检索结果-内蒙古大学图书馆

21st International conference on solid-state sensors, Actuators and Microsystems (Transducers)

作者： Yang, Lingmeng Zhu, Zhezheng Chang, Wenhan Meng, Fanrui Gao, Chengchen Hao, Yilong Yang, Zhenchuan Peking Univ Inst Microelect Beijing Peoples R China

ISBN: (纸本)9780738125626

A compact and superdirective particle velocity gradient (PVG) sensor based on two MEMS hot-wire acoustic particle velocity sensor (APVS) chips is proposed. The capability of directly measurement of second-order directionality of acoustic field makes the PVG sensors are more competitive than currently used acoustic vector sensors or microphone arrays, while the compact design can broaden their working frequency. With the APVS spacing of 3.6mm, the measured directional patterns are all cosine squared shape up to 5 kHz, which demonstrated the feasibility for directly acquirement of second-ordered directionality. The sensor could be monolithic integrated to further shorten the spacing of velocity sensors, and to be more competitive for high-sound-frequency and narrow space directional acoustic sensing applications.

关键词： Particle velocity gradient Acoustic vector sensor Directionality Super-directivity Integration

来源：评论

学校读者我要写书评

暂无评论

Design and characterization of CMOS APS imagers on two different technologies

Design and characterization of CMOS APS imagers on two diffe...

引用

conference on solid state sensor arrays - development and applications II

作者： Cavadore, C Solhusvik, J Magnan, P Gautrand, A Degerli, Y Lavernhe, F Farre, J Saint-Pe, O Davancens, R Tulet, M SUPAERO Dept Elect F-31055 Toulouse 4 France

ISBN: (纸本)0819427411

In this paper, we present experimental results from measurements on CMOS APS imager designed by CIMI-SUPAERO on two different technologies. In both cases, pixels with photoMos and photodiode structures have been designed. The first circuit has been developed using a standard CMOS DLP/DLM 1.2 mu m process from Austria Micro Systems. The detector array consists of 32x32 square pixels with 50 mu m pixel pitch;fill factor is 75 % for photodiode (PD) and 50 % for photoMos (PM). The circuit is also including row and column address decoders and the readout circuitry so as to perform on-chip correlated double-delta sampling to reduce column to column fixed pattern noise. Two other chips have been developed with a standard CMOS SLP/DLM process from MIETEC with 0.7 mu m design rules, which includes a 128x128 pixels array, with 21 mu m pixel pitch and analogue readout circuitry. Among 10 different arrays, no faulty one was observed for both circuits. In this paper, we compare both performances of 32x32 pixels and 128x128 pixels in terms of dark current, quantum efficiency, conversion gain, dynamic range, linearity and spatial uniformity.

关键词： Active Pixel sensor APS CMOS image sensors characterisation

来源：评论

学校读者我要写书评

暂无评论

A Review of Single-Photon Avalanche Diode Time-of-Flight Imaging sensor arrays

引用

IEEE sensorS JOURNAL 2021年第11期21卷 12654-12666页

作者： Piron, Francois Morrison, Daniel Yuce, Mehmet Rasit Redoute, Jean-Michel Univ Liege Dept Elect Engn & Comp Sci B-4000 Liege Belgium Monash Univ Dept Elect & Comp Syst Engn Melbourne Vic 3800 Australia

Time-of-flight (ToF) sensors using light pulses or continuous waves allow accurate distance measurements. Three-dimensional imagers can be based on an array of timing or time-gated integration pixels. Single-photon avalanche diodes (SPADs) have been increasingly chosen as the pixel's photodetector device to develop fast, long-range ToF sensors. solid-state ToF cameras are replacing other alternatives, showing attractive characteristics and bringing up new potential applications. This paper presents the technical evolution of SPAD ToF 3D imaging sensors, and provides insight into their development over the last few decades. Starting with the first SPAD imagers reported in the early 2000's, various direct and indirect arrays up to present day state-of-the-art prototypes are referenced. The existing methods, options and possible implementations are described, addressing their advantages and drawbacks, and showing the progress yet to be made. The performance of the different presented approaches are given and compared.

关键词： Single-photon avalanche diodes sensors Timing sensor arrays Three-dimensional displays Photonics Smart pixels 3D Imaging 3DIC CMOS imagers direct time-of-flight (dToF) depth image sensors indirect time-of-flight (iToF) light detection and ranging (LiDAR) time-of-flight (ToF) single-photon avalanche diode (SPAD)

来源：评论

学校读者我要写书评

暂无评论

Fiber optic sensor technology: an overview

引用

sensorS AND ACTUATORS A-PHYSICAL 2000年第1-3期82卷 40-61页

作者： Grattan, KTV Sun, T City Univ London Sch Engn Dept Elect Elect & Informat Engn London EC1V 0HB England

This work presents an overview of progress and developments in the field of fiber optic sensor technology, highlighting the major issues underpinning recent research and illustrating a number of important applications... 详细信息

关键词： fiber optics sensors measurement

来源：评论

学校读者我要写书评

暂无评论

Transparent SU-8 three-axis micro strain gauge force sensing pillar arrays for biological applications

Transparent SU-8 three-axis micro strain gauge force sensing...

引用

14th International conference on solid-state sensors, Actuators and Microsystems/21st European conference on solid-state Transducers

作者： Klejwa, N. Harjee, N. Kwon, R. Coulthard, S. M. Pruitt, B. L. Stanford Univ Dept Elect Engn Stanford CA 94305 USA Stanford Univ Dept Engn Mech Stanford CA 94305 USA

ISBN: (纸本)9781424408412

This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies (Drosophila melanogaster), including: 1 mu N force sensitivity, >25 mu N range, and bio-compatibility. By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing.

