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development of Low Cost Rapid Fabrication of Sharp Polymer Microneedles for In Vivo Glucose Biosensing applications

ECS JOURNAL OF solid state SCIENCE AND TECHNOLOGY 2015年第10期4卷 S3053-S3058页

作者： Barrett, Colm Dawson, Karen O'Mahony, Conor O'Riordan, Alan Natl Univ Ireland Univ Coll Cork Tyndall Natl Inst Cork Ireland

New approaches to enable more effective management of diabetes mellitus, such as continuous glucose monitoring are being developed both to prevent unstable episodes of hypo or hyper glycaemia and also to provide an improved user experience. One emerging approach to realize these requirements is to fabricate a minimally invasive transdermal sensor for the direct in vivo detection of glucose in the interstitial fluid. Microneedles - sharp, microscopic structures measuring less than 1 mm in length - have been previously employed to allow painless penetration of the stratum corneum for delivery of drugs and vaccines. In this work we present, ultra sharp gold coated polymer microneedle arrays (sub micron tip radii) which are fabricated using a low cost polymer replication approach. Critical dimensions of the microneedle arrays are characterized using a combination of optical and scanning electron microscopies. Fabricated microneedle devices are characterized by cyclic voltammetry to explore functionality. The voltammetric detection of glucose is performed using ferrocene monocarboxylic acid as an oxidising mediator in the presence of glucose oxidase. The biosensor can be applied to the quantification of glucose in the physiological range (2 - 13.5 mM). The sensors demonstrate high selectivity towards glucose with negligible interference from other oxidizable species including uric acid, ascorbic acid, mannose, fructose, salicylic acid (Aspirin) and acetaminophen (Paracetamol). This demonstrates potential future use of these microneedle devices for in vivo glucose detection. (C) The Author(s) 2015. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution Non-Commercial No Derivatives 4.0 License (CC BY-NC-ND, http://***/licenses/by-nc-nd/4.0/), which permits non-commercial reuse, distribution, and reproduction in any medium, provided the original work is not changed in any way and is properly cited. F

关键词： Glucose

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High-speed, high-sensitivity, low-noise scientific CMOS image sensors

High-speed, high-sensitivity, low-noise scientific CMOS imag...

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Conference on Microelectronics - Design, Technology and Packaging

作者： Kleinfelder, S Univ Calif Irvine Irvine CA 92697 USA

ISBN: (纸本)0819451673

Image sensors for scientific applications face unusually demanding performance requirements for speed, sensitivity, noise, dynamic range and data throughput. Dynamic proton radiography, for example, requires both extremely high frame rates (multi-MHz) and high dynamic range (similar to80 dB). Electron microscopy, particle physics, nuclear science and astrophysics applications requires high sensitivity and low noise for single-photon/single charged particle efficiency, often in extremely large (>100 M-pixel) arrays with tremendous sustained throughput (>50 G-pixels/s) and radiation-tolerance. This paper covers recent research results that extend standard CMOS image sensor performance in these areas. Signal to noise ratios as high as 90 dB have been achieved using a new, low-overhead, column-level active reset technique. This image sensor achieves output noise levels of similar to45 microvolts, rms, without the use of correlated double sampling. Enhanced sensitivity for single-photon detection has been obtained by using an epitaxial silicon region as a higher cross-section CMOS sensor, with low-capacitance diode or large-area pbotogate charge collection. This development has made possible the use of standard 0.25 micrometer digital CMOS sensor arrays in place of expensive hybrid high-resistivity silicon sensor focal plane arrays plus CMOS readout circuit combinations. High-speed transient image sensors with frame rates as high as 10 M-frames/s, combined with 13-bit resolution, has been achieved using on-focal-plane frame storage. Fabricated in a standard digital 0.35 micrometer digital CMOS technology, the latter device includes a photodetector, a charge-integrating amplifier and an array of 64 sample circuits per pixel. Finally, a 100+ M-frames/s solid-state "streak camera" prototype is discussed which, in conjunction with the possible use of 3-D packaging techniques, may yield a sensor array capable of acquiring images at rates exceeding 10 T-pixels/s.

