A new method for optical microscopy with super-resolution exceeding the Rayleigh limit was developed to observe the shape of particles contaminating the LSI patterned wafer in the far- field. The principle of the new ...
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ISBN:
(纸本)0819409251
A new method for optical microscopy with super-resolution exceeding the Rayleigh limit was developed to observe the shape of particles contaminating the LSI patterned wafer in the far- field. The principle of the new method is as follows. The optical spot being smaller than the measured particles has to be scanned on the particle to measure the shape of particles on the wafer. The phase-shifting mask making small optical spot consists of the checkered mask which has been coated with a transparent layer patterned to ensure that the optical phases of the nearest apertures are opposite. The destructive interference between the two opposite phases of light waves from adjacent apertures cancels some diffraction effects and increases the spatial resolution, so that the size and resolution of the coherent laser spots can exceed the size limit of the Airy disk and resolution of Rayleigh limit. The new method for optical microscope with super resolution was examined theoretically and experimentally. The coherent beam generated from 15 mW He-Ne laser projected to the phase-shifting checkered mask forms small laser spots of which size are under 0.1 micrometers in diameter. It is clarified that in the far-field, the scattered light from two spots with opposite phases on the wafer can be observed in exceeding with Rayleigh limit.
Main stages of electro-optical devices (EOD) energy calculation are presented. Generalized methodology of the energy calculation permits to find simply a set of important EOD parameters, for example, a threshold sensi...
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ISBN:
(纸本)0819409251
Main stages of electro-optical devices (EOD) energy calculation are presented. Generalized methodology of the energy calculation permits to find simply a set of important EOD parameters, for example, a threshold sensitivity, a detection range, construction parameters of an optical system, detector and electronic scheme.
Recent progress in an on-going development program leading to the design of superconducting continuous-wave (cw) linear accelerators for high-brightness ion beams is reviewed. A new spoke-resonator geometry incorporat...
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ISBN:
(纸本)0819407755
Recent progress in an on-going development program leading to the design of superconducting continuous-wave (cw) linear accelerators for high-brightness ion beams is reviewed. A new spoke-resonator geometry incorporating a half-wavelength resonant line was fabricated and tested. This geometry serves as the basis for the constituent cavities of a superconducting section being designed for high-current testing with a deuterium beam. Considerable progress has been made in the design of this section. A multi-phased program leading to the development of a superconducting radio-frequency quadrupole (SCRFQ) has been initiated. design considerations and test results from the various activities are presented.
We summarize the requirements for a stereoscopic microscope as part of an investigational excimer laser corneal sculpting apparatus, describe how a Zeiss surgical microscope was integrated into that apparatus and repo...
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ISBN:
(纸本)0819409251
We summarize the requirements for a stereoscopic microscope as part of an investigational excimer laser corneal sculpting apparatus, describe how a Zeiss surgical microscope was integrated into that apparatus and report the in situ optical performance of the microscope.
The Goddard robotics effort is alive and well, even after the sad demise of the flight telerobotic servicer (FTS). We have released a technical report on the design and implementation of a flexible robot control syste...
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ISBN:
(纸本)0819410306
The Goddard robotics effort is alive and well, even after the sad demise of the flight telerobotic servicer (FTS). We have released a technical report on the design and implementation of a flexible robot control system architecture, and are in the process of prototyping it. The architecture is based on our experience in implementing NASA Standard Reference Model Architecture (NASREM) and the prototype FTS control system in Ada. We have successfully demonstrated the integration of the capaciflector proximity sensor for docking and berthing. We can even still do state of the art force reflecting teleoperation, thanks to adding a sixth motor to the Kraft hand controllers. We look forward to transferring some of this technology to other NASA centers.
Rank Pneumo has worked with the Center for Optics Manufacturing and the Center's Manufacturing Advisory Board to design a multi-axis prism grinding machine. The Opticam PM is a three axis, high precision CNC recip...
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ISBN:
(纸本)0819409251
Rank Pneumo has worked with the Center for Optics Manufacturing and the Center's Manufacturing Advisory Board to design a multi-axis prism grinding machine. The Opticam PM is a three axis, high precision CNC reciprocating grinder. It is designed for the automated manufacturing of glass prisms. Unique features of the design incorporate electrolytic in- process dressing of the finishing wheel, nested grinding wheels and machine resident metrology to provide RQM (Real-time Quality Management).
A scheme of an optical switch using a matrix of reprogrammable holograms is discussed. The light from each input channel is deflected to an output channel with a separate microhologram. The microholograms are recorded...
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ISBN:
(纸本)0819409251
A scheme of an optical switch using a matrix of reprogrammable holograms is discussed. The light from each input channel is deflected to an output channel with a separate microhologram. The microholograms are recorded and overrecorded with two acousto-optical deflectors on a bacteriorhodospin photo medium. The experiments have been carried out on a prototype with 20 × 20 channels. As shown, the capacity of such a switch can be increased up to 104 × 104.
The first-order Double-Gauss 4 element objective arrangement derived from a triplet type by splitting the central negative element is discussed. The Petzval sum of the lens system was chosen and calculated. With desir...
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ISBN:
(纸本)0819409251
The first-order Double-Gauss 4 element objective arrangement derived from a triplet type by splitting the central negative element is discussed. The Petzval sum of the lens system was chosen and calculated. With desired axial color, glasses will be selected and axial color calculated. By using the aspherical coefficients, we discuss the aberrations compensation. Following the design procedures to design a camera objective, the lens data after optimization and the MTF curve are presented.
A typical CIM architecture consists of several standalone software applications which are integrated to provide a complete automated manufacturing environment. An essential component of CIM is a geometrical database t...
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ISBN:
(纸本)0819409251
A typical CIM architecture consists of several standalone software applications which are integrated to provide a complete automated manufacturing environment. An essential component of CIM is a geometrical database that contains the models of systems and their components. All the individual applications must interface with that database, and direct interface to other software tools is an advantage. Traditional major components of this environment include a CAD/CAE system and a CAM system. The relationship between the two is clear, the CAD/CAE component produces a design which is transferred to the CAM component for production. An optical system contains two types of elements, optical and mechanical, with disparate design and manufacturing methods. The paper discusses the optical CIM environment and the basic components that it requires.
Although the principles of concurrentengineering and rapid product cycles are not new concepts in the industrial sector, the optics manufacturing industry has witnessed few technological advances since the 1940's...
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ISBN:
(纸本)0819409251
Although the principles of concurrentengineering and rapid product cycles are not new concepts in the industrial sector, the optics manufacturing industry has witnessed few technological advances since the 1940's. At present the optics industry maintains outdated stand-alone manufacturing equipment and systems that do little to foster integration or communications. 'Islands of Technology', spawned from the latest offerings of CNC controlled equipment, are generally stand alone systems incapable of supporting communication with other process equipment, not to mention the total business enterprise. This approach increases the cost in design and manufacture of optical systems while negatively impacting competitiveness in the global marketplace.
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