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检索条件"任意字段=Conference on Solid State Sensor Arrays - Development and Applications"

共 1073 条记录，以下是781-790 订阅

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Laser based manufacturing of high-accuracy electrodes in brittle materials

Laser based manufacturing of high-accuracy electrodes in bri...

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conference on Photon Processing in Microelectronics and Photonics II

作者： Kulik, C Ostendorf, A Meyer, F Laser Zentrum hannover EV D-30419 Hannover Germany

ISBN: (纸本)0819447773

Dielectric sensors with smallest electrode structures are used to monitor several technical applications. Thus, durable substrate materials are essential for the exploitation of the sensors in hostile process environment. Here, ceramics and different glasses show ideal material properties, but are difficult-to-machine in the micrometer range. UV-laser beam sources are well suited for an economic manufacturing of micro-structures in these brittle materials. Especially, advanced laser tools like excimer- and frequency converted solid-state lasers show excellent machining results. This paper presents the development of new laser based production techniques and innovative process chains for the fabrication of distinctive electrode structures in high stable materials. Two different machining concepts are shown. A conductive Indium Tin-Oxide (ITO) layer with a thickness of about 600nm has been structured with a KrF excimer laser (lambda = 248 nm, H = 5 J/cm(2)), without damaging the underlying borosilicate glass substrate. The dimension of the electrodes and insulation channels of the sensor are as small as 50mum. For the second approach of manufacturing a dielectric sensor, aluminum oxide as a bulk substrate materials has been machined with the same laser type. No thermal damage was observed by an operating fluence H = 20 J/cm(2). The obtained extreme durable embedded-electrode-type sensor can be completed by. filling the cavity with conductive material by standard electroplating techniques. For the manufacturing process, a high flexible NC-controlled machining concept is presented, which allows a time and pulse minimized fabrication as well, as an optimization of the surface,quality of. the micro-sensor, including a process. optimization via simulation.

关键词： laser based micro-machining brittle materials sensor manufacturing UV-laser electrodes

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High throughput integration of optoelectronics devices for biochip fluorescent detection

High throughput integration of optoelectronics devices for b...

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conference on Microfluidics, BioMEMS, and Medical Microsystems

作者： Thrush, E Levi, O Wang, K Harris, JS Smith, SJ Stanford Univ Solid State & Photon Lab Stanford CA 94305 USA

ISBN: (纸本)081944782X

Miniaturized, portable and robust sensing systems are required for the development of integrated biological analysis systems and their application to clinical diagnostics. This work uses vertical cavity surface emitting lasers (VCSELs), optical emission filters and PIN photodetectors to realize monolithically integrated, near infrared, fluorescence detection systems. The integration of these micro technologies with biochip applications will drastically reduce cost and allow for parallel sensing architectures, which is particularly useful for flow channel arrays such as in capillary array electrophoresis. This paper focuses on the fabrication of integrated fluorescence sensors. Fabrication procedures have been developed to realize intracavity contacted VCSELs and low noise photodetectors, such as selective AlGaAs wet etching and via planarization. A reflow process with positive photoresist has been developed to provide via electrical contacts and to optically isolate the photodetector from the light source. Three-dimensional microstructures can be simply made by this reflow technique. Optical simulations predict that a detection sensitivity lower than 10000 molecules per 10(4)mum(2) sample area. Single molecule detection may be possible in certain sensing architectures.

关键词： biochips fluorescence sensors infrared dyes VCSELs semiconductor lasers photodetectors fabrication

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A CMOS chip for individual cell manipulation and detection

A CMOS chip for individual cell manipulation and detection

引用

IEEE International conference on solid-state Circuits (ISSCC)

作者： N. Manaresi A. Romani G. Medoro L. Altomare A. Leonardi M. Tartagni R. Guerrieri Silicon BioSystems s.r.l. Bologna Italy ARCES University of Bologna Bologna Italy

ISBN: (纸本)0780377079

Investigation of individual biological cell interactions on a large scale creates applications in drug screening, cell separation and cell analysis. The IC is designed to detect and manipulate more than 10k cells in parallel and includes a 320 /spl times/ 320 sensing and actuation array. The chip is implemented in 0.35/spl mu/m 2P 3M CMOS.

关键词： Electrodes Cells (biology) Drugs Optical sensors sensor arrays Circuits Fluid flow Logic arrays Voltage Photodiodes

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The colorization of solid state AMLCD's for military head mounted displays (HMDs) and other viewer applications

The colorization of solid state AMLCD's for military head mo...

