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检索条件"任意字段=Current Developments in Lens Design and Optical Engineering V"

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Avoiding unstable regions in the design space of EUv mirror systems comprising high-order aspheric surfaces

Avoiding unstable regions in the design space of EUV mirror ...

引用

Conference on current developments in lens design and optical engineering v

作者： Marinescu, O Bociort, F Braat, J Delft Univ Technol Opt Res Grp NL-2628 CJ Delft Netherlands

ISBN: (纸本)0819454613

When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain assumptions upon which they are based become invalid. We describe a technique that keeps the configuration away from the unstable regions. The central component of our technique is a finite-aberration quantity, the so-called quasi-invariant, which has been originally introduced by H. A. Buchdahl. The quasi-invariant is computed for several rays in the system, and its average change per surface is determined for all surfaces. Small values of these average changes indicate stability. The stabilization technique consists of two steps: First, we obtain a stable initial configuration for subsequent optimization by choosing the system parameters such that the quasi-invariant change per surface is minimal. Then, if the average changes per surfaces of the quasi-invariant remain small during optimization, the configuration is kept in the safe region of the parameter space. This technique is applicable for arbitrary rotationally symmetric optical systems. Examples from the design of aspheric mirror systems for EUv lithography will be given.

关键词： mirror systems aspheres EUv lithography optimization relaxation

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Improving efficiency of beam splitter for DvD pickup

Improving efficiency of beam splitter for DVD pickup

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Conference on current developments in lens design and optical engineering v

作者： Chen, WJ Chen, CH Shieh, HPD Natl Taiwan Univ Sci & Technol Dept Elect Engn Taipei 106 Taiwan

ISBN: (纸本)0819454613

The majority of the beam splitters for three beam tracking in commercial DvD pickup employ lamellar phase gratings, which already provides sufficient efficiency. However, for a pickup with all diffractive elements, the power budget becomes more critical, and a higher efficiency of the beam splitter is required. In this paper, we have investigated and will present the influence of the desired energy ratio between the zeroth order central beam to the first order side beam on the total efficiency of the beam splitter. The simulation based on scalar diffraction theory shows that the total efficiency of a lamellar phase grating will drop as the ratio decrease, which can be improved by employing a more sophisticated surface relief. The equal-side triangular profile has been investigated as a solution and the geometrical size of the profile has been optimized for several desired energy ratio. For a low cost fabrication process with photolithography, the total efficiency loss due to quantization with different quantization levels of the triangular surface relief has been estimated with scalar diffraction theory. This paper is concluded with a table of optimal phase level for a given energy ratio and desired minimum total efficiency with the consideration of fabrication cost.

关键词： DvD pickup beam splitter diffractive optical element

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A fast optical scanning deflectometer for measuring the topography of large silicon wafers

A fast optical scanning deflectometer for measuring the topo...

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current developments in lens design and optical engineering v

作者： Krey, Stefan van Amstel, Willem D. Szwedowicz, Konrad Campos, Juan Moreno, Alfonso Lous, Erik J. TRIOPTICS GmbH Hafenstrasse 39 22880 Wedel Germany Philips CFT Eindhoven Netherlands Univ. Autònoma de Barcelona Spain Philips Semiconductors Nijmegen Netherlands

A compact scanning deflectometer is presented for the fast topography measurement of semiconductor wafers. The technique, however, is equally well suited for any flat or slightly curved specular reflective surface. The measurement principle is based on the 2D measurement of the local slope vector by means of a narrow Laser beam scanning rapidly across the sample surface. The fast linear scanning is combined with sample rotation to measure the complete surface of circular samples. There is no physical contact to the measured surface. The topography of the sample is derived from the slope data by a novel 2D integration method, which is robust with respect to noise in the slope signals. We present the full-size topography of unpatterned and patterned wafers of different polishing quality.

关键词： Scanning

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A simple focal-length measurement technique for adaptive microlenses using Z-scan

A simple focal-length measurement technique for adaptive mic...

