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Conference on solid state sensor arrays - development and applications

作者： Shimamoto, H Mitani, K Fujita, Y NHK Science and Technical Research Laboratories Tokyo Japan

ISBN: (纸本)0819424307

A dynamic range expansion method for Charge Modulation Device (CMD) imagers has been proposed and an experimental circuit was evaluated. As active pixel sensors, CMD imagers offer significant advantages in terms of non-destructive readout and high-speed operation. Furthermore, the CMD imager used in this study has built-in dual vertical shift registers which can start their scanning independently. We applied our newly developed source reset method to the imager, which enables each pixel charge to be reset by external circuits. By using these functions, we have obtained our dynamic range expansion method. The source reset method enables each pixel of a CMD imager to be reset selectively. We use it for a regional electrical shutter. For instance, if there is an overexposed pixel, its accumulated charge is reset from outside the imager, so that the pixel charge is prevented from becoming saturated. The non-destructive readout and high-speed operation enable the CMD imager to be read multiple times without destruction of accumulated charges. For instance, if the imager is driven twice in one field period, each pixel's accumulations can be checked and reset selectively from external of the device at the first scanning, then, all the signals are obtained at the second scanning and output through a small process circuit. This dynamic range expansion method for CMD imagers needs only a simple feedback Circuit but does not need complex equipment externally nor adding reset circuits on a chip. An experimental circuit with this method was successfully evaluated here.

关键词： Charge Modulation Device source reset method dynamic range expansion active pixel sensor non-destructive readout feedback circuit

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Optical refractometry using a, monolithically integrated Mach-Zehnder interferometer

Optical refractometry using a, monolithically integrated Mac...

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1997 International Conference on solid-state sensors and Actuators

作者： Maisenholder, B Zappe, HP Kunz, RE Moser, M Riel, P Paul Scherrer Inst Zurich Switzerland

ISBN: (纸本)0780338294

Integrated optical sensors, based on evanescent wave sensing, are useful for numerous applications, including medical, environmental and food analysis. System miniaturization is a key issue in their further development. We present the design and fabrication of a novel refractometric transducer, where all optoelectronic components (lasers, waveguides, modulators, detectors and sensor pads) are monolithically integrated on a 5 x 0.15 mm(2) chip and report on its performance as a refractometer in a flow-through system.

关键词： optical sensor evanescent wave interferometer integrated optics

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Integrated resonant accelerometer microsystem for automotive applications

Integrated resonant accelerometer microsystem for automotive...

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Proceedings of the 1997 International Conference on solid-state sensors and Actuators. Part 2 (of 2)

作者： Ohlckers, Per Holm, Reidar Jakobsen, Henrik Kvisteroy, Terje Kittilsland, Gjermund Nese, Martin Nilsen, Svein M. Ferber, Alain SensoNor Horten Norway

In the project 'IRMA-EU' (IRMA: Integrated Resonant Accelerometer Microsystem for Automotive applications), a project sponsored by the European Commission under ESPRIT, SensoNor and project partners Autoliv and SINTEF are developing a resonant structure two-chip accelerometer silicon microsystem for automotive applications, the SA30: Crash sensor for front impacts, with range ± 50g. The project is focusing on the development of key process technologies, product designs and manufacture of functional prototypes. The IRMA project is coordinated with other activities performed by the partners to cover all aspects of research and technology development as well establishment of high volume production capabilities needed for successful product innovation of this new generation of crash sensors. The sensing principle is an acceleration sensitive resonant structure, with an ASIC for resonance control and signal conditioning. Prototypes in silicon of both the sensor chip and the ASIC chip have confirmed the feasibility of the concept, and ramp up to high volume production has now started.

关键词： Accelerometers

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development of micromachined switches with increased reliability

Development of micromachined switches with increased reliabi...

