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A Review of Single-Photon Avalanche Diode Time-of-Flight Imaging sensor arrays

IEEE sensorS JOURNAL 2021年第11期21卷 12654-12666页

作者： Piron, Francois Morrison, Daniel Yuce, Mehmet Rasit Redoute, Jean-Michel Univ Liege Dept Elect Engn & Comp Sci B-4000 Liege Belgium Monash Univ Dept Elect & Comp Syst Engn Melbourne Vic 3800 Australia

Time-of-flight (ToF) sensors using light pulses or continuous waves allow accurate distance measurements. Three-dimensional imagers can be based on an array of timing or time-gated integration pixels. Single-photon avalanche diodes (SPADs) have been increasingly chosen as the pixel's photodetector device to develop fast, long-range ToF sensors. solid-state ToF cameras are replacing other alternatives, showing attractive characteristics and bringing up new potential applications. This paper presents the technical evolution of SPAD ToF 3D imaging sensors, and provides insight into their development over the last few decades. Starting with the first SPAD imagers reported in the early 2000's, various direct and indirect arrays up to present day state-of-the-art prototypes are referenced. The existing methods, options and possible implementations are described, addressing their advantages and drawbacks, and showing the progress yet to be made. The performance of the different presented approaches are given and compared.

关键词： Single-photon avalanche diodes sensors Timing sensor arrays Three-dimensional displays Photonics Smart pixels 3D Imaging 3DIC CMOS imagers direct time-of-flight (dToF) depth image sensors indirect time-of-flight (iToF) light detection and ranging (LiDAR) time-of-flight (ToF) single-photon avalanche diode (SPAD)

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state of the art in thick-film sensors

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Microelectronics Journal 1992年第2期23卷 133-141页

作者： Prudenziati, Maria Morten, Bruno Univ of Modena Modena Italy

The speed of evolution of thick-film technology as an advanced technique for solid state sensors is illustrated. Recent innovations are mentioned with regard to modern techniques for the design, realization and test of hybrid circuits for signal processing, use of new materials both for substrates and transducing elements, new concept designs and processing techniques. Current research activities and programmes, which promise new interesting materials for, and emerging applications of, thick-film sensors, are described. However, several problems remain unsolved;some topics which should improve our understanding and performance of thick-film sensors are mentioned.

关键词： solid state Devices, Thick Film

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All solid state imaging infrared/imaging LADAR sensor system

All solid state imaging infrared/imaging LADAR sensor system

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Conference on Optical Sensing

作者： Barenz, J Baumann, R Imkenberg, F Krogmann, D Tholl, HD Bodenseewerk Geraetetech GmbH D-88641 Uberlingen Germany

ISBN: (纸本)0819453811

A compact dual mode sensor is under development at BGT addressing autonomous guidance, target detection and classification/identification for several military and civilian applications. The dual mode sensor consists of an imaging infrared sensor and an imaging Ladar sensor both in snapshot mode. This paper presents the concept of the dual mode sensor and shows the current development status. Critical components such as a compact laser source, fiber-array for image plane sampling, wavelength selective infrared beam splitter and micro-lens arrays for Ladar field-of-view steering are presented in detail.

关键词： dual mode sensor 3D-Ladar fiber amplifier fiber-array micro-lens array autonomous guidance autonomous target recognition

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MEIS FM - A MULTISPECTRAL IMAGER FOR FORESTRY AND MAPPING

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IEEE TRANSACTIONS ON GEOSCIENCE AND REMOTE SENSING 1991年第1期29卷 184-186页

作者： NEVILLE, RA TILL, SM Data Acquisition Division Canada Centre for Remote Sensing Ottawa ONT Canada

The MEIS ii airborne multispectral imager has been providing data to the remote sensing community since 1983. During that time, MEIS ii has provided data for more than 200 remote sensing missions. One of the first and most successful applications of MEIS imagery has been in forestry for inventory, juvenile stand assessment, and insect-damage detection and mapping. The addition to MEIS of a fore-aft stereo capability, coupled with the development of accurate techniques for the correction of geometric distortions in airborne imagery, has led to the possibility of producing high-resolution data bases for topographic maps by totally digital methods. The success of the research performed in forestry and mapping with MEIS ii data, combined with the advances of geographic information systems (GIS), has opened the way for the development of a new system which will include data acquisition and ground-processing components and which will provide truly operational capabilities. This report describes the sensor, MEIS FM, its conceptual design and functional specifications. MEIS FM will be a wide angle, high-resolution multi-spectral imager based on state-of-the-art linear arrays and custom-designed high-resolution optics. The design has been specifically tailored to the requirements of the mapping and forestry industries, with the emphasis on the cost effective production of the end-user products.

