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20.4 MEMS-Free 4096-Pixel CMOS E-Nose Gas-sensor Array with Molecular-Selective Metal-Organic-Framework Sensing and In-Pixel Thermodynamic Modulation for Fast sensor Regeneration

20.4 MEMS-Free 4096-Pixel CMOS E-Nose Gas-Sensor Array with ...

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IEEE International Conference on solid-state Circuits (ISSCC)

作者： Marco Saif Fuze Jiang Shao–Wei Lo Adam Wang Zhikai Huang Jiachen Wang Hangxing Liu Chih–Jen Shih Thomas Burger Hua Wang ETH Zürich Zürich Switzerland

ISBN: (数字)9798331541019

ISBN: (纸本)9798331541026

Accurate and real-time sensing of gas molecule species and concentrations is critical for a myriad of applications, including environmental protection, industry automation, public health monitoring, and bio-/chemical-security surveillance. For example, gas sensing in large chemical plants is crucial for safety and production efficiency, with ammonia (NH3) being particularly important due to its extensive use [1]. Electronic noses (e-noses) consist of a chemical sensor array with surface recognition modules for capturing specific or multi-species gas molecules followed by electronic signal acquisition and processing [2]. Despite decades of exploration [3]–[5], the development of e-noses is still in its early stages, and existing e-noses continue to face major challenges as: (1) limited selectivity on target molecules (2) poor sensor regeneration due to slow and incomplete gas desorption process, which can result in sensing memory effect, i.e., affecting low-trace gas detection due to prior exposure to high concentrations, (3) a small number of sensing nodes instead of a large array, also lacking in-pixel signal processing and data digitization [6], [7]. To address these issues, we present a monolithically integrated molecular specific metal-organic-frameworks (MOFs) CMOS e-nose sensor array with in-pixel fast capacitance-gas interfacing, readout, and data digitization with local temperature regulation and sensing. For demonstration, NiNi-Pyz MOFs have been employed to achieve NH3 specificity. In particular, the in-pixel temperature regulation can modulate the thermodynamic of NH 3 adsorption and desorption at the sensor interfaces, significantly improving the sensitivity and allowing rapid sensor regeneration.

关键词： Temperature sensors Thermodynamics Temperature distribution Array signal processing Surveillance Electronic noses Regulation sensors Surface treatment sensor arrays

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solid state sensor arrays: development and applications

Solid State Sensor Arrays: Development and Applications

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solid state sensor arrays: development and applications 1997

The proceedings contain 27 papers. The topics discussed include: greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs;charge-coupled-device fiber optic taper array x-ray detector for protein crystallography;experimental measurement of the variation in sensitivity within a single pixel of a CCD;CCD transfer method: standard for absolute performance of CCDs and digital CCD camera systems;modeling camera orientation and 3D structure from a sequence of images taken by a perambulating commercial video camera;first study of a flat vacuum image sensor with a field-emitter array;and new 1000x1000 frame transfer CCD camera for high-speed high-fidelity digital imaging.

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Recent trends in potentiometric sensor arrays-A review

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ANALYTICA CHIMICA ACTA 2010年第2期678卷 149-159页

作者： Bratov, A. Abramova, N. Ipatov, A. CSIC IMB CNM Barcelona 08193 Spain

Nowadays there exists a large variety of ion sensors based on polymeric or solid-state membranes that can be used in a sensor array format in many analytical applications. This review aims at providing a critical overview of the distinct approaches that were developed to build and use potentiometric sensor arrays based on different transduction principles, such as classical ion-selective electrodes (ISEs) with polymer or solid-state membranes, solid-contact electrodes (SCE) including coated wire electrodes (CWE), ion-sensitive field-effect transistors (ISFETs) and light addressable potentiometric sensors (LAPS) Analysing latest publications on potentiometric sensor arrays development and applications certain problems are outlined and trends are discussed (C) 2010 Elsevier B V All rights reserved

关键词： Potentiometric sensors sensor array Electronic tongue Multicomponent analysis

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Prototype of 2D direct x-ray a-SiN:H sensor array

Prototype of 2D direct x-ray a-SiN:H sensor array

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Conference on solid state sensor arrays - development and applications ii

作者： Popov, IA Van Doorselaer, G Van Calster, A De Smet, H Callens, F Boesman, E State Univ Ghent B-9000 Ghent Belgium

ISBN: (纸本)0819427411

Study of the possible use of a-SIN: H thin films for 2D direct x-ray sensor arrays lead to the development of simple prototype. The sensor array is a 100x100 array of simple cross-over silicon rich a-SiN:H thin film diodes with sizes 200x200 mu m formed on a 2" glass substrate. There are neither switching elements nor x-ray conversion layer involved which leads to extremely simple 2 mask processing for the whole array. Specific behavior of the a-SiN:H sensing diodes under x-ray irradiation requires special attention to be paid to the driving strategy and read out electronics.

