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International Conference on solid state sensors and Actuators (TRANSDUCERS)

作者： P.R. Scheeper J.K. Reynolds T.W. Kenny Brüel and Kjær Sound and Vibration Measurement A S Naerum Denmark Mechanical Engineering Department Design Division University of Stanford USA

An accelerometer based on a tunneling displacement transducer is presented. The sensor is fabricated using silicon micromachining techniques for fabrication of the seismic mass, the suspension beams and the tunneling tip and electrodes. The demonstrated accelerometer shows linear response from 0.2 mg to 20 g (159 Hz), and shows a 1 kHz bandwidth. The electron tunneling accelerometer can be used in applications where both a high dynamic range and a reasonable bandwidth are required.

关键词： Modal analysis Accelerometers Tunneling Bandwidth Transducers Silicon Micromachining Fabrication Electrodes Electrons

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Finite element simulation strategies for microfluidic devices with chemical reactions

Finite element simulation strategies for microfluidic device...

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International Conference on solid state sensors and Actuators (TRANSDUCERS)

作者： I.-M. Hsing R. Srinivasan M.P. Harold K.F. Jensen M.A. Schmidt Massachusetts Institute of Technology Cambridge MA USA DuPont Central Research and Development Wilmington DE USA

We present a general Galerkin finite element method (GFEM) based model for simulation of two- and three-dimensional (2- and 3-D) fluid flow, thermal fields, and chemical species concentrations in microfluidic devices. This approach incorporates a flexible mesh generation procedure that enables us to explore different microfluidic device designs for chemical processing and chemical sensor applications. Simulation results are validated by comparisons with experimental data for a microchemical device. The good agreement between simulations and experiments demonstrates the ability of FEM solutions to provide accurate simulations of microfluidic chemical devices.

关键词： Finite element methods Microfluidics Chemical vapor deposition Chemical sensors Inductors Chemical technology Biological system modeling Mesh generation Chemical processes Toxic chemicals

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solid state sensor arrays and CCD Cameras

Solid State Sensor Arrays and CCD Cameras

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solid state sensor arrays and CCD Cameras

ISBN: (纸本)081942028X

The proceedings contains 38 papers. Following topics are discussed: solid state sensor arrays development and applications;new devices;new technology;cameras and systems;cameras for digital photography;and cameras for scientific imaging. Some of the specific papers discussed are: scientific CMOS CID imagers;wide-dynamic-range APS star tracker;megapixel resolution PC digital still camera;and ultraviolet digital imaging for nuclear safeguards.

关键词： Optical sensors

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Energy selective imaging systems based on monolithic CdZnTe arrays operated in a high speed counting mode

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 1996年第1-2期380卷 323-330页

作者： Polichar, R Schirato, R Shreve, D Reed, J Polichar, A Science Applications International Corporation 4161 Campus Point Court San Diego CA 92121 USA

The excellent inherent energy resolution of CdZnTe and the evolution of techniques to fabricate this material into large, multi-pixel monolithic arrays, have encouraged the development of practical, multi-function, x-ray imaging systems. These systems are capable of simultaneously recording the x-ray image of an object while identifying the average atomic number of each of its internal components. The primary improvement of this new sensor technology is the ability to break down the detected radiation into energy bins after passing through the sample. The reduced fraction of scattered radiation recorded in a collimated, linear scanner image makes it possible to separate differing energy regions of the beam with a single bremsstrahlung source and a single, multiple discriminators. Such imaging systems have immediate applications in security and contraband detection, as well as a number of specialized uses in medical imaging. This review covers recent work carried out at SAIC in the development of these systems including the characterization of the detector devices, the requirements for the electronic readout system and a number of examples of images taken with prototype systems. Studies have been conducted with examples of both linear and area arrays using relatively simple processing electronics. Problems of incomplete charge collection and energy separation are discussed along with potential solutions to these issues. Imaging measurements made with these systems exhibit noise limits set by the available statistics and excellent point spread functions. Practical limitations in the useful pixel resolution approach 0.1 mm with stopping thickness of several millimeters. This suggests that high resolution scanners with x-ray tube potentials of several hundred kilovolts are feasible with this technology.

