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Development and deployment of a multi-component Advanced Process Control system for an epitaxy tool

Development and deployment of a multi-component Advanced Pro...

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IEEE/SEMI conference and Workshop on Advanced Semiconductor Manufacturing

作者： J. Moyne V. Solakhian A. Yershov M. Anderson D. Mockler-Hebert Brooks Automation Inc. Chelmsford MA USA Fairchild Semiconductor Corporation South Portland ME USA

A multi-component Advanced Process Control (APC) system has been developed and deployed for an Applied Materials vapor phase epitaxy tool at Fairchild Semiconductor. The system, which is fully automated, operates on a SEMI APC framework compliant platform, supports the plug-and-play of multiple APC applications ("plug-ins"), and has configurable control rules that allow the user to specify not only how each APC application will be utilized, but also how the APC applications will interact in a complementary fashion. The current system contains real-time data visualization, run-to-run control (R2R), and fault detection and classification (FDC) plug-ins. The data visualization component is currently being utilized for real-time visual monitoring of aspects of equipment health. The R2R component includes a multivariate algorithm and is being used to provide multi-zone control of deposition thickness and resistivity. The FDC component will gather the in-process data from the tool to automatically determine equipment health and classify faults in order to reduce mean time to repair. In this paper, the methodology used to deploy and configure this APC system is described. data is provided illustrating the use of each of these APC capabilities individually and in complementary fashion. data analysis is included that focuses on the benefits of utilizing these capabilities, benefits such as improved equipment reliability, improved overall equipment effectiveness and yield. The paper also includes a discussion of the benefits and issues associated with the complementary utilization of multiple APC components in an open architecture framework.

关键词： Process control Epitaxial growth Automatic control Control systems data visualization Semiconductor materials Real time systems Fault detection Monitoring Thickness control

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OntoPlant: An integrated virtual plant software package for different scale applications

OntoPlant: An integrated virtual plant software package for ...

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2011 IEEE International conference on Spatial data Mining and Geographical Knowledge Services, ICSDM 2011 - In Conjunction with 8th Beijing International Workshop on Geographical Information Science, BJ-IWGIS 2011

作者： Tang, Liyu Chen, Chongcheng Zou, Jie Lin, Yuxin Lin, Ding Li, Jieguang Key Lab of Spatial Data Mining and Information Sharing of MOE Spatial Information Research Center of Fujian Fuzhou University Fuzhou 350002 China

ISBN: (纸本)9781424483495

OntoPlant is a virtual plant software package, which has been developed at Spatial Information Research Center of Fujian in Fuzhou University since 2002. The purpose of the software package is to provide an integrated software solution to realistic plant modelling, real-time scene rendering, growth simulation and applications at different scales from individual, stand (population, community) to landscape. Its key components are ParaTree, LSTree, VisForest, and ForestSIMA. The software package is implemented with VC, OpenGL Graphics standard, while ForestSIMA is also based on ArcGIS ArcObjects developer kit. ParaTree and LSTree are core of OntoPlant. They are used to build individual plant model. ParaTree combines geometric modelling and parameterized modelling. The shape characteristic of tree organ is depicted with a group of parameters, the values of parameters can be edited by interactive graphical parameter curve component tool. This tool provides friendly interface and intuitive interactive means, namely, what you see is what you get. The ParaTree can simulate realistic 3D plants at any age or season by modifying the parameters, pruning the tree. It is adaptive to simulate the architecture of tree. It doesn't require users to have much knowledge of biology. While the opposite is true for LSTree. LSTree is based on the theory of L-systems, which is faithful to the plant morphology and the physiological growth process. This system makes it possible to model the development of plants with efficiency and flexibility as a process of string rewriting. VisForest is a software platform for creating and editing 3D scenes. It allows the fusion of geospatial data (terrain, images) with 3D objects (plants and house) in a georeferenced environment, definition of 3D scene component, distribution density and form of plants. The ForestSIMA is an application designed to assist in landscape level analysis and planning of forest ecosystems by automating the tasks of stand project

关键词： visualization

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analysis of gene expression data by using self-organizing maps and k-means clustering

Analysis of gene expression data by using self-organizing ma...

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International Joint conference on Neural Networks (IJCNN)

作者： A. Sugiyama M. Kotani Graduate School of Science and Technology Kobe University Hospital Kobe Japan Faculty of Engineering Kobe University Hospital Kobe Japan

There is a growing need for a method to analyze massive gene expression data obtained from DNA microarrays. We introduce a method of combining a self-organizing map (SOM) and a k-means clustering for analyzing and categorizing the gene expression data. The SOM is an unsupervised neural network learning algorithm and forms a mapping the high-dimensional data to two-dimensional space. However, it is difficult to find clustering boundaries from results of the SOM. On the other hand, the k-means clustering can partition the data into the clusters under the assumption of the known number of clusters. In order to understand easily the results of SOM, we apply the k-means clustering to finding the clustering boundaries from results of SOM. We have applied the proposed method to the published data of yeast gene expression and show that the method is effective for categorizing the data.