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Conference on current developments in lens design and optical engineering v

作者： Abdelaziez, Y Banerjee, P Univ Dayton ECE Dept Dayton OH 45469 USA

ISBN: (纸本)0819454613

A simple technique for focal length measurements of adaptive micro-lenses using z-scan is reported. Focal length is one of the most important parameters of any lens. The effective focal length is measured with reference to the principal points that are not easy to find especially for micro-lenses. In addition, variable focal length microlenses pose a different challenge that makes the process of determining their exact focal length a tedious and difficult process. Classical methods such as nodal slide and magnification have been used for focal length determination. Also, advanced Interference techniques such as Talbot, Moire, Digital Speckle, Zygo and Joint Fourier Transform were used for focal length measurements. These techniques require more elaborate setups and difficult to implement, especially for microlenses. Recently a power meter was used to find the focal length of an unknown lens. Most of the techniques mentioned above proof to be not simple for microlens characterization. The z-scan technique has been implemented, for quite sometimes, to characterize the third-order effects of a nonlinear optical material. The z-scan provides information on both the sign and magnitude of the non-linear refractive index and offer advantage of simplicity. We have used a regular lens to collimate and focus light unto the lens under test. By scanning the lens under test and measuring the on-axis intensity, one can find the focal length. This is because the on-axis intensity is proportional to the phase of the lens and therefore the focal length. In the case of an adaptive lens with its focal length is a function of the applied voltage, the scanning occurs for each voltage value that will correspond to the on-axis refractive index change and therefore the far field on-axis intensity. This described technique above is easy to implement and can achieve good accuracy due to the inherent sensitivity of the z-scan.

关键词： focal length z-scan PLZT adaptive micro-lens

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Fielding of an imaging vISAR diagnostic at the National Ignition Facility (NIF)

Fielding of an imaging VISAR diagnostic at the National Igni...

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Conference on current developments in lens design and optical engineering v

作者： Malone, RM Bower, JR Capelle, GA Celeste, JR Celliers, PM Frogget, BC Guyton, RL Kaufman, MI Lare, GA Lee, TL MacGowan, BJ Montelongo, S Ng, EW Thomas, TL Tunnell, TW Watts, PW Bechtel Nevada Los Alamos NM 87544 USA Lawrence Livermore Natl Lab Livermore CA 94551 USA

ISBN: (纸本)0819454613

The National Ignition Facility (NIF) requires diagnostics to analyze high-energy density physics experiments. As a core NIF early light diagnostic, this system measures shock velocities, shock breakout times, and shock emission of targets with sizes from I to 5 mm. A 659.5 nm vISAR probe laser illuminates the target. An 8-inch-diameter fused silica triplet lens collects light at f/3 inside the 33-foot-diameter vacuum chamber. The optical relay sends the image out an equatorial port, through a 2-inch-thick vacuum window, and into two vISAR (velocity Interferometer System for Any Reflector) interferometers. Both streak cameras and CCD cameras record the images. Total track is 75 feet. The front end of the optical relay can be temporarily removed from the equatorial port, allowing for other experimenters to use that port. The first triplet can be no closer than 500 mm from the target chamber center and is protected from debris by a blast window that is replaced after every event. Along with special coatings on the mirrors, cutoff filters reject the NIF drive laser wavelengths and pass a band of wavelengths for vISAR, for passive shock breakout light, or for thermal imaging light (bypassing the interferometers). Finite Element Analysis was performed on all mounting structures. All optical lenses are on kinematic mounts, so that the pointing accuracy of the optical axis can be checked. A two-color laser alignment scheme is discussed.

关键词： vISAR optical relay interferometer National Ignition Facility (NIF) streak camera

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Recent development of Precessions polishing for larger components and free-form surfaces

Recent development of <i>Precessions</i> polishing for large...