关键词： x-ray imaging dual energy position sensitive solid state detector array room temperature cadmium zinc telluride

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Quasianalog accelerometer using microswitch array

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sensorS AND ACTUATORS A-PHYSICAL 1996年第1-3期54卷 574-578页

作者： Noetzel, J Tonnesen, T Benecke, W Binder, J Mader, G SIEMENS AG AUTOMOT SYST GRP D-93049 REGENSBURG GERMANY

This paper describe the development of a quasianalog accelerometer which uses an array of acceleration switches. The investigations are based on results or fabricated and evaluated single-microswitch sensors. The new acceleration sensor concept combines the advantage of high EMI immunity and simple signal pre-conditioning circuitry. Important characteristics of the laterally moving cantilevers, such as resonance frequency and switching time, can he determined by a single mask. First test devices have been fabricated by the use of a special sacrificial-layer additive technology. This Microform technology combines UV patterning of very thick photoresist layers and moulding of the resulting patterns by electroplated metals. This technology is used for the fabrication of laterally driven microswitches, each having a different acceleration threshold. tinder an applied acceleration, the cantilever beam deflects laterally and closes a contact with an electrode. With an electrode on each side of the cantilever, two directions of acceleration can be measured. A simulation model has been developed which enables the design of quasianalog sensors for different applications. Different layouts are created to investigate the basic characteristics. The simulation results are verified on a shaker using the fabricated lest structures of a single-microswitch sensor.

关键词： accelerometers arrays microswitches

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Quasianalog accelerometer using microswitch array

Quasianalog accelerometer using microswitch array

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8th International Conference on solid-state sensors and Actuators (Eurosensors IX)

作者： Noetzel, J Tonnesen, T Benecke, W Binder, J Mader, G SIEMENS AG AUTOMOT SYST GRP D-93049 REGENSBURG GERMANY

关键词： accelerometers arrays microswitches

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High-power 2-um diode-pumped Tm:YAG laser

High-power 2-um diode-pumped Tm:YAG laser

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solid state Lasers V

作者： Beach, Raymond J. Sutton, Steven B. Honea, E.C. Skidmore, Jay A. Emanuel, Mark A. Lawrence Livermore Natl. Lab. Livermore CA USA

ISBN: (纸本)0819420727

Using a scalable diode end-pumping technology developed at Lawrence Livermore National Laboratory we have demonstrated a compact Tm:YAG laser capable of generating greater than 50 W of cw 2 micrometer laser output power. The design and operational characteristics of this laser, which was built originally for use in assessing laser surgical techniques, are discussed. The 2 micrometer radiation produced by the 3F4 - 3H6 transition of Tm3+ has many practical applications because it is strongly absorbed by water and also because it is an 'eye-safe' wavelength. The strong absorption of 2 micrometer radiation by water makes this transition a very attractive candidate for performing laser surgical procedures as most tissue types are predominately composed of liquid water. The fact that 2 micrometer radiation is considered 'eye-safe' makes this transition attractive for laser range finding and remote sensing applications where other laser wavelengths could pose a safety hazard. At sufficiently high doping densities, Tm3+ exhibits a beneficial two-for-one quantum pump efficiency enabling well developed AlGaAs laser diode arrays to be used as efficient excitation sources. Many applications requiring 2 micrometer laser radiation such as remote sensing, laser radar, anti sensor, sensor spoofing, and OPO pumping have driven the development of diode pumped all solid state TM3+ laser systems because of their potential for efficiency, compactness, and ruggedness. Here we focus on Tm3+:YAG and the scalable diode end-pumping technology developed at LLNL which enables higher average power operation of diode pumped Tm3+ laser systems than has previously been possible. To date we have demonstrated cw operation of this laser to power levels of 51 W. The end-pumping technology used is the same as was previously used to demonstrate a 100 mJ Q-switched Nd:YLF laser.

关键词： solid state lasers

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CCD controller requirements for ground-based optical astronomy

CCD controller requirements for ground-based optical astrono...

