved.

关键词： angular measurement nano-satellite position sensitive detector sun angle sun sensor transparent conductive layer

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A dry electrophysiology electrode using CNT arrays

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sensorS AND ACTUATORS A-PHYSICAL 2006年第1期132卷 34-41页

作者： Ruffini, Giulio Dunne, Stephen Farres, Esteve Marco-Pallares, Josep Ray, Chris Mendoza, Ernest Silva, Ravi Grau, Carles Starlab Barcelona SL Ed Observ Fabra Barcelona 08035 Spain Univ Surrey Adv Technol Inst Nanoelect Ctr Guildford GU2 5XH Surrey England Univ Barcelona Neurodyan Lab Psychiat & Clin Psychobiol Dept E-08007 Barcelona Spain

We describe the design of a dry electrode sensor for biopotential measurement applications (ENOBIO) designed to eliminate the noise and inconvenience associated to the use of electrolytic gel. ENOBIO uses nanotechnology to remove gel-related noise, as well as maintaining a good contact impedance to minimise interference noise. The contact surface of the electrode will be covered with an array/forest of carbon nanotubes and will also be tested with an Ag/AgCl coating to provide ionic-electronic transduction. The nanotubes are to penetrate the outer layers of the skin, the Stratum Corneum, improving electrical contact. We discuss requirements, skin properties, nanotube penetration and transduction, noise sources, prototype design logic and biocompatibility. A future paper will report test results. (c) 2006 Elsevier B.V. All rights reserved.

关键词： biopotential electrode carbon nanotubes EEG ECG

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Evolution of epitaxial titanium silicide nanocrystals as a function of growth method and annealing treatments

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APPLIED SURFACE SCIENCE 2006年第15期252卷 5355-5360页

作者： Goldfarb, I. Grossman, S. Cohen-Taguri, G. Tel Aviv Univ Fac Engn Dept Solid Mech Mat & Syst IL-69978 Tel Aviv Israel Tel Aviv Univ Univ Res Inst Nanosci & Nanotechnol IL-69978 Tel Aviv Israel

Titanium silicide grows on silicon in a form of discontinuous layers, which is the most serious obstacle to the formation of high-quality epilayers for VLSI applications. At the same time, nanometric dimensions of the epitaxial silicide islands attract interest as quantum nanostructures. However, for this purpose, nanocrystals in a self-assembled array have to be defect-free, and exhibit high shape and size uniformity. In this work titanium silicide was grown on Si(1 1 1) substrates by reactive deposition epitaxy and by solid-phase epitaxy. Since the reaction and phase-formation kinetics depend on the growth method, accordingly different lattice matching and facet energies may result in different morphological shapes of the nanocrystals. Nanocrystals from reaction in a solid-state could be characterized as highly non-uniform in both shape and size, and their evolution due to post-deposition anneals increased that non-uniformity even further. Relaxation of epitaxial mismatch strain by misfit dislocations could be inferred from a gradual reduction of the nanocrystal vertical aspect ratio and development of flat top facets out of the initially sharp conical crests, in accord with generalized Wulf-Kaishew theorem. On the other hand, the silicide nanocrystals formed by reactive deposition exhibited high uniformity and thermal stability. Significant strain relaxation, as could be judged by the nanocrystal flattening, took place only at temperatures in excess of 650 degrees C, followed by progressive nanocrystal coalescence. It thus could be inferred, that better titanium silicide nanocrystal arrays (in the sense of uniformity and stability) are more easily obtained by reactive deposition epitaxy than by solid-phase epitaxy. While terminal, stable C54-TiSi2 phase, did eventually form in the epilayers in both methods, different evolution pathways were manifested by different respective morphologies and orientations even in this final state. (c) 2005 Elsevier B.V. All rights

关键词： vapor-phase epitaxy self-assembled nanostructures silicides scanning tunneling microscopy

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Nonlinear vibration modes in micro-resonator arrays

Nonlinear vibration modes in micro-resonator arrays

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Smart Structures and Materials 2006 conference

作者： Dick, Andrew J. Balachandran, Balakumar Mote, C. Daniel, Jr. Univ Maryland Dept Mech Engn College Pk MD 20742 USA

ISBN: (纸本)0819462195

Nonlinear phenomena such as mode localization have been studied for a number of years in the solid-state physics literature. Energy can become localized at a specific location in a discrete system as a result of the nonlinearity of the system and not due to any defects or impurities within the considered systems. Intrinsic Localized Modes (ILMs), which are defined as localization due to strong intrinsic nonlinearity within an array of perfect, periodically repeating oscillators, are of interest to the present work. Here, such localization is studied in the context of micro-cantilever arrays and micro-resonator arrays, and it is explored if an ILM can be realized as a nonlinear normal mode or nonlinear vibration mode. The method of multiple scales and methods to determine nonlinear normal modes are used to study the nonlinear vibrations of the resonator arrays. Preliminary investigations reported in this article suggest that it is possible to realize an ILM as a nonlinear vibration mode. These results are believed to be important for future designs of microresonator arrays intended for signal processing, communication, and sensor applications.