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Conference on current developments in lens design and optical engineering v

作者： Walker, DD Beaucamp, ATH Brooks, D Doubrovski, v Cassie, M Dunn, C Freeman, R King, A Libert, M McCavana, G Morton, R Riley, D Simms, J UCL Dept Phys & Astron Opt Sci Lab London WC1E 6BT England

ISBN: (纸本)0819454613

Since the 2003 Annual Meeting, the Precessions process has become accepted as an efficient method for polishing and figuring moderate-sized axially-symmetric aspheric parts in industry. In this paper, we report on some very significant new advances beyond this capability. The first is the demonstration of the process on substantially larger diameter parts than worked hitherto - in particular, a precision-ground 500 mm diameter deeply-concave aspheric mirror. We describe the consequences of polishing large parts with the axis of the part vertical, in contrast to the horizontal axis of the smaller machines. Issues include slurry puddling and settlement in concave forms, process-uniformity, adequate support of the part and handling. We then report on recent work developing the Precessions process for non axially-symmetric surfaces including free-form. The correct relationship of the process with metrology has proved to be complex on several fronts, one example being differing descriptions of form either along a surface or its projection. We present our experience using profilometry and interferometry on precision-ground and polished surfaces, and in achieving absolute form with known base radius. Finally, we remark on the potential power of a priori predictions of achievable surface quality when optimizing optical system designs.

关键词： Polishing

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Proceedings of SPIE: current developments in lens design and optical engineering Iv

Proceedings of SPIE: Current Developments in Lens Design and...

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current developments in lens design and optical engineering Iv

The proceedings contains 15 papers from the Proceedings of SPIE: current developments in lens design and optical engineering Iv. Topics discussed include: Zernike polynomials and aberration balancing;optical design for imaging spectroscopy;integral optical system design of injection molded optics;structured design method for automotive lamp reflectors;optical systems for free-space laser communications;and current status and future direction of sensors in Earth observing satellites.

关键词： optical systems

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optical design for imaging spectroscopy

Optical design for imaging spectroscopy

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Conference on current developments in lens design and optical engineering Iv

作者： Mouroulis, P Green, RO CALTECH Jet Prop Lab Pasadena CA 91109 USA

design examples are given for imaging spectrometer systems operating in the solar reflected spectrum. design considerations and procedures are outlined for incoherently and coherently coupled systems. The case of a pa... 详细信息

ISBN: (纸本)0819450464

关键词： optical design imaging spectroscopy concentric spectrometers convex/concave gratings

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optical systems for free-space laser communications

Optical systems for free-space laser communications

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Conference on current developments in lens design and optical engineering Iv

作者： Hemmati, H CALTECH Jet Prop Lab Pasadena CA 91109 USA

An overview of optical systems utilized in JPL's optical Communications research is provided here. These include discussions on the flight terminal optics, the ground receiver aperture and the uplink beacon or com... 详细信息

ISBN: (纸本)0819450464

关键词： telescope flight optics photon buckets and optical communications

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A new method to treat a spherical lens as a combination of two perpendicular lengthless cylindrical lenses in ray tracing

A new method to treat a spherical lens as a combination of t...

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Conference on current developments in lens design and optical engineering Iv

作者： Al-Ali, LS Rasheed, KH Ajman Univ Sci & Technol Ajman U Arab Emirates

ISBN: (纸本)0819450464

We present a new suggestion for treating skew rays. In the new suggestion. we hypothetically divide a spherical lens. at each point of intersection of the incident rays with the spherical lens. into two effective perpendicular lengthless cylindrical lenses. One of the hypothetical cylindrical lenses is effective in the vertical direction while the other is effective in the horizontal direction. A method is given for calculating the resulted vertical and horizontal angles of refraction. After calculating these angles one can combine. at that point of incidence. the two components into a vector sum to find the resultant refracted ray. The new suggested method is first discussed and demonstrated for one single lens. and then generalized to optical systems of many components. The method's power and effectiveness in lens and optical systems design is demonstrated. A software package is designed and written for the purpose of optical ray tracing. The new method is implemented in this software. The name we gave to this package is "CALOSD". CALOSD is an acronym for Computer Aided lens and optical Systems design. CALOSD is capable of producing very accurate tabulated data as well as graphical displays of an optical system and rays traced from different points or angles of view: including a top view.

关键词： lens design ray tracing meridian and skew rays approximate and exact methods

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