关键词： high-speed low noise active reset CMOS image sensor streak camera

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Quasianalog accelerometer using microswitch array

Quasianalog accelerometer using microswitch array

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8th International Conference on solid-state sensors and Actuators (Eurosensors IX)

作者： Noetzel, J Tonnesen, T Benecke, W Binder, J Mader, G SIEMENS AG AUTOMOT SYST GRP D-93049 REGENSBURG GERMANY

This paper describe the development of a quasianalog accelerometer which uses an array of acceleration switches. The investigations are based on results or fabricated and evaluated single-microswitch sensors. The new acceleration sensor concept combines the advantage of high EMI immunity and simple signal pre-conditioning circuitry. Important characteristics of the laterally moving cantilevers, such as resonance frequency and switching time, can he determined by a single mask. First test devices have been fabricated by the use of a special sacrificial-layer additive technology. This Microform technology combines UV patterning of very thick photoresist layers and moulding of the resulting patterns by electroplated metals. This technology is used for the fabrication of laterally driven microswitches, each having a different acceleration threshold. tinder an applied acceleration, the cantilever beam deflects laterally and closes a contact with an electrode. With an electrode on each side of the cantilever, two directions of acceleration can be measured. A simulation model has been developed which enables the design of quasianalog sensors for different applications. Different layouts are created to investigate the basic characteristics. The simulation results are verified on a shaker using the fabricated lest structures of a single-microswitch sensor.

关键词： accelerometers arrays microswitches

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A 47.14-$\mu\text{W}$ 200-MHz MOS/MTJ-Hybrid Nonvolatile Microcontroller Unit Embedding STT-MRAM and FPGA for IoT applications

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IEEE JOURNAL OF solid-state CIRCUITS 2019年第11期54卷 2991-3004页

作者： Natsui, Masanori Suzuki, Daisuke Tamakoshi, Akira Watanabe, Toshinari Honjo, Hiroaki Koike, Hiroki Nasuno, Takashi Ma, Yitao Tanigawa, Takaho Noguchi, Yasuo Yasuhira, Mitsuo Sato, Hideo Ikeda, Shoji Ohn, Hideo Endoh, Tetsuo Hanyu, Takahiro Tohoku Univ Res Inst Elect Commun Lab Brainware Syst Sendai Miyagi 9808577 Japan Tohoku Univ Ctr Spintron Integrated Syst Sendai Miyagi 9808577 Japan Tohoku Univ Ctr Innovat Integrated Elect Syst Sendai Miyagi 9808577 Japan Tohoku Univ Res Inst Elect Commun Sendai Miyagi 9808577 Japan Tohoku Univ Ctr Innovat Integrated Elect Syst Sendai Miyagi 9808572 Japan Tohoku Univ Ctr Spintron Integrated Syst Grad Sch Engn Sendai Miyagi 9808572 Japan Tohoku Univ Ctr Spintron Integrated Syst Sendai Miyagi 9808572 Japan Tohoku Univ Ctr Spintron Res Network Sendai Miyagi 9808572 Japan Tohoku Univ Res Inst Elect Commun Sendai Miyagi 9808572 Japan Tohoku Univ WPI Adv Inst Mat Res Sendai Miyagi 9808577 Japan Tohoku Univ Ctr Spintron Res Network Sendai Miyagi 9808577 Japan Tohoku Univ Grad Sch Engn Sendai Miyagi 9808572 Japan

The demand for energy-efficient, high-performance microcontroller units (MCUs) for the use in power-supply-critical Internet-of-Things (IoT) sensor-node applications has witnessed a substantial increase. In response, research concerning the development of several low-power-consuming MCUs has been actively pursued. The performance level of such MCUs, however, has not been sufficient, thereby rendering them non-feasible for the use in IoT sensor-node applications that process a large number of received signals immediately followed by extraction of valuable information from them to limit data transferred to a data center. To realize next-generation IoT systems based on intelligent sensor-node application, ultra-low-power high-performance MCUs need to be developed. This paper presents an ultra-low-power-consuming and high-performance MCU configuration based on the spintronics device technology, using which all modules are non-volatilized, and any wasteful power consumption is eliminated by controlling the power supplied independently to each module. By incorporating a reconfigurable accelerator module, for performing various signal-processing procedures in sensor-node applications, and a memory controller, which can speed up the entire system by relaxing the data-transfer bottleneck of logic and memory, the proposed MCU configuration achieves ultra-low power consumption and high-speed operation. As confirmed by the results obtained via measurements performed on a fabricated chip, the proposed MCU design, on average, consumed 47.14 $\mu \text{W}$ power at an operating frequency of 200 MHz. This corresponds to the world's highest signal-processing performance and energy efficiency of highly functional IoT sensor nodes powered by harvested energy

关键词： Nonvolatile memory Spintronics Performance evaluation Magnetic tunneling Central Processing Unit Memory management Standards Energy harvesting field-programmable gate arrays Internet of Things magnetic tunnel junction microcontroller unit (MCU) spin-transfer-torque magnetoresistive random access memory (STT-MRAM)

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Thin-film microsensors for high-temperature gas detection arrays

Thin-film microsensors for high-temperature gas detection ar...