关键词： nonlinear vibration nonlinear normal modes intrinsic localized modes micro-resonators

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Antenna-coupled microbolometers for multi-spectral infrared imaging

Antenna-coupled microbolometers for multi-spectral infrared ...

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32nd conference on Infrared Technology and applications

作者： Weling, Aniruddha S. Henning, Patrick F. Neikirk, Dean P. Han, Sangwook Foster Miller Inc 195 Bear Hill Rd Waltham MA 02451 USA Univ Texas Austin Dept Elect & Comp Engn Austin TX 78712 USA

ISBN: (纸本)0819462624

Although the rapid development of 2-D focal plane arrays of thermal infrared (IR) detectors has led to remarkable progress in uncooled IR imaging technology, a major limitation of these sensors is the lack of true on-chip spectral discrimination. Multi-spectral detection capabilities enable rapid, efficient and multi-dimensional scene interpretation that is especially beneficial to advanced IR imaging systems for early threat warning and target recognition applications. We propose a novel design for a monolithic micromachined array of bolometric detectors capable of multi-spectral imaging in the long-wave IR (7-14 mu m) region. The central ingredient of this approach is to employ planar multi-mode antenna structures to efficiently couple incident electromagnetic radiation to a microbolometeric sensing element that is much smaller than the IR wavelength. The wavelength selectivity of such an antenna-coupled detector can be tuned by optimizing its multiple geometric parameters. We present a planar microbolometer design that can accomplish 3-color LWIR imaging with no moving parts analogous to solid-state color videography in the visible region. The proposed effort targets applications of uncooled color IR imaging where the benefits in space, power, weight and complexity will have a significant impact.

关键词： infrared imaging multi-spectral thermal detector microbolometer array FPA sensor

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development of an array of polymer/MnO₂/Fe₂O₃ mixtures for use in gas sensing applications

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sensorS AND ACTUATORS B-CHEMICAL 2006年第1-2期118卷 386-392页

作者： Arshak, K. Gaidan, I. Univ Limerick Dept Elect & Comp Engn Limerick Ireland

This paper investigates an array of thick-films gas sensors made from polymer, iron oxide and manganese oxide. The films were printed onto glass substrates with silver electrodes. The effects of different gas vapours on the devices at room temperature were investigated. The response of the sensors was defined as, Delta R = ((R-gas - R-air)/R-air) x 100 and was seen to increase with increasing gas vapour concentration. It was observed that various film compositions showed a higher response to propanol and toluene than that to chloroform, ethanol and hexane. The response of the sensors to the gas vapours was seen to change depending on the composition used to form the sensing layer. For example, sensor S-4 was formed using PVB and 1.5 wt.% carbon black and displayed a higher response to 5000 ppm propanol (43.27) than that to toluene (19.43). While the response of S-3, with a sensing layer composed of 75/25% Fe2O3/MnO2 and 5 wt.% PVB binder and 1.5 wt.% carbon black to the same concentration of propanol and toluene at room temperature was 62.57 and 45.95%, respectively. (c) 2006 Elsevier B.V. All rights reserved.

关键词： oxides polymer gas sensors thick film

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Micro fiber optic sensor interrogation system for aerospace applications

Micro fiber optic sensor interrogation system for aerospace ...

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Micro-Nano-technology for Aerospace applications, CANEUS2006

作者： Xiao, Gao Zhi Mrad, Nezih Institute for Microstructrual Science National Research Council M-50 1200 Montreal Road Ottawa Ont. K1A 0R6 Canada Department of National Defence Air Vehicles Research Section National Defence Headquarters Ottawa Ont. K1A 0R6 Canada

ISBN: (纸本)0791837874

The emerging field of microsystems technology is enabling the innovative development of a micro optical fiber interrogation system for potential integration into air platforms structural health monitoring and management capabilities. Our efforts in such development is based on micron size optical waveguides using arrayed waveguide gratings (AWG) based demultiplexer for highly multiplexed fiber Bragg grating (FBG) sensor arrays. In this document, a proposed system concept, its operating principle and proposed interrogation methodology are presented. Initial results demonstrate the ability of the system to obtain measurement resolution of 1 pm or better (equivalent to 0.1°C for temperature sensing) and response time as short as two milli-second. Owing to the small size and ruggedness of AWG, it is potentially feasible to fabricate an all solid state (no moving parts), palm size, robust and high-resolution interrogation system that responds to air platform requirements. Copyright © 2006 by ASME.

关键词： Fiber optic sensors

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