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5th International workshop on Advanced Patterning Solutions, IWAPS 2021

作者： Wu, Qiang Li, Yanli Yue, Liwan Mao, Zhibiao School of Microelectronics Fudan University Shanghai China Ningbo Nata Opto-electronic Materials Co. Ltd 21 Qingshan Road Beilun District Ningbo city Zhejiang Province 315800 China

ISBN: (纸本)9781665420785

Ever since the debut of Chemically Amplified Resist (CAR), the optical resolution in lithography has been continually improving since 0.25 micron all the way to 5 nm with 248 nm, 193 nm, 193 nm immersion, and Extreme Ultra-Violet (EUV) lithography. The key behind the success of CAR platform in resolution accomplishment through many generations is chemical amplification in deprotection reaction, which not only drastically improves sensitivity, but also makes the cross section profile in the photoresist much more vertical. Throughout a nearly 30-year span of integrated circuit generations, the amplified deprotection reaction is done through photo-generated acid diffusion. Not until year 2004, the measurement of the diffusion length is not accurate enough to enable effective modeling [1]. Now it becomes a consensus that the improvement of CAR resolution must be accompanied by the reduction of the diffusion length. Due to the fact that the reduction of the photoacid diffusion length may reduce chemical amplification, an increase of PhotoAcid Generator (PAG) loading and/or a reduction of deprotection activation energy may be needed. The deprotection activation energy depends on both the PAG and the polymer designs, which can also affect linewidth bias between dark field and bright field conditions. This will generated difference in Optical Proximity Effect (OPE). We have used a self-developed physical aerial image simulation model to fit to the wafer exposure data of Exposure Latitude (EL) in Focus Exposure Matrix (FEM) and linewidth through pitch (an example linewidth through pitch data are shown in Fig. 1) to extract physical parameters such as, the effective photoacid diffusion length, the isolated to dense linewidth bias and compare the extracted data to the commonly accepted industry standard [2] or the target requirement from the customer processes. The difference can serve as a guide for formulation improvement and we will demonstrate that this is a very efficient

关键词： Photoresists

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Structure-Preserving model-reduction of Dissipative Hamiltonian Systems

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JOURNAL OF SCIENTIFIC COMPUTING 2019年第1期81卷 3-21页

作者： Afkham, Babak Maboudi Hesthaven, Jan S. Ecole Polytech Fed Lausanne Sch Basic Sci FSB Inst Math MATH CH-1015 Lausanne Switzerland

Reduced basis methods are popular for approximately solving large and complex systems of differential equations. However, conventional reduced basis methods do not generally preserve conservation laws and symmetries of the full order model. Here, we present an approach for reduced model construction, that preserves the symplectic symmetry of dissipative Hamiltonian systems. The method constructs a closed reduced Hamiltonian system by coupling the full model with a canonical heat bath. This allows the reduced system to be integrated with a symplectic integrator, resulting in a correct dissipation of energy, preservation of the total energy and, ultimately, it helps conserving the stability of the solution. Accuracy and stability of the method are illustrated through the numerical simulation of the dissipative wave equation and a port-Hamiltonian model of an electric circuit.

关键词： model order reduction Symplectic model reduction The reduced dissipative Hamiltonian method

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Process model Guided Photoresist Formulation Optimization

Process Model Guided Photoresist Formulation Optimization

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Advanced Patterning Solutions (IWAPS), International workshop on

作者： Qiang Wu Yanli Li Liwan Yue Zhibiao Mao School of Microelectronics Fudan University Shanghai China Ningbo Nata Opto-electronic Materials Co. Ltd Ningbo city Zhejiang Province China

ISBN: (纸本)9781665420808

关键词： Semiconductor device modeling Stimulated emission Ultraviolet sources Resists Optical imaging Data models Automobiles

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Generalized Power Grid reduction Technique

Generalized Power Grid Reduction Technique

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workshop on Communication Networks and Power Systems (WCNPS)

作者： Pedro Augusto Montel de Carvalho Victor do Prado Brasil Anésio de Leles Ferreira Filho Jorge Andrés Cormane Angarita Universidade de Brasília Brasília Brazil

ISBN: (数字)9781728187914

ISBN: (纸本)9781728187921

This work presents a power grid reduction method that allows the accomplishment of several study cases with different loading conditions regarding the same system by performing a single reduction process. In particular, this technique presents robustness for radial and meshed power grid topology and unbalanced systems modeled with neutral wire, which are not available in related existing publications. Equally important, the evaluation metric employs the phasors voltages instead of just the magnitude itself, as normally seen in the literature. In this fashion, the proposed technique shows the capability to remove more than 2000 buses from a benchmark EPRI feeder with phasorial voltage accuracy of 99% and to speed up 67% its power flow simulation time. Moreover, this paper also exposes a meshed grid reconfiguration and an evaluation of losses from the reduced IEEE 123 buses feeder with photovoltaic distributed generation through a QSTS simulation with a maximum of 1.8% relative losses errors.

