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solid state sensor arrays: development and applications 1997

The proceedings contain 27 papers. The topics discussed include: greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs;charge-coupled-device fiber optic taper array x-ray detector for protein crystallography;experimental measurement of the variation in sensitivity within a single pixel of a CCD;CCD transfer method: standard for absolute performance of CCDs and digital CCD camera systems;modeling camera orientation and 3D structure from a sequence of images taken by a perambulating commercial video camera;first study of a flat vacuum image sensor with a field-emitter array;and new 1000x1000 frame transfer CCD camera for high-speed high-fidelity digital imaging.

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Proceedings of SPIE: solid state sensor arrays: development and applications II

Proceedings of SPIE: Solid State Sensor Arrays: Development ...

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solid state sensor arrays: development and applications II

This Volume 3301 of the conference proceedings contains 21 papers. Topics discussed include new devices and technologies, X ray sensors and CMOS sensors.

关键词： sensors

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A Scalable BEV Perception Processor for Image/Point Cloud Fusion applications Using CAM-Based Universal Mapping Unit

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IEEE JOURNAL OF solid-state CIRCUITS 2025年第3期60卷 1002-1013页

作者： Feng, Xiaoyu Lin, Xinyuan Yang, Huazhong Liu, Yongpan Sun, Wenyu Tsinghua Univ Dept Elect Engn Beijing 100084 Peoples R China

The integration of multi-sensor data like image and point cloud for information complementarity is crucial for 3-D perception scenarios like autonomous driving. Recently, bird's eye view (BEV)-based sensor fusion is attracting more and more attention but the significant computational overhead constrains their widespread application at the edge. First, there are numerous irregular memory access operations in BEV fusion networks. For example, sparse convolutions (SCONVs) in the point cloud branch and irregular BEV plane mapping result in significant memory addressing and mapping overhead. Furthermore, multi-sensor fusion leads to rapid expansion of model size, making it difficult and expensive for single-chip solutions to meet the demands. Based on the above challenges, this work proposes an image and point cloud fusion processor with two highlights: a content addressable memory (CAM)-based deep fusion core to accelerate a variety of irregular BEV operations and chip-level parallelism design supporting flexible interconnect topology. The proposed chip is fabricated in 28-nm CMOS technology. Compared with existing image or point cloud accelerators, the proposed chip achieves higher frequency, 2x higher area efficiency, and 2.61x higher energy efficiency for sparse point cloud processing. To the best of authors' knowledge, this work is the first accelerator for BEV-based multi-modal fusion networks.

关键词： Point cloud compression arrays Three-dimensional displays Semantics Parallel processing Topology Feature extraction Cloud computing Autonomous vehicles Network topology Bird's eye view (BEV) chip-level parallelism content addressable memory (CAM) diverse memory access multi-modal fusion

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Magnetic Field Enhanced Frequency-Selective Terahertz Detection via 3D Printing Micro-Helical Stepped and MoTe2 Coated arrays

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ADVANCED OPTICAL MATERIALS 2025年第1期13卷

作者： Peng, Zhong-Ze Song, Qi Yang, Jiachen Zhang, Min Hou, Shao-Dong Zhang, Bing-Yuan Chen, Wei Lu, Yan-Qing Liaocheng Univ Sch Phys Sci & Informat Technol Shandong Key Lab Opt Commun Sci & Technol Liaocheng 252059 Peoples R China Shenzhen Univ Coll Phys & Optoelect Engn Shenzhen 518060 Peoples R China Nanjing Univ Collaborat Innovat Ctr Adv Microstruct Natl Lab Solid State Microstruct Key Lab Intelligent Opt Sensing & ManipulatColl E Nanjing 210023 Peoples R China

Recent advancements in wireless communication have markedly increased data throughput and decreased latency in progressing toward sixth-generation (6G) networks, wherein the terahertz (THz) waveband offers significant potential. However, conventional THz sensors often suffer from high noise, low responsivity, and low spectrum efficiency, limiting their effectiveness for THz applications. Here, to address these challenges, a magnetic-enhanced frequency-selective is developed THz sensor by depositing an Au-enhanced active layer of MoTe2 on a designed 3D printing high-depth micro-helical stepped structure. This sensor, featuring four characteristic frequency points and an effective area of 107.12 mm2, demonstrated noticeable improvements under a 0.145 mT magnetic field at 0.1 THz: optical responsivity improved by 413.23% (from 3.32 to 17.03 MV W-1), noise equivalent power decreased by 80.51% (from 49.16 to 9.58 pW Hz-1/2), and the detectivity reached 3.30 x 1010 cmHz1/2W-1. This work highlights the potential of integrating 3D microstructures with novel topological materials for practical 6G communication.