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solid state sensor arrays and CCD Cameras

作者： Leach, Robert W. San Diego State Univ. San Diego CA USA

ISBN: (纸本)081942028X

Astronomical CCD controllers are being called upon to operate a wide variety of CCDs in a range of ground-based astronomical applications. These include operation of several CCDs in the same focal plane (mosaics), simultaneous readout from two or four corners of the same CCD (multiple readout), readout of only a small region or number of regions of a single CCD (sub-image or region of interest readout), continuous readout of devices for drift scan observations, differential imaging for low contrast polarimetric or spectroscopic observations and very fast readout of small devices for wavefront sensing in adaptive optics systems. These applications all require that the controller electronics not contribute significantly to the readout noise of the CCD, that the dynamic range of the CCD by fully sampled (except for wavefront sensors), that the CCD be read out as quickly as possible from one or more readout ports, and that considerably flexibility in readout modes (binning, skipping and signal sampling) and device format exist. A further requirement imposed by some institutions is that a single controller design be used for all their CCD instruments to minimize maintenance and development efforts. A controller design recently upgraded to meet these requirements is reviewed. It uses a sequencer built with a programmable DSP to provide user flexibility combined with fast 16-bit A/D converters on a programmable video processor chain to provide either fast or slow readouts.

关键词： Cameras

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Transition Region and Coronal Explorer Mission

Transition Region and Coronal Explorer Mission

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IEEE Conference on Aerospace applications

作者： I.J. Burt Goddard Space Flight Center NASA Greenbelt MD USA

The Transition Region and Coronal Explorer (TRACE) mission is the fourth mission in the Small Explorer (SMEX) program series at the National Aeronautics and Space Administration's Goddard Space Flight Center. The primary objective of the TRACE mission is to explore the connections between the fine scale magnetic fields in the solar surface and features in the solar photosphere, chromosphere, transition region, and corona. The TRACE spacecraft, including the instrument, weighs 250 kilograms, uses 200 watts of power, and will cost approximately 35 million dollars for the entire mission. It will launch into a Sun-synchronous Low Earth Orbit (LEO) in September 1997 and collect movie-like images of the Sun with one are second spatial and 1 second temporal resolution; these images will be made available on the Internet daily. This paper shows NASA's approach to small spacecraft development It discusses some trades in the design of each subsystem to accommodate instrument and spacecraft heritage as well as new mission requirements. Topics include: a solid state Command and Data Handling (C&DH) system, solid state memory using 20 Megabyte modules approximately 1"/spl times/1"/spl times/0.2" each; a fully digital Attitude Control System (ACS); a guide telescope fine error sensor for spacecraft attitude and control as well as image motion compensation to better than are second levels. Adaptations in ground systems and operations are also included as well as the systems engineering approach.

关键词： Space vehicles Instruments Low earth orbit satellites solid state circuits Space missions Magnetic fields Corona Costs Sun Spatial resolution

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Microfabricated potentiometric solid-state ion/biosensor arrays

Microfabricated potentiometric solid-state ion/biosensor arr...

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作者： Liu, Dong University of Michigan

学位级别：Ph.D.

There has been great interest in the development of solid-state potentiometric ion/biosensors, in which ion-selective polymer membranes are cast directly on solid-state conducting sites with no internal reference electrolyte. Microfabricated solid-state sensor arrays based on silicon wafers can be used either as single-use disposable devices or as reversible multisensing electrochemical detectors in the flow-through systems. In this work, a novel four-site potentiometric solid-state ion sensor array (prepared to detect $\rm K\sp+, NH\sb4\sp+, Ca\sp{2+}$ and pH) was fabricated by screen-printing appropriate ionophore doped polymer membranes on a silicon wafer with Ag-epoxy as the inner conductor. The resulting sensor array was employed as a detector in a flow-injection analysis system. The use of silicone rubber and polyurethane as polymer matrices resulted in much better membrane adhesion to the silicon wafer when compared to conventional poly(vinyl chloride) films. The EMF stability of potentiometric solid-state sensors is crucial for practical analytical applications. EMF stability was greatly improved via the incorporation of a silver-ligand complex into the ion-selective polymer matrix. Different types of plasticizers and polymer water uptake were also found to contribute to the initial potential drift (from dry to wet) of the solid-state sensors. With optimized plasticizer (2-ethylhexyl diphenyl phosphate) and a well-established electron transfer pair ((1,3-bis(diphenylphosphino)-propane) silver(I) nitrate) at the polymer membrane/Ag$\sp0$ conductor interface, a very stable potentiometric ion-selective response was achieved. A new asymmetric membrane system with improved surface properties for preparation of conventional and solid-state type potentiometric biosensors is also reported. The amine functional groups on the modified ion-selective membrane surface can be used advantageously to covalently attach bioreagents. Other enzyme immobilization methods, such a

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