关键词： Mathematical model Admittance Power systems Impedance Shunts (electrical) Power grids Integrated circuit modeling

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Real-Time Thermal Imaging Using Augmented Reality and Accelerated 3D models

Real-Time Thermal Imaging Using Augmented Reality and Accele...

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IEEE workshop on Computers in Power Electronics

作者： Bawar Jalal Steve Greedy Paul Evans PEMC Research Group University of Nottingham Nottingham UK GGIEMR Group University of Nottingham Nottingham UK

ISBN: (数字)9781728171609

ISBN: (纸本)9781728171616

We present an innovative method to allow real-time visualisation of temperature fields on power electronic circuits using augmented reality. A real-time time-domain simulation incorporating the Block Arnoldi model order reduction techniques is implemented in the Unity game engine. Traditional methods run too slowly whereas the developed system allows an example model with 9232 thermal nodes to be dynamically simulated in real-time at a speed fast enough to allow for a smooth augmented reality visualisation. The aim is to show the feasibility of the technology and that it could be applied to visualising electromagnetic fields in future work.

关键词： Integrated circuit modeling Real-time systems Heating systems Temperature measurement Visualization Data models Solid modeling

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A Bidirectional Wireless Power Transfer System with Constant Power Output

A Bidirectional Wireless Power Transfer System with Constant...

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IEEE International workshop on Anti-counterfeiting, Security, Identification, ASID

作者： Shengtao Ke Yidie Ye Huakang Xia Fengjie Wen Ge Shi Facuity of Information Science and Engineering Ningbo University Ningbo China College of Mechanical and Electrical Engineering China Jiliang University Hangzhou China

ISBN: (数字)9781728168791

ISBN: (纸本)9781728168807

Bidirectional wireless power transfer (BWPT) is an emerging technology within the wireless power transfer field of research, which allows the same device to receive power and it can transmit power to other compatible devices. In practical applications, due to the distance of the coil, the lateral misalignment and the angular misalignment, it is difficult to achieve constant power transmission. This paper proposes an adaptive adjustment scheme, which detects the output power of the circuit in real-time through a closed-loop feedback method, uses ergodic sampling to obtain the best duty cycle, and adaptively adjusts the duty cycle of the inverter pulse width modulation signal, to compensate for the reduction in load power. Furthermore, the validity and feasibility of the scheme are verified by simulation and prototype experiments. A maximum constant power transmission of 4W is achieved within the range of 5 cm in longitudinal distance, 4 cm in lateral displacement and 60° of angular misalignment. The maximum BWPT efficiency can be achieved, up to 66.17%. The proposed method improves the quality of BWPT.

关键词： Couplings Power generation Magnetic resonance Wireless power transfer Wireless communication Inductance Mathematical model

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Physical Scaling Effects of Differential Crosstalk in Via Arrays up to Frequencies of 100 GHz 22

Physical Scaling Effects of Differential Crosstalk in Via Ar...

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22nd IEEE workshop on Signal and Power Integrity (SPI)

作者： Scharff, Katharina Dahl, David Bruens, Heinz-Dietrich Schuster, Christian Hamburg Univ Technol Inst Electromagnet Theory Hamburg Germany

ISBN: (纸本)9781538622995

Data rates on copper-based links are now increasing beyond 50 Gbps which requires frequency-domain analyses up to at least 100 GHz. This work investigates for the first time the frequency behavior of differential crosstalk inside a via array for frequencies up to 100 GHz. It is shown that the crosstalk does not increase indefinitely with frequency. We evaluate if efficient modeling tools like the physics-based via modeling can be used for crosstalk assessments up to 100 GHz and compare the results with full-wave solutions. A reduced model with a single cavity is sufficient to predict the overall frequency dependence of the crosstalk inside the array. The effect of scaling down the geometry of the array is investigated. The via pitch is identified as the parameter with the greatest impact. For a frequency of 50 GHz a reduction of the via pitch from 80 mil to 40 mil could reduce the crosstalk by about 30 dB.