关键词： 3D printing magnetic field enhanced terahertz sensing topological materials

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solid-state dewetting sputtered ultra-thin Au films for LSPR sensing chip toward African swine fever virus detection

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sensorS AND ACTUATORS A-PHYSICAL 2025年 382卷

作者： Lamtha, Thomanai Waiwijit, Uraiwan Duangkanya, Kamonchanok Lertvanithphol, Tossaporn Amarit, Ratthasart Tantiwanichapan, Khwanchai Sathukarn, Asmar Chananonnawathorn, Chanunthorn Hincheeranan, Wantanee Dhanasiwawong, Kittidhaj Choowongkomon, Kiattawee Sritrakul, Tepyuda Boodde, Orawan Sukmak, Manakorn Horprathum, Mati Natl Elect & Comp Technol Ctr Spectroscop & Sensing Devices Res Grp Pathum Thani 12120 Thailand Kasetsart Univ Fac Sci Dept Biochem Bangkok 10900 Thailand Kasetsart Univ Fac Vet Med Dept Vet Publ Hlth Nakhon Pathom 73140 Thailand Kasetsart Univ Fac Vet Med Dept Farm Resources & Prod Med Nakhon Pathom 73140 Thailand

The African swine fever virus (ASFV) has caused enormous economic losses in the swine industry, with no effective vaccine or specific drug treatment currently available. The development of highly specific and sensitive detection for ASFV is crucial to better controlling the spread and management of this disease. In this context, localized surface plasmon resonance (LSPR) based gold nanoparticle (Au NPs) arrays chip has proven great potential for detecting small molecules in label-free biosensor applications. Here, we developed a facile method for the fabrication of an Au NPs-LSPR sensor chip by depositing ultra-thin Au films onto glass slide substrates through magnetron sputtering at various deposition times, ranging from 9 to 18 sec. The subsequent formation of Au NPs was achieved by post-annealing treatment at 500 degrees C for 2 h. The formation of the Au NPs, including diameter, density, and inter-particle spacing, was found to be dependent on the deposition time, allowing tunability of the LSPR peak from 527 to 563 nm. Additionally, the prepared Au NPs exhibited refractive index (RI) sensitivity ranging from 36.118 to 92.165 nm/RIU. To evaluate the LSPR biosensor performance, the optimized Au NPs-LSPR sensor chips were employed in the detection of ASFV antibodies in swine blood serum. The LSPR response was investigated across a dilution range of 1:640-1:10240, achieving a limit of detection (LOD) with high specificity at the 1:5120 dilution level, which demonstrated twice the sensitivity compared to the enzyme-linked immunosorbent assay (ELISA) method. Furthermore, these Au NPs-LSPR sensor chips show high regenerability, long-term stability, and good reproducibility, which are potentially valuable for on-site detection testing to prevent the spread of ASFV. Additionally, our proposed Au NPs-LSPR sensor platform holds great potential as a point-of-field (POF) device for detecting chemicals and biomolecules in diverse applications.

关键词： LSPR AuNPs chip Thin film Sputtering Dewetting ASFV

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Optoelectronic in-sensor computing based on PD-RRAM array

Optoelectronic in-sensor computing based on PD-RRAM array

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Smart Photonic and Optoelectronic Integrated Circuits 2025

作者： Pan, Wen Hao, Zhibiao Sun, Changzheng Xiong, Bing Wang, Jian Han, Yanjun Li, Hongtao Gan, Lin Luo, Yi Wang, Lai Beijing100084 China

ISBN: (纸本)9781510684881

The rapid expansion of the Internet of Things (IoT) necessitates the development of low-power edge devices capable of efficient processing volumes of data. In-sensor computing provides a transformative solution by enabling in-situ data processing within sensor arrays. This study introduces a highly integrated PD-RRAM array for real-time in-sensor computing, which integrates photodiodes (PDs) with resistive random access memories (RRAMs). By consolidating sensing, storage, and computing, the PD-RRAM array achieve excellent efficiency and low power consumption, positioning it as a potential technology for future IoT applications. © 2025 SPIE.