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conference on Helmet and Head-Mounted Displays VIII

作者： Woodard, O Gale, R Reese, C Kopin Corp Westborough MA 01581 USA

ISBN: (纸本)0819449385

Kopin's miniature Active Matrix Liquid Crystal Displays (AMLCD's) are rapidly becoming the display technology of choice in a wide range of military head mounted and sensor viewer applications. These low power, ruggedized displays operate from -37degreesC to +65degreesC with excellent imaging characteristics and reliability. Kopin and the US Army Night Vision and Electronic sensors Directorate (NVESD) are co-operatively developing high resolution, full-color displays for day/night operations and image fusion applications. Kopin is leveraging the successful development of its monochrome SXGA (1280 x 1024) AMLCD to develop a color SXGA display and a color SVGA (800 x 600) display. Color technology approaches evaluated for these new products included color filters, frame sequential color., binary optic phase plate spot sequential color, and diffractive optic column sequential color. These approaches all involve frame sequential operation with the exception of color filters. A generic color frame sequential mode was selected for the SXGA display design that will allow operations of all frame-sequentially based approaches. This display facilitates color technology changes and upgrades by replacing the backlight assembly. The color filter approach was selected for the SVGA display. Both color technologies are used for Kopin commercial display products. Performance data and specifications for Kopin's displays will be presented with reference to military (HMD and weapon sight), industrial, and commercial applications. Analytical results and data from color approaches investigated will be presented and compared. Application extensions that utilize the new color technologies developed will be highlighted.

关键词： active matrix liquid crystal display (AMLCD) helmet mounted display flat panel display (FPD) weapon sight and image fusion

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Polymeric micro-cantilever acoustic sensor array

Polymeric micro-cantilever acoustic sensor array

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： Tao Xu M. Bachman Fan-Gang Zeng Guann-Pyng Li Department of Electrical and Computer Engineering UCI Integrated Nanosystems Research Facility USA Department of Electrical and Computer Engineering UCI Integrated Nanosystems Research Facility Departments of Otolaryngology and Biomedical Engineering University of California Irvine CA USA

A polymeric micro-cantilever acoustic sensor array has been developed that mimics the biological front-end processing in the cochlea, and is intended for use in applications of auditory prostheses. Made of polymer material, the micro-cantilevers have similar mechanical performance as the basilar membrane. The polymeric cantilevers, which are transparent, are used as optical waveguides to guide an acoustically-modulated light signal to produce a signal suitable for human hearing. These polymeric cantilevers have the Q/sub 10/ values of 9.38, 10.11, 11.56, and 14.01 for resonant frequencies at 286, 720, 2,868, and 6,948 Hz, respectively. These values are similar to those obtained by direct measurement of the basilar membrane. Furthermore, they have a linear dynamic range of more than 80 dB SPL with less than 15% harmonic distortion. This acoustic sensor array has low power consumption, short processing time, high sensitivity, high frequency resolution, small size, is free of electromagnetic interference, and is suitable for a totally implantable device in the human ear.

关键词： sensor arrays Acoustic sensors Acoustic arrays Biomembranes Optical polymers Optical waveguides Humans Prosthetics Biological materials Optical materials

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A CMOS photodiode array with in-pixel data acquisition system

A CMOS photodiode array with in-pixel data acquisition syste...

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European conference on solid-state Circuits (ESSCIRC)

作者： R. Steadman A. Kemna F. Morales G. Vogtmeier E. Ozkan W. Brockherde B. Hosticka Philips Research Laboratories Aachen Germany Fraunhofer Institute of Microelectronic Circuits and System Duisburg Germany

A CMOS photodetector array with in-pixel electronics has been developed for computed tomography (CT) applications. Consisting of 10/spl times/20 pixel array in-pixel electronics has been designed to achieve 17 bits dynamic range and a quantum limited system under CT operating range. A series of limitations have been overcome to integrate both photodiode and a charge-sensing amplifier at pixel level.

关键词： Photodiodes Data acquisition Computed tomography Photodetectors sensor arrays CMOS process Capacitance Capacitors Laboratories Microelectronics

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Composite photopolymer microstructures: from planar to 3D devices

Composite photopolymer microstructures: from planar to 3D de...

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： P. Renaud S. Metz S. Jiguet A. Bertsch EPFL Microsystem LaboratorySTI-LMIS EPFL Lausanne Switzerland

In this paper, a survey is made of some technologies in which the photo-definable polymer is used as structural material and where physical properties of polymers are modified to change porosity, mechanical or electrical properties. The paper is organized in three sections: (a) 2D, multilayer photopolymers, (b) High aspect ratio and (c) 3D micro-stereolithography technologies. In addition the authors mention some development in which photo-polymerization is used to locally create special structures.