关键词： Crosstalk Cavity resonators Integrated circuit modeling Finite element analysis Dielectrics Impedance simulation

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Low Order Compact model Development for LED Package Thermal Investigation 23

Low Order Compact Model Development for LED Package Thermal ...

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23rd International workshop on Thermal Investigations of ICs and Systems (THERMINIC)

作者： Nemeth, Marton Poppe, Andras Budapest Univ Technol & Econ Dept Electron Devices Budapest Hungary

ISBN: (纸本)9781538619285

In this paper we present a new computational method for calculating thermal transfer impedances between a few separate locations of a given physical structure aimed at the implementation into a field-solver based on the SUNRED (SUccessive Node reduction) algorithm. The order reduction was done by the balanced truncation method. We tested the method on a simplified LED package in 3D. Results obtained by the proposed new calculation method and results obtained by the conventional numerical simulation are compared and the error was estimated based on the difference of these results. Based on that comparison we found that the proposed method is fast and accurate.

关键词： Integrated circuit modeling Mathematical model Admittance Transfer functions Heating systems Monitoring Electronic packaging thermal management

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circuit realization method for reduced order inductive PEEC modeling circuits

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COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING 2016年第3期35卷 1203-1217页

作者： Trung-Son Nguyen Tung Le Duc Son Thanh Tran Guichon, Jean-Michel Chadebec, Olivier G2Elab ENSE3 Grenoble Elect Engn Lab St Martin Dheres France Hanoi Univ Sci & Technol Sch Elect Engn Dept Elect Power Syst Hanoi Vietnam Hanoi Univ Sci & Technol Int Res Inst Computat Sci & Engn ICSE Hanoi Vietnam Elect Power Univ Dept Elect Engn Hanoi Vietnam CNRS G2ELab Grenoble France

Purpose - The purpose of this paper is to synthesize equivalent circuit obtained from reduced order model of large scale inductive PEEC circuits. Design/methodology/approach - This paper describes an original approach for reducing and synthesizing large parasitic RLM electrical circuits coming from inductive Partial Element Equivalent circuit (PEEC) models. The proposed technique enables the re - use of the reduced order model in the time domain circuit simulation context. Findings - The paper shows how to use a synthesis method to realize an equivalent circuit issued from compressed PEEC circuits. Originality/value - The coupling between methods PEEC and a compressed method as Fast Multipole Method in order to reduce time and space consuming are well known. The innovation here is to realize a smaller circuit equivalent with the original large scale PEEC circuits to use in temporal simulation tools. Moreover, this synthesis method reduces time and memories for modelling industrial application while maintaining high accuracy.

关键词： Equivalent circuit synthesis method FMM method Interconnect circuit model order reduction PEEC method SPRIM IOPOR

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Thermal modeling for FinFET NAND Gate circuits Using a Multi-Block Reduced-Order model 21

Thermal Modeling for FinFET NAND Gate Circuits Using a Multi...

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21st International workshop on Thermal Investigations of ICs and Systems

作者： Cheng, Ming-C. Jia, Wangkun Helenbrook, Brian T. Clarkson Univ Dept Elect & Comp Engn Potsdam NY 13699 USA Clarkson Univ Dept Mech & Aeronaut Engn Potsdam NY 13699 USA

ISBN: (纸本)9781467397056

An approach to thermal simulation of semiconductor ICs has been developed using a multi-block reduced-order model (ROM). The ROM projects the heat equation onto a functional space to represent the thermal solution using only a few degrees of freedom (DOF). The approach does not require any assumption on the physical geometry, dimensions, BCs or heat flow pathways. The developed approach is applied to a FinFET NAND gate circuit constructed using multiple blocks of a FinFET NAND gate. It is shown that the multi-block ROM approach is able to offer accurate thermal solution for a NAND IC subjected to power pulse excitations with large variations of pulse frequency, width, shape and time shift that substantially deviate from those used in the model construction. The approach offers accurate thermal solution as detailed as the detailed numerical simulation with a reduction in the numerical DOF by 5 to 6 orders of magnitude.

关键词： FinFET

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