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Proceedings of the 1997 International Conference on solid-state sensors and Actuators. Part 2 (of 2)

作者： Hiltmann, Kai M. Schmidt, Bertram Sandmaier, Hermann Lang, Walter Hahn-Schickard Soc Inst of Micro- and Informationtechnology Villingen-Schwenningen Germany

By micromachining of silicon and glass, an electrical switch with low-resistance metal contacts was made. The switch is aimed at applications as a binary pressure sensor and to replace conventional push-button switches. First measurements on switches yielded electrical lifetimes over 105 cycles and contact resistance clearly below 1 Ω.

关键词： Electric switches

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Automotive applications for micromachining

Automotive applications for micromachining

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Conference on Micromachining and Microfabrication Process Technology III

作者： Sparks, DR Chang, SC Delco Electronics Corp. (United States) General Motors Research and Development Ctr. (United States)

ISBN: (纸本)0819426555

High volume silicon micromachining has been employed by the automotive industry for 20 years. This paper will examine past, current and future applications of MEMS to the automobile. Both sensor and the application of micromachining to other automotive areas will be covered. Technologies such as wet and plasma etching, wafer bonding, LIGA, circuit integration and packaging will be discussed.

关键词： micromachine pressure sensor accelerometer angular rate sensor valve nozzle LIGA wafer bonding etching silicon

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development of a modal analysis accelerometer based on a tunneling displacement transducer

Development of a modal analysis accelerometer based on a tun...

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Proceedings of the 1997 International Conference on solid-state sensors and Actuators. Part 2 (of 2)

作者： Scheeper, Patrick R. Reynolds, J.Kurth Kenny, Thomas W. Bruel & Kjaer Sound and Vibration Measurement A/S Naerum Denmark

An accelerometer based on a tunneling displacement transducer is presented. The sensor is fabricated using silicon micromachining techniques for fabrication of the seismic mass, the suspension beams and the tunneling tip and electrodes. The demonstrated accelerometer shows linear response from 0.2 mg to 20 g (159 Hz), and shows a 1 kHz bandwidth. The electron tunneling accelerometer can be used in applications where both a high dynamic range and a reasonable bandwidth are required.

关键词： Accelerometers

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Giant magnetoimpedance effect in soft magnetic wires for sensor applications

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sensorS AND ACTUATORS A-PHYSICAL 1997年第1-3期59卷 20-29页

作者： Vazquez, M Knobel, M Sanchez, ML Valenzuela, R Zhukov, AP CSIC INST CIENCIA MATLAS ROZASMADRIDSPAIN UNICAMP LMBTDFESCMIFGWBR-13083970 CAMPINASSPBRAZIL UNIV OVIEDO DEPT FISE-33007 OVIEDOSPAIN NATL AUTONOMOUS UNIV MEXICO INST MATMEXICO CITY 04510DFMEXICO CHERNOGOLOVKA SOLID STATE PHYS INST CHERNOGOLOVKA 142432MOSCOW DISTRICTRUSSIA

The giant magneto-impedance effect (GMI) consists of the large relative change of the impedance (up to around 300%) observed in magnetically very soft ribbon and wire alloys under the application of de magnetic fields (units of kA m(-1)), The phenomenology of the GMI effect is firstly described including a discussion about its origin which mainly lies in the classical skin-effect. An alternative approach to GMI phenomena considering equivalent circuits is also introduced. The main requirements to detect GMI is to count on a sample with very large circular susceptibility and reduced resistivity provided the frequency of the ac current flowing along the sample (necessary to evaluate the impedance) is high enough (roughly above 0.1 MHz for most samples here considered). The dependence on de magnetic field, mechanical stresses and particularly on thermal treatments resulting in the induced magnetic anisotropies or in the devitrification of amorphous samples into a nanocrystalline structure are reviewed. First results on GMI in glass-coated amorphous microwires are also reported. The use of the GMI as a tool for studying the inner circular magnetization process or for evaluating the magnetostriction is introduced. Finally, a description on various aspects regarding the development of magnetic field, current, proximity and stress sensor applications is presented. (C) 1997 Elsevier Science S.A.