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作者： Ward, Benjamin James Case Western Reserve University

学位级别：Ph.D.

Improvements in the control of engine and power generator exhausts, fire detection, and environmental monitoring can be achieved through the development of improved sensing methods. This study focused on the development of high temperature gas sensor arrays for use in these applications. sensors based on metal oxide resistors, specifically variations of tin oxide resistors and electrochemical cells were produced using microfabrication and micromachining techniques. The use of these techniques resulted in small, rugged sensors which can be produced in a repeatable manner. These sensors were designed to be usable in high temperature engine exhaust streams, but can be used in a wide range of environments due to the integration of a heater and temperature detector on chip for temperature control. Tin oxide thin films were deposited using a sol-gel technique. Three types of tin oxide sensing films were studied, including undoped tin oxide, platinum doped tin oxide, and a copper surface treated (by dip coating) tin oxide. These devices showed very different sensitivities to test gases in laboratory calibrations and were tested in several exhaust and fire-simulation systems. Two types of electrochemical cell devices were studied, including yttria stabilized zirconia (YSZ) for oxygen detection and a NASICON (sodium super ionic conductor)/sodium carbonate system for carbon dioxide detection. These sensors were operated in amperometric, diffusion limited mode. Both were produced on a generic “platform” for solid state, amperometric electrochemical microsensors. Laboratory testing showed sensitivity of these sensors to the gases of interest. Three separate designs of the YSZ sensor were investigated. Output currents on the order of 30 nA in nitrogen and 80 nA in air were noted. The diffusion barrier was not optimum for the desired linear change in output current compared to oxygen concentration. The NASICON based sensor included the novel processing step of electron beam evapo

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Design and Implementation of QCM Virtual Sensing Schemes for Analyses of Volatile Organic Compounds

Design and Implementation of QCM Virtual Sensing Schemes for...

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作者： Nicholas Colby Speller Louisiana State University and Agricultural and Mechanical College

学位级别：博士

sensor arrays have evolved as powerful approaches for providing detection and discrimination of volatile organic compounds (VOCs) as required across numerous analytical applications. Such systems typically comprise a number of cross reactive sensor elements, which generate analyte specific response patterns upon exposure to VOCs, and are known as multisensor arrays. When evaluated using statistical methods, these response patterns facilitate classification of VOCs. As an alternative, a single dynamically operated sensor could also be used to generate analyte specific response patterns. This approach is known as a virtual sensor array (VSA) and can exhibit significant advantages when compared to MSAs. Some advantages include lower power consumption, sensor drift, material cost, and experimental preparatory time. Furthermore, several dynamically operated sensors could be used in tandem (using the MSA and VSA scheme in a complementary fashion) to fabricate virtual multisensor arrays (V-MSAs). Such systems would exhibit greater data density than either the MSA or VSA, and are promising for samples that are particularly challenging to discriminate. Among the various systems utilized for VOC discrimination, sorption based systems hold considerable promise because they are simple and inexpensive yet highly effective. This dissertation is focused on the development of array sensing schemes using ionic liquids (ILs), a group of uniform materials based on organic salts (GUMBOS), and binary blends of either IL or GUMBOS with polymer as recognition elements and the quartz crystal microbalance (QCM) as the transducer. Towards this end, ILs, which are defined as organic salts with melting points below 100 °C, and group of uniform materials based on organic salts (GUMBOS) which extend the melting range of ILs to 250 °C to encompass similar solid phase salts, were used to design the first examples of QCM based VSAs, and V-MSAs, for pure VOC and complex mixture analyses. Furthermore

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2014 IEEE sensors applications Symposium, SAS 2014 - Proceedings

2014 IEEE Sensors Applications Symposium, SAS 2014 - Proceed...

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2014 9th IEEE sensors applications Symposium, SAS 2014

ISBN: (纸本)9781479921805

The proceedings contain 73 papers. The topics discussed include: wide-slot antenna for breast imaging applications;measurement uncertainties in differential radar applied to breast imaging;contactless determination of gas concentration and pressure based on a low jitter mmWave FMC radar;development of a frequency-shifted feedback fiber laser at 777.5 nm for range sensing applications;2-D vector field visualization of corrosion in a small-bore piping system using bobbin-type integrated hall and GMR sensors arrays;non-destructive evaluation of far-side corrosion around the multi-layered rivet by using the solid-state hall sensor array;modeling, quantification, optimization - energy efficiency in distributed, embedded systems;and energy efficient handling of big data in embedded, wireless sensor networks.