关键词： amorphous silicon active matrix TFD x-ray sensor

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Cross-sensitivity evaluation of chemical sensors for electronic tongue: determination of heavy metal ions

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sensorS AND ACTUATORS B-CHEMICAL 1997年第1-3期44卷 532-537页

作者： Vlasov, Y Legin, A Rudnitskaya, A St Petersburg State Univ Dept Chem St Petersburg 199034 Russia

The development of the promising new field of sensor applications, multisensor arrays for liquid analysis based on the principles of the electronic tongue, implies some new demands on sensor material research and development. Stable and reproducible sensors with partial specificity and considerable cross-sensitivities to different components in solutions are of primary interest. solid-state potentiometric sensors, both crystalline and vitreous, are likely to be thr most promising ones for multisensor devices designed for long-term analytical application in natural and artificial complex media. The present paper deals with development or a method of evaluation of integral heavy metal cation sensitivity of solid-state sensors with special consideration of cross-sensitivity features. The method involves a comparative study of different sensor materials in individual component solutions using several criteria based on integral response parameters. The procedure scheme call be applied to evaluate cross-sensitivity of ally kind of potentiometric sensors for liquid media. (C) 1997 Elsevier Science S.A.

关键词： cross-sensitivity liquid media chemical sensors multisensor arrays

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Versatile building-block architecture for large area, high performance CCD imagers

Versatile building-block architecture for large area, high p...

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Conference on solid state sensor arrays - development and applications ii

作者： Theuwissen, A Beenhakkers, M Dillen, B Folkerts, HO Heyns, H Korthout, L Kreider, G Opmeer, P Peek, H Roks, E Rosner, H van der Sijde, A Vledder, F Philips Imaging Technol NL-5656 AA Eindhoven Netherlands

ISBN: (纸本)0819427411

A bouwblok (building-block) concept is described which allows one to fabricate several large area CCD image sensors from a single mask set. The size of the various imagers can differ both horizontally as well as vertically. The new method drastically reduces the development time and the associated cost of a new sensor. Because all imagers use of same basic pixel structure, the characteristics of new configurations can be fairly well predicted.

关键词： CCD imagers solid-state imaging modular concept mask stitching high performance imaging digital photography

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Trends in the development of solid state amperometric and potentiometric high temperature sensors

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solid state IONICS 2000年第137期136卷 519-531页

作者： Göpel, W Reinhardt, G Rösch, M Univ Tubingen Inst Phys & Theoret Chem D-72076 Tubingen Germany Univ Tubingen Steinbeis Transfer Ctr Interface Anal & Sensors D-72076 Tubingen Germany

High temperature sensors based on solid electrolytes are well established in many applications. In this context. stabilized zirconia as an oxygen ion conductor plays the key role to monitor oxygen. Recent trends in the use of stabilized zirconia aim at the detection of other exhaust or environmental gases like NOx, CO or hydrocarbons. This is possible by, e.g. monitoring currents of specific electrode reactions at a given voltage ('amperometric devices') or monitoring voltages between different electrodes which result from specific electrode reactions including the kinetically determined formation of surface oxygen during different catalytic reactions ['mixed-potential (non-Nernstian) devices']. In all applications, the catalytic and electrochemical properties of the electrode materials play a key role for achieving reproducible sensor signals. This requires controlled microstructures down to the atomic scale. Therefore, extensive work now focuses on the structural as well as functional optimization of known, and on the development of new electrode materials. In this promising trend particular emphasis is put on the in-situ spectroscopic and microscopic characterization of the various interfaces under sensor operation conditions. (C) 2000 Elsevier Science B.V. All rights reserved.

关键词： stabilized zirconia amperometric sensors potentiometric sensors mixed potentials sensor arrays multi-component analysis interface analysis in-situ spectroscopy

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Modeling and estimation of FPN components in CMOS image sensors

Modeling and estimation of FPN components in CMOS image sens...