关键词： Gene expression Self organizing feature maps DNA Clustering algorithms Fungi Robustness data visualization Prototypes data engineering Partitioning algorithms

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A vertical image as a means to improve air traffic control in extended TMA

A vertical image as a means to improve air traffic control i...

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conference on Digital Avionics Systems (DASC)

作者： R. Benhacene Centre d'Etudes de la Navigation Aérienne Toulouse France

This paper describes a new working environment that has been designed for terminal sectors (E-TMA). An initial description of the characteristics of such sectors is given. An analysis of the tasks of controllers and their corresponding bottlenecks is made. The new environment proposes solutions to address these difficulties. The first result is an interface, called VertiDigi, dedicated to arrival sectors. It consists of a vertical representation of traffic on a touch sensitive screen, which serves as a visualization and input device in lieu of the paper strips board. Discussion of the underlying concepts and the potential advantages of the new interface follows. Several advantages are given, but moreover, the proposed environment can be used as a framework for the implementation of both new methods for control in these sectors (sequencing, work sharing and work load management through preparation), but also the capturing of concepts such as data-link or ASAS spacing.

关键词： Air traffic control Airports visualization Aircraft Navigation Strips Load management Environmental management Guidelines Performance analysis

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An extensible tool for source code representation using XML

An extensible tool for source code representation using XML

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Working conference on Reverse Engineering

作者： G. McArthur J. Mylopoulos Siu Kee Keith Ng Department of Computer Science University of Toronto Toronto Canada

One of the problems facing software re-engineering projects is the fact that program source code is invariably stored in ASCII plain text format. This format doesn't reflect the underlying structure of the program. Consequently, software re-engineering or code migration tools need to unearth this structure. This paper explores the possibility of adopting XML format to represent program structure for software systems, and describes a tool, the XMLizer, which has been implemented to support the transformation of software programs from ASCII plain text format to XML. In addition, the XMLizer allows variable-depth marking up of program structure by using a multi-weight parsing technique. The XMLizer currently supports three languages, Java, PL/IX and Pascal, and can be extended to support others. The performance of the XMLizer in converting PL/IX programs into XML was tested. XMLized output is accessible through an abundance of existing XML tools that can support both analysis and visualization tasks.

关键词： XML Java Markup languages Computer science Educational institutions Software systems Software tools Testing data visualization Equations

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PCA: Simulating erroneous equations for error-visualization

PCA: Simulating erroneous equations for error-visualization

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International conference on Computers in Education

作者： T. Horiguchi T. Hirashima Faculty of Information Engineering Kobe University of Mercantile Marine Kobe Japan Department of Artificial Intelligence Kyushu Institute of Technology Fukuoka Japan

This paper presents the method of simulating the simultaneous equations which are over/under-constrained by the learner's misconception (partial constraint analysis: PCA). It can deal with arbitrary linear differential and/or algebraic equations with erroneous parts which preserve linearity. The procedure is as follows: (1) to generate the network which describes the constraints among the variables in equations (causal relation network: cn); (2) to abstract the subgraphs in which variables can be calculated (executed) independently of the rest (partial causal chains: pc); (3) to enumerate the combinations of pces which can be executed simultaneously; and (4) to execute the selected combination by supplying the driving data exogenously for simulating the behavior of the erroneous system. An example of application to a simple electric circuit is also presented.

关键词： Principal component analysis Differential algebraic equations Linearity Analytical models Circuit simulation Artificial intelligence Marine technology Partial differential equations Sections Redundancy

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Head and neck multimodality volumes visualization methods

Head and neck multimodality volumes visualization methods

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IEEE Symposium on Nuclear Science (NSS/MIC)

作者： W. Sibomana J.-F. Daisne A. Bol M. Lonneux V. Gregoire C. Michel PET Laboratory Université Catholique de Louvain Louvain-La-Neuve Belgium St-Luc Hospital Université Catholique de Louvain Brussels Belgium St-Luc Hospital Nuclear Medicine Department Université Catholique de Louvain Brussels Belgium St-Luc Hospital Radiation Oncology Department Université Catholique de Louvain Brussels Belgium