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Recent advances in biologically sensitive field-effect transistors (BioFETs)

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ANALYST 2002年第9期127卷 1137-1151页

作者： Schöning, MJ Poghossian, A Univ Appl Sci Aachen D-52428 Julich Germany Forschungszentrum Julich Inst Thin Films & Interfaces D-52425 Julich Germany

Thirty years have elapsed since the invention of the ISFET by Bergveld. Since that time, various types of BioFETs have been developed using different biological recognition elements starting with enzymes and immunological species through DNA molecules to living cells and even living organisms. The study of the current state of BioFETs reveals that some BioFETs, like EnFETs are at a well-developed stage, whereas other BioFETs such as GenFETs and beetle/chip FETs are in the initial stages of development. There are still a number of fundamental and technological problems that must be overcome, before the first reliable BioFET-based bioanalytical microsystem will appear on the market. Therefore, intensive interdisciplinary research and cooperation of specialists from different disciplines is still required, not only in the field of biotechnology and bioengineer- ing but also in related disciplines, like informatics, solid-state physics, microtechnology, genetics as well as specific tech- niques such as sensor integration and packaging, interfacing circuits, etc. Hence, future prospects for BioFET developments can be expected in the following directions: (i) BioFETs utilising intact biological receptors (ion channel receptors, binding proteins, etc.) that bind specific drugs and reagents in such a way that they produce a conformational change in the protein structure. This conformational change, in turns, triggers a cellular response, (e.g., the opening of an ion channel of the membrane (so-called ion-channel switch biosensor); (ii) ISFET-based DNA chips can be considered as a new tool for the simultaneous analysis of thousands of nucleic acids with a broad area of potential applications in biomedical research and clinical diagnostics, genomics, drug screening, environmental monitor- ing and food industry. They combine both the possibility of direct DNA hybridisation detection without the use of labelled probes and the large integration ability of these active microelect

关键词： Glucose Oxidase chemical analysis micro total analysis systems Field effect transistors Biosensors signal acquisition biological organs hybrid systems Electronic Nose Oxygen electrodes sensor arrays Si technology

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High resolution linear arrays

High resolution linear arrays

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solid-state Imagers and Their applications 1985

作者： Bosiers, Jan Vermeiren, Jan Sevenhans, Jan Interuniversity Microelectronics Center kapeldreef 75 LeuvenB3050 Belgium Sachs-Freeman Associates Inc BowieMD20715 United States

This paper describes the methodology, which is used in IMEC for the realization of very high resolution linear image sensors. The key elements in design and processing are the use of the DEPLI-sensor principle, a quadrilinear read-out approach and the use of p-p+ epimaterial. The feasibility of these principles are demonstrated on devices with a pitch of 8,6,5 and 4 urn and with a number of pixels ranging from BOO to 4096. A standard triple poly, buried channel process is used for the fabrication of the devices. A charge transfer inefficiency of better than 1.E-5 is measured and a data rate of over 5 MHz can be achieved. The dark current is less than 2 nA/cm2, the responsivity equals 0.36 A/W at 700 nm wavelength and the non-uniformity is less than ± 5 % for all sensor types. © 1986 SPIE. All rights reserved.

关键词： Charge transfer

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Micro fiber optic sensor interrogation system for aerospace applications

Micro fiber optic sensor interrogation system for aerospace ...

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Micro-Nano-technology for Aerospace applications, CANEUS2006

作者： Xiao, Gao Zhi Mrad, Nezih Institute for Microstructrual Science National Research Council M-50 1200 Montreal Road Ottawa Ont. K1A 0R6 Canada Department of National Defence Air Vehicles Research Section National Defence Headquarters Ottawa Ont. K1A 0R6 Canada

ISBN: (纸本)0791837874

The emerging field of microsystems technology is enabling the innovative development of a micro optical fiber interrogation system for potential integration into air platforms structural health monitoring and management capabilities. Our efforts in such development is based on micron size optical waveguides using arrayed waveguide gratings (AWG) based demultiplexer for highly multiplexed fiber Bragg grating (FBG) sensor arrays. In this document, a proposed system concept, its operating principle and proposed interrogation methodology are presented. Initial results demonstrate the ability of the system to obtain measurement resolution of 1 pm or better (equivalent to 0.1°C for temperature sensing) and response time as short as two milli-second. Owing to the small size and ruggedness of AWG, it is potentially feasible to fabricate an all solid state (no moving parts), palm size, robust and high-resolution interrogation system that responds to air platform requirements. Copyright © 2006 by ASME.

关键词： Fiber optic sensors

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