关键词： RRAM

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High-Capacity and High-Density FBG Array Sensing Demodulation System Based on High-Speed Wavelength-Swept REC-DFB Laser Array 4

High-Capacity and High-Density FBG Array Sensing Demodulatio...

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4th International Computational Imaging Conference, CITA 2024

作者： Yang, Shijie Dai, Pan Ban, Qilu Wang, Yu Wang, Jiacheng Xu, Kaichuan Fan, Yaqiang Dong, Junwei He, Zilong Zhang, Yixin Wang, Feng Chen, Xiangfei Key Laboratory of Intelligent Optical Sensing and Manipulation The Ministry of Education & Engineering Research Center of Precision Photonics Integration and System Application The Ministry of Education National Laboratory of Solid State Microstructures College of Engineering and Applied Sciences Institute of Optical Communication Engineering Nanjing University Tongding Joint Lab for large-scale photonic integrated circuits Nanjing University Jiangsu Nanjing210093 China

ISBN: (纸本)9781510688834

Fiber Bragg grating (FBG) sensing technology, with the advantages of precise real-time monitoring and strong anti-interference capabilities, has been widely applied in various fields, including aerospace, petrochemical, and power transmission. This study presents an FBG sensing demodulation system applicable to high-capacity, high-density fiber sensing through quasi-distributed networking using multipoint FBG sensor arrays, capable of dense monitoring through multi-channel parallel operation and wavelength division multiplexing (WDM). The FBG sensing demodulation system primarily consists of a wavelength-swept semiconductor laser source and its parallel driving control module, a multiplexed FBG sensor array section, and a signal acquisition and demodulation module. The laser source is a distributed feedback (DFB) laser array, integrating 20 individual laser units at high density, based on the reconstruction-equivalent-chirp (REC) technique. A continuous coverage of wavelength tuning range, exceeding 40 nm in the C-band range, is achieved, with a maximum sweeping speed of 2.5 kHz and a tuning speed of 100,000 nm/s. The FBG sensor array section can deploy multiple non-identical WDM fiber grating arrays. The system can operate at high sweeping speeds of 1 kHz and 2.5 kHz, yielding great sensing results in temperature experiments, strain experiment and vibration experiment. The proposed FBG sensing system meets the application demands for high-capacity and dense quasi-distributed fiber sensing, exhibiting significant advantages in sensor load capacity, measurement precision, and especially measurement speed, with promising future applications. © 2025 SPIE.

关键词： Fiber Bragg gratings

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Photo-to-answer: development of a universal and intelligent multi-channel sensor array for reducing substance detection and beverage flavor classification

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Chemical Engineering Journal 2025年 515卷

作者： Xia, Xuhui Li, Xuheng Zheng, Jia Zhao, Peng Zeng, Xin Guo, Mingyi Hou, Changjun Huo, Danqun Key Laboratory for Biological Science and Technology of Ministry of Education Bioengineering College of Chongqing University Chongqing400044 China College of Culinary and Food Science Engineering Sichuan Tourism University Chengdu610100 China Strong-flavor Baijiu Solid-state Fermentation Key Laboratory of China Light industry Wuliangye Group Co. Ltd Yibin644007 China

Reducing substances are critical parameters for discriminating flavored beverages. The development of rapid and intelligent methods for detecting reducing substances can significantly enhance beverage production management and facilitate the construction of flavor databases. In this study, a GO@Mel-Cu nanozyme was synthesized by leveraging the strong peroxidase (POD)-like activity of Mel-Cu and the increased catalytic core surface area provided by graphene. Three-channel sensor arrays based on GO@Mel-Cu were constructed using three colorimetric substrates (OPD, TMB, and ABTS2-), enabling the discrimination of 19 reducing substances and the classification of five categories of flavored beverages. This platform not only demonstrated a limit of detection (LOD) of 1 nM to ascorbic acid but realized 100 % accuracy for 19 types of reducing substances discrimination, highlighting its potential for both the sensitive detection of reducing substances and the universal discrimination of flavored beverages. Absorbance fingerprints of the five flavored beverages were analyzed using PCA, LDA, and HCA, achieving successful intra-group species discrimination. In the blind sample testing, our sensor array successfully discriminated five flavored beverages and their binary mixtures with 98.2 % and 98 % accuracy, respectively. To further advance portable and intelligent beverage classification, ResNet 50 models were trained for sensor array image classification, achieving over 98 % accuracy. A portable and universal platform for flavored beverage discrimination was subsequently developed, enabling a portable system that provides direct output from photos to results. This work offers a promising strategy for flavored beverage discrimination and reducing substances detection, contributing to food production and regulatory applications. © 2025 Elsevier B.V.

