Time series forecasting, while vital in various applications, often employs complex models that are difficult for humans to understand. Effective explainable AI techniques are crucial to bridging the gap between model...
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Odometry estimation is a fundamental technique for many robotics and autonomous driving applications. Recent advances using LiDAR and IMU sensor-fusion methods show promising potential in odometry estimation by combin...
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Aiming at the transient stability analysis of Virtual Synchronous Generators considering current limitation, this paper primarily constructs a switching dynamic model for single-converter grid-connected systems based ...
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This study proves the applicability of wafer to wafer hybrid bonding to commercialized DRAM products for the first time. A metal interconnection process for bonding Cu pad was carried out on the already fabricated DRA...
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ISBN:
(纸本)9781665479431
This study proves the applicability of wafer to wafer hybrid bonding to commercialized DRAM products for the first time. A metal interconnection process for bonding Cu pad was carried out on the already fabricated DRAM wafer and another bare Si wafer. Two wafers were stacked with wafer to wafer hybrid bonding process. Afterwards, TSV last process with BEOL Metallization was carried out. After applying the optimized bonding process conditions with CMP flatness, Cu dishing control, bonding voids free was confirmed. The stable connectivity of bonding could be confirmed through the daisy chain pattern with 100% pass rate. Finally same wafer yields with current DRAM product can be obtained. Cell characteristics have changed as the hydrogen passivation effect due to the hybrid bonding process and subsequent metal processes has changed. Through thermal budget control, the same cell characteristics could be obtained as existing DRAM.
With the rapid development of the power industry and the widespread application of UAVs (Unmanned Aerial Vehicles), indoor inspection is facing new opportunities and challenge. Ensuring safe, reliable, and efficient U...
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Edge computing has emerged as a transformative paradigm with applications ranging from IoT to smart homes and transportation systems. However, its decentralized nature presents significant challenges in securing sensi...
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The active and reactive power of grid-connected inverter (GCI) under weak grid condition supports the operation at the same time, so its operating characteristic under different power factors are particularly importan...
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In order to facilitate intuitive control and communication across a variety of areas, hand gesture recognition is an essential component of human-computer interaction systems. In this paper, a real-time hand gesture r...
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System-on-Chip (SoC) technology is constantly evolving and being applied in various fields such as the Building Automation System (BAS). Aiming to improve systems' performance and users' experience, BAS relies...
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In Ecommerce world, social media becomes very important part for communicating customers to business because business can collect and prepare their industry according to the reviews of the customers through social med...
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