关键词： Multispectral imaging Forestry Remote sensing Radiometry Image segmentation Data acquisition Optical arrays Image sensors Feature extraction Digital elevation models

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solid state sensor arrays and CCD Cameras

Solid State Sensor Arrays and CCD Cameras

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solid state sensor arrays and CCD Cameras

ISBN: (纸本)081942028X

The proceedings contains 38 papers. Following topics are discussed: solid state sensor arrays development and applications;new devices;new technology;cameras and systems;cameras for digital photography;and cameras for scientific imaging. Some of the specific papers discussed are: scientific CMOS CID imagers;wide-dynamic-range APS star tracker;megapixel resolution PC digital still camera;and ultraviolet digital imaging for nuclear safeguards.

关键词： Optical sensors

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History of infrared detectors

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OPTO-ELECTRONICS REVIEW 2012年第3期20卷 279-308页

作者： Rogalski, A. Mil Univ Technol Inst Appl Phys 2 Kaliskiego Str PL-00908 Warsaw Poland

This paper overviews the history of infrared detector materials starting with Herschel's experiment with thermometer on February 11(th), 1800. Infrared detectors are in general used to detect, image, and measure patterns of the thermal heat radiation which all objects emit. At the beginning, their development was connected with thermal detectors, such as thermocouples and bolometers, which are still used today and which are generally sensitive to all infrared wavelengths and operate at room temperature. The second kind of detectors, called the photon detectors, was mainly developed during the 20(th) Century to improve sensitivity and response time. These detectors have been extensively developed since the 1940's. Lead sulphide (PbS) was the first practical IR detector with sensitivity to infrared wavelengths up to similar to 3 mu m. After World War ii infrared detector technology development was and continues to be primarily driven by military applications. Discovery of variable band gap HgCdTe ternary alloy by Lawson and co-workers in 1959 opened a new area in IR detector technology and has provided an unprecedented degree of freedom in infrared detector design. Many of these advances were transferred to IR astronomy from Departments of Defence research. Later on civilian applications of infrared technology are frequently called "dual-use technology applications." One should point out the growing utilisation of IR technologies in the civilian sphere based on the use of new materials and technologies, as well as the noticeable price decrease in these high cost technologies. In the last four decades different types of detectors are combined with electronic readouts to make detector focal plane arrays (FPAs). development in FPA technology has revolutionized infrared imaging. Progress in integrated circuit design and fabrication techniques has resulted in continued rapid growth in the size and performance of these solid state arrays.

关键词： thermal and photon detectors lead salt detectors HgCdTe detectors microbolometers focal plane arrays

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Lithium garnets: Synthesis, structure, Li⁺ conductivity, Li⁺ dynamics and applications

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PROGRESS IN MATERIALS SCIENCE 2017年 88卷 325-411页

作者： Ramakumar, S. Deviannapoorani, C. Dhivya, L. Shankar, Lakshmi S. Murugan, Ramaswamy Pondicherry Univ Dept Phys Pondicherry 605014 India

Inorganic solid fast Li+ conductors based batteries are expected to overcome the limitations over safety concerns of flammable organic polymer electrolytes based Li+ batteries. Hence, an all-solid-state Li+ battery using non-flammable solid electrolyte have attracted much attention as next-generation battery. Therefore, in the development of all-solid-state lithium rechargeable batteries, it is important to search for a solid electrolyte material that has high Li+ conductivity, low electronic conductivity, fast charge transfer at the electrode interface and wide electrochemical window stability against potential electrodes and lithium metal. Hence, significant research effort must be directed towards developing novel fast Li+ conductors as electrolytes in all-solid-state lithium batteries. Among the reported inorganic solid Li+ conductive oxides, garnet-like structural compounds received considerable attention in recent times for potential application as electrolytes in all-solid-state lithium batteries. The focus of this review is to provide comprehensive overview towards the importance of solid fast lithium ion conductors, advantages of lithium garnets over other ceramic lithium ion conductors and understanding different strategies on synthesis of lithium garnets. Attempts have also been made to understand relationship between the structure, Li+ conduction and Li+ dynamics of lithium garnets. The status of lithium garnets as solid electrolyte in electrochemical devices like all-solid state lithium battery, lithium-air battery and sensor are also discussed. (C) 2017 Elsevier Ltd. All rights reserved.

关键词： Electrochemical energy storage devices Rechargeable lithium battery technology solid fast Li+ conductors Garnet structured fast Li+ conductors

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Microfabricated potentiometric solid-state ion/biosensor arrays

Microfabricated potentiometric solid-state ion/biosensor arr...

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作者： Liu, Dong University of Michigan

学位级别：Ph.D.