关键词： sensor arrays

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20.4 MEMS-Free 4096-Pixel CMOS E-Nose Gas-sensor Array with Molecular-Selective Metal-Organic-Framework Sensing and In-Pixel Thermodynamic Modulation for Fast sensor Regeneration

20.4 MEMS-Free 4096-Pixel CMOS E-Nose Gas-Sensor Array with ...

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IEEE International Conference on solid-state Circuits (ISSCC)

作者： Marco Saif Fuze Jiang Shao–Wei Lo Adam Wang Zhikai Huang Jiachen Wang Hangxing Liu Chih–Jen Shih Thomas Burger Hua Wang ETH Zürich Zürich Switzerland

ISBN: (数字)9798331541019

ISBN: (纸本)9798331541026

Accurate and real-time sensing of gas molecule species and concentrations is critical for a myriad of applications, including environmental protection, industry automation, public health monitoring, and bio-/chemical-security surveillance. For example, gas sensing in large chemical plants is crucial for safety and production efficiency, with ammonia (NH3) being particularly important due to its extensive use [1]. Electronic noses (e-noses) consist of a chemical sensor array with surface recognition modules for capturing specific or multi-species gas molecules followed by electronic signal acquisition and processing [2]. Despite decades of exploration [3]–[5], the development of e-noses is still in its early stages, and existing e-noses continue to face major challenges as: (1) limited selectivity on target molecules (2) poor sensor regeneration due to slow and incomplete gas desorption process, which can result in sensing memory effect, i.e., affecting low-trace gas detection due to prior exposure to high concentrations, (3) a small number of sensing nodes instead of a large array, also lacking in-pixel signal processing and data digitization [6], [7]. To address these issues, we present a monolithically integrated molecular specific metal-organic-frameworks (MOFs) CMOS e-nose sensor array with in-pixel fast capacitance-gas interfacing, readout, and data digitization with local temperature regulation and sensing. For demonstration, NiNi-Pyz MOFs have been employed to achieve NH3 specificity. In particular, the in-pixel temperature regulation can modulate the thermodynamic of NH 3 adsorption and desorption at the sensor interfaces, significantly improving the sensitivity and allowing rapid sensor regeneration.

关键词： Temperature sensors Thermodynamics Temperature distribution Array signal processing Surveillance Electronic noses Regulation sensors Surface treatment sensor arrays

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35.2 A Spatial-Domain Compressive-Sensing Photoacoustic Imager with Matrix-Multiplying SAR ADC

35.2 A Spatial-Domain Compressive-Sensing Photoacoustic Imag...

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IEEE International Conference on solid-state Circuits (ISSCC)

作者： Huan-Cheng Liao Shunyao Zhang Yumin Su Arvind Govinday Yiwei Zou Wei Wang Vivek Boominathan Ashok Veeraraghavan Lei Li Kaiyuan Yang Rice University Houston TX

ISBN: (数字)9798331541019

ISBN: (纸本)9798331541026

Wearable deep-tissue imaging technologies promise a paradigm shift to preventive, proactive, and accessible health care. Real-time and long-term imaging offers unprecedented insights into one's body conditions, enabling constant monitoring of high-risk patients (e.g., cardiovascular [1] and musculoskeletal [2]), tracking fetal development [3], and overseeing recovery after surgeries. These devices also make medical imaging more accessible and affordable in low-income countries. Ultrasound and photoacoustic (PA) imaging modalities are well suited for such applications because of their high resolution for imaging deep tissue and fewer safety concerns. Compared to the well-known ultrasound, emerging PA technology [4], [5] employs optical excitation and ultrasonic readout, governed by PA effects, to achieve higher molecular contrast and sensitivity based on the agents' optical absorption properties while offering similar depth and resolution. Thus, this work targets a compact and low-power PA RX with data compression as a key enabler of the envisioned wireless wearable PA imager. It is worth noting that PA and ultrasound RX share similar sensor arrays and readout circuits, except that the amplitude of received PA signals is roughly ten times smaller than that of ultrasound due to an extra stage of energy transduction and light exposure limits. Thus, we discuss and compare ultrasound and PA RX designs together in this paper.

关键词： Wireless communication Wireless sensor networks Ultrasonic imaging Image resolution Biomedical optical imaging Surgery Optical imaging solid state circuits Optical sensors Biomedical monitoring

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