关键词： soft magnetic materials amorphous wires magnetic sensors

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Photoactivatable silanes for the site-specific immobilization of antibodies

Photoactivatable silanes for the site-specific immobilizatio...

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1st SPIE Conference on Microfabricated and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental applications

作者： Conrad, DW Davis, AV Golightley, SK Bart, JC Ligler, FS Naval Research Lab. (United States) GEO-CENTERS Inc. (United States) American Society for Engineering Education (United States)

ISBN: (纸本)0819423890

The development of techniques which can be used for the discrete immobilization of multiple antibodies on solid supports has important applications in the areas of clinical diagnostics, drug discovery, and biosensor development.(1-9) While photolithography has provided many elegant methods for generating spatially-resolved reactive surface functionalities, the problem of nonspecific adsorption of proteins which occurs during sequential immobilization steps continues to hamper the development of antibody sensing arrays. This nonspecific adsorption prevents the establishment of unique and individually-addressable binding sites on the substrate surface. In as effort to solve this problem, we have synthesized and characterized a series of photoactivatable silanes which can be used for the tight-directed attachment of antibodies to solid supports. These compounds produce amine-reactive functional groups upon irradiation with UV light. The first silane derivative prepared yielded a relatively hydrophobic surface when it was used for substrate modification. The resultant surface exhibited a high degree of nonspecific protein adsorption even in the absence of light activation. We therefore decided to synthesize a more hydrophilic analog. This second derivative displayed low nonspecific protein binding even in the absence of detergents or protein blocking agents. We have used this second compound to discretely immobilize four different IgG antibodies (each directed against a different antigen) on several hydroxyl-bearing substrates. Antigen binding experiments using fluorescent and I-125-labeled antigens have confirmed that the immobilized antibodies retain their functionalities.

关键词： antibody immobilization array biosensor immunochemical sensor photoactivatable photoimmobilization photopatterning silane

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Adaptive Antenna arrays Applied to Position Location

Adaptive Antenna Arrays Applied to Position Location

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作者： Donald F. Breslin Virginia Polytechnic Institute and State University

学位级别：硕士

Wireless communication has enjoyed explosive growth over the past decade. As demands for increased capacity and quality grow, improved methods for har- nessing the multipath wireless channel must be developed. The use of adaptive antenna arrays is one area that shows promise for improving capacity of wireless systems and providing improved safety through position location capabilities. These arrays can be used for interference rejection through spatial ltering, position location through direction nding measurements, and developing im- proved channel models through angle of arrival channel sounding measurements. This thesis provides an overview of the technical challenges involved in position location of wireless users and details the hardware development of a multi- sensor testbed at the Mobile and Portable Radio Research Group at Virginia Tech. This testbed is to be used for position location experiments as well as a host of other adaptive signal processing applications.

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10 mu m thin GaAs membrane manufactured by nonselective etching

10 mu m thin GaAs membrane manufactured by nonselective etch...

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Conference on Micromachining and Microfabrication Process Technology III

作者： Muller, A Petrini, I Avramescu, V Iordanescu, S Marcelli, R Fogllieti, V Dragoman, M National Institute Research and Development of Microtechnology 72996 Bucharest Erou Iancu Nicolae 32B Romania CNR Solid State Electronics Institute 00156 Roma Via Cineto Romano 42 Italy

ISBN: (纸本)0819426555

The aim of this paper is to determinate an optimum nonselective etching solution in order to manufacture an as thin as possible, uniform and high quality GaAs membrane. Three different etching systems in various proportions of the components were analysed. A high quality 10 mu m thin GaAs membrane was obtained using the [1(H3PO4)] : [1(CH3OH)] : [3(H2O2)] etching solution. The micromachined GaAs membranes are manufactured to be used as support for microwave circuits as well as in high temperature sensor applications.

关键词： gallium arsenide micromachining membrane etching microwave circuits sensors

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