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Conference on solid state sensor arrays - development and applications ii

作者： El Gamal, A Fowler, B Min, H Liu, XQ Stanford Univ Informat Syst Lab Stanford CA 94305 USA

ISBN: (纸本)0819427411

Fixed pattern noise (FPN) for a CCD sensor is modeled as a sample of a spatial white noise process. This model is, however, not adequate for characterizing FPN in CMOS sensors, since the readout circuitry of CMOS sensors and CCDs are very different. The paper presents a model for CMOS FPN as the sum of two components: a column and a pixel component. Each component is modeled by a first order isotropic autoregressive random process, and each component is assumed to be uncorrelated with the other. The parameters of the processes characterize each component of the FPN and the correlations between neighboring pixels and neighboring columns for a batch of sensors. We show how to estimate the model parameters from a set of measurements, and report estimates for 64x64 passive pixel sensor (PPS) and active pixel sensor (APS) test structures implemented in a 0.35 micron CMOS process. High spatial correlations between pixel components were measured for the PPS structures, and between the column components in both PPS and APS. The APS pixel components were uncorrelated.

关键词： CMOS image sensor fixed pattern noise nonuniformity image sensor characterization

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MOS AREA sensor .2. LOW-NOISE MOS AREA sensor WITH ANTIBLOOMING PHOTO-DIODES

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IEEE JOURNAL OF solid-state CIRCUITS 1980年第4期15卷 747-752页

作者： OHBA, S NAKAI, M ANDO, H HANAMURA, S SHIMADA, S SATOH, K TAKAHASHI, K KUBO, M FUJITA, T HITACHI LTD MUSASHI WORKSKOKUBUNJITOKYO 185JAPAN HITACHI LTD MOBARA WORKSCHIBAJAPAN

The development of a high-sensitivity 320 X 244 element MOS area sensor and a novel fixed pattern noise (FPN) suppressing circuit are reported in this paper. The new device incorporates p/sup +/-n/sup +/ high-C photodiodes and double-diffused sense lines. The p/sup +/-n/sup +/ high-C photodiodes provide a large dynamic range and a large saturation signat of 1.4 /spl mu/A with 6-1x W-lamp illumination. The double-diffused sense lines are introduced to vastly improve blooming characteristics, making use of a built-in potential barrier. FPN is proved to stem mainly from inversion charge variations through horizontal switching MOS gate capacitances. A simple high-performance FPN suppressing circuit is proposed which realizes high signal-to-noise (S/N) ratios of more than 68 dB at saturation. The new sensor is tested in a high-sensitivity black-and-white VTR hand-held camera and will find broad applications.

关键词： Photodiodes sensor phenomena and characterization Video recording Cameras sensor arrays Dynamic range Capacitance Circuit testing Image sensors MOSFETs

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Improving resolution of solid-state linear array X-Ray detectors

Improving resolution of solid-state linear array X-Ray detec...

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Conference on solid state sensor arrays - development and applications ii

作者： Borras, G Odet, C Vuorinen, K Gaffiot, F Jacquemod, G Inst Natl Sci Appl CREATIS F-69621 Villeurbanne France

ISBN: (纸本)0819427411

Linear solid-state detectors are nowadays a widespread media in industrial and medical X-ray imaging. The resolution reached with this systems has been largely improved in this past years, but is still too poor for some high resolution applications. We first have carried out an optimization of the detector characteristics through a behavioral simulation using a Hardware Description Language (HDLA(TM)). Furthermore, our work concerned the resolution enhancement for this kind of detectors via signal processing. Our approach takes into account the modeled point spread function (PSF) of the system. This modeled PSF is obtained with a new edge technique. The knowledge about the system response is used in a restoration scheme in order to improve the response of the detector to the high frequencies in the digital image. The restoration problem is an ill posed problem and uses an inverse Wiener filtering. Another intrinsic limitation of solid-state detectors is the spatial sampling step. In order to overcome this problem, we also tested the feasibility of a finer sampling of the acquired image, by interlacing several slightly shifted acquisitions of the same test object. The restoration applied to this finer sampled signal results in a resolution enhancement that is theoretically impossible to reach with a single detector acquisition. Some experimental results obtained on a variable bar-space pattern phantom are presented. This kind of phantom allows for a precise evaluation of the Modulation Transfer Function (MTF) on the acquired and processed images. The contribution of the image processing to the resolution enhancement can thus be quantified.

关键词： simulation behavioral CCD X-ray MTF image restoration

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