关键词： SU-8 force sensor strain gauge

来源：评论

学校读者我要写书评

暂无评论

PHYSICS OF A-SI-H SWITCHING DIODES

引用

JOURNAL OF NON-CRYSTALLINE solidS 1993年第Part2期166卷 653-658页

作者： VANBERKEL, C POWELL, MP DEANE, SC Philips Research Laboratories Redhill UK

Amorphous silicon diodes can be used as simple, two-terminal switches in active matrix addressing of display and image sensor arrays. These switching diodes provide an alternative to transistors with a simpler technology and fewer pixel connections. This paper discusses different addressing schemes in which switching diodes can be used and it reviews the device physics for these applications. In particular, it addresses the mechanisms of the dark steady-state I-V characteristics and the transient response of the diodes under typical operation conditions. The discussion gives a qualitative approach to the device physics, which is supported by computer modelling that uses complete expressions for occupancy, charge density and recombination. The defect density distribution is calculated from first principles using the defect-pool model.

关键词： solid state physics

来源：评论

学校读者我要写书评

暂无评论

Low-temperature PECVD-deposited silicon nitride thin films for sensor applications

引用

SURFACE & COATINGS TECHNOLOGY 2001年第0期142卷 808-812页

作者： Suchaneck, G Norkus, V Gerlach, G Dresden Univ Technol Inst Solid State Elect D-10602 Dresden Germany

Polymer-like silicon-rich SiNx:H films suitable for transparent VIS/NIR/MIR-range optical coatings were deposited by PECVD at a substrate temperature of 80 and 150 degreesC. Optical properties and film microstructure were investigated by transmission/reflection measurements and by FTIR. Air exposure for more than 1 year reveals no post-oxidation with time. The application as an antireflective coating for IR-sensor arrays is demonstrated. (C) 2001 Elsevier Science BN. All rights reserved.

关键词： plasma-enhanced CVD low temperature deposition silicon-rich silicon nitride

来源：评论

学校读者我要写书评

暂无评论

Tip integration on arrays of silicon micro cantilevers with self exciting piezoelectric sensor for parallel atomic force microscopy applications

Tip integration on arrays of silicon micro cantilevers with ...

引用

1997 International conference on solid-state sensors and Actuators

作者： Indermuhle, PF Schurmann, G Racine, GA deRooij, NF Univ of Neuchatel Neuchatel Switzerland

ISBN: (纸本)0780338294

Self sharpening tips have been integrated on arrays of cantilevers provided with self exciting piezoelectric sensors (ZnO) by using monocrystalline silicon micromachining. Atomic force microscopy (AFM) images of grids with periods of 0.25 mu m, 1 mu m and 5 mu m and with height differences of 100 nm, 15 nm and 180 nm respectively have been achieved with single cantilevers.

关键词： atomic force microscopy (AFM) piezoelectric sensors piezoelectric actuators

来源：评论

学校读者我要写书评

暂无评论

A novel low-field electron-emission polycrystalline diamond microtip array for sensor applications

引用

sensorS AND ACTUATORS A-PHYSICAL 1996年第1-3期54卷 724-727页

作者： Kang, WP Davidson, JL Li, Q Xu, JF Kinser, DL Kerns, DV E CHINA NORMAL UNIV DEPT ELECT ENGNSHANGHAI 200062PEOPLES R CHINA

Electron field emission from an array of patterned pyramids of polycrystalline diamond has been investigated for microsensor applications. Selective deposition and molding of a polycrystalline diamond film in a silicon cavity mold and subsequent creation of a freestanding polycrystalline diamond diaphragm with diamond pyramidal microtips has been achieved, The processing techniques are compatible with IC and micromachining technologies. High current emission from the patterned diamond microtip arrays is obtained at low electric fields. Field emission for these diamond microtips exhibits significant enhancement in total emission current compared to silicon emitters. Moreover, field emission from patterned polycrystalline diamond pyramidal-tip arrays is unique in that the applied field is found to be lower than that required for emission from Si, Ge, GaAs, and metal surfaces. The findings suggest the potential use of diamond-based field-emitter arrays in microsensors such as pressure sensors, accelerometers, and tactile sensors.

关键词： electron emission microtip arrays polycrystalline diamond

来源：评论

学校读者我要写书评

暂无评论

Cell-based CMOS sensor and actuator arrays

引用

IEEE JOURNAL OF solid-state CIRCUITS 2004年第12期39卷 2431-2437页

作者： Jenkner, M Tartagni, M Hierlemann, A Thewes, R Infineon Technol Agr Corp Res D-81730 Munich Germany Univ Bologna ARCES I-40123 Bologna Italy Swiss Fed Inst Technol Phys Elect Lab CH-8093 Zurich Switzerland

In recent years, increasing knowledge about in vitro cell handling and culturing has encouraged a variety of CMOS-based approaches to stimulate and detect electrical activity of biological cells. This paper outlines in a topical review the scope of cell-based biosensors and actuators for in vitro applications ranging from single-cell detection to multisite probing of complex neural tissue. Recent examples are selected to demonstrate how standard CMOS processes have been used to engineer arrays with different functionality.

关键词： cell-based biosensors cell manipulation dielectrophoresis extracellular recording image sensors in vitro multielectrode array (MEA) multisite recording neurons

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：