This paper describes design strategies and algorithms which have been developed for visualization. registration, Volume of Interest (VoI) definition and measurements on multimodality single subject head and neck CT, MR, PET and surgical tumor specimen images. This work was part of a project that measured the usefulness of MR and PET images in three-dimensional radiotherapy treatment planning which was originally based only on CT images. The VoIs. which could be defined on any of the registered volume. were exported with the CT images to the treatment planning system, using DICOM. The major problem was the handling of large datasets with big differences in FOV and voxel sizes. We used object-oriented design and C++ programming language to develop object classes and methods for efficient data management. We used the eXtensible Markup Language (XMEL) standard to save the registration transformers and the VoIs. The registered volumes were resliced on the fly for visualization or VoI statistical information computing. Therefore, we avoided creation of large resliced dataset files. We used the new classes to extend two existing applications: interactive registration and RoI drawing. The paper describes: (i) the data handling problems.. (ii) the developed objects relationship and methods and (iii) the two applications.

关键词： Neck visualization Computed tomography Head Positron emission tomography Algorithm design and analysis Volume measurement Surgery Neoplasms DICOM

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Scalable monitoring and configuration tools for grids and clusters

Scalable monitoring and configuration tools for grids and cl...

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Euromicro conference on Parallel, Distributed and Network-Based Processing

作者： P. Augerat C. Martin B. Stein INPG ID laboratory Grenoble France BULL INRIA ID laboratory Grenoble France Universidade Federal de Santa Maria Santa Maria Brazil

ISBN: (纸本)0769514448

We present the Ka-admin project that addresses the problem of collecting, visualizing and feeding back any grid information, trace or snapshot, compliant to an XML-like model. Real use includes performance analysis of parallel applications and cluster administration. Ka-admin includes a generic "filter" module that processes monitored data independently of what they represent. Filters can remove, aggregate and transform data or pass them to external applications. The end user is responsible for activating the filters from within an interactive graphical interface. This allows him to focus on important information. We also present a "scatter/gather" module that allows efficient collection and distribution of data and commands in a large cluster. Early work on "MPI/threads" applications and system monitoring tools proved that the combination of both modules matches the objective of a scalable visualization of large data sets.

关键词： Computerized monitoring data visualization Laboratories Filters High performance computing Application software Scalability Performance analysis Aggregates Computer architecture

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Three-dimensional reconstruction of rat brain from autoradiographic images using image registration by maximization of mutual information

Three-dimensional reconstruction of rat brain from autoradio...

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IEEE Symposium on Nuclear Science (NSS/MIC)

作者： Jae Sung Lee Jin Su Kim Dong Soo Lee Kwang Suk Park Department of Radiology Division of Nuclear Medicine Johns Hopkins University School of Medicine Baltimore MD USA Department of Nuclear Medicine College of Medicine Seoul National University Seoul South Korea Department of Biomedical Engineering College of Medicine Seoul National University Seoul South Korea

ISBN: (纸本)0780376366

Autoradiographic image analysis is a powerful and dominantly used method for the quantitative analysis of radioisotope distribution in small animals. Three-dimensional reconstruction of the brain from serial sections of autoradiographic images allows volumetric visualization and analysis, coregistration with other 3D modalities, and anatomical standardization. We implemented an operating system and platform independent software in which the 3D reconstruction of the rat brain from the autoradiographic images using the image registration technique is possible. Image registration and a 3D reconstruction technique developed in this study would be useful for the quantitative analysis of the autoradiographic images.

关键词： Image reconstruction Image registration Mutual information Image analysis Biomedical imaging Animals Nuclear medicine Telephony Positron emission tomography data mining

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A posture monitoring system using accelerometers

A posture monitoring system using accelerometers

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Canadian conference on Electrical and Computer Engineering (CCECE)

作者： R.J. Nevins N.G. Durdle V.J. Raso Dept of Electrical & Computer Engineering University of Alberta Canada Glenrose Rehabilitation Site Captial Health Authority Rehabiliation Technology Canada

A new method of monitoring spinal posture in the sagittal plane is presented. Posture is measured during activities of daily living utilizing accelerometer inclinations of six points along a subject's spine. The over sampled, low frequency filtered data can be monitored and collected over extended periods (up to four weeks) utilizing the inexpensive, low-power, portable data logger developed in the course of this research. The data logger utilizes 7 processors to collect and store data onto an MS-DOS formatted CompactFlash card for later analysis. Two trials were done: regimented postures across a one hour period and unregimented activities during a five hour period. data was then visualized graphically and compared to noted postures and activities. The system was designed to be accurate to within /spl plusmn/0.5/spl deg/. Measured precision was found to be within /spl plusmn/0.39/spl deg/. This system will be useful for monitoring changes in back curvature resulting from surgery or treatment.

关键词： Accelerometers Sensor phenomena and characterization Computerized monitoring Gravity Mechanical sensors Back Stress Satellites Assembly data visualization

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