关键词： Microstructure Electrodes Polymers Polyimides Silicon Etching sensor arrays Resists Laboratories Micromechanical devices

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Nanoscale manipulation and control of tin oxide nanostructures on large area arrays of microhotplates

Nanoscale manipulation and control of tin oxide nanostructur...

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International conference on solid state sensors and Actuators (TRANSDUCERS)

作者： B. Panchapakesan R. Cavicchi S. Semancik D.L. DeVoe Delaware MEMS and Nanotechnology Laboratory University of Delaware Newark DE USA Chemical Science and Technology laboratory National Institute for Standards and Technology Gaithersburg MD USA Maryland MEMS Laboratory (MML) University of Maryland College Park MD USA

This paper describes 36-element arrays of surface micromachined microhotplates as thermal platforms for manipulating and controlling the morphology of tin oxide (SnO/sub 2/) nanostructures for chemical sensing applications. A new technique of using metal nanoparticles as seed layers for the nucleation, growth and control of SnO/sub 2/ nanostructures on microhotplate arrays is described. 16 /spl Aring/ of metals such as nickel, cobalt, iron, copper and silver were selectively evaporated on each column of the microhotplate array. Following evaporation, the microhotplates were heated to 500/spl deg/C and SnO/sub 2/ was deposited on top of the microhotplates using a self-aligned CVD process. SEM characterization revealed control of SnO/sub 2/ nanostructures in the range of 20 nm to 121 nm. Gas sensing in seven different hydrocarbons revealed that metal nanoparticles that helped in faster nucleation of SnO/sub 2/ resulted in smaller grain size and higher sensitivity. Temperature programmed sensing (TPS) on the devices yielded shape differences in the response between air and methanol illustrating selectivity. Spider web plots were used to monitor materials programmed selectivity (MPS). The shape differences between different gases in spider web plots illustrate materials selectivity as a powerful approach for monitoring selectivity in various gases. Continuous monitoring in alcoholic gases yielded stable sensor response for more than 200 hours. This comprehensive study illustrates the use of nanoparticle seeding approach for sensitive, selective and stable gas sensing applications.

关键词： Tin Nanostructures Nanoparticles Monitoring Gases Shape Surface morphology Chemical vapor deposition Nickel Cobalt

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The development and evaluation of solid-state detector arrays for high energy x-ray imaging

The development and evaluation of solid-state detector array...

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IEEE Symposium on Nuclear Science (NSS/MIC)

作者： Yulan Li Yuanjing Li Shaofeng Wang Shuwei Li Huilin He Department of Engineering Physics Tsinghua University Beijing China Nuctech Company Limited Beijing China

ISBN: (纸本)0780382579

Several detector modules which consist of linear CdWO/sub 4/ crystal arrays optically coupled to photodiode arrays were developed for a high energy X-ray NDT system. An electron linear accelerator (LINAC) which produces pulsive X rays with maximum energy of 9 MeV is used for X ray source. 16 channels were assembled in each module, with crystal size of 0.8 mm /spl times/ 5 mm /spl times/ 30 mm and pitch size of 1.3 mm. Lead spacers were placed between crystals to reduce the cross-talk. Based on M-C simulation, the detection efficiency of the detector can reach 70%, energy deposit rate 30%, while crosstalk can be reduced to 5%. After fabrication, we tested their performances under the radiation sources of /sup 60/Co, 6 MeV LINAC and 9 MeV LINAC. The results show that the arrays satisfy the meet of the NDT system.

关键词： solid state circuits X-ray detection X-ray detectors sensor arrays X-ray imaging Optical arrays Linear particle accelerator Electron optics Optical crosstalk Optical coupling

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Overview of field programmable analog arrays as enabling technology for evolvable hardware for high reliability systems

Overview of field programmable analog arrays as enabling tec...

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NASA/DoD Workshop on Evolvable Hardware

作者： J. Plante H. Shaw L. Mickens C. Johnson-Bey Dynamic Range Corporation Office of Parts Packaging and Assembly Technologies NASA Goddard Space Flight Center USA ARCADE Laboratory Morgan State University USA

The recent commercial availability of field programmable analog arrays (FPAAs) is leading designers of high reliability space and ground support systems to consider how these devices can lead to new applications. They hold promises for analog systems that require reactive evolvability such as those that correct defective mechanical deployments. They are also suited to evolving circuits, which change with temporary or degenerative electrical conditions such as those associated with power systems during specific periods of orbit in space flight and with the effects of aging on electronic components. FPAAs are seen as a key enabler to a system in development that will enable circuit development in a hardware environment that can be programmed and tailored for a given system's electrical input/output/load environment.

关键词： Field programmable analog arrays Hardware sensor arrays Space technology NASA Laboratories Availability Circuits Power system management Aerospace electronics

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