There has been great interest in the development of solid-state potentiometric ion/biosensors, in which ion-selective polymer membranes are cast directly on solid-state conducting sites with no internal reference electrolyte. Microfabricated solid-state sensor arrays based on silicon wafers can be used either as single-use disposable devices or as reversible multisensing electrochemical detectors in the flow-through systems. In this work, a novel four-site potentiometric solid-state ion sensor array (prepared to detect $\rm K\sp+, NH\sb4\sp+, Ca\sp{2+}$ and pH) was fabricated by screen-printing appropriate ionophore doped polymer membranes on a silicon wafer with Ag-epoxy as the inner conductor. The resulting sensor array was employed as a detector in a flow-injection analysis system. The use of silicone rubber and polyurethane as polymer matrices resulted in much better membrane adhesion to the silicon wafer when compared to conventional poly(vinyl chloride) films. The EMF stability of potentiometric solid-state sensors is crucial for practical analytical applications. EMF stability was greatly improved via the incorporation of a silver-ligand complex into the ion-selective polymer matrix. Different types of plasticizers and polymer water uptake were also found to contribute to the initial potential drift (from dry to wet) of the solid-state sensors. With optimized plasticizer (2-ethylhexyl diphenyl phosphate) and a well-established electron transfer pair ((1,3-bis(diphenylphosphino)-propane) silver(I) nitrate) at the polymer membrane/Ag$\sp0$ conductor interface, a very stable potentiometric ion-selective response was achieved. A new asymmetric membrane system with improved surface properties for preparation of conventional and solid-state type potentiometric biosensors is also reported. The amine functional groups on the modified ion-selective membrane surface can be used advantageously to covalently attach bioreagents. Other enzyme immobilization methods, such a

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Fully Integrated Multiplexed Wristwatch for Real-Time Monitoring of Electrolyte Ions in Sweat

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ACS NANO 2024年第20期18卷 12808-12819页

作者： Cai, Xin Xia, Rui-Ze Liu, Zi-Hao Dai, Hai-Hua Zhao, Yong-Huan Chen, Shi-Hua Yang, Meng Li, Pei-Hua Huang, Xing-Jiu Chinese Acad Sci Inst Solid State Phys Key Lab Environm Opt & Technol HFIPS Hefei 230031 Peoples R China Chinese Acad Sci Inst Solid State Phys Environm Mat & Pollut Control Lab HFIPS Hefei 230031 Peoples R China Univ Sci & Technol China Dept Mat Sci & Engn Hefei 230026 Peoples R China Chinese Acad Sci State Key Lab Transducer Technol Shanghai Inst Microsyst & Informat Technol Shanghai 200050 Peoples R China Hefei Comprehens Natl Sci Ctr Inst Environm Hefei 230088 Peoples R China

Considerable progress has already been made in sweat sensors based on electrochemical methods to realize real-time monitoring of biomarkers. However, realizing long-term monitoring of multiple targets at the atomic level remains extremely challenging, in terms of designing stable solid contact (SC) interfaces and fully integrating multiple modules for large-scale applications of sweat sensors. Herein, a fully integrated wristwatch was designed using mass-manufactured sensor arrays based on hierarchical multilayer-pore cross-linked N-doped porous carbon coated by reduced graphene oxide (NPCs@rGO-950) microspheres with high hydrophobicity as core SC, and highly selective monitoring simultaneously for K+, Na+, and Ca2+ ions in human sweat was achieved, exhibiting near-Nernst responses almost without forming an interfacial water layer. Combined with computed tomography, solid-solid interface potential diffusion simulation results reveal extremely low interface diffusion potential and high interface capacitance (598 mu F), ensuring the excellent potential stability, reversibility, repeatability, and selectivity of sensor arrays. The developed highly integrated-multiplexed wristwatch with multiple modules, including SC, sensor array, microfluidic chip, signal transduction, signal processing, and data visualization, achieved reliable real-time monitoring for K+, Na+, and Ca2+ ion concentrations in sweat. Ingenious material design, scalable sensor fabrication, and electrical integration of multimodule wearables lay the foundation for developing reliable sweat-sensing systems for health monitoring.

关键词： graphene solid contact ion selective electrodes sweat sensing electrolyte real-time monitoring

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The first study of a flat vacuum image sensor with a field-emitter array

The first study of a flat vacuum image sensor with a field-e...

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Conference on solid state sensor arrays - development and applications

作者： Yamagishi, T Nanba, M Okazaki, S Tanioka, K Sato, F Egami, N NHK Science and Technical Research Laboratories 1-10-11 Kinuta Setagaya-ku Tokyo Japan

ISBN: (纸本)0819424307

To develop a high-definition image sensor having ultra-high sensitivity far superior to CCDs, A new compact image sensor consisting of a matrix field emitter array (FEA) and a high-gain avalanche rushing amorphous photoconductor (HARP) target is studied. Most research on devices with FEAs has so far focused on flat displays and high-frequency devices. Although the concept of a flat image sensor with FEAs has been proposed before, image sensors with FEAs have yet to be fabricated. In this paper, the fundamental driving characteristics of a new flat image sensor comprised of an X-Y matrix FEA set face to face with a HARP target have been investigated in a vacuum chamber for the first time. Experiments confirmed that the device successfully picks up images. High-sensitivity is achieved with the HARP target, and the temporal fluctuation and spatial variation of the emission currents obtained from the FEA have almost no effect on the signal output currents. Furthermore, the resolution characteristics are affected by the mesh voltage and by divergence of the emission from the field emitter (FE) tips.

关键词： field emitter array FEA image sensor HARP target field emitter image sensor FEIS cold cathode vacuum micro-electronics

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