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design and testing of a refractive reshaping system

Design and testing of a refractive reshaping system

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current developments in optical design and optical engineering III

作者： Jiang, Wu Shealy, David L. Martin, James C. Univ. of Alabama/Birmingham Birmingham AL USA

ISBN: (纸本)081941249X

For many illumination applications, it is desirable for a laser beam to have a uniform irradiance distribution across its diameter. Refractive and reflective systems for reshaping a laser beam profile have been proposed and discussed for many years. One of the refractive systems consisting of two plano-aspherical lenses operates with high efficiency. Recently, a prototype of this two aspherical lens reshaping system has been made from CaF2. The performance of the prototype is presented in this paper. The optical design and analysis of this system also are discussed.

关键词： Laser beams

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design and construction of large-aperture reflective interferometers

Design and construction of large-aperture reflective interfe...

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current developments in optical design and optical engineering III

作者： Nemechek, John J. GCA Tropel a Unit of General Signal Fairport NY USA

ISBN: (纸本)081941249X

Phase measuring interferometry is well established as the premier measurement technology in support of optical component fabrication. Commercial instruments are available that provide surface measurements over a range of radii and diameters. However, microlithographic lenses have increased in complexity and scale to the point that most commercial instruments fail to provide adequate surface coverage. Most severe is the ability to measure large diameter, convex surfaces. Anticipating the demands of today's microlithographic lens production, Tropel began design and construction of a new class of phase measuring interferometers in 1990. As a catadioptric design, these instruments feature a large spherical mirror to accomplish their purpose. This paper reviews the optical design of the large aperture reflective interferometer (LARI), and various considerations in their construction.

关键词： Interferometers

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New compact Xenon flash system for zoom lens and close-up photography

New compact Xenon flash system for zoom lens and close-up ph...

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current developments in optical design and optical engineering III

作者： Cheng, Dah Y. Cheng Technology & Services Los Altos CA USA

ISBN: (纸本)081941249X

The new Intense Point Source (IPS) consists of the regular linear Xenon flash tube mounted in a newly patented Orthogonal Parabolic Reflector (OPR) (Patent No. 5,037,191). The system integrates the radiation for the long linear lamp into a very small point on the order of 3 to 6 millimeters in diameter, with a 90° divergent angle. A diffuser and lens systems are employed to provide either a narrow beam of a few degrees for long range photography or a diffused light for close-up photography to provide softened, penetrating lighting. Light intensity distribution data for the new flash system as compared to that of the original Vivitar 285 flash lamp as measured in the Vivitar lab, are presented.

关键词： Flashlights

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RECENT developments IN STEPPER FOCUS AND OVERLAY CONTROL METROLOGY FOR SUB-HALF-MICRON MANUFACTURING APPLICATIONS 7

RECENT DEVELOPMENTS IN STEPPER FOCUS AND OVERLAY CONTROL MET...

引用

7TH ANNUAL CONF ON INTEGRATED CIRCUIT METROLOGY, INSPECTION, AND PROCESS CONTROL

作者： HOLLMAN, RF BISCHOFF, PM HELLEBREKERS, PP GCA a Unit of General Signal (United States)

ISBN: (纸本)0819411604

current generation of advanced IC's require sub-half-micron-resolution photolithography over large exposure fields, with device overlay tolerances of less than 100 nanometers. Achieving this performance in high-volume manufacturing will challenge the focus and overlay control capabilities of optical reduction steppers. This paper presents new metrological approaches to achieving the required focus and overlay control performance. A latent image focus measurement technique is described, which has been used extensively to characterize die levelling performance. To improve overlay capability on back end levels (especially metal), a combined bright field/dark field alignment system has been developed. Data on alignment performance, and optimization of alignment mark design for bright field, will be presented.

关键词： optical alignment Overlay metrology Semiconducting wafers Control systems Metals Metrology Tolerancing Error analysis Manufacturing Signal detection

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Control of gradient index profile for gradient index glasses of macro size and large n for a varifocal slide projector lens

Control of gradient index profile for gradient index glasses...

引用

current developments in optical design and optical engineering III

作者： Xu, Xiaojie Wickson, Max A. Savard, Michael Sherman, Paul Lightpath Technologies Inc. Tucson AZ USA

ISBN: (纸本)081941249X

Axial gradient index lens blanks with values of Δn up to 0.5, thicknesses and diameters up to 25 and 200 mm, respectively, have been produced by fusing together thin layers of glasses of progressively different indices of refraction. Smooth, step-free gradients are formed by controlled diffusion within and across the layers. Computer software has been developed to prescribe the gradient index profile and to control the diffusion process. Linear, quadratic, cubic, and a variety of other gradient index profiles can be produced by this method over a wide refractive index range. This paper discusses the diffusion software, process and metrology for a gradient blank currently in process to be used in a varifocal slide projector prototype.

关键词： Gradient index optics

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New adaptive optics prototype system for the ESO 3.6-m telescope: Come-on-Plus

New adaptive optics prototype system for the ESO 3.6-m teles...

引用

lens and optical Systems design 1992

作者： Hubin, N. Beuzit, J.L. Gigan, P. Lena, P. Madec, P.Y. Rousset, G. Boyer, C. Gaffard, J.P. Richard, J.C. Vittot, M. Rigaut, F. Gendron, E. Merkle, F. Karl- Schwarzschild -Str. 2 Munchen8046 Germany Observatoire de Paris et Universite de Paris VII DESPA 5 place Jules Janssen Meudon92195 France BP 72 92322 Chatillon Cedex France Route de Nozay Marcoussis91460 France 22 avenue Descartes BP 15 Limeil-Brevannes Cedex94453 France

ISBN: (纸本)9780819409591

Following the successful astronomical runs of the Come-On adaptive optics prototype on the ESO 3.6 m telescope in La Silla, Chile an upgraded version called Come-On-Plus is currently being constructed and was set up in December 1992. This paper describes the main improvements of this new system. In particular, the 52 actuator deformable mirror with 30 Hz closed loop bandwidth, the modal control, the high detectivity wavefront sensor channel, and the infrared imaging channel are presented. Finally, the laboratory tests of each subsystem are analyzed. This second prototype is dedicated to routine astronomical observing as well as providing design parameters for the adaptive optics for the ESO Very Large Telescope (VLT). © (1992) 2017 SPIE.

关键词： Adaptive optics

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lens blocking method for OPTICAM

引用

Precision engineering 1993年第3期15卷 205-205页

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design AND CONSTRUCTION OF AN ASTROMETRIC ASTROGRAPH

DESIGN AND CONSTRUCTION OF AN ASTROMETRIC ASTROGRAPH

引用

CONF ON current developments IN optical design AND optical engineering 2

作者： VUKOBRATOVICH, D VALENTE, T SHANNON, RR HOOKER, R SUMNER, RE Optical Sciences Ctr./Univ. of Arizona (United States)

ISBN: (纸本)0819409251

The optical Sciences Center, University of Arizona, has designed and constructed a unique 'red corrected' astrometric astrograph objective lens for the United States Naval Observatory. A five element design, with an integral Schott OG550 filter, was developed to meet the requirement for a 2060 mm focal length, f/10 system. The lens provides a nearly zero distortion flat field of 5 by 5 degrees in the sky. A weight limit of 55 kg led to the use of a titanium lens barrel. Assembly tolerances are satisfied through the use of elastomeric subcell mounting of the individual elements, and an adjustable final element. The lens is hermetically sealed and uses a filter/dessicator system to insure the long term cleanliness of the optics.

关键词： Tolerancing Distortion Adhesives Titanium Assembly tolerances optical design optical filters Photography Glasses lens design

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lens BLOCKING METHOD FOR OPTICAM

LENS BLOCKING METHOD FOR OPTICAM

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CONF ON current developments IN optical design AND optical engineering 2

作者： NOVAK, R MARRO, M TIPPS, JD CZAJKOWSKI, W DEMARCO, J SALAMON, PA MATCHETT, D CAPUTO, F LEBLANC, G Monroe Community College (United States) Eastman Kodak Co. (United States) Loctite Corp. (United States)

ISBN: (纸本)0819409251

A uv-curing 'cold' blocking adhesive has been developed by Loctite Corporation for use with the Opticam SM. The adhesive is a significant advance in the lens blocking process, as it eliminates heat-induced blocking strain; the most significant problem encountered with current hot pitch blocking methods. The new cold blocking adhesive is complemented by a new Kennametal lens blocking adapter tool and chucking system. The tooling offers substantially improved lens adapter to machine alignment and transfer; at considerably lower cost. The lenses are deblocked in a heated water and detergent solution, eliminating the environmental concerns of the current method.

关键词： Adhesives Optics manufacturing Glasses Light sources optical alignment Precision optics Roads UV optics Computing systems optical fabrication

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NEW design METHOD FOR ATHERMALIZED optical-SYSTEMS

NEW DESIGN METHOD FOR ATHERMALIZED OPTICAL-SYSTEMS

引用

CONF ON current developments IN optical design AND optical engineering 2

作者： TAMAGAWA, Y WAKABAYASHI, S TAJIME, T Mitsubishi Electric Corp. (Japan)

ISBN: (纸本)0819409251

This paper describes a new design method for athermalized optical systems. It can be accomplished by combining optical materials and by selecting suitable lens powers. However, there are difficulties in determining material and power of each lens, because achromatism is simultaneously required. To determine the condition of eliminate thermal focus shift and longitudinal chromatic aberration easily by simple drawing, an athermal chart is proposed which is constructed by plotting chromatic dispersive power and thermal dispersive power on a cartesian coordinate system.

关键词： Modulation transfer functions Zinc Colorimetry Germanium Chromatic aberrations Temperature metrology Visualization Gallium arsenide Refractive index Thermography

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