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Dry process pattern transfer for x-ray mask fabrication

Dry process pattern transfer for x-ray mask fabrication

引用

Dry Processing for Submicrometer Lithography 1989

作者： Doyle, Gary F. Applied Lithography Operations Perkin Elmer Coorporation 4 Finance Drive DanburyCT06810 United States

This paper will describe our current X-Ray mask development efforts at ALO that have produced half-micron "device level" masks. It will focus on the pattern transfer phase of the mask fabrication process. This combines the use of Electron Beam writing strategies, wet etching, and O2- RIE with a tri-level resist (PBS / Cr / S1400-23). Although the mask has no buried topography, the resist stencil must exhibit etched structures with vertical sidewalls and no undercutting of the transfer layer mask. This is made difficult by the need for overetch periods (~ 30%) that are necessitated by pattern generated microloading effects in submicron geometries. An additional constraint involves the Au plating base beneath the tri-level layer, whose thickness integrity must be maintained prior to electroplating. This processing is carried out on a five-micron thick, three inch diameter free-standing boron nitride membrane substrate. This paper will also discuss some studies using a tri-level structure where RIE will define the mid-level and resist stencil layer. This area of study is one of several critical aspects of X-Ray mask technology that must be successfully developed to achieve 0.25 micron mask design rules. © 1990 SPIE. All rights reserved.

关键词： III-v semiconductors

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Case study of a central-station grid-intertie photovoltaic system with v-trough concentration

Case study of a central-station grid-intertie photovoltaic s...

引用

IEEE Conference on Photovoltaic Specialists

作者： J. Freilich J.M. Gordon The Pearlstone Center for Aeronautical Engineering Studies Department of Mechanical Engineering Ben-Gurion University of the Negev Beersheba Israel Ben-Gurion Univ. of the Negev Beersheva Israel

A case study of an installed, central-station (no storage), utility-intertie photovoltaic (Pv) system in Sede Boger, Israel (latitude 30.9 degrees N), is presented. This Pv system was constructed with 189 polycrystalline silicon solar cell modules mounted on inexpensive, horizontal north-south axis trackers with v-trough mirrors for low-level concentration. The power conditioning unit operates at a fixed voltage rather than at maximum power point (MPP). Although design output of this system was a nominal 12 kW peak, the measured output was significantly less, occasionally dropping to zero on clear summer days. The major task was to pinpoint the causes of this deficiency and recommend system modifications. As part of this investigation, quantitative assessments of fixed-voltage operation as well as the energetic value of v-trough concentration and one-axis tracking were performed for this system and similar systems. The sample results show that fixed-voltage operation at the best fixed voltage (BFv) can achieve 96% of the yearly energy of MPP operation. The results also show the sensitivity of the yearly energy delivery to the selection of fixed voltage and its marked asymmetry about the BFv; the influences of inverter current constraints on yearly energy delivery and the BFv; and how the separate effects of tracking and optical concentration increase yearly energy delivery.< >

关键词： Computer aided software engineering Photovoltaic systems voltage Mirrors Inverters Solar power generation Jacobian matrices Aerospace engineering Mechanical engineering Silicon

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optical design ANALYSIS INCORPORATING ACTUAL SYSTEM INTERFEROMETRIC DATA

OPTICAL DESIGN ANALYSIS INCORPORATING ACTUAL SYSTEM INTERFER...

引用

CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： WILLEY, G PATCHIN, R CAI a Division of RECON/OPTICAL INC. (United States)

ISBN: (纸本)0819402044

Interferometric measurements of real surfaces are combined with computed optical design analyses. To accomplish this, a special software interface driver was developed to accept serial optical Path Difference (OPD) data from a Zygo Mark III interferometer, apply standard algorithms, and convert the measured data into a CODE v readable file. Analysis was conducted on a large aperture developmental optical system containing a fold mirror of eggcrate construction. MTF performance of the entire system was computed as were the contributions of individual surfaces to overall optical quality. Diffraction effects due to the rib structure of the eggcrate mirror were apparent in this analysis, as were the effects of gravity and figure components of the wavefront. This hybrid analysis demonstrates the usefulness of coupling interferometry with an optical design program in the analysis of complex optical systems.

关键词： Mirrors Modulation transfer functions Wavefronts Diffraction Interferometry Code v Computing systems optical engineering Data modeling Error analysis

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COMPUTER INTEGRATION FOR optical FABRICATION

COMPUTER INTEGRATION FOR OPTICAL FABRICATION

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CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： BARRETT, D CZAJKOWSKI, W Eastman Kodak Company (United States)

The chronological events associated with fabricating a lens system from initial design to final component manufacturing will be explored. The benefits of utilizing computer integration in design, process planning and ... 详细信息

ISBN: (纸本)0819402044

关键词： Computer aided design Manufacturing Optics manufacturing Spherical lenses optical engineering CAD systems optical fabrication Control systems Glasses Polishing

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current TRENDS IN BINARY OPTICS AT PERKIN-ELMER

CURRENT TRENDS IN BINARY OPTICS AT PERKIN-ELMER

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CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： LOGUE, J MCHUGH, T Perkin-Elmer Corporation (United States)

ISBN: (纸本)0819402044

Binary optics is an emerging technology whereby light is directed, combined, or distributed by an optical material having a "stepped" phase structure. We produce computer-generated diffractive elements having high optical efficiency using multiple mask lithography. Perkin-Elmer has an active research and development program supporting binary optics activities from software development to practical technology demonstrations. Standard software tools have been developed to facilitate the design of binary optics from general optical prescriptions. These tools are used to design binary masks for the fabrication of binary optics for diverse applications ranging from simple lenses to general phase transformations. This paper briefly reviews the development of binary optics, discusses the tools supporting the design and fabrication of binary optics, and presents recent applications and demonstrations of binary optics.

关键词： Diffraction Photomasks Lenses optical alignment Aspheric lenses optical components Computer generated holography Binary data optical engineering Computer aided design

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SENSITIvITY ANALYSIS OF optical-SYSTEMS USING THE ANGLE CHARACTERISTIC

SENSITIVITY ANALYSIS OF OPTICAL-SYSTEMS USING THE ANGLE CHAR...

引用

CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： vELZEL, CHF DEMEIJERE, JLF Philips-CFT (The Netherlands) B.V. Optische Industrie de Oude Delft (The Netherlands)

ISBN: (纸本)0819402044

The change of the angle characteristic of an optical system when a component parameter is varied follows from first order perturbation theory. Simple formulas are obtained for the sensitivity of the angle characteristic to changes in position, form and refractive index. These formulas can be applied in the design and assembling of optical systems. In assembling we use them for the measurement of decenters; in design we can obtain the mechanical tolerances from them, and also the magnitude of steps in parameter space to be taken in an optimization procedure. We apply our analysis to the systems that were discussed in a previous paperl. It will be seen that the concept of strain discussed in that paper also applies to the calculation of tolerances. The sensitivity of a system to component shifts and tilts correlates with the strain caused by this component. The sensitivity analysis developed in this paper therefore confirms the conclusion of the previous paper. 1 J.L.F. de Meijere, J.A. Schuurman and C.H.F. velzel, The use of the pseudo-eikonal in the optimization of optical systems, Proc. SPIE Conf. 1013, sept. 1988, Hamburg.

关键词： Monochromatic aberrations Tolerancing optical engineering Objectives Refractive index Spherical lenses Geometrical optics Assembly tolerances Sensors optical design

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INCREASING NUMERICAL APERTURE OF SELFOC LENS - PHYSICAL APPROACH

INCREASING NUMERICAL APERTURE OF SELFOC LENS - PHYSICAL APPR...

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CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： YAOMIN, C YUE, C SHIQIONG, Z Nanjing Fiber Glass Research and Design Intitule Nanjing 210012 China

In order to increase NA of selfoc lens, a physical approach is proposed. The paper describes theory and preparation results of this approach, which depends on reshaping the surface of general selfoe lens. © 1989 ... 详细信息

ISBN: (纸本)0819402044

关键词： optical engineering

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BINOCULAR PERFORMANCE AND design

BINOCULAR PERFORMANCE AND DESIGN

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CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： vUKOBRATOvICH, D University of Arizona (United States)

ISBN: (纸本)0819402044

A binocular extends the range of human vision. Binoculars enable the user to see objects at greater distances or, alternatively, to see greater detail in distant objects. In failing light, binocul are used to detect objects that the naked eye cannot detect. Binoculars also extend the range of stereo vision of the user; this application is primarily of interest in military fire control.

关键词： Prisms Eye Target detection Objectives Stray light optical engineering Glasses Tolerancing optical alignment Refraction

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design EXAMPLES OF HYBRID REFRACTIvE-DIFFRACTIvE LENSES

DESIGN EXAMPLES OF HYBRID REFRACTIVE-DIFFRACTIVE LENSES

引用

CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： FOO, LD CLARK, SP MERCADO, RI Lockheed Missiles and Space Company Inc. (United States)

ISBN: (纸本)0819402044

Diffractive lenses have recently become realizable elements in optical systems. However, their application to wide band optical imaging systems are limited because they are highly dispersive and exhibit unacceptable amounts of color related aberrations. In this paper we will present a design study of the achromatization of hybrid refractive-diffractive lenses over wide spectral bands. design examples of hybrid lenses which operate in the visible, mid-infrared (3 - 5 micron) and long-wave infrared (8 - 12 micron) spectral bands will be presented and a comparison with conventional lenses designed to operate in these spectral bands will be discussed.

关键词： Mirrors Lenses Monochromatic aberrations Fluctuations and noise optical components Silicon Glasses Potassium visible radiation Infrared radiation

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LARGE OPTICS FABRICATION - TECHNOLOGY DRIvERS AND NEW MANUFACTURING TECHNIQUES

LARGE OPTICS FABRICATION - TECHNOLOGY DRIVERS AND NEW MANUFA...

引用

CONF ON current developments IN optical engineering AND COMMERCIAL OPTICS

作者： PILERI, D Eastman Kodak Company (United States)

ISBN: (纸本)0819402044

Optics currently being considered for large systems are frequently ultra-lightweight and deformable by design. They can often have unusual shapes and include non-rotationally symmetric surface figures. Surface roughness, subsurface damage, light scattering and laser damage threshold specifications are also frequently required. Manufacturing techniques currently being developed to address these stringent requirements will be discussed.

关键词： Polishing Optics manufacturing Ions Mirrors Surface finishing Aspheric lenses Glasses Metrology optical engineering Interferometry

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