This paper describes the implementation of an optically efficient near-infrared spectrometer using a diffractive-MEMS chip in combination with digital-transform methods. This spectrometer architecture offers potential...
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This paper describes the implementation of an optically efficient near-infrared spectrometer using a diffractive-MEMS chip in combination with digital-transform methods. This spectrometer architecture offers potential advantages over conventional detector-array-based designs because the modulation inherent in the use of digital-transform spectroscopy not only permits the normal signal-to-noise improvements associated with modulation of the light source, but it also creates an inherent insensitivity to stray light. Sample applications, illustrated here for the specific case of the Hadamard digital transform, include material inspection and identification and the monitoring of dynamic processes, such as epoxy-resin cure.
Rapid and representative reconstruction of geometric shape models from surface measurements has applications in diverse arenas ranging from industrial product design to biomedical organ/tissue modeling. However, despi...
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This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is compos...
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ISBN:
(纸本)0780389948
This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is composed of an electrochemical sensor, a custom potentiostat module, and an RF module for wireless communication. Also, the authors presented monolithic MEMS VCOs integrated with high-Q MEMS inductors and MEMS transmission lines for low-power wireless transceiver applications. Phase noise of the proposed MEMS VCOs has been improved by more than 7 dBc/Hz compared with their CMOS counterparts at 1MHz offset from center frequencies of 5GHz and 13 GHz, respectively.
Pressure sensors with a metallic diaphragm and bonded strain gauge are by far the most widely used sensors in pressure measurement. In this work, we describe a method to fabricate a low power, light weight and low cos...
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Pressure sensors with a metallic diaphragm and bonded strain gauge are by far the most widely used sensors in pressure measurement. In this work, we describe a method to fabricate a low power, light weight and low cost pressure sensor using aluminum diaphragm. The diaphragm is hard anodized to get insulating base over which Pt-W (Pt: 92%, W: 8%) thin film strain sensors are sputter deposited for sensing the pressure. Hence, this technique eliminates the application of adhesive to bond the strain gauges to the metallic diaphragm. The required level of insulation resistance (in the range of giga-ohms) between the metal diaphragm and the sputtered stain gauge is provided by the hard anodic film. The hard anodic coating is obtained by the wet electrochemical method with pulsed power supply arrangement. The details of diaphragm fabrication, hard anodization of aluminum, testing, calibration of sensor and its applications are discussed and compared with sensors fabricated from different aluminum alloys (AA2024, AA6061 and AA7075).
Optical interconnects will have an important role for internal communication within future spacecrafts as well as intra-communication between satellite constellations. Optical sources with novel functionality, such as...
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Optical interconnects will have an important role for internal communication within future spacecrafts as well as intra-communication between satellite constellations. Optical sources with novel functionality, such as solidstate beam steering, would have many advantages. A novel approach for creating 2D arrays of coherently coupled vertically emitting laser cavities has been demonstrated and is discussed herein. Coherent optical coupling is achieved by creating a 2times2 array of defect cavities within the top distributed Bragg reflector of a photonic crystal vertical cavity surface emitting laser. By modifying the index within the coupling regions, accomplished by varying the hole parameters in those regions, coherent coupling has been observed in the far field. Utilization of this approach may lead to extended area coherent sources with high spectral purity. Moreover, tuning the phase shift between lasers in the array would enable angular steering the far field emission pattern. Such a coherent array of lasers would allow the development of optical communication laser sources with electronic beam steering capability
For the first time, the 65nm high performance transistor technology and the highly compacted double stacked S/sup 3/ SRAM cell with a size of 25F/sup 2/, and 0.16/spl mu/m/sup 2/ has been combined for providing the hi...
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For the first time, the 65nm high performance transistor technology and the highly compacted double stacked S/sup 3/ SRAM cell with a size of 25F/sup 2/, and 0.16/spl mu/m/sup 2/ has been combined for providing the high density and high density solutions which can make the breakthrough in the field of the cache memory products and the network memory products. The SSTFT (single-crystal silicon thin film transistor) is used not only for cell transistors but also for peripheral transistors. The selective Co silicidation techniques is developed for low resistance. By utilizing this technology, the high performance 288Mb synchronous SRAM product will be fabricated.
In this paper we report the development of n-type and p-type Si-microprobe arrays fabricated by using in situ doping in vapor-liquid-solid, (VLS) growth employing a gas-source molecular beam epitaxy (GS-MBE) system as...
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In this paper we report the development of n-type and p-type Si-microprobe arrays fabricated by using in situ doping in vapor-liquid-solid, (VLS) growth employing a gas-source molecular beam epitaxy (GS-MBE) system as the growth environment. VLS growth using Si2H6 only gives intrinsic Si microprobes with the resistivity of similar to 10(4) Omega-cm, which decreases to similar to 10-(2) Omega-cm after phosphorous diffusion at 1100 degrees C. However, by incorporating in situ doping into the VLS growth method, more conductive probes (resistivity similar to 10(-3) Omega-cm) can be realized at a temperature less than 700 degrees C. The site and diameter of the VLS-grown probe can be controlled and the growth rate is higher than that of a poly-Si or epitaxial Si crystal grown by the vapor-solid (VS) method. Due to the low processing temperature, in situ doping is effective for realizing highly conductive probe arrays with smart sensor devices by a standard IC process followed by VLS growth. The wide range of doping leads to the possibility of using these probes for the fabrication of vertical active devices such as diodes and transistors.
Miniaturized and cost-effective thermoelectric generators (TEG) scavenging energy from environment could potentially provide power autonomy to consumer electronic products operating at low power. For example, TEG moun...
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Miniaturized and cost-effective thermoelectric generators (TEG) scavenging energy from environment could potentially provide power autonomy to consumer electronic products operating at low power. For example, TEG mounted in a wristwatch have been used to generate electricity from human heat. The key point of IMEC's research in this field is the realization of a body area network, consisting of a set of wireless sensors/actuators, able to provide health, sports, comfort, and safety monitoring functions to the user. The development of miniature energy scavengers built on MEMS technology is a primary goal of the ongoing research, as this will make the network truly power autonomous. In this paper, the modeling and a novel design of MEMS TEG especially conceived for human body applications are described. The design is built on the basis of a thermal model of the device, which includes the human body as one of its important elements. For this purpose, the research on human body thermal features is performed. The TEG prototype made with commercial thermopiles is tested with power conditioning electronics and a wireless module mounted on a watchstrap.
A compact dual mode sensor is under development at BGT addressing autonomous guidance, target detection and classification/identification for several military and civilian applications. The dual mode sensor consists o...
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ISBN:
(纸本)0819453811
A compact dual mode sensor is under development at BGT addressing autonomous guidance, target detection and classification/identification for several military and civilian applications. The dual mode sensor consists of an imaging infrared sensor and an imaging Ladar sensor both in snapshot mode. This paper presents the concept of the dual mode sensor and shows the current development status. Critical components such as a compact laser source, fiber-array for image plane sampling, wavelength selective infrared beam splitter and micro-lens arrays for Ladar field-of-view steering are presented in detail.
In recent years, increasing knowledge about in vitro cell handling and culturing has encouraged a variety of CMOS-based approaches to stimulate and detect electrical activity of biological cells. This paper outlines i...
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In recent years, increasing knowledge about in vitro cell handling and culturing has encouraged a variety of CMOS-based approaches to stimulate and detect electrical activity of biological cells. This paper outlines in a topical review the scope of cell-based biosensors and actuators for in vitro applications ranging from single-cell detection to multisite probing of complex neural tissue. Recent examples are selected to demonstrate how standard CMOS processes have been used to engineer